JPS6147222B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention includes a loading section, a processing section, and an unloading section, and allows members to be processed, placed on a tray, for example, to be sequentially fed from the loading section to the processing section for desired processing. The present invention relates to a control device for a continuous vacuum processing apparatus configured as follows.

In the above-mentioned type of processing equipment, which performs sputtering or vacuum deposition while continuously moving the tray carrying the parts to be processed one after another within the processing area, for example, when processing only one side of the substrate, In order to prevent the processing from affecting the other side (for example, contamination), to improve processing efficiency, and to prevent contamination within the processing chamber, it is necessary to transfer the substrates in a so-called press-and-press method with the substrates brought into close contact with each other back and forth. To do this, in order to bring the following substrate/tray unit sent from the feeding section into contact with the substrate/tray unit moving in the processing area in the transfer area of the processing area, The moving speed on the preparation section side must be higher than the moving speed. However, if the difference between the two speeds is relatively large, there is a risk of damage to the substrate due to the impact upon contact, which is particularly serious when the substrate is made of a fragile material such as glass.

Therefore, in order to prevent damage to each substrate due to impact when the substrates come into contact with each other during transfer, the feeding speed of the following substrate is linearly reduced immediately before the substrate is moved in the processing area. It is an object of the present invention to provide a control device for a continuous vacuum processing apparatus configured to bring the control device into close contact with the preceding substrate when the speed reaches a constant speed.

For this purpose, in the control device according to the present invention, the substrates to be processed are moved from the preparation section to the processing section.
A first transfer device sequentially feeds the tray units, and a substrate/tray unit sent by the first transfer device to be processed at a constant speed relative to the substrate/tray unit moving within the processing section area. A second transfer device of variable speed in close contact is provided, the first and second transfer devices being related to their mutual operative position and the position of the substrate/tray unit to be processed being transferred by these transfer devices. Operation controlled.

In one embodiment of the present invention, the first and second transfer devices are configured to reciprocate over predetermined distances, transport the substrate/tray unit to be processed on the outward trip, and return only themselves on the return trip. A pulse motor that reciprocates the carrier, and a detector that is combined with the carrier and detects its start position and stop position. The second transfer devices may also be of identical construction and arranged side by side in pairs so that when one is in the activated state, the other is in the ready state. Each pulse motor of the second transfer device is regulated in accordance with the travel distance or time of the associated carrier.

Each carrier of the first and second transfer devices can preferably be controlled to return from a stop position to a start position on its outward journey at high speed.

Furthermore, in the control device of the present invention, the substrate to be processed, which is transported by the carrier of the first transport device,
A detector is provided for detecting whether a tray unit is in a predetermined position relative to the transport device, this detector preferably being of the photoelectric type.

Therefore, according to the present invention, the operation of each transfer device for a substrate to be processed is controlled by a detection signal of the position of each transfer device and a signal indicating whether or not a substrate to be processed to be transferred is present at a predetermined position. Since it is controlled by a detection signal and the transfer speed of the second transfer device is adjusted according to the moving distance or time, it is ensured that the substrate to be processed is transported from the preparation section to the processing section. At the same time, the substrates to be processed can be fed into the processing area in close contact with each other without impact.

The present invention will be further described below with reference to the accompanying drawings.

FIG. 1 shows a control device of the present invention in a block diagram, where A represents a charging section and B represents a processing section of a continuous vacuum processing apparatus. In the preparation section A, M1 is a pulse motor for driving the first transfer device (Figs. 2 and 3);
C1 is its control circuit, D1-1 and D1-2 are microswitches, and these microswitches are combined with the carrier of the first transfer device to detect its start position and stop position, as explained in FIGS. 2 and 3. do. D1-3 uses a photoelectric sensor to detect whether the substrate to be processed is in a predetermined position relative to the first transfer device, that is, in a state where it can be transferred by the first transfer device. The outputs of these detectors D1-1 to D1-3 are connected to a control circuit C1 of a pulse motor M1.

In addition, in the processing section B, M2 and M3 are the respective carriers (second and third
(Fig.) is controlled by a combination of control circuits C2 and C3, respectively.
Each of these control circuits C2 and C3 includes microswitches D2-1 and D2-2;
Connected to D3-2.

Control circuit C1 or micro switch D2-
1 and D3-1, and a micro switch D1-2 is connected to the control circuits C2 and C3, respectively.

