JPS6159780B2 - - Google Patents
Info
- Publication number
- JPS6159780B2 JPS6159780B2 JP55131600A JP13160080A JPS6159780B2 JP S6159780 B2 JPS6159780 B2 JP S6159780B2 JP 55131600 A JP55131600 A JP 55131600A JP 13160080 A JP13160080 A JP 13160080A JP S6159780 B2 JPS6159780 B2 JP S6159780B2
- Authority
- JP
- Japan
- Prior art keywords
- exhaust port
- vacuum
- reaction vessel
- sub
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/0006—Controlling or regulating processes
- B01J19/0013—Controlling the temperature of the process
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00051—Controlling the temperature
- B01J2219/00132—Controlling the temperature using electric heating or cooling elements
- B01J2219/00135—Electric resistance heaters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00051—Controlling the temperature
- B01J2219/0015—Controlling the temperature by thermal insulation means
- B01J2219/00153—Vacuum spaces
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Carbon And Carbon Compounds (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
Description
【発明の詳細な説明】
本発明は一般的に言えば、電気抵抗加熱反応炉
であつて、反応中に電気抵抗体を侵す物質の存在
または発生を見る反応に使用されるためのものに
関する。DETAILED DESCRIPTION OF THE INVENTION The present invention generally relates to electrical resistance heating reactors for use in reactions that monitor the presence or generation of substances that attack electrical resistors during the reaction.
本発明はホウ酸,ホウ酸ナトリウム等のホウ酸
塩または酸化ホウ素を炭素源の存在下または非存
在下に還元性金属で還元してホウ素またはホウ素
炭化物を生成させる方法の実施に関連してなされ
たもので、当該反応に関連して具体的に記載され
るが、本発明の反応炉が一般に電気抵抗体を侵す
物質の存在または発生を見る反応に一般に使用さ
れるものであることは自明である。 The present invention relates to the implementation of a method for producing boron or boron carbide by reducing boric acid, a boron salt such as sodium borate, or boron oxide with a reducing metal in the presence or absence of a carbon source. Although the reactor of the present invention is specifically described in connection with the reaction, it is obvious that the reactor of the present invention is generally used for reactions in which the presence or generation of substances that attack electrical resistors is observed. be.
ホウ素,ホウ酸ナトリウム等のホウ酸塩,また
は酸化ホウ素はアルミニウム,カルシウム,また
はマグネシウム等の還元性の金属により非酸化性
雰囲気中600〜1100℃で還元され、ホウ素が生成
する。あるいは、還元性の金属と同時に黒鉛,庶
糖などの炭素源を加えることにより同じ条件で還
元炭化され、ホウ素炭化物が生成する。 Boron, a borate such as sodium borate, or boron oxide is reduced with a reducing metal such as aluminum, calcium, or magnesium in a non-oxidizing atmosphere at 600 to 1100°C to produce boron. Alternatively, by adding a carbon source such as graphite or sucrose at the same time as a reducing metal, the material is reduced and carbonized under the same conditions to produce boron carbide.
この温度条件はニクロム,鉄クロム等の電熱線
および帯を発熱体として使用する電気抵抗加熱炉
によつて満たすことが可能であり、このような電
気抵抗加熱炉は上記と異なる発熱体を用いる炉形
式と比較して極めて廉価であり、また、大型化も
容易である。 This temperature condition can be met by an electric resistance heating furnace that uses heating wires and strips of nichrome, iron chrome, etc. as heating elements. It is extremely inexpensive compared to other types, and can be easily made larger.
しかし、還元反応、あるいは還元炭化反応は急
激な発熱反応であるため、反応時に、酸化ホウ
素,還元性金属等の蒸発が生じ、これらの蒸気は
いずれも上記の発熱体を激しく劣化させる。その
ため、上記の反応を行う反応室と発熱体の収納室
との間には何らかの方法で隔離させる必要があ
る。 However, since the reduction reaction or reduction carbonization reaction is a rapid exothermic reaction, boron oxide, reducing metals, etc. evaporate during the reaction, and both of these vapors severely deteriorate the heating element. Therefore, it is necessary to isolate the reaction chamber in which the above reaction takes place and the heating element storage chamber by some method.
一方、ホウ酸は加熱すると分解して水蒸気を発
生し、また、ホウ酸塩や酸化ホウ素は吸湿性が高
いため通常かなりの水分を含有しており加熱する
と水蒸気を放出する。この水蒸気は還元反応ある
いは還元炭化反応を阻害し、ホウ酸塩の残留、急
激な発熱反応時の水蒸気の瞬間的な発生と熱膨張
に起因する反応物,反応生成物の機械的飛散、あ
るいは、生成ホウ素あるいは炭化物の水蒸気酸化
を招く原因となる。従つて、上記反応開始前に十
分な真空脱水を行うことが望ましい。また、炉内
を非酸化性雰囲気とするためにも、炉内を一度真
空状態として空気を除去する必要がある。 On the other hand, boric acid decomposes and generates water vapor when heated, and borates and boron oxides are highly hygroscopic, so they usually contain a considerable amount of water and release water vapor when heated. This water vapor inhibits the reduction reaction or reduction carbonization reaction, resulting in residual borate, mechanical scattering of reactants and reaction products due to instantaneous generation of water vapor and thermal expansion during rapid exothermic reactions, or This causes steam oxidation of boron or carbide produced. Therefore, it is desirable to perform sufficient vacuum dehydration before starting the reaction. Furthermore, in order to create a non-oxidizing atmosphere inside the furnace, it is necessary to once place the inside of the furnace in a vacuum state and remove air.
