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JPS6211510B2 - - Google Patents
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JPS6211510B2 - - Google Patents

Info

Publication number
JPS6211510B2
JPS6211510B2 JP56144121A JP14412181A JPS6211510B2 JP S6211510 B2 JPS6211510 B2 JP S6211510B2 JP 56144121 A JP56144121 A JP 56144121A JP 14412181 A JP14412181 A JP 14412181A JP S6211510 B2 JPS6211510 B2 JP S6211510B2
Authority
JP
Japan
Prior art keywords
lsi
heat transfer
transfer body
cooling module
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56144121A
Other languages
Japanese (ja)
Other versions
JPS5844754A (en
Inventor
Tsuneaki Tajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP56144121A priority Critical patent/JPS5844754A/en
Publication of JPS5844754A publication Critical patent/JPS5844754A/en
Publication of JPS6211510B2 publication Critical patent/JPS6211510B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00Arrangements for thermal protection or thermal control
    • H10W40/60Securing means for detachable heating or cooling arrangements, e.g. clamps

Landscapes

  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Description

【発明の詳細な説明】 本発明は、LSIパツケージの冷却構造に関す
る。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a cooling structure for an LSI package.

電子装置に広く使用されている大規模集積回路
(以下LSIという)等の素子の温度は、信頼性の
点から一定温度に保つことが重要である。
From the viewpoint of reliability, it is important to maintain the temperature of elements such as large-scale integrated circuits (hereinafter referred to as LSI) that are widely used in electronic devices at a constant temperature.

従来、LSIパツケージの冷却構造は、LSIパツ
ケージ基板のLSI搭載面の裏面側にヒートシンク
を圧接または固着し、これを送風機により強制空
冷する構造であり、LSIから発生する熱は、前記
LSIパツケージ基板を通りヒートシンクに伝導
し、ヒートシンクから空気に伝達されている。
Conventionally, the cooling structure for LSI packages is such that a heat sink is pressure-bonded or fixed to the back side of the LSI mounting surface of the LSI package board, and this is forcedly cooled by a blower.
It is conducted through the LSI package board to the heat sink, and from the heat sink to the air.

一般に、LSIにはその動作保証の点から厳しい
温度制限があり、LSIの温度はある限度以下に押
える必要がある。しかしながら近年の半導体技術
の進展に伴ない、LSIの集積度が飛躍的に増大し
ているため、その発熱量も増大する一方であり、
従来の冷却構造ではヒートシンクから空気までの
熱抵抗が大きく、大形のヒートシンクおよび大形
の送風機を使用してもLSIの温度を制限温度以下
に押えられないというのが現状である。
Generally, LSIs have strict temperature limits in order to guarantee their operation, and the temperature of LSIs must be kept below a certain limit. However, with the recent progress in semiconductor technology, the degree of integration of LSIs has increased dramatically, so the amount of heat generated has only increased.
In conventional cooling structures, the thermal resistance from the heat sink to the air is large, and even with the use of a large heat sink and large blower, the current situation is that the temperature of the LSI cannot be kept below the temperature limit.

本発明の目的は、冷却能力の優れたLSIパツケ
ージの冷却構造を提供することにある。
An object of the present invention is to provide an LSI package cooling structure with excellent cooling capacity.

前記目的を達成するために、本発明によるLSI
パツケージの冷却構造は、基板上に搭載された多
数個のLSIパツケージ等の発熱を拡散冷却する冷
却構造において、前記LSI上にそれぞれ1以上設
けられたバイメタル構造を有する伝熱体と、前記
伝熱体であるNi―Ti合金またはCu―Zn―Al合金
等に近接または接触し内部に液体冷媒を貫流させ
る冷却モジユールを設け、前記LSIの温度が上昇
したときに、前記伝熱体が変形して前記冷却モジ
ユールに圧接するように構成されている。
In order to achieve the above object, an LSI according to the present invention
A package cooling structure is a cooling structure that diffuses and cools the heat generated by a large number of LSI packages mounted on a board. A cooling module is provided that is close to or in contact with a Ni-Ti alloy or Cu-Zn-Al alloy, etc., which is the body, and allows a liquid coolant to flow through the inside, so that when the temperature of the LSI increases, the heat transfer body deforms. The cooling module is configured to be in pressure contact with the cooling module.