An example of a specific configuration of the present invention applied to a continuous sputtering apparatus will be described with reference to FIGS. 2 and 3. Reference numeral 1 denotes a preparation chamber, and this preparation chamber 1 has a processing side partition valve device (not shown). The sputtering chamber 2 communicates with a discharge chamber (not shown) through a discharge-side gate valve arrangement (not shown). 2 and 3, the details and construction of the sputtering apparatus in each chamber are omitted, and only the arrangement of the main components of an embodiment of the apparatus according to the invention is schematically shown. The first transfer device 3 includes a drive chain 8 attached to four sprockets 4 to 7 supported by bearings on a frame (not shown), a pulse motor M1 that drives the sprocket 7, and a drive chain 8 fixed to the chain 8 (not shown). It has a carrier 9 that reciprocates between a starting point and an ending point set along a horizontal guide rail, and a control circuit C1 (FIG. 1) for a pulse motor M1. The carrier 9 engages with the engaging portion 10a of the substrate/tray unit 10 when moving in the transfer direction of the substrate/tray unit 10, that is, in the right direction in FIGS. 2 and 3, and in the opposite direction, that is, the return direction. It is provided with an engaging claw 9a that freely rotates relative to the engaging portion of the board and does not act on the substrate/tray unit. The substrate/tray unit 10 is transported along a guide path between guide and support rollers 11 arranged in pairs.

The second transfer device 12 in the sputtering chamber 2 has substantially the same configuration as the first transfer device 3 in the preparation chamber 1, but the first transfer device 3 is located above the path of the substrate/tray unit. In contrast, it is recognized that it is located below the above passage, and the third
They are arranged side by side in pairs as shown in the figure. That is, in the illustrated embodiment, the second transfer device 12 includes sprockets 13-16; 17-20; chain 21;
22, pulse motor M2; M3, carrier 23;
24, control circuit C2; C3 (FIG. 1). Reference numerals 25 and 26 respectively indicate a light emitting element and a light receiving element of a photoelectric sensor, and they are moved from a substrate/tray unit supply device 27 to a predetermined transfer preparation position (second
Each substrate/tray unit lifted to a position indicated by reference numeral 10 in the figure is detected. That is, this sensor is provided at a position across the substrate/tray unit as shown in FIG. 3, and generates an output signal indicating completion of transfer preparation when the substrate/tray unit is at the predetermined position. This output signal is the pulse motor M
1 control circuit C1. Therefore, when the output signal is being generated, the feeding device 27 is prevented from feeding the next substrate/tray unit to the predetermined transfer preparation position. In this case, if necessary, another photoelectric sensor may be used to control the level of subsequent substrate/tray units to be supplied to the predetermined position.

In addition, as shown in Fig. 3, the micro switch D1
-1, D1-2, D2-1, D2-2, D3-1
D3-2 is arranged in cooperation with the carriers 9, 23, 24 and at a position relative to the start and stop points of each carrier, respectively, and generates signals related to the start and stop points of each carrier, respectively. If desired, other types of position sensing proximity switches may be used instead of microswitches.

The operation of the apparatus of this invention will be explained below with reference to FIG.

First, it is assumed that the continuous sputtering apparatus is in operation and the substrate/tray units are being transferred one after another.

Now, as shown in FIG.
is lifted to a predetermined transfer preparation position, the sensors 25 and 26 output a transfer preparation completion signal, and this output signal is supplied to the control circuit C1 of the pulse motor M1 of the first transfer device 3, and This control circuit C1 includes a micro switch D1-1.
and micro switch D2-1 or D3-1
A start point detection signal indicating that the carrier 9 and the carrier 23 or 24 are at a predetermined start position is supplied from the start point detection signal. In this state, the control device C1 supplies a starting pulse P1 to the pulse motor M1 to drive the pulse motor M1 at the set speed FL. As a result, the carrier 9 of the first transfer device 3 is moved via the drive sprocket 7 and the chain 8 from its starting position to the stop position which activates the microswitch D1-2, and the substrate/tray unit 1
0 is advanced to the position indicated by the dotted line 10' in FIG. In this case, in response to the operation of the microswitch D1-2, the control circuit C1 stops and reverses the pulse motor M1 with a stop/reverse signal P2, so that the carrier 9 is stopped at a preset position.
In this way, the engaging portion 10b at the front end of the substrate/tray unit 10 engages with the engaging claw 23a of the carrier 23 located at the starting point of the second transfer device 12, as shown by the dotted line in FIG. moved to the position. In this state, the photoelectric sensors 25 and 26
is turned off, and therefore the substrate/tray unit supplying device 27 transfers the next substrate/tray unit to the first transfer device 3.
is supplied to the transfer preparation position, and the pulse motor M1
The reverse rotation causes the carrier 9 to return to its starting position at a relatively high speed. On the other hand, in the second transfer device 12, in response to the operation of microswitches D1-2 and D2-1, control circuit C2 starts pulse motor M2 at the above-mentioned set speed FL using start signal P3, and after a scheduled time. The speed is increased to FH by the speed increase signal P4, and this high speed FH
After maintaining the speed for a certain period of time, the speed is increased again by the deceleration signal P5.
The speed is reduced to FL, and micro switch D2
-2 is activated and the motor is driven at this low speed FL until the stop/reverse rotation signal P6 is generated. This causes the carrier 23 to move from its starting point to its stopping point at a speed corresponding to the speed distribution shown by curve Y in FIG. At this time, the engaging pawl 23a of the carrier 23 is engaged with the lower side of the engaging portion 10b at the front end of the substrate/tray unit 10', so that the front end of this unit 10' is 10'' in FIG. It will come into contact at a constant speed with the rear end of the preceding board/tray unit that is moving forward at the set speed FL shown by . It is indicated by the symbol tx in FIG. Meanwhile, during this operation, the further carrier 24 of the second transfer device 12 is returned from the stop position to the start position at a relatively high speed in preparation for the next transfer operation. When the carrier 24 returns to its starting position, the control circuit C1 of the first transfer device 3 receives a signal from the microswitch D3-1 that the second transfer device 12 is ready for transfer, and therefore the first transfer device 3
In this case, when the micro switch D1-1 and the substrate/tray unit sensor 25 (D1-3) are turned on, the carrier 9 is located at the starting point and the substrate/tray unit to be transferred is at the predetermined position. If so, it will be activated immediately and move that unit to the second unit.
Transfer toward the transfer device 12 begins. As a result, in the second transfer device 12, the carrier 24 transfers the incoming substrate/tray unit, while the carrier 23 returns at a relatively high speed for the next operation. The speed control of the two pulse motors M2 and M3 in the second transfer device 12 is
This can be carried out by the control circuits C2, C3 depending on the travel distance or time of the carriers 23, 24 in the transfer device 12 and the feeding speed of the substrate/tray unit by the first transfer device 3.

