JPS6154474B2 - - Google Patents

Description

Detailed Description of the Invention (Technical Field) The present invention relates to an air filtration device, particularly an air filtration device in which a low-noise, lightweight, and thin filter unit with a blower having a collection efficiency of 99.97% or more is arranged in a lattice-like frame. Regarding a filtration device.

(Prior Art) A highly clean space is required in fields such as precision industry such as semiconductor manufacturing, biotechnology, and pharmaceutical industry. Clean spaces include clean rooms that clean the entire working environment, clean benches and clean booths that locally clean the working environment. In order to create such a clean space, a filter unit with a blower is used, which is a combination of a blower and a high-performance filter. The purpose of its use is to make the minimum necessary work environment clean while efficiently saving energy. By installing this unit in an area where higher cleanliness is required in a clean room with relatively low cleanliness, it is possible to locally make a desired area a highly clean space. It can easily accommodate the movement of manufacturing equipment and changes in clean room layout.

Conventionally, as shown in FIG. 2, this type of unit has a method in which each filter unit 100 with a blower is fixed to a hanging fixture 400 from the ceiling, and the gap between the units is filled with a spacer 500 and caulking material 600. It has been adopted. In this method, when a large number of units are installed together, caulking is required in many places, making the work extremely complicated. Moreover, air leakage cannot be completely prevented.

Furthermore, as shown in FIG. 3, there is also an apparatus in which the unit 100 is installed on a square metal mounting frame 101 suspended from the ceiling via a gasket 601 made of chloroprene sponge or the like. In this device, it is difficult to connect the filter frame 102 and the mounting frame 101 in an airtight manner due to the structure.
Air leakage cannot be completely prevented. Joint part 1 between air filter 103 and blower 104
It is also technically difficult to keep 05 airtight.

Furthermore, since the fan module and filter module used in the unit are relatively thick and heavy, the unit as a whole tends to be bulky and heavy. Therefore, work such as installation, replacement of fans and filters, and removal for inspection and repair is not easy. The noise is also loud.

(Object of the Invention) An object of the present invention is to provide an air filtration device that can maintain extremely high airtightness. Another object of the present invention is to provide an air filtration device that has extremely high collection efficiency, excellent air blowing performance, low noise, and is lightweight and thin. Still another object of the present invention is to provide an air filtration device in which the fan module and filter module can be easily replaced and removed without impairing the airtightness between these modules. Still another object of the present invention is to provide an air filtration device that can be easily installed and removed at a desired location because the fan module and filter module are lightweight and thin.

(Structure of the Invention) The device of the present invention includes (1) an air filter module, (2) a fan module located at the rear of the air filter module, and (3) a lattice that connects both modules in an airtight manner. (4) a fixing member that fixes both modules in the horizontal direction via the frame, and (5) an upper opening of the frame. The extension part of the fan module frame is arranged in the part, and the lower edge is arranged in the groove extension part of the air filter module, thereby achieving the above object.

(Example) The present invention will be described below with reference to Examples.

As shown in FIG. 1, the air filtration device of the present invention connects an air filter module 1, a fan module 2 located behind the air filter module 1, and both modules 1 and 2 in an airtight manner. The frame body 3 has an H-shaped cross section. A plurality of frames 3 are arranged in a lattice shape, and can hold a plurality of pairs of air filter modules 1 and fan modules 2 in their respective lattice spaces. The device of the present invention further includes a fixing member 4. This fixing member 4 connects both modules 1 and 2 via the frame 3.
fixed horizontally.

The air filter module 1 mainly includes an air filter 11 and a filter frame 12. The air filter 11 has a diameter of, for example, 0.3 μm.
It has a collection efficiency of 99.97% or more for monodisperse DOP (dioctyl phthalate) particles. Such an ultra-high performance air filter 11 includes, for example,
There is a HEPA (High Efficiency Particulate Air) filter. The filter frame 12 has a groove extending portion 120 outwardly. There is no particular restriction on the material of the filter frame 12 and the extension portion 120, and for example, metals such as aluminum and iron, plywood, synthetic resin, etc. are used.

The fan module 2 mainly includes a blower 21
and a fan module frame 22. The fan module frame 22 has an extension portion 220 . As the blower 21, one that is small, lightweight, thin, and has good blowing efficiency and wind speed distribution may be used. For example, a propeller fan or a sirotskov fan. This blower 21 is supported by a fan module frame 22 made of, for example, metal or synthetic resin, with a vibration-proofing/sound-absorbing material interposed therebetween in order to reduce the vibration and noise generated by the blower 21. Examples of the vibration-proofing/sound-absorbing material include glass wool and foamed plastics such as polyurethane foam and polystyrene foam, and are arranged so as to surround the entire circumference of the blower or a portion thereof. If, for example, a flywheel that is interlocked with the blower is disposed behind the blower as a resonance prevention means, vibration and noise can be further effectively reduced. Further, in order to equalize the wind speed distribution of the discharged air, a perforated plate or the like is appropriately provided behind the air filter 11. Furthermore, it is also possible to provide a blind plate behind the air filter module 1 to adjust the cleanliness of the clean room.