上記構成によれば、本発明の目的は完全に達成
される。
According to the above configuration, the object of the present invention is completely achieved.

次に本発明について図面を参照して詳細に説明
する。第1図は本発明による冷却構造の実施例を
示す平面図、第2図は第1図A―A断面図であ
る。
Next, the present invention will be explained in detail with reference to the drawings. FIG. 1 is a plan view showing an embodiment of the cooling structure according to the present invention, and FIG. 2 is a sectional view taken along line AA in FIG.

LSI1はLSIパツケージ基板2に多数搭載さ
れ、このLSI1にはそれぞれ2つの断面U字形の
バイメタル構造を有する伝熱体3,3であるNi
―Ti合金またはCu―Zn―Al合金等が開口部を内
側にして固定されている。伝熱体3と間隙を有し
て冷却モジユール7を固定するように伝熱体3お
よび冷却モジユール7はフレーム8,8で挾持さ
れている。冷却モジユール7には液体冷媒4の供
給口5および排出口6が設けられ、内部を液体冷
媒4が貫流している。
A large number of LSIs 1 are mounted on an LSI package board 2, and each of these LSIs 1 has two Ni heat transfer bodies 3, each having a bimetallic structure with a U-shaped cross section.
-Ti alloy or Cu-Zn-Al alloy, etc. is fixed with the opening facing inside. The heat transfer body 3 and the cooling module 7 are sandwiched between frames 8, 8 so as to fix the cooling module 7 with a gap between the heat transfer body 3 and the heat transfer body 3. The cooling module 7 is provided with a supply port 5 and a discharge port 6 for the liquid refrigerant 4, through which the liquid refrigerant 4 flows.

LSI1から発生した熱は、LSIパツケージ基板
2を通して、周囲の空気に伝達される第1の経路
と、LSI1に固着されたバイメタル伝熱体3から
冷却モジユール7を通して、供給口5から排出口
6へ常時流動している液体冷媒4に伝導される第
2の経路の二通りの経路を通つて放熱される。
Heat generated from the LSI 1 is transmitted through the LSI package board 2 to the surrounding air through a first path, from the bimetal heat transfer body 3 fixed to the LSI 1, through the cooling module 7, and from the supply port 5 to the discharge port 6. The heat is radiated through two paths, the second path being conducted to the liquid refrigerant 4 that is constantly flowing.

しかし、LSIパツケージ基板2から周囲の空気
に伝達される第1の経路の熱抵抗は非常に大きい
ため、大部分の熱は第2の経路、つまりバイメタ
ル伝熱体3から冷却モジユール7を通して放熱さ
れる。
However, since the thermal resistance of the first path, which is transmitted from the LSI package board 2 to the surrounding air, is extremely large, most of the heat is radiated through the second path, that is, from the bimetal heat transfer body 3 through the cooling module 7. Ru.

バイメタル伝熱体3から冷却モジユール7を通
る第2の経路において、LSI1からバイメタル伝
熱体3および冷却モジユール7から液体冷媒4ま
では、ほとんどが良熱伝導体であるので、熱抵抗
は低くおさえることができる。バイメタル伝熱体
3から冷却モジユール7へ低熱抵抗で熱を伝導す
るために伝熱体をバイメタル構造にしてあるの
で、LSI1の温度が高くなると、バイメタル伝熱
体3が変形して冷却モジユール7に圧接されて、
低熱抵抗となり、さらにLSI1の温度の上昇に比
例して、その圧接力が増加し、より低熱抵抗化を
可能にしている。
In the second path from the bimetal heat transfer body 3 to the cooling module 7, most of the paths from the LSI 1 to the bimetal heat transfer body 3 and from the cooling module 7 to the liquid refrigerant 4 are good thermal conductors, so the thermal resistance is kept low. be able to. Since the heat transfer body has a bimetal structure in order to conduct heat from the bimetal heat transfer body 3 to the cooling module 7 with low thermal resistance, when the temperature of the LSI 1 increases, the bimetal heat transfer body 3 deforms and transfers heat to the cooling module 7. being pressed together,
The thermal resistance is low, and the pressure contact force increases in proportion to the rise in the temperature of the LSI 1, making it possible to lower the thermal resistance even further.