Each substrate/tray unit that is sequentially sent into the sputtering chamber 2 and processed in this way is taken out in a take-out chamber (not shown), which has a structure similar to that of the transfer device 3 and supply device 27 provided in the preparation chamber 1, for example. can be sequentially extracted by the following device.

In the illustrated embodiment, each carrier and its drive mechanism may be of any other construction;
If necessary, a photoelectric sensor may be additionally provided at one or more positions in the transfer stroke of the first and second transfer devices to monitor the transfer status of each substrate/tray unit to ensure more reliable transfer operation. It can be guaranteed.

As explained above, in the embodiment of the present invention, three pulse motors are used, and their operation is controlled via a control circuit according to the operation of a combined micro switch and a photoelectric sensor. The substrates/tray units to be fed can be successively fed into the processing chamber in close contact with each other without impact, and in this invention, each transfer device is driven in relation to their operating status, so there is no possibility of malfunction. For example, in the event of a failure at any location, the entire transfer system can be completely shut down. Furthermore, since a pulse motor is used as a drive source for each transfer device, the moving speed and speed change of the carrier in each transfer device can be accurately and easily controlled. Therefore, even if the substrate to be processed is relatively fragile and relatively large, for example glass, the invention allows it to be easily and reliably fed into the processing chamber of a continuous vacuum processing apparatus in a continuous manner without risk of damage. be able to.

In addition, in the embodiment of this invention, the second transfer device 12
The speed control of the pulse motors M2 and M3 is set in advance by the combined control circuit according to the operating time or distance, but in some cases, the speed control of the pulse motors M2 and M3 is set in advance by the combined control circuit according to the operating time or distance. The speed of the pulse motor may be controlled depending on the state of transfer of each substrate/tray unit by monitoring.

[Brief explanation of the drawing]

FIG. 1 is a block diagram showing the configuration of an apparatus according to the invention, FIGS. 2 and 3 are a front view and a plan view showing an embodiment of the invention, and FIG. 4 is an explanatory diagram of the operation. In the figure, M1, M2, M3: pulse motor, C
1, C2, C3: control circuit, D1-1, D1-
2, D2-1, D2-2, D3-1, D3-2:
Micro switch, D1-3: Photoelectric sensor.

Claims (1)

[Scope of Claims] 1. A control for a continuous vacuum processing apparatus, which is equipped with a loading section, a processing section, and an unloading section, and is configured to continuously feed members to be processed from the loading section to the processing section and perform desired processing. In the apparatus, there is a first transfer device that sequentially sends the members to be processed from the loading section to the processing section, and a member being processed that moves the members to be processed that have been sent by the first transfer device through the processing section. and a variable-speed second transfer device that brings the first and second transfer devices into close contact with each other at a constant speed, and controls the operation of the first and second transfer devices based on their mutual operating positions and the parts to be processed transferred by these transfer devices. A control device characterized in that it is configured to perform control in relation to position. 2. The first and second transfer devices each include a carrier configured to reciprocate a predetermined distance, transfer the material to be processed on the outward trip, and return only itself on the return trip, and a pulse motor for reciprocating the carrier. , a detector combined with the carrier to detect its start position and stop position;
The transfer devices are of identical construction and arranged side by side in pairs, such that when one is in the active state the other is in the ready state, and each pulse motor of the second transfer device is adapted to control the distance traveled by the carrier associated with it or The device according to claim 1, whose speed is controlled according to time. 3. The device according to claim 2, wherein each carrier of the first and second transfer devices is configured to return from the end point of its outgoing path to its starting position at high speed. 4. A detector is provided for detecting whether or not a processed member to be transferred exists at a predetermined position with respect to the first transfer device, and the operation of the transfer device is controlled by an output signal of the detector. A device according to scope 1.