JPS6143817B2 - - Google Patents
Info
- Publication number
- JPS6143817B2 JPS6143817B2 JP53163305A JP16330578A JPS6143817B2 JP S6143817 B2 JPS6143817 B2 JP S6143817B2 JP 53163305 A JP53163305 A JP 53163305A JP 16330578 A JP16330578 A JP 16330578A JP S6143817 B2 JPS6143817 B2 JP S6143817B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- inclined surface
- knob
- electron microscope
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Description
【発明の詳細な説明】
本発明は圧縮荷重をかけながら試料像の観察が
行える電子顕微鏡等の試料圧縮試験装置に関す
る。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a sample compression testing device such as an electron microscope that allows observation of a sample image while applying a compressive load.
試料に引張荷重をかけ、該試料の状態変化をミ
クロ的に観察するための付属装置が古くから電子
顕微鏡に組み込まれ、実用されていることは周知
である。しかし乍ら、これと逆の状態、つまり圧
縮荷重をかけてその状態変化を観察できるように
なした試料装置は全く開発されていない。 It is well known that attachment devices for applying a tensile load to a sample and microscopically observing changes in the state of the sample have been incorporated into electron microscopes for a long time and have been put into practical use. However, no sample device has been developed in which it is possible to apply a compressive load to the specimen and observe changes in its state.
而して本発明は、実用に供し得る試料圧縮試験
装置を提供するものである。 Thus, the present invention provides a sample compression testing device that can be put to practical use.
第１図は本発明の一例を示す一部断面した平面
図、第２図はその試料付近の拡大断面図を示して
ある。図中１は鏡筒、例えば試料室壁、或いは試
料ステージであり、これにホルダー２が取り付け
られている。このホルダーは光軸と直交する方向
から挿入されており、又、光軸を交わる付近には
電子線を通過するための穴３が穿つてある。４は
ビス等により、前記ホルダーの電子線通過穴部に
固定された試料台で、その一端面は光軸とある角
度（例えば45度）をなした傾斜面４ａをなしてい
る。そして薄膜試料５はこの傾斜面に沿わせて保
持される。６は試料５を挾んで試料台４と対向し
て置かれた押板で、例えばカミソリの刃が使用さ
れ、棒体７の先端にビス等により固定されてい
る。この棒体は駆動軸８内を通して、気密を保つ
て真空外に取り出され、その先端につまみ９を取
り付け、前記駆動体に対し、回転調整ができるよ
うになつている。又、駆動軸８も気密を保つて、
真空外に取り出され、その外周部に雄ネジ１０が
刻設されている。この雄ネジには調整つまみ１１
が螺合し、このつまみを回転することにより、駆
動軸８がその軸心方向に移動するようになしてあ
る。勿論図示しないが駆動軸の回転阻止機構は設
けてある。 FIG. 1 is a partially sectional plan view showing an example of the present invention, and FIG. 2 is an enlarged sectional view of the vicinity of the sample. In the figure, reference numeral 1 denotes a lens barrel, for example, a sample chamber wall or a sample stage, to which a holder 2 is attached. This holder is inserted from the direction perpendicular to the optical axis, and a hole 3 for passing the electron beam is bored near the intersection of the optical axis. Reference numeral 4 denotes a sample stage fixed to the electron beam passage hole of the holder with screws or the like, one end surface of which forms an inclined surface 4a forming a certain angle (for example, 45 degrees) with the optical axis. The thin film sample 5 is held along this inclined surface. Reference numeral 6 denotes a push plate placed opposite the sample stage 4 with the sample 5 in between, and is made of, for example, a razor blade, and is fixed to the tip of the rod 7 with screws or the like. This rod is passed through the drive shaft 8 and taken out of the vacuum while maintaining airtightness, and a knob 9 is attached to the tip of the rod so that the rotation of the drive body can be adjusted. Also, the drive shaft 8 is kept airtight,
It is taken out of the vacuum, and a male thread 10 is carved on its outer periphery. This male screw has an adjustment knob 11.
are screwed together, and by rotating this knob, the drive shaft 8 is moved in its axial direction. Of course, although not shown, a rotation prevention mechanism for the drive shaft is provided.
斯る構成において、先ずつまみ９を回わして、
押板６の方向を調整する。次いで、つまみ１１を
回わして駆動軸８を第１図中左方向に移動させる
と、押板６が第３図に示すように試料５を傾斜面
４ａへ押しつけ５ａで示す試料部分に圧縮応力が
作用する。 In such a configuration, turn knob 9 one by one,
Adjust the direction of the push plate 6. Next, when the knob 11 is turned to move the drive shaft 8 to the left in FIG. 1, the push plate 6 presses the sample 5 against the inclined surface 4a as shown in FIG. 3, applying compressive stress to the sample portion 5a. acts.
而して、この部分に電子線を照射し、その透過
電子線を結像すれば圧縮状態の試料の透過電子顕
顕微鏡像が得られる。 If this portion is irradiated with an electron beam and the transmitted electron beam is imaged, a transmission electron microscope image of the sample in a compressed state can be obtained.