高温の化学反応用の容器としては黒鉛を使用し
なければならないが、一般に人造黒鉛は微細な気
孔を有し、特殊な含浸処理を行つた不浸透明性黒
鉛を除き、物質の拡散,流体の浸透を許すため、
黒鉛の反応容器もその器壁は気体や金属の蒸気の
通過や物質の拡散通過を完全に阻止することがで
きない。従つて黒鉛容器内部のみを高度に真空に
することは不可能であるし、黒鉛反応容器の内外
に圧力差がある場合、あるいは黒鉛反応容器を長
期間にわたつて使用する場合には、反応物質の黒
鉛容器外への浸出は避けられない。 Graphite must be used as a container for high-temperature chemical reactions, but in general, artificial graphite has fine pores and, with the exception of impregnable transparent graphite that has undergone special impregnation treatment, it is difficult for substances to diffuse and for fluids to flow. To allow penetration,
The walls of a graphite reaction vessel cannot completely prevent the passage of gas or metal vapor or the diffusion of substances. Therefore, it is impossible to create a high degree of vacuum only inside the graphite container, and if there is a pressure difference between the inside and outside of the graphite reaction container, or if the graphite reaction container is used for a long period of time, the reactants leaching out of the graphite container is unavoidable.
以上に述べた二つの要件、すなわち、反応室と
発熱体収納室との隔離、および、反応室の真空排
気を同時に満足させる形式としては、
(a) 隔離壁と耐真空容器の役割を兼ねる炉心管を
使用し、炉心管内を反応室として使用し、真空
排気は炉心管内のみ行う形式と、
(b) 反応室,発熱体収納室をともに耐真空容器の
内部に設置し、さらに両室の間に隔離壁を設け
る形式
の2つが考えられる。真空排気系の小型化、およ
び2つの役割を炉心管に兼ねさせるという単純化
の点からは(a)の形式の方が良さそうであるが、次
のような重大な問題点を持つている。すなわち、
発熱反応時には最高温度が1200〜1400℃になるこ
とと合わせて、温度的,雰囲気的に長期間の使用
に耐える単一の材料が存在せず、また、炉心管を
多層構造にすることによつてこの問題を避けよう
とすると、反応を遂行する反応室の有効体積が炉
心管肉厚の増大によつて大巾に減少し、さらに炉
心管自身の熱容量の増大が炉心管を伝つて炉外へ
逃散する熱の増大のために熱効率が大巾に減少す
るという加熱炉としては致命的な欠陥を持つに至
る。 The two requirements mentioned above, that is, the isolation of the reaction chamber and the heating element storage chamber, and the evacuation of the reaction chamber, can be met at the same time by: (a) a reactor core that serves as both a separation wall and a vacuum-resistant container; (b) Both the reaction chamber and heating element storage chamber are installed inside a vacuum-resistant container, and there is a Two types of separation walls can be considered. Type (a) seems to be better in terms of downsizing the vacuum exhaust system and simplifying the role of the reactor core tube, but it has the following serious problems. . That is,
In addition to the fact that the maximum temperature during an exothermic reaction is 1200 to 1400℃, there is no single material that can withstand long-term use in terms of temperature and atmosphere, and because the core tube has a multilayer structure, In order to avoid this problem, the effective volume of the reaction chamber in which the reaction is carried out is drastically reduced due to the increase in the wall thickness of the reactor core tube, and the increase in the heat capacity of the reactor core tube itself is transmitted through the reactor core tube to the outside of the reactor. As a heating furnace, this has a fatal flaw in that the thermal efficiency is drastically reduced due to the increase in heat escaping to the furnace.
したがつて、従来の(a)の形式や、あるいは高価
な黒鉛ヒータータンマン炉等を用いる方法によつ
て製造されたホウ素あるいはよう素炭化物は生産
性が低く高価であつた。 Therefore, boron or iodine carbides produced by the conventional method (a) or by a method using an expensive graphite heater Tammann furnace have low productivity and are expensive.
本発明者等は(b)の形式において、黒鉛製隔壁と
その外部の発熱体収容室を別々に排気できる構造
を採用することにより上記の温度的,雰囲気的な
問題を解決できると同時に、熱効率も大巾に改善
〓〓〓〓
されることを見出し本発明を完成した。 In the type (b), the inventors have found that by adopting a structure in which the graphite partition wall and the heating element storage chamber outside thereof can be separately evacuated, the above temperature and atmospheric problems can be solved, and at the same time thermal efficiency can be improved. Significant improvement〓〓〓〓
The present invention was completed based on this discovery.
