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JPS621291B2 - - Google Patents
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JPS621291B2 - - Google Patents

Info

Publication number
JPS621291B2
JPS621291B2 JP14712981A JP14712981A JPS621291B2 JP S621291 B2 JPS621291 B2 JP S621291B2 JP 14712981 A JP14712981 A JP 14712981A JP 14712981 A JP14712981 A JP 14712981A JP S621291 B2 JPS621291 B2 JP S621291B2
Authority
JP
Japan
Prior art keywords
ultrasonic
inner tank
area
space
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14712981A
Other languages
Japanese (ja)
Other versions
JPS5849434A (en
Inventor
Norihiko Inuzuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP14712981A priority Critical patent/JPS5849434A/en
Publication of JPS5849434A publication Critical patent/JPS5849434A/en
Publication of JPS621291B2 publication Critical patent/JPS621291B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/10Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing sonic or ultrasonic vibrations

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Description

【発明の詳細な説明】 本発明は超音波を利用する電解装置や洗浄装置
などに用いられている二重槽式超音波処理装置に
関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a double tank type ultrasonic treatment device used in electrolysis devices, cleaning devices, etc. that utilize ultrasonic waves.

一般に超音波を利用して腐蝕性の強い溶液中で
被処理物材に電解または洗浄などの表面処理を行
う場合には、超音波振動子に腐蝕性溶液が直接接
触すると、超音波振動子が腐食して超音波振動子
の寿命が短くなるために、超音波処理装置を二重
槽構造とし、外槽に超音波振動子を設置すると共
に、超音波振動子や内外両槽の材料を侵さない溶
液を外槽中に入れ、一方、内槽には超音波が透過
し易くかつ腐蝕性溶液に侵されない材料を用いる
と共に、内槽中に処理液と被処理物材を入れて電
解や洗浄などの超音波処理を行う。
Generally, when performing surface treatment such as electrolysis or cleaning on a material to be treated in a highly corrosive solution using ultrasonic waves, if the corrosive solution comes into direct contact with the ultrasonic vibrator, the ultