JPS6210779B2 - - Google Patents
Info
- Publication number
- JPS6210779B2 JPS6210779B2 JP52018838A JP1883877A JPS6210779B2 JP S6210779 B2 JPS6210779 B2 JP S6210779B2 JP 52018838 A JP52018838 A JP 52018838A JP 1883877 A JP1883877 A JP 1883877A JP S6210779 B2 JPS6210779 B2 JP S6210779B2
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- holder
- adhesive
- groove
- mounting surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Description
【発明の詳細な説明】
本発明は、ラツプ加工装置において加工物をホ
ルダに接着して取付ける場合の加工物取付け方法
に係り、特に加工物をホルダ取付け面へ高い精度
で均一に接着させて取付ける取付方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for attaching a workpiece to a holder in a lap processing device by adhesively bonding the workpiece to a holder, and particularly for attaching the workpiece to a holder attachment surface by uniformly bonding the workpiece with high precision. Regarding the installation method.
一般にラツプ加工装置は、第1図と第2図に示
すように、ホルダ1の加工物取付け面1′に加工
物2を円周方向に配置した状態で接着せしめ、こ
のホルダ1と共に加工物2を砥粒3が滴下されて
いるラツプ定盤4の上で所定の荷重の重錘5を付
加しながら自転しつつ公転させて加工物表面をラ
ツプ加工するようになつている。 Generally, as shown in FIGS. 1 and 2, in a lap processing device, a workpiece 2 is adhered to a workpiece mounting surface 1' of a holder 1 in a circumferential direction. The surface of the workpiece is lapped by rotating and revolving around the surface of the workpiece while applying a weight 5 with a predetermined load on a lapping surface plate 4 onto which abrasive grains 3 are dripped.
ところで、この場合に加工物は常にホルダ1の
加工物取付け面1′と平行に加工されるので、加
工物2がホルダ1に傾いて接着されると、かえつ
てラツプ加工により加工物2自体の平行度が悪く
なつて寸法のばらつきが大きくなる。 By the way, in this case, the workpiece is always machined parallel to the workpiece mounting surface 1' of the holder 1, so if the workpiece 2 is attached to the holder 1 at an angle, the workpiece 2 itself will be damaged by the lap process. Parallelism deteriorates and dimensional variations increase.
従つて、加工物2をホルダ1に接着するときは
できるだけ傾かないように均一に接着する必要が
ある。 Therefore, when bonding the workpiece 2 to the holder 1, it is necessary to bond the workpiece 2 uniformly and without tilting as much as possible.
また、加工物2をホルダ1に接着するための接
着剤中には不純物や塵埃が混入している場合が
多々あり、このような不純物や塵埃が加工物2と
ホルダ1間に挿入され、平行度が悪くなるた
め、、なるべく接着剤中の不純物や塵埃が両者間
に挿入されないようにする必要がある。 Furthermore, the adhesive used to bond the workpiece 2 to the holder 1 often contains impurities and dust, and these impurities and dust may be inserted between the workpiece 2 and the holder 1, causing the parallel Therefore, it is necessary to prevent impurities and dust in the adhesive from being inserted between the two.
しかしながら、従来の装置においては、例えば
特公昭46−26395号公報、特開昭47−40281号公
報、及び特開昭49−37278号公報等に示されるよ
うに、溝が形成されたホルダ上に接着剤を塗布し
た後、加工物をホルダ上へ載置し、加工物を加圧
して取付けている。 However, in conventional devices, as shown in, for example, Japanese Patent Publication No. 46-26395, Japanese Patent Application Publication No. 47-40281, and Japanese Patent Application Publication No. 49-37278, a groove is formed on a holder. After applying the adhesive, the workpiece is placed on the holder and attached by applying pressure.
従つて、接着剤の溶融状態によつては、接着剤
が邪魔となり、また、接着剤中の不純物や塵埃は
そのまま加工物とホルダ間に残り、両者が必ずし
も平行に取付けられず、加工精度を向上すること
が難しかつた。 Therefore, depending on the molten state of the adhesive, the adhesive may become a nuisance, and impurities and dust in the adhesive may remain between the workpiece and the holder, and the two may not necessarily be installed parallel to each other, impairing machining accuracy. It was difficult to improve.
本発明は、このような従来の欠点に鑑みてなさ
れたものであり、ホルダの加工物取付面に溝を切
つてこの上に加工物を載せ、さらに均一に荷重が
加わるように弾性体を介して重錘を載せ、この状
態で融解した接着剤を溝を介してホルダと加工物
との間にしみ込ませ、重錘の荷重に反比例した一
定の厚さの接着層を形成して加工物をホルダに均
一に接着するようにした加工物取付け方法を提供
するものである。 The present invention has been made in view of these conventional drawbacks, and involves cutting a groove in the workpiece mounting surface of the holder, placing the workpiece on top of the groove, and using an elastic body to apply the load evenly. A weight is placed on the holder, and in this state, the molten adhesive is soaked between the holder and the workpiece through the groove, forming an adhesive layer with a constant thickness that is inversely proportional to the load on the weight, and attaching the workpiece to the workpiece. A method for attaching a workpiece to a holder is provided.
以下に本発明の方法を図面の実施例により説明
する。 The method of the present invention will be explained below with reference to the embodiments of the drawings.
ホルダ1の加工物取付け面1′には第3図に示
されるように細かい格子状の溝6を切る。 A fine grid-like groove 6 is cut in the workpiece mounting surface 1' of the holder 1, as shown in FIG.
そして、第4図に示すようにこの溝6の方を上
に向けてホルダ1を水平に設置する。次に、ホル
ダ1の溝6の上に加工物2を円周方向に配置して
載せ、この加工物2の上に耐熱性のゴム材7を介
して所定の荷重の重錘8を載せる。 Then, as shown in FIG. 4, the holder 1 is installed horizontally with the groove 6 facing upward. Next, the workpiece 2 is placed on the groove 6 of the holder 1 in a circumferential direction, and a weight 8 with a predetermined load is placed on the workpiece 2 via a heat-resistant rubber material 7.
するとゴム材7の加工物2と接する側の面が弾
性的に変形し、加工物2の表面が若干傾いている
ような場合であつてもその表面全域に接するよう
になる。このため、重錘8の荷重が加工物全体に
均一に加えられる。 Then, the surface of the rubber material 7 that is in contact with the workpiece 2 is elastically deformed, and even if the surface of the workpiece 2 is slightly inclined, it comes into contact with the entire surface of the workpiece 2. Therefore, the load of the weight 8 is uniformly applied to the entire workpiece.
こうした後、ホルダ1の中央に粘性の比較的小
さい接着剤の塊9を載置した状態で電気炉等に入
れ、接着剤の融解温度(例えば、100〜150℃)で
一定時間加熱する。 After this, the holder 1 is placed in an electric furnace or the like with a relatively low-viscosity adhesive mass 9 placed in the center thereof, and heated for a certain period of time at the melting temperature of the adhesive (for example, 100 to 150° C.).
すると、融解した接着剤がホルダ1の中央より
溝6に沿つて外周部側に流れて加工物2の下に達
し、次いで第5図に示される如く溝6より加工物
2とホルダ1の加工物取付け面1′との間に毛細
管現象でしみ込んで接着層9′が形成される。 Then, the melted adhesive flows from the center of the holder 1 along the groove 6 to the outer peripheral side and reaches the bottom of the workpiece 2, and then, as shown in FIG. An adhesive layer 9' is formed between the adhesive layer 9' and the attachment surface 1' by capillary action.
この接着層9′の厚さは重錘8の荷重に反比例
するため、重錘8の荷重を選択することにより任
意の所定の値に設定することができる。また重錘
8の荷重は加工物2に均一に加わつているので、
一定の厚さに均一に形成される。そこでこのよう
な接着層9′が形成された後に室温まで冷却され
ると、接着層9′が固化し、この状態で加工物2
がホルダ1に接着して貼り付けられる。 Since the thickness of this adhesive layer 9' is inversely proportional to the load of the weight 8, it can be set to any predetermined value by selecting the load of the weight 8. Also, since the load of the weight 8 is applied uniformly to the workpiece 2,
Formed uniformly to a certain thickness. Therefore, when such an adhesive layer 9' is formed and cooled to room temperature, the adhesive layer 9' solidifies, and the workpiece 2 is attached in this state.
is glued and pasted onto the holder 1.
従つて、本発明によると、加工物2とホルダ1
を接着するための接着剤は、毛細管現象によりし
み込むようにしているので、両者を接着するに際
し、両者間に接着剤中の不純物や塵埃および半溶
融状態の接着剤が挿入されることはない。 Therefore, according to the invention, the workpiece 2 and the holder 1
The adhesive for bonding the two is made to penetrate through capillary action, so when bonding the two, impurities and dust in the adhesive and semi-molten adhesive will not be inserted between the two.
このため、均一な厚さの接着層9′により加工
物2をホルダ1の加工物取付け面1′に均一に取
付けることができ、ラツプ加工の精度が著しく向
上し、且つ前加工で平行度に狂いを生じていたも
のの修正も行なうことができる。 Therefore, the workpiece 2 can be evenly attached to the workpiece attachment surface 1' of the holder 1 by the adhesive layer 9' having a uniform thickness, and the accuracy of lap processing is significantly improved. It is also possible to correct what was causing the error.
なお、溝6の切り方や形状は、第3図に示され
る実施例の他、種々のものが適用可能である。 Note that various ways of cutting and shapes of the grooves 6 can be applied in addition to the embodiment shown in FIG. 3.
第1図と第2図は本発明が適用されるラツプ加
工装置を示す平面図と一部の底面図、第3図はホ
ルダの加工物取付け面を示す平面図、第4図は本
発明の方法の実施例を示す図、第5図は接着層の
形成状態を示す側面図である。
1……ホルダ、1′……加工物取付け面、2…
…加工物、3……砥粒、4……ラツプ定盤、5,
8……重錘、6……溝、7……ゴム材、9……接
着剤の塊、9′……接着層。
1 and 2 are a plan view and a partial bottom view of a lapping device to which the present invention is applied, FIG. 3 is a plan view showing the workpiece mounting surface of the holder, and FIG. FIG. 5 is a side view showing the state of formation of the adhesive layer. 1... Holder, 1'... Workpiece mounting surface, 2...
...Workpiece, 3...Abrasive grain, 4...Lap surface plate, 5,
8... Weight, 6... Groove, 7... Rubber material, 9... Adhesive mass, 9'... Adhesive layer.
Claims (1)
うため、加工物を保持する側の部材であるホルダ
の取付面に加工物を取付ける方法において、 前記取付面の中央部から周辺部にかけて接着剤
を誘導するための溝が形成されたホルダの取付面
に加工物を配載置し、 該配載置した加工物の上に弾性体のシートを載
せ、さらにその上から加圧し、 この状態で、融解し、流動化した接着剤を前記
溝を介して前記ホルダの取付面と加工物の対向面
の間にしみ込ませ、 その後、該接着剤を固化させることにより、 加工物をホルダへ貼り付けることを特徴とする
ホルダへの加工物取付け方法。[Claims] 1. A method for mounting a workpiece on the mounting surface of a holder, which is a member that holds the workpiece, in order to perform rolling and sliding lapping in combination with a lapping surface plate, comprising: Place the workpiece on the mounting surface of the holder, which has a groove formed to guide the adhesive from the center to the periphery, place an elastic sheet on top of the placed workpiece, and then Pressure is applied, and in this state, the melted and fluidized adhesive is infiltrated between the mounting surface of the holder and the opposing surface of the workpiece through the groove, and then the adhesive is solidified, thereby processing. A method for attaching a workpiece to a holder, which is characterized by attaching the object to the holder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1883877A JPS53111594A (en) | 1977-02-23 | 1977-02-23 | Method of mounting workpiece on holder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1883877A JPS53111594A (en) | 1977-02-23 | 1977-02-23 | Method of mounting workpiece on holder |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53111594A JPS53111594A (en) | 1978-09-29 |
| JPS6210779B2 true JPS6210779B2 (en) | 1987-03-09 |
Family
ID=11982690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1883877A Granted JPS53111594A (en) | 1977-02-23 | 1977-02-23 | Method of mounting workpiece on holder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS53111594A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5615973A (en) * | 1979-07-13 | 1981-02-16 | Fujitsu Ltd | Machining method for both faces of tiny thin leaf |
| JPS56166151U (en) * | 1980-05-09 | 1981-12-09 | ||
| JPH0770186B2 (en) * | 1987-10-21 | 1995-07-31 | 株式会社日立製作所 | Method of polishing air bearing surface of slider of magnetic head |
| JPH08329441A (en) * | 1996-06-17 | 1996-12-13 | Hitachi Ltd | Method of polishing air bearing surface of slider of magnetic head |
| US6402594B1 (en) * | 1999-01-18 | 2002-06-11 | Shin-Etsu Handotai Co., Ltd. | Polishing method for wafer and holding plate |
-
1977
- 1977-02-23 JP JP1883877A patent/JPS53111594A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS53111594A (en) | 1978-09-29 |
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