本発明によれば弁つきの排気口(第1排気口)
と弁つきの気体導入口(第1気体導入口)を備え
た耐真空容器と;該耐真空容器内に設けられた黒
鉛製の反応容器であつて、前記耐真空容器と独立
に別の弁つきの排気口(第2排気口)と弁つきの
気体導入口(第2気体導入口)を有するものと;
該反応容器を包囲して前記耐真空容器に配置され
た電気抵抗加熱炉とからなる化学反応炉が提供さ
れる。 According to the invention, an exhaust port with a valve (first exhaust port)
and a vacuum-resistant container equipped with a gas inlet (first gas inlet) with a valve; a reaction container made of graphite provided within the vacuum-resistant container; One having an exhaust port (second exhaust port) and a gas inlet with a valve (second gas inlet);
A chemical reaction furnace is provided which includes an electric resistance heating furnace surrounding the reaction vessel and disposed in the vacuum-resistant vessel.
本発明の要旨は黒鉛反応容器と、それをかこむ
電気抵抗加熱炉を納めた耐真空容器を別々に排気
および通気できるように構成した点に存し、排気
口及び気体導入口の設け方は種々の様式が可能で
ある。黒鉛反応容器に直接排気口と気体導入口を
設けることが可能である。 The gist of the present invention resides in that a graphite reaction vessel and a vacuum-resistant vessel enclosing an electric resistance heating furnace are constructed so as to be able to be separately evacuated and ventilated, and the exhaust port and gas inlet may be provided in various ways. formats are possible. It is possible to provide an exhaust port and a gas inlet directly to the graphite reaction vessel.
また本発明の化学反応炉は黒鉛製反応容器およ
び、これを包囲する電気抵抗体の耐真空容器空間
内における配置様式に何ら限定されるものでな
く、いわゆる竪型炉及び横型炉を含むものであ
る。黒鉛製反応容器の壁が耐真空容器空間を横方
向に仕切る横型炉では一般に反応物または生成物
の出し入れが容易であるという利点があるが、炉
内のガス流が複雑となる欠点がある。一方、竪型
炉ではガス流を自然対流に乗せることにより、ガ
ス流の乱れを少なくし、還元性金属蒸気を有効に
パージすることが可能である。 Furthermore, the chemical reaction furnace of the present invention is not limited to the manner in which the graphite reaction vessel and the electrical resistor surrounding it are arranged in the vacuum-resistant vessel space, and includes so-called vertical furnaces and horizontal furnaces. Horizontal furnaces in which the walls of the graphite reaction vessel laterally partition the vacuum-resistant vessel space generally have the advantage that reactants or products can be taken in and out easily, but have the disadvantage that the gas flow within the furnace is complicated. On the other hand, in a vertical furnace, by causing the gas flow to undergo natural convection, it is possible to reduce turbulence in the gas flow and effectively purge the reducing metal vapor.
次に図面を参照して本発明を一実施態様につい
て説明する。 Next, one embodiment of the present invention will be described with reference to the drawings.
上述のように本発明の化学反応炉は、耐真空容
器5,電気抵抗加熱炉6,黒鉛製反応容器8を要
部としてなりたつている。 As described above, the chemical reaction furnace of the present invention consists of the vacuum-resistant container 5, the electric resistance heating furnace 6, and the graphite reaction container 8 as the main parts.
耐真空容器5は円筒状の側壁51,天井板5
2,底板53よりなり、側壁51は図示されてい
ないが要所に水冷ジヤケツトが設けてある。耐真
空容器の中央部に円筒状の黒鉛反応容器8が配置
され、それを囲繞するように電気抵抗加熱炉6が
配置されている。電気抵抗加熱炉は既知のもので
あつて、その内側壁に例えばカンタル合金製の発
熱体7を巻きつけ、アスベストなどの耐熱材料を
充填したものであるが、加熱温度を加減するため
にその要所から導線タツプ4を引き出し、これは
図面の右側に見られるように耐真空容器の外側に
気密に引き出され、また図の左側にみられるよう
に熱電対2が挿入され、その導線は同様に耐真空
容器の外側に気密に引き出されている。その取出
部は取り外しできるようにしておくのが有利であ
る。電気抵抗加熱炉の炉体は気密にする必要はな
い。 The vacuum-resistant container 5 has a cylindrical side wall 51 and a ceiling plate 5.
