JPS6157906B2 - - Google Patents

Description

[Detailed description of the invention]

The present invention relates to a vacuum plating apparatus used in vacuum evaporation methods, ion plating methods, etc., for collecting plating metal vapor that flies away from materials other than the material to be vacuum plated. Generally, in a vacuum, an evaporation material 4 such as cobalt or cobalt alloy is evaporated by heating it in a crucible 3 serving as an evaporation source, and this plating metal vapor is flown onto the surface of a material 5 to be plated such as a steel strip, and the material 4 to be plated is In the vacuum plating device that forms the vacuum plating layer of metal on the surface of the material 5, the scattering area of the plating metal vapor flow is larger than the collision area of the plating metal vapor on the surface of the material to be plated. The part does not adhere to the material to be plated 5 and scatters in the vacuum chamber 1 as an ineffective plating metal vapor,
As a result, the yield of vacuum plating material decreases. Moreover, the above-mentioned ineffective metal vapor flies to the attached equipment in the vacuum chamber and the wall of the vacuum chamber, and accumulates as a vapor deposited layer. This accumulated and adhered metal layer is removed when the vacuum plating equipment is operated continuously for a long time.
The amount is large and causes dust during vacuum operation. Therefore, in order to stabilize the quality, it is necessary to remove the deposited layer after each operation. In addition, in order to improve the material yield of the vacuum plating method, the metal layer accumulated on the attached equipment in the vacuum chamber and the surface of the vacuum chamber wall is recovered, and the evaporation material 4 is converted into a material suitable for vacuum plating. After playing, it is appropriate to reuse. In addition, in order to increase recovery efficiency, it is more advantageous to use a layered state than a powder state. Conventionally, as a countermeasure for this, a flat metal plate such as a chrome-plated steel plate was used, as shown in Figure 1.
A cover 2 that matches the shape of the attached equipment in the vacuum chamber 1 and the wall of the vacuum chamber 1 is provided, and a layer of ineffective plating metal vapor is deposited on the surface of the cover 2, so that the accumulated metal layer is increased in quantity. At that point, the vacuum plating operation was stopped, the cover 2 was replaced with a new one, and the operation was started again. However, according to the above method, when removing the metal material layer accumulated on the surface of the cover 2, the metal material layer must be peeled off using mechanical impact or the like, so the metal material layer is peeled off in a powder state. At the same time, many undulations occur on the surface of the cover 2, making it difficult to reuse the cover 2. Furthermore, since it is in a powdered state, it has the drawbacks of reduced collection efficiency and poor working environment. The present invention improves the above-mentioned conventional drawbacks, and can easily peel off the metal layer accumulated on the vacuum chamber wall, the surface of the attached equipment in the vacuum chamber, and the cover surface in layers without requiring mechanical impact or the like. The present invention provides a method and apparatus that can perform the following steps. Hereinafter, one embodiment of the present invention will be explained in detail with reference to FIG. 6 is a cover for capturing ineffective vacuum plating metal vapor, and 7 is a carbon film. The carbon film 7 was formed by applying a paste made by mixing carbon powder with a particle size of about 0.5 μm, an epoxy resin, and a solvent. In the above configuration, vacuum plating was performed using a resin film as the material to be plated and a cobalt alloy as the vacuum plating material. After vacuum plating is completed, in order to peel off the ineffective metal vapor adhesion layer from the cover 6 covered with the carbon film that has captured the ineffective plating metal vapor,
It could be easily peeled off with a small impact force of 0.028Kg/mm ² . That is, it could be easily peeled off and recovered with almost no mechanical impact. In order to clarify the effects of the present invention, similar tests were conducted on cover 2 materials conventionally used: steel plate, copper plate, stainless steel, chrome plated steel plate, nickel plated steel plate, and copper plated steel plate. The comparative study results are shown in Table 1. In Table 1,
Those that do not peel off under an impact force of 0.028 Kg/mm ² are marked with an x mark, and those that peel off between 0 and 0.028 Kg/mm ² are marked with an ○ mark. This result shows that the cover on which the carbon film is formed is very effective as an ineffective vacuum plating material recovery plate.

[Table] The present invention improves the drawbacks of the conventional vacuum plating method for recovering ineffective vacuum plating metal materials, and is very effective in mass production of vacuum plating.

[Brief explanation of the drawing]

FIG. 1 is a sectional view of a conventional plating device, and FIG. 2 is a sectional view of a cover in an embodiment of the present invention. 1... Vacuum chamber, 5... Material to be plated, 4... Evaporation material, 6... Cover, 7... Carbon film.

Claims (1)

[Claims] 1. A vacuum chamber that maintains a vacuum state, an evaporation material that is provided in the vacuum chamber and that is heated and scattered and adheres to the specified material to be plated, and a carbon film that is provided around the evaporation material and has a carbon film on the surface. A vacuum plating device consisting of a formed cover.