A plurality of frames 3 having an H-shaped cross section are connected in a grid pattern. This frame body 3 receives the fan module extension 220 at an upper opening 31 . The lower edge 32 of the frame 3 is disposed within the groove extension 120 of the filter module 1. This frame body 3 is supported and fixed to a suitable fixed part such as a ceiling by means of a fixing member 4 such as a hanging fitting so that the apparatus is held horizontally. The fixing member 4 is fixed to the frame 3 via a tightening mechanism 41. The tightening mechanism 41 is connected to the filter frame groove extending portion 120.
A shielding plate 410 that supports the shielding plate 410 from below, and a filter frame grooved portion 12 that supports the shielding plate 410 from below.
0. This shielding plate 410 is arranged in a shape corresponding to the frame 3, and shields the connecting portion between the frame 3 and the filter frame 12 from the field of vision, thereby improving the appearance of the apparatus. By opening this tightening mechanism 41, the air filter module 1 and fan module 2 can be individually removed in sequence. Air filter module 1
Maintenance work on the fan module 2 can be performed from below (indoors) by simply removing the fan module 2.

A fluid sealing material 5 is accommodated in each of the groove extending portion 120 of the air filter module 1 and the upper opening 31 of the lattice-like frame 3. The sealing material 5 creates a completely airtight space between the groove extending portion 120 of the air filter module 1 and the lower edge 32 of the frame, and between the upper opening 31 of the frame and the fan module extending portion 220. Make it. the result,
The air filter module 1 and fan module 2 are held in a completely airtight state via a frame 3.

As the fluid sealing material 5, a nonvolatile substance having surface adhesiveness and good sealing properties and workability is employed. Examples include modified urethane sealing materials and silicone sealing materials.
Among them, those having appropriate viscosity and pot life are appropriately selected from the viewpoint of chemical properties, sealing properties, etc.

(Effects of the Invention) In the filtration device of the present invention, the air filter module and the fan module are airtightly connected via a frame by a fluid sealant. Since both modules are connected via a frame, they can be removed and installed individually without compromising airtightness. On the other hand, the fan module uses an ultra-thin blower, and the air filter module uses an ultra-thin high-performance air filter, so the entire device is lightweight and thin, and is significantly bulkier. low. Therefore, the noise is low and the installation and removal of the device is extremely easy. Maintenance work such as replacing filters and blowers, and inspecting and repairing blowers can also be easily performed.

[Brief explanation of the drawing]

FIG. 1 is a front sectional view of a main part showing an embodiment of the apparatus of the present invention, and FIGS. 2 and 3 are front sectional views of main parts showing an example of a conventional apparatus. DESCRIPTION OF SYMBOLS 1... Air filter module, 2... Fan module, 3... H-shaped cross section frame, 4... Fixing member, 5... Fluid sealing material, 11,103...
... Air filter, 12, 120 ... Air filter frame, 21, 104 ... Blower, 22 ... Fan module frame, 31 ... Upper opening of frame groove extension, 32 ... Lower edge of frame body, 41...Tightening mechanism, 100...Filter unit with blower,
101...Mounting frame, 105...Joining portion, 120...
... Frame groove extension part, 220 ... Fan module frame extension part, 400 ... Hanging tool, 410 ... Shielding plate, 411 ... Screw means, 500 ... Spacer, 600 ... Caulking material, 601 ...Gasket.

Claims (1)

[Claims] 1. (1) an air filter module, (2) a fan module located at the rear of the air filter module, and (3) a lattice-like connection that connects both modules in an airtight manner. (4) a fixing member for horizontally fixing both modules via the frame; (5) an upper opening of the frame; An air filtration device in which an extending portion of a fan module frame is disposed, and a lower edge thereof is disposed in a groove extending portion of an air filter module. 2. The device according to claim 1, wherein a fluid sealant is accommodated in the upper opening of the frame and the groove extension of the air filter module. 3. The device according to claim 1, wherein the air filter module includes a lightweight, thin, and high-performance filter. 4. The device according to claim 1, wherein the fan module includes a lightweight and thin blower. 5. The device according to claim 4, wherein the blower is a propeller fan. 6. The device according to claim 4, wherein the blower is a Sirotskov fan. 7. The device according to claim 4, wherein the blower is supported by the fan module frame via a vibration-proofing/sound-absorbing material. 8. The device according to claim 4, wherein resonance prevention means is provided behind the blower. 9. The device according to claim 8, wherein the resonance prevention means is a flywheel.