2. It consists of a bottom plate 53, and the side walls 51 are provided with water cooling jackets at key points (not shown). A cylindrical graphite reaction vessel 8 is arranged in the center of the vacuum-resistant vessel, and an electric resistance heating furnace 6 is arranged so as to surround it. Electric resistance heating furnaces are known, in which a heating element 7 made of, for example, Kanthal alloy is wrapped around the inner wall and filled with a heat-resistant material such as asbestos. The conductor tap 4 is pulled out from the place, and this is pulled out airtightly to the outside of the vacuum-proof container as seen on the right side of the drawing, and the thermocouple 2 is inserted as seen on the left side of the figure, and its conductor is similarly pulled out. It is drawn out airtight to the outside of the vacuum-resistant container. Advantageously, the outlet is removable. The furnace body of an electric resistance heating furnace does not need to be airtight.
耐真空容器の中央に配置された黒鉛製の反応容
器8は、その上端の開口部を耐真空容器の天井板
によつて閉鎖的に固定される。ここに「閉鎖的」
という語は、天井板が円筒状の黒鉛反応容器を取
りかこんで固定しているが、そのとりかこみかた
は必ずしも厳密であることを必要としないが、煙
霧質や粉塵の通過を許さないというほどの意味で
ある。 A graphite reaction vessel 8 placed in the center of the vacuum-resistant container has an opening at its upper end closed and fixed by a ceiling plate of the vacuum-resistant container. "Closed" here
This term refers to the ceiling board that surrounds and fixes the cylindrical graphite reaction vessel, and although the surroundings do not necessarily have to be strict, It is the meaning.
耐真空容器5には弁を有して真空系に連通する
第1排気口3と、弁と逆止弁を有して大気に連通
する第1の副排気口3′と、同じく弁を有する第
1気体導入管10が設けられている。第1排気口
3は通常の真空系に連通し、気体導入管10は通
常は窒素,アルゴン等の不活性ガスの蓄圧ソース
(ボンベ)等に連通する。好ましい実施態様では
第1排気口と第1副排気口は切り替え三方弁を備
えた1個の排気管(第1排気管)に構成される。 The vacuum-resistant container 5 has a first exhaust port 3 that has a valve and communicates with the vacuum system, a first sub-exhaust port 3' that has a valve and a check valve and communicates with the atmosphere, and also has a valve. A first gas introduction pipe 10 is provided. The first exhaust port 3 communicates with a normal vacuum system, and the gas introduction pipe 10 normally communicates with a pressure accumulation source (cylinder) of an inert gas such as nitrogen or argon. In a preferred embodiment, the first exhaust port and the first sub-exhaust port are configured into one exhaust pipe (first exhaust pipe) equipped with a three-way switching valve.
第1気体導入管10を底板53に設けるために
は電気抵抗加熱炉6は底板上に直接載置すること
なく、断熱性材料の枕12の上に載置するのが好
ましい。 In order to provide the first gas introduction pipe 10 on the bottom plate 53, it is preferable that the electric resistance heating furnace 6 is placed on a pillow 12 made of a heat insulating material, rather than being placed directly on the bottom plate.
耐真空容器の天井板52の上部には黒鉛製反応
容器の上部開口をかこんで予備室13が設けら
れ、これは弁を有して真空系に連通する第2排気
口1と、大気に連通する第2の副排気口1′と、
開閉できる気密ハツチ14が設けられている。好
ましい態様では第2排気口と第2副排気口は切り
替え三方弁を備えた1個の排気管(第2排気管)
に構成される。第1排気管と第2排気管の真空系
への連通口は統合して一つの共通の真空系へつな
ぐことができる。 A preliminary chamber 13 is provided at the top of the ceiling plate 52 of the vacuum-resistant container, surrounding the upper opening of the graphite reaction container, and this has a second exhaust port 1 having a valve and communicating with the vacuum system, and a second exhaust port 1 that communicates with the atmosphere. a second sub-exhaust port 1';
An airtight hatch 14 that can be opened and closed is provided. In a preferred embodiment, the second exhaust port and the second sub-exhaust port are one exhaust pipe (second exhaust pipe) equipped with a three-way switching valve.
It is composed of The communication ports of the first exhaust pipe and the second exhaust pipe to the vacuum system can be integrated and connected to one common vacuum system.
前記第1気体導入管10は単に耐真空容器内に
開放するより、図示されているように耐真空容器
の内部に貫入延長させて黒鉛製反応容器の底部外
周に近接させ、これを囲繞する環状管に形成し、
該環状管の内側または上側に多数のガス放出小孔
を設けることにより、耐真空容器内に放出された
ガスを耐真空容器内空間に発生する自然対流に乗
せて黒鉛製反応容器8と電気抵抗体7の間隙を上
〓〓〓〓
昇させるのが好ましい。 Rather than simply opening into the vacuum-resistant container, the first gas introduction tube 10 extends into the vacuum-resistant container as shown in the figure, and is brought close to the outer periphery of the bottom of the graphite reaction container. formed into a tube;
By providing a large number of gas release holes inside or on the upper side of the annular tube, the gas released into the vacuum-resistant container is carried by natural convection generated in the vacuum-resistant container space, and is connected to the graphite reaction container 8 and electrical resistance. Above the gap between body 7〓〓〓〓
It is preferable to raise the temperature.
