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JPS6154863B2 - - Google Patents
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JPS6154863B2 - - Google Patents

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Publication number
JPS6154863B2
JPS6154863B2 JP59241065A JP24106584A JPS6154863B2 JP S6154863 B2 JPS6154863 B2 JP S6154863B2 JP 59241065 A JP59241065 A JP 59241065A JP 24106584 A JP24106584 A JP 24106584A JP S6154863 B2 JPS6154863 B2 JP S6154863B2
Authority
JP
Japan
Prior art keywords
resin
plating properties
oxide film
adhesion
less
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59241065A
Other languages
Japanese (ja)
Other versions
JPS61119656A (en
Inventor
Kazu Sasaki
Tsutomu Inui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP59241065A priority Critical patent/JPS61119656A/en
Publication of JPS61119656A publication Critical patent/JPS61119656A/en
Publication of JPS6154863B2 publication Critical patent/JPS6154863B2/ja
Granted legal-status Critical Current

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  • Lead Frames For Integrated Circuits (AREA)

Description

【発明の詳細な説明】[Detailed description of the invention]

〔産業上の利用分野〕 本発明はたとえば樹脂モールド型ICにおい
て、安価でかつ樹脂との密着性およびメツキ性の
すぐれたFe―Cr系合金のICリードフレーム材料
に関するものである。 〔従来技術〕 この用途に使用されるリードフレーム材料には
パツケージング工程(メツキ、ボンデイング樹脂
封止など)あるいは使用上からの要求特性として
メツキ性、耐食性、リードのピン強度が優れてい
ることが要求される。従来この種の材料として42
合金(41Ni―Fe)が広く使用されているが、原
料的に高価なNiを多量に含有するためコスト高
となる欠点を有している。 しかるに最近は製品のコストダウンの厳しい要
求にともない従来より安価でかつ必要最低限度の
特性を有する材料の要望が強まり、純鉄やステン
レス鋼(SUS410,SUS430)が検討されるに至つ
ている。しかしこれらの合金は一長一短の特性を
有し純鉄は大気中で容易に発錆するため耐食性の
点で、またステンレス鋼は耐食性は優れているが
メツキ性が著しく劣る欠点を有している。 本発明者はこの要求も満たす材料としてFe―
6〜10%Cr系合金で安価でかつメツキ性を損う
ことなく耐食性の優れたリードフレーム材料(特
開昭57−50457号)を提案した。 〔発明が解決しようとする問題点〕 ICはその素子を外部から保護するためにセラ
ミツクや樹脂で封止されているが、樹脂封止型は
セラミツク型に比べ耐湿性が劣るのが欠点となつ
ている。しかるに最近は高密度実装への要求から
パツケージが小型・薄型化の傾向にあり、従来に
も増して耐湿性の向上が強く望まれている。 しかしながら従来の材料では樹脂との密着性が
劣るためリードと樹脂との隙間から水が浸入し、
素子上のAl配線が腐食したり、断線してしまう
等の問題がある。 〔問題点を解決するための手段・作用〕 本発明は以上の観点から従来のFe―Cu系合金
の欠点を改良し、樹脂との密着性を高めることを
目的に、材料面から樹脂との密着性とメツキ性を
研究したところリードフレーム表面の酸化膜と材
料組成が特許請求の範囲にあるとき、従来合金に
比べて樹脂密着性が著しく改善され、かつメツキ
性も良好なものが得られた発見に基づくものであ
る。 以下本発明の限定理由を述べる。 本発明の対象となるFe―Cr系合金はリードフ
レーム材料として具備すべきメツキ性と耐食性が
得られることが必要で、Cr量が10%を越える
と、密着性の良好なメツキが得られず、また6%
未満では著しく耐食性が劣るため、Cr6〜10%に
限定した。 Cは多く含有すると炭化物を形成し、腐食の発
生原因となり、0.1%以下とした。 SiとMnはリードフレーム上に樹脂との密着性
のすぐれた酸化膜を形成させる元素であるが、Si
とMnの合計が0.2%未満では形成される酸化膜が
薄く樹脂との密着性向上に効果がなく、1.5%を
越えると酸化膜が厚くなりメツキの密着性が悪く
なる。そしてMn/Si比が10を越えると表面酸化
物がMn―richとなつて、酸化膜が地金と剥離し
やすくなり、1未満ではリードフレームとしてメ
ツキ欠陥のもとになるSi系の介在物比が多くなる
ため、Si+Mnを0.2〜1.5%でMn/Si比を1〜10
に限定した。 Alは酸化膜形成を促進する元素であるが、
0.001%未満ではその効果は少なく、0.2%を越え
ると酸化膜が厚くなり、メツキ性が劣つてくるた
め、0.001〜0.2%に限定した。 表面酸化膜の厚みはイオンマイクロアナライザ
ーで深さ方向にSi,Mn,Alを分析し求めたもの
で、80〜250Åに限定したのは、80Å未満では樹
脂との密着性が弱く、250Åを越えるとメツキ性
が劣つてくるためである。 さらに本発明では上記基本合金のメツキ性を損
うことなく、一層優れた耐食性を得るために、
Ni,Mo,Nb,V,Wの1種又は2種以上を含有
しても良く、その量が単独または複合で0.2%未
満では耐食性に効果がなく、一方3.5%を越える
とメツキ性およびフレームの成形加工性が著しく
悪くなり、実用上好ましくないことから0.2〜3.5
%とした。 〔実施例〕 以下実施例によつて説明する。 表に示す合金を高周波誘導炉で溶解鋳造後950
℃以上の温度で鍛造、熱間圧延を行ない、厚さ3
mmの板に圧延した。さらに冷間圧延と焼鈍を繰り
返し、厚さ0.25mmの薄板材とした。
[Industrial Field of Application] The present invention relates to an IC lead frame material made of an Fe--Cr alloy that is inexpensive and has excellent adhesion to resin and plating properties, for example in a resin molded IC. [Prior art] The lead frame material used for this purpose is required to have excellent plating properties, corrosion resistance, and lead pin strength in the packaging process (plating, bonding resin encapsulation, etc.) or in use. required. Conventionally, this kind of material is 42
Although alloy (41Ni-Fe) is widely used, it has the disadvantage of high cost because it contains a large amount of Ni, which is an expensive raw material. However, in recent years, with the strict requirement to reduce the cost of products, there has been an increasing demand for materials that are cheaper than before and have the minimum necessary characteristics, and pure iron and stainless steel (SUS410, SUS430) are being considered. However, these alloys have advantages and disadvantages; pure iron easily rusts in the atmosphere and therefore has poor corrosion resistance, while stainless steel has excellent corrosion resistance but has the disadvantage of significantly poor plating properties. The present inventor has proposed Fe-
We proposed a lead frame material (Japanese Patent Laid-Open No. 57-50457) that is made of a 6-10% Cr alloy and is inexpensive and has excellent corrosion resistance without impairing plating properties. [Problem to be solved by the invention] ICs are sealed with ceramic or resin to protect their elements from the outside, but the disadvantage of resin-sealed types is that they are less moisture resistant than ceramic types. ing. However, in recent years, there has been a trend toward smaller and thinner packages due to the demand for higher density packaging, and there is a stronger desire for improved moisture resistance than ever before. However, conventional materials have poor adhesion to the resin, allowing water to enter through the gap between the lead and the resin.
There are problems such as corrosion and disconnection of Al wiring on the element. [Means and effects for solving the problems] From the above viewpoint, the present invention improves the drawbacks of conventional Fe-Cu alloys and improves the adhesion with resin from the material standpoint. Research on adhesion and plating properties revealed that when the oxide film on the lead frame surface and the material composition were within the claimed range, resin adhesion was significantly improved compared to conventional alloys, and a product with good plating properties was obtained. It is based on the discovery that The reasons for the limitations of the present invention will be described below. The Fe-Cr alloy that is the subject of the present invention must have the plating properties and corrosion resistance required for a lead frame material, and if the Cr content exceeds 10%, plating with good adhesion cannot be obtained. , also 6%
If it is less than Cr, the corrosion resistance will be significantly inferior, so it is limited to 6 to 10% Cr. If a large amount of C is contained, it forms carbides and causes corrosion, so the content is set to 0.1% or less. Si and Mn are elements that form an oxide film with excellent adhesion to resin on lead frames, but Si
If the total of Mn and Mn is less than 0.2%, the oxide film formed will be thin and will not be effective in improving adhesion to the resin, and if it exceeds 1.5%, the oxide film will become thick and the adhesion of plating will deteriorate. When the Mn/Si ratio exceeds 10, the surface oxide becomes Mn-rich and the oxide film easily separates from the base metal, while when it is less than 1, Si-based inclusions become a source of plating defects in the lead frame. Since the ratio increases, Si + Mn is 0.2 to 1.5% and Mn/Si ratio is 1 to 10.
limited to. Al is an element that promotes oxide film formation,
If it is less than 0.001%, the effect will be small, and if it exceeds 0.2%, the oxide film will become thick and the plating properties will deteriorate, so it was limited to 0.001 to 0.2%. The thickness of the surface oxide film was determined by analyzing Si, Mn, and Al in the depth direction with an ion microanalyzer, and was limited to 80 to 250 Å because adhesiveness with the resin is weak below 80 Å, and if it exceeds 250 Å. This is because the plating properties deteriorate. Furthermore, in the present invention, in order to obtain even better corrosion resistance without impairing the plating properties of the basic alloy,
One or more of Ni, Mo, Nb, V, and W may be contained, and if the amount alone or in combination is less than 0.2%, it will have no effect on corrosion resistance, while if it exceeds 3.5%, the plating properties will deteriorate. 0.2 to 3.5 because the molding processability of
%. [Example] The following is an explanation based on an example. After melting and casting the alloy shown in the table in a high frequency induction furnace,
Forged and hot rolled at temperatures above ℃, thickness 3
Rolled into a mm plate. Furthermore, cold rolling and annealing were repeated to obtain a thin plate material with a thickness of 0.25 mm.

【表】【table】

〔効果〕〔effect〕

特性評価を行なつた結果を表に示す。 表より明らかなように本発明合金1〜8は比較
合金に比べて樹脂との密着強度は約2倍以上の値
を示し、かつ酸化膜の厚みが250Å以下ではメツ
キ性も優れている結果が得られた。また本発明合
金はいずれも一般の純鉄に比べ優れた耐食性を有
し、かつ42合金と同等の良好なメツキ性が得られ
ることがわかる。 以上の如く、本発明のリードフレーム材料は安
価でかつ良好なメツキ性と高い樹脂密着性を有す
る材料で、樹脂モールド型パツケージの信頼性を
大巾に向上させるもので工業上の効果が大きい。
The results of the characteristic evaluation are shown in the table. As is clear from the table, alloys 1 to 8 of the present invention have approximately twice as much adhesion strength to the resin as the comparative alloys, and also have excellent plating properties when the oxide film thickness is 250 Å or less. Obtained. Furthermore, it can be seen that all of the alloys of the present invention have superior corrosion resistance compared to general pure iron, and can provide good plating properties equivalent to that of Alloy 42. As described above, the lead frame material of the present invention is a material that is inexpensive, has good plating properties, and high resin adhesion, and greatly improves the reliability of resin molded packages, which has great industrial effects.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は樹脂密着強度テストの原理図である。 1:試料、2:樹脂モールド用薄板治具、3:
ホツトプレート、4:樹脂。
FIG. 1 is a diagram showing the principle of the resin adhesion strength test. 1: Sample, 2: Thin plate jig for resin mold, 3:
Hot plate, 4: Resin.

Claims (1)

【特許請求の範囲】 1 重量比でCr6〜10%,C0.1%以下,Si+
Mn0.2〜1.5%(Mn/Si=1〜10).A10.001〜0.2
%残部Fe及び不可避的に混入する不純物を含む
Fe―Cr系合金において、その表面酸化膜の厚み
が80〜250Åであることを特徴とする樹脂との密
着性およびメツキ性の優れたICリードフレーム
材料。 2 重量比でCr6〜10%,C0.1%以下,Si+
Mn0.2〜1.5%(Mn/Si=1〜10),A10.001〜0.2
%でさらにNi,Mo,Nb,V,Wのうち1種又は
2種以上を単独または複合で0.2〜3.5%含有し残
部Fe及び不可避的に混入する不純物を含むFe―
Cr系合金において、その表面酸化膜の厚みが80
〜250Åであることを特徴とする樹脂との密着性
およびメツキ性の優れたICリードフレーム材
料。
[Claims] 1. Cr6 to 10% by weight, C0.1% or less, Si+
Mn0.2-1.5% (Mn/Si=1-10). A10.001~0.2
Contains % balance Fe and unavoidable impurities
An IC lead frame material made of Fe-Cr alloy with excellent adhesion to resin and plating properties, characterized by a surface oxide film with a thickness of 80 to 250 Å. 2 Cr6-10% by weight, C0.1% or less, Si+
Mn0.2~1.5% (Mn/Si=1~10), A10.001~0.2
%, further contains 0.2 to 3.5% of one or more of Ni, Mo, Nb, V, and W, singly or in combination, and the balance is Fe and unavoidably mixed impurities.
In Cr-based alloys, the thickness of the surface oxide film is 80
An IC lead frame material with excellent adhesion to resin and plating properties, characterized by a thickness of ~250Å.
JP59241065A 1984-11-15 1984-11-15 Material for lead frame for ic Granted JPS61119656A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59241065A JPS61119656A (en) 1984-11-15 1984-11-15 Material for lead frame for ic

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59241065A JPS61119656A (en) 1984-11-15 1984-11-15 Material for lead frame for ic

Publications (2)

Publication Number Publication Date
JPS61119656A JPS61119656A (en) 1986-06-06
JPS6154863B2 true JPS6154863B2 (en) 1986-11-25

Family

ID=17068773

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59241065A Granted JPS61119656A (en) 1984-11-15 1984-11-15 Material for lead frame for ic

Country Status (1)

Country Link
JP (1) JPS61119656A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6355968A (en) * 1986-08-26 1988-03-10 Mitsui Haitetsuku:Kk Lead frame
JP2721162B2 (en) * 1987-10-15 1998-03-04 日立金属株式会社 Semiconductor lead frame with excellent resin adhesion

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS599149A (en) * 1982-07-07 1984-01-18 Daido Steel Co Ltd Material for lead frame

Also Published As

Publication number Publication date
JPS61119656A (en) 1986-06-06

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