以上、発熱体をLSIとして説明したが、他の発
熱体であつても本発明は同様に適用できる。ま
た、伝熱体と冷却モジユールは、はじめから接触
して設けておいてもよい。
Although the heating element has been described above as an LSI, the present invention is similarly applicable to other heating elements. Further, the heat transfer body and the cooling module may be provided in contact with each other from the beginning.

本発明は以上説明したようにLSI等の発熱体の
放熱経路にバイメタル構造を有する伝熱体を採用
することにより、温度上昇とともに放熱経路の熱
抵抗が低くなるので、発熱体の温度を一定に保つ
ことができ、LSIパツケージの冷却能力を向上さ
せることができるという効果がある。
As explained above, the present invention employs a heat transfer body having a bimetal structure in the heat dissipation path of a heat generating element such as an LSI, so that the thermal resistance of the heat dissipation path decreases as the temperature rises, so the temperature of the heat generating element can be kept constant. This has the effect of improving the cooling capacity of the LSI package.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明による冷却構造の実施例を示す
平面図、第2図は第1図A―A断面図である。 1…LSI、2…LSIパツケージ基板、3…バイ
メタル伝熱体、4…液体冷媒、5…供給口、6…
排出口、7…冷却モジユール、8…フレーム。
FIG. 1 is a plan view showing an embodiment of the cooling structure according to the present invention, and FIG. 2 is a sectional view taken along line AA in FIG. 1...LSI, 2...LSI package board, 3...bimetal heat transfer body, 4...liquid refrigerant, 5...supply port, 6...
Discharge port, 7...cooling module, 8...frame.

Claims (1)

【特許請求の範囲】[Claims] 1 基板上に搭載された多数個のLSIパツケージ
等の発熱を拡散冷却する冷却構造において、前記
LSI上にそれぞれ1以上設けられたバイメタル構
造を有する伝熱体と、前記伝熱体に近接または接
触し内部に液体冷媒を貫流させる冷却モジユール
を設け、前記LSIの温度が上昇したときに、前記
伝熱体が変形して前記冷却モジユールに圧接する
ように構成したことを特徴とするLSIパツケージ
の冷却構造。
1 In a cooling structure that diffuses and cools the heat generated by a large number of LSI packages mounted on a board, the above-mentioned
One or more heat transfer bodies each having a bimetallic structure are provided on the LSI, and a cooling module that is close to or in contact with the heat transfer body and allows a liquid coolant to flow through the inside thereof is provided, and when the temperature of the LSI rises, the A cooling structure for an LSI package, characterized in that a heat transfer body is configured to deform and come into pressure contact with the cooling module.
JP56144121A 1981-09-11 1981-09-11 Cooling structure for lsi package Granted JPS5844754A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56144121A JPS5844754A (en) 1981-09-11 1981-09-11 Cooling structure for lsi package

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56144121A JPS5844754A (en) 1981-09-11 1981-09-11 Cooling structure for lsi package

Publications (2)

Publication Number Publication Date
JPS5844754A JPS5844754A (en) 1983-03-15
JPS6211510B2 true JPS6211510B2 (en) 1987-03-12

Family

ID=15354675

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56144121A Granted JPS5844754A (en) 1981-09-11 1981-09-11 Cooling structure for lsi package

Country Status (1)

Country Link
JP (1) JPS5844754A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4851856A (en) * 1988-02-16 1989-07-25 Westinghouse Electric Corp. Flexible diaphragm cooling device for microwave antennas

Also Published As

Publication number Publication date
JPS5844754A (en) 1983-03-15

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