黒鉛製反応容器8の底は上部開口部と同様閉鎖
的に耐真空容器に対し固定される。黒鉛製反応炉
の底には、るつぼ9を支持するための黒鉛製の支
持棒17の侵入を許すための孔81が穿たれてい
る。この支持棒17と孔81の接触は気密ではな
いが可及的に閉鎖的であるのが望ましい。 The bottom of the graphite reaction vessel 8, like the upper opening, is fixed to the vacuum-resistant vessel in a closed manner. A hole 81 is bored in the bottom of the graphite reactor to allow a graphite support rod 17 for supporting the crucible 9 to enter. Although the contact between the support rod 17 and the hole 81 is not airtight, it is desirable that it be as closed as possible.
耐真空容器5の底部には前記の黒鉛製の支持棒
17を気密にかつ摺動可能に支持するために第2
の予備室15が設けられている。この予備室の底
部中央部には前記支持棒の貫通を許す孔が設けら
れ、支持棒を気密に支持するために、例えばO―
リング16を保持することができるように構成さ
れ、一方黒鉛支持棒のこのO―リングと摺動接触
する部分はステンレス鋼の被覆で覆われており、
それより下部はむくのステンレス鋼棒でよい。 A second support rod 17 is provided at the bottom of the vacuum-resistant container 5 to airtightly and slidably support the graphite support rod 17.
A spare room 15 is provided. A hole is provided in the center of the bottom of the preparatory chamber to allow the support rod to pass through.For example, an O-
The graphite support rod is configured to be able to hold the O-ring 16, while the portion of the graphite support rod that makes sliding contact with this O-ring is covered with a stainless steel coating.
The lower part may be a bare stainless steel rod.
この予備室には第2の弁を有する気体導入管1
1が設けられる。これも第1の気体導管と同様
に、不活性気体の蓄圧ソースに連通させられる。
ここから導入される不活性気体は、支持棒17と
黒鉛反応容器の底の孔の間隙を通つて後者の中に
導入され、第1副排気口から容器外に出る。 This preliminary chamber has a gas introduction pipe 1 having a second valve.
1 is provided. Like the first gas conduit, this also communicates with an accumulator source of inert gas.
The inert gas introduced from here is introduced into the latter through the gap between the support rod 17 and the hole in the bottom of the graphite reaction vessel, and exits from the vessel through the first sub-exhaust port.
この第2の予備室は本発明において必須のもの
ではなく、るつぼの支持棒を設けない場合には不
要である。 This second auxiliary chamber is not essential in the present invention, and is unnecessary if a crucible support rod is not provided.
黒鉛反応容器には蓋を施してもよい。この蓋に
は、反応物のスパツタリングの場合の物質の飛散
を反応容器内に留める目的のものであるが、気体
を通す孔を有し、容器に対して容易に取り外しで
きるものである。 The graphite reaction vessel may be provided with a lid. The purpose of this lid is to keep the scattering of substances in the reaction vessel during sputtering of the reactant, but it has a hole through which gas can pass, and can be easily removed from the vessel.
このように構成されているので、上部のハツチ
14を開き、図示されていない駆動機構によつて
支持棒をハツチの外まで上昇させて、るつぼに必
要な反応材料を仕込み、蓋を施し、支持棒を反応
容器内の所望位置まで下降させ、必要ならば黒鉛
反応容器にも蓋を施し、ハツチを閉じて、必要に
応じ、加熱,脱気,通気の操作を行なう。 With this structure, the upper hatch 14 is opened, the support rod is raised to the outside of the hatch by a drive mechanism (not shown), the necessary reaction material is charged into the crucible, the lid is applied, and the support rod is raised to the outside of the hatch. The rod is lowered to the desired position within the reaction vessel, the graphite reaction vessel is also covered if necessary, the hatch is closed, and heating, degassing, and ventilation operations are performed as necessary.
このような装置が当業者が既知の知識をもつて
この図面に基づいて容易に製作し得るものである
から、その設計や部品について詳細に説明する必
要はない。参考までに本発明者らが製作したもの
は、耐真空容器は厚さ6mmのステンレス鋼製で、
その外径730mm,高さ790mm;黒鉛反応容器の外径
220mm,黒鉛壁の厚み15mmであり、外周に水冷ジ
ヤケツトを有する。 There is no need to describe the design or components in detail, as such a device can be easily fabricated based on this drawing with knowledge known to those skilled in the art. For reference, the vacuum-resistant container made by the inventors is made of stainless steel with a thickness of 6 mm.
Its outer diameter 730mm, height 790mm; outer diameter of graphite reaction vessel
220 mm, graphite wall thickness 15 mm, and a water cooling jacket around the outer periphery.
次に上記の反応炉を用いて、炭化ホウ素を合成
した操作例を記す。 Next, an example of an operation in which boron carbide was synthesized using the above-mentioned reactor will be described.
ハツチ14を開き、図示されていない駆動機構
によつて支持棒をハツチの外まで上昇させ、るつ
ぼにホウ酸,マグネシウム,炭素の混合物を仕込
み、蓋をして、支持棒17を反応容器8の中央に
下降させ、黒鉛反応容器にも蓋を施し、ハツチ1
4を閉じた。次に第1気体導入管10,第2気体
導入管11,第1副排気口3′,および第2副排
気口1′の弁を閉じ、第2排気口1および第1排
気口3の弁を開き、その先に設けた真空ポンプに
よつて耐真空容器5および黒鉛反応容器8の内部
を圧力1torr以下の真空にすると共に、電気抵抗
体7に通電してるつぼ内の反応混合物を480℃で
90分間加熱して真空脱水し、駆動機構によつて、
るつぼを予備室まで上昇させた。次に第1排気口
3と第2排気口1の弁を閉じ、第1気体導入管1
0と第2気体導入管11の弁を開き、第1気体導
入管10からは窒素を送入し、第2気体導入管1
1からはアルゴンを送入してから、逆止弁の付い
た第1副排気口3′と第2副排気口1′を開き電気
抵抗体7に通電して、黒鉛製反応容器8の温度を
1050℃とし、次いで駆動機構によつて、るつぼを
反応容器8の中央に下降させ、るつぼ内の反応混
合物を1020℃にし、90分間保持した。窒素ガスは
第1気体導入管10を通り、電気抵抗加熱炉6の
下部でかつ黒鉛製反応容器8の周囲の環状管の内
側に設けられた多数の小孔から導入した。窒素流
は発生する自然対流に乗せ、黒鉛製反応容器と電
気抵抗体の間の間隙を上昇させ、黒鉛製隔壁の気
孔を介して反応容器8の外へ漏出する還元性金属
蒸気と電気抵抗体との接触を可及的に阻止した。
窒素流量は1分あたり耐真空容器5内の空隙体積
の1/100ないし1/10とした。窒素は一部は耐
真空容器内を還流しつつ第1副排気口1′から排
出される。黒鉛中の気孔などを介して電気抵抗加
熱炉に漏出した微量のマグネシウム金属蒸気は第
1気体導入管10から送られる窒素ガスと反応し
て不活性な窒化物となり除去され、電気抵抗体の
劣化はほぼ完全に防止された。また黒鉛製反応容
器も還元性金属蒸気又はホウ酸蒸気によつて侵さ
れることがなかつた。次に支持棒を上昇させて、
反応生成物を予備室に収納し、これを十分放冷し
〓〓〓〓
た後、ハツチ14を開けて反応生成物を取り出し
た。得られたホウ素炭化物中間体は炭化ホウ素と
酸化マグネシウムを主体とし、少量のホウ化マグ
ネシウム,炭素,ホウ酸マグネシウムを含む軽石
状の固体であり、これを塩酸に浸漬して酸化マグ
ネシウムを除去したのち、1800℃にて熱処理した
ところ、高純度の炭化ホウ素粉末を得ることがで
きた。 The hatch 14 is opened, the support rods are raised to the outside of the hatch by a drive mechanism (not shown), a mixture of boric acid, magnesium, and carbon is charged into the crucible, the lid is closed, and the support rods 17 are moved into the reaction vessel 8. Lower it to the center, cover the graphite reaction container, and add hatch 1.
4 closed. Next, the valves of the first gas introduction pipe 10, the second gas introduction pipe 11, the first sub-exhaust port 3', and the second sub-exhaust port 1' are closed, and the valves of the second exhaust port 1 and the first exhaust port 3 are closed. The inside of the vacuum resistant container 5 and the graphite reaction container 8 are evacuated to a pressure of 1 torr or less using the vacuum pump provided at the end of the crucible, and the reaction mixture in the crucible is heated to 480°C by energizing the electric resistor 7. in
After heating for 90 minutes and vacuum dehydration, the drive mechanism
The crucible was raised to the preliminary room. Next, the valves of the first exhaust port 3 and the second exhaust port 1 are closed, and the first gas introduction pipe 1 is closed.
0 and the valves of the second gas introduction pipe 11 are opened, nitrogen is introduced from the first gas introduction pipe 10, and the second gas introduction pipe 1 is supplied with nitrogen.
After introducing argon from 1, the first sub-exhaust port 3' and the second sub-exhaust port 1' equipped with check valves are opened, and electricity is applied to the electric resistor 7 to control the temperature of the graphite reaction vessel 8. of
The crucible was then lowered to the center of the reaction vessel 8 by a drive mechanism, and the reaction mixture in the crucible was brought to 1020°C and held for 90 minutes. Nitrogen gas passed through the first gas introduction pipe 10 and was introduced from a number of small holes provided inside the annular pipe around the graphite reaction vessel 8 at the lower part of the electric resistance heating furnace 6 . The nitrogen flow is carried by the generated natural convection and raises the gap between the graphite reaction vessel and the electrical resistor, causing reducing metal vapor and the electrical resistor to leak out of the reaction vessel 8 through the pores of the graphite partition wall. Contact with them was prevented as much as possible.
