JPS6148404B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a device for detecting the state of dicer processing using an energization method.

During dicer machining, it is necessary to monitor blade wear, clogging, chipping, and chipping of the workpiece to perform efficient machining. For example, in precision machining of magnetic heads, chipping of the workpiece is likely to occur due to abrasion of the blade, so the machining state must be monitored to improve product yield.

Conventionally, the machining state has been monitored by using a machining force measuring device when the workpiece is mounted on a table, but the monitoring device is complicated and expensive and requires skill to handle. Also,
As a simple method, there is a technique of observing the shape of the workpiece after processing with a microscope, but there are problems in that it is not possible to monitor the workpiece during processing, and the observation results are difficult to match depending on the observer. Conventionally, blade 3 and workpiece 4
In order to electrically detect the contact position with the blade (or table 5) and determine the switching depth of the blade to the workpiece, a DC power supply 8 is used to energize the blade 3 and the workpiece 4 as shown in Figure 1. A method has been proposed. In this figure, 1 is a fixed bearing;
2 is a rotating main shaft, 5 is a table, 6 is an insulator,
7 is a high frequency motor, and 9 is a measurement impedance. In this method, since the applied power source is a DC power source and the bearing 1 has a high resistance, it is impossible to detect the monitoring output Vout due to the thermoelectromotive force from both ends of the measurement impedance 9. On the other hand, in order to make it easier to detect the current flowing, it is conceivable to provide a brush 10 as shown in the figure to improve the current conductivity, but this brush 10 has a problem that it has a short lifespan due to wear.

The purpose of the present invention is to solve the above-mentioned conventional problems,
An object of the present invention is to provide a dicer machining state detection device capable of detecting various precise machining states by detecting thermoelectromotive force generated at least between a blade and a workpiece and in a bearing without using a brush. .

That is, in order to achieve the above object, the present invention has the following features:
In a dicer processing device equipped with a bearing that rotatably supports a main shaft with a blade fixed to the tip and a table on which a workpiece is placed, for pouring a conductive fluid such as water onto the blade or the main shaft. A fluid nozzle installed facing the blade is provided, and an AC power supply and a first,
and a second measurement impedance are connected in series, an amplifier is provided to amplify each signal detected from both ends of the first and second measurement impedances, and a low-pass filter is applied to the signal amplified by the amplifier. is connected to detect thermoelectromotive force by the signal detected from this low-pass filter, further connect a band-pass filter to the signal amplified by the above amplifier, and connect a rectifier to this output to detect the conducting current. This is a dicer machining state detection device characterized by being configured as follows.

The present invention will be specifically described below with reference to the drawings. FIGS. 2 and 3 show an embodiment of the dicer machining state detection device of the present invention. That is, the fluid nozzle 1 is connected to the blade 3 fixed to the tip of the main shaft 2.
4, and an AC power supply 11 is connected in series between the metal part of the fluid nozzle 14, the table 5, and the main shaft 2 with other measurement impedances _Z1 and _Z2 interposed as shown in the figure. Now, when a conductive fluid such as water is poured from the fluid nozzle 14 onto the tip of the main shaft 2, the measurement impedance Z ₁ of both parallel measurement circuits and
The output voltages V ₁ and V ₂ appearing across Z ₂ can be detected. By processing this output voltage as shown in Fig. 3, the blade 3 and workpiece 4 are
The thermal electromotive force and current flowing through the bearing can be measured independently. That is, by using the detection signal processing circuit shown in FIG. 3 and amplifying the output Vout with the amplifier 19 and processing it with the low-pass filter 22, it is possible to detect the thermoelectromotive force, which is a direct current component. One side output
By passing Vout through a band pass filter 20, extracting an alternating current carrier component, rectifying it in a rectifier circuit 21, and passing it through a low pass filter 22', it is possible to detect the current flowing through the measurement circuit. By connecting the AC power source 11 in this manner, it became possible to detect the thermoelectromotive force and the current flowing. Furthermore, by detecting the thermoelectromotive force and the current flowing, it becomes possible to monitor the precise processing state. If a large thermoelectromotive force is detected between the blade 3 and the workpiece 4, it means that the frictional heat between the blade 3 and the workpiece 4 has increased, and whether the abrasive cutting edge of the blade 3 has worn out. This is caused by chips getting stuck between the abrasive grains, resulting in a clogging condition. In addition, by detecting the current flowing between the blade 3 and the workpiece 4, it is possible to detect fluctuations in the resistance value between the two, that is, contact between the two, as well as small vibrations during one rotation of the blade (local wear and breakage of the blade, uneven wear). , vibrations caused by chipping of the workpiece, etc.) are detected. In addition, by detecting the thermoelectromotive force of the bearing, the cause of frictional heat generation in the bearing, that is, the life of the bearing and the overload state of machining by the blade can be detected. Furthermore, since a bearing normally exhibits a constant high resistance value, an abnormality in the bearing can be detected by detecting the current flowing through the bearing.

In the case of the above embodiment, it has been found that if the cooling nozzle 15 is connected to the optical current power source 11 instead of the fluid nozzle 14, the processed portion of the workpiece 4 can be cooled, so that more precise monitoring can be performed. The method using such a fluid nozzle 14 improves the conductivity of the measurement circuit, so that accurate monitoring can be performed. Furthermore, blade 3
If a recess is provided at the tip of the main shaft 2 to which the main shaft 2 is fixed, and fluid is poured into the recess, reliable conduction of the circuit can be achieved using a small amount of fluid.

As explained above, according to the present invention, conduction is established with the dicer by the conductive fluid flowing from the fluid nozzle, and the frequency characteristics of the current flowing through the fluid nozzle, the table, and the bearing allow for a simple configuration and high-speed rotation. The present invention has the effect of being able to detect the machining state of the dicer with high reliability, such as the overload state of the bearing, the damaged state of the cutting edge of the blade, and the chipping state of the finished workpiece.

[Brief explanation of the drawing]

Fig. 1 is a diagram showing the energization method between the blade and workpiece in a conventional dicer, Fig. 2 is a diagram illustrating the energization method in a dicer which is an embodiment of the present invention, and Fig. 3 is a diagram showing the energization method in a dicer according to the present invention. FIG. 3 is a diagram showing a signal processing method. 1...Bearing, 2...Main shaft, 3...Blade, 4
...Work, 5...Table, 6...Insulator, 9
...Measurement impedance, 11...AC power supply,
14...Fluid nozzle, 15...Cooling nozzle.

Claims (1)

[Claims] 1. In a dicer processing device equipped with a bearing that rotatably supports a main shaft with a blade fixed to the tip and a table on which a workpiece is placed, a conductive fluid such as water is injected into the blade or the main shaft. a fluid nozzle installed opposite to the blade in order to perform the measurement, an AC power source and first and second measurement impedances are connected in series between the metal part of the fluid nozzle and the table and the bearing; An amplifier is provided to amplify each signal detected from both ends of these first and second measurement impedances, and a low-pass filter is connected to the signal amplified by the amplifier, and the signal detected from the low-pass filter generates heat. A dicer machining state detection device characterized in that it is configured to detect an electromotive force, further connect a band pass filter to the signal amplified by the amplifier, and connect a rectifier to the output of the band pass filter to detect a conducting current.