尚、充分な観察視野を確保するには試料５の厚
さt1と押板の厚さt2が問題となる。即ち、試料が
薄すぎると充分な視野は得られないので、本発明
は電子線の透過能の高い超高圧電子顕微鏡へ適用
することが好ましい。例えば、加速電圧が
1000KVの超高圧電子顕微鏡においては試料が鉄
（Ｆe）の場合３〜５μｍの透過能があり、傾斜面
の角度が45゜のとき試料の厚さt1は２〜３μｍを
確保できる。一方、押板の厚さt2は電子線透過可
能厚さの1/2〜1/3以下が好ましく、前記例を参照
すれば1.5〜２μｍ以下にすると良い。前記押板
としてカミソリの刃を用いた場合、その刃先の厚
さは0.5〜１μｍ以下であるので、充分に要求に
応え得る。 Note that the thickness t 1 of the sample 5 and the thickness t 2 of the pressing plate pose problems in ensuring a sufficient observation field of view. That is, if the sample is too thin, a sufficient field of view cannot be obtained, so it is preferable to apply the present invention to an ultra-high voltage electron microscope that has a high ability to transmit electron beams. For example, if the accelerating voltage is
In a 1000 KV ultra-high voltage electron microscope, if the sample is iron (F e ), it has a transmittance of 3 to 5 μm, and when the angle of the inclined plane is 45°, the sample thickness t 1 can be secured to 2 to 3 μm. On the other hand, the thickness t2 of the push plate is preferably 1/2 to 1/3 or less of the thickness through which electron beams can be transmitted, and referring to the above example, it is preferably 1.5 to 2 μm or less. When a razor blade is used as the pressing plate, the thickness of the cutting edge is 0.5 to 1 μm or less, so it can fully meet the requirements.
以上の如き構成となせば、充分な観察視野を確
保した上で試料に圧縮荷重をかけ、それによる試
料の状態変化を電子顕微鏡で直接観察できるの
で、主に金属の研究に大いに役く立つものであ
る。 With the above configuration, it is possible to apply a compressive load to the sample while securing a sufficient observation field, and directly observe the changes in the state of the sample due to this using an electron microscope, which is very useful mainly for metal research. It is.
第１図は本発明の一実施例を示す一部断面平面
図、第２図は第１図における試料付近の縦断面
図、第３図は試料の圧縮状態を示す図である。
１：鏡筒又はステージ、２：ホルダー、３：電
子線通過穴、４：試料台、５：試料、６：押板、
７：棒状、８：駆動軸、９：つまみ、１０：雄ネ
ジ、１１：調整つまみ。
FIG. 1 is a partially sectional plan view showing an embodiment of the present invention, FIG. 2 is a longitudinal sectional view of the vicinity of the sample in FIG. 1, and FIG. 3 is a view showing the compressed state of the sample. 1: Lens barrel or stage, 2: Holder, 3: Electron beam passage hole, 4: Sample stage, 5: Sample, 6: Push plate,
7: Rod-shaped, 8: Drive shaft, 9: Knob, 10: Male screw, 11: Adjustment knob.
Claims (1)
面を設け、この傾斜面上に薄膜試料を保持せし
め、該試料を挟んで薄肉状の押板を前記試料台の
傾斜面に押圧する如く構成したことを特徴とする
電子顕微鏡等の試料圧縮試験装置。1. A sample stage is provided with an inclined surface forming a desired angle with respect to the optical axis, a thin film sample is held on this inclined surface, and a thin press plate is pressed against the inclined surface of the sample stage with the sample in between. A sample compression testing device for an electron microscope, etc., characterized by being configured as follows.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16330578A JPS5588256A (en) | 1978-12-26 | 1978-12-26 | Sample compression tester for electron microscope or the like |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16330578A JPS5588256A (en) | 1978-12-26 | 1978-12-26 | Sample compression tester for electron microscope or the like |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5588256A JPS5588256A (en) | 1980-07-03 |
| JPS6143817B2 true JPS6143817B2 (en) | 1986-09-30 |
Family
ID=15771294
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16330578A Granted JPS5588256A (en) | 1978-12-26 | 1978-12-26 | Sample compression tester for electron microscope or the like |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5588256A (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006196310A (en) * | 2005-01-13 | 2006-07-27 | Central Res Inst Of Electric Power Ind | Electron microscope movable probe device and electron microscope sample observation method |
| EP2504671B1 (en) * | 2009-11-27 | 2020-04-08 | Bruker Nano, Inc. | Micro electro-mechanical heater |
| EP2780689B1 (en) | 2011-11-14 | 2017-01-04 | Hysitron, Inc. | Probe tip heating assembly |
| WO2013082148A1 (en) | 2011-11-28 | 2013-06-06 | Lucas Paul Keranen | High temperature heating system |
| JP2013127859A (en) * | 2011-12-16 | 2013-06-27 | Nagoya Institute Of Technology | Test sample measuring instrument and test sample measuring instrument control method |
| US9829417B2 (en) | 2012-06-13 | 2017-11-28 | Hysitron, Inc. | Environmental conditioning assembly for use in mechanical testing at micron or nano-scales |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS567257B2 (en) * | 1973-07-09 | 1981-02-17 |
-
1978
- 1978-12-26 JP JP16330578A patent/JPS5588256A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5588256A (en) | 1980-07-03 |
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