The nitrogen flow rate was set to 1/100 to 1/10 of the void volume in the vacuum-resistant container 5 per minute. A portion of the nitrogen is exhausted from the first sub-exhaust port 1' while refluxing inside the vacuum-resistant container. A trace amount of magnesium metal vapor that leaked into the electric resistance heating furnace through pores in the graphite reacts with the nitrogen gas sent from the first gas introduction pipe 10 and becomes inert nitride, which is removed, causing deterioration of the electric resistor. was almost completely prevented. Also, the graphite reaction vessel was not attacked by reducing metal vapor or boric acid vapor. Next, raise the support rod,
Store the reaction product in a preliminary chamber and leave it to cool sufficiently〓〓〓〓
After that, the hatch 14 was opened and the reaction product was taken out. The obtained boron carbide intermediate is a pumice-like solid mainly composed of boron carbide and magnesium oxide, with small amounts of magnesium boride, carbon, and magnesium borate, and after immersing it in hydrochloric acid to remove the magnesium oxide. After heat treatment at 1800℃, highly pure boron carbide powder could be obtained.
本発明は以上のような構成を有する炉であるた
め、炉内雰囲気を良好に制御できると同時に、極
めて耐久性の高い黒鉛製反応容器の使用、および
これと窒素ガスパージとの組合せによる電気抵抗
体の劣化の防止、さらに、加熱容積の有効利用と
熱効率の向上を可能にできる。 Since the present invention is a furnace having the above-mentioned configuration, the atmosphere inside the furnace can be well controlled, and at the same time, an extremely durable graphite reaction vessel is used, and an electric resistor is created by combining this with nitrogen gas purge. In addition, it is possible to prevent deterioration of the heating capacity, and also to make effective use of heating volume and improve thermal efficiency.
図は本発明の装置の概念を示す断面図で本発明
に関わる部分を中心に示したものである。
1:第2排気口、1′:第2副排気口、2:熱
電対、3:第1排気口、3′:第1副排気口、
4:導線タツプ、5:耐真空容器、6:電気抵抗
加熱炉、7:カンタル合金製発熱体(電気抵抗
体)、8:黒鉛製反応容器、9:黒鉛製反応るつ
ぼ、10:第1気体導入口、11:第2気体導入
口、12:断熱材、13:予備室、14:気密ハ
ツチ、15:第2予備室、16:O―リング、1
7:支持棒、51:側壁、52:天井板、53:
底板、81:孔。
〓〓〓〓
The figure is a sectional view showing the concept of the device of the present invention, mainly showing the parts related to the present invention. 1: second exhaust port, 1': second sub-exhaust port, 2: thermocouple, 3: first exhaust port, 3': first sub-exhaust port,
4: Conductor tap, 5: Vacuum resistant container, 6: Electrical resistance heating furnace, 7: Kanthal alloy heating element (electrical resistor), 8: Graphite reaction vessel, 9: Graphite reaction crucible, 10: First gas Inlet, 11: Second gas inlet, 12: Heat insulating material, 13: Preliminary chamber, 14: Airtight hatch, 15: Second preliminary chamber, 16: O-ring, 1
7: Support rod, 51: Side wall, 52: Ceiling board, 53:
Bottom plate, 81: hole. 〓〓〓〓
Claims (1)
体導入口(第1気体導入口)を備えた耐真空容器
と;該耐真空容器内に設けられた黒鉛製の反応容
器であつて、前記耐真空容器と独立に別の弁つき
の排気口(第2排気口)と弁つきの気体導入口
(第2気体導入口)を有するものと;該反応容器
を包囲して前記耐真空容器に配置された電気抵抗
加熱炉とからなる化学反応炉。 2 特許請求の範囲第1項に記載の化学反応炉で
あつて、耐真空容器が弁と逆止弁を有する副排気
口(第1副排気口)を備え、黒鉛製反応容器も弁
と逆止弁を有する副排気口(第2副排気口)を有
することを特徴とするもの。 3 特許請求の範囲第2項に記載の化学反応炉で
あつて、耐真空容器,黒鉛製反応容器,電気抵抗
加熱炉の何れもが垂直円筒形であり;(反応容器
の上端開口部が耐真空容器の天井板に閉鎖的に固
定され;該天井板の上に前記反応容器の開口を包
囲する予備室が設けられその部分に前記第2排気
口と第2副排気口と反応容器に物を出し入れする
ことのできる密閉できるハツチが設けられ;反応
容器の底部が耐真空容器の底部に閉鎖的に固定さ
れ、反応容器の底部が通気手段を有し、耐真空容
器の底部の下側に第2の予備室であつて、前記反
応容器の底部の通気手段に連通し、第2の気体導
入口がその部分に設けられているものを有するこ
とを特徴とする装置。 4 特許請求の範囲第3項に記載の化学反応炉で
あつて、反応容器の底板を貫通して下から反応容
器内に進入する支持棒を有し、該支持棒の貫通部
が通気手段を構成し、該支持棒は前記第2予備室
の底部に摺動可能かつ気密に支持され、上端にる
つぼを支持することのできるものであることを特
徴とする化学反応炉。 5 特許請求の範囲第2〜4項のいずれかに記載
の化学反応炉であつて、第1気体導入管が耐真空
容器の底板に設けられ、該導入管が内部に貫入延
長して黒鉛反応容器の底部を囲繞する環状の管と
なり、その環状部に多数の小孔を有し、導入気体
が黒鉛反応容器と電気抵抗体との間隙に向けて開
放されることを特徴とする装置。 6 特許請求の範囲第2〜5項のいずれかに記載
の化学反応炉であつて、第1排気口と第1副排気
口,第2排気口と第2副排気口とが、それぞれ三
方弁によつて一体化されていることを特徴とする
もの。 7 特許請求の範囲第2〜6項の何れかに記載の
化学反応炉であつて、第1排気口と第2排気口が
共通の真空系に連通することを特徴とするもの。 8 特許請求の範囲第1〜7項の何れかに記載の
化学反応炉であつて、耐真空容器の要部を冷却す
〓〓〓〓
ることができることを特徴とするも。[Claims] 1. A vacuum-resistant container equipped with an exhaust port with a valve (first exhaust port) and a gas inlet with a valve (first gas inlet port); A reaction vessel, which has an exhaust port with a separate valve (second exhaust port) and a gas inlet with a valve (second gas inlet) independently of the vacuum-resistant container; A chemical reaction furnace comprising an electric resistance heating furnace placed in the vacuum-resistant container. 2. The chemical reactor according to claim 1, wherein the vacuum-resistant container is provided with a sub-exhaust port (first sub-exhaust port) having a valve and a check valve, and the graphite reaction container is also provided with a sub-exhaust port having a valve and a check valve. It is characterized by having a sub-exhaust port (second sub-exhaust port) having a stop valve. 3. The chemical reaction furnace according to claim 2, in which the vacuum-resistant container, the graphite reaction container, and the electric resistance heating furnace are all vertically cylindrical; Closely fixed to the ceiling plate of the vacuum vessel; a preliminary chamber surrounding the opening of the reaction vessel is provided on the ceiling plate, and the second exhaust port, the second sub-exhaust port, and the second exhaust port are connected to the reaction vessel. The bottom of the reaction vessel is closed-closely fixed to the bottom of the vacuum-resistant vessel, and the bottom of the reaction vessel has ventilation means; An apparatus characterized in that it has a second preliminary chamber, which communicates with the ventilation means at the bottom of the reaction vessel, and in which a second gas inlet is provided. 3. The chemical reactor according to item 3, wherein the reactor has a support rod that penetrates the bottom plate of the reaction vessel and enters the reaction vessel from below, the penetrating portion of the support rod constitutes a ventilation means, and the support rod A chemical reactor characterized in that the rod is slidably and airtightly supported at the bottom of the second preparatory chamber and can support a crucible at the upper end.5 Claims 2 to 4 In the chemical reactor according to any one of the above, the first gas introduction pipe is provided on the bottom plate of the vacuum-resistant container, and the introduction pipe penetrates and extends into the inside to form an annular pipe surrounding the bottom of the graphite reaction container. , a device characterized in that the annular portion thereof has a large number of small holes, and the introduced gas is released toward the gap between the graphite reaction vessel and the electric resistor. 6. Claims 2 to 5. The chemical reactor according to any one of the above, characterized in that the first exhaust port and the first sub-exhaust port, and the second exhaust port and the second sub-exhaust port are each integrated by a three-way valve. 7. A chemical reactor according to any one of claims 2 to 6, characterized in that the first exhaust port and the second exhaust port communicate with a common vacuum system. 8. A chemical reactor according to any one of claims 1 to 7, which cools a main part of a vacuum-resistant container.
It is also characterized by being able to
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55131600A JPS5756037A (en) | 1980-09-24 | 1980-09-24 | Chemical reactor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55131600A JPS5756037A (en) | 1980-09-24 | 1980-09-24 | Chemical reactor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5756037A JPS5756037A (en) | 1982-04-03 |
| JPS6159780B2 true JPS6159780B2 (en) | 1986-12-18 |
Family
ID=15061845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55131600A Granted JPS5756037A (en) | 1980-09-24 | 1980-09-24 | Chemical reactor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5756037A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58187800U (en) * | 1982-06-08 | 1983-12-13 | 株式会社日本製鋼所 | Target equipment for radioisotope production |
| JP2009256153A (en) * | 2008-04-21 | 2009-11-05 | Bridgestone Corp | Method and apparatus for producing silicon carbide powder |
-
1980
- 1980-09-24 JP JP55131600A patent/JPS5756037A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5756037A (en) | 1982-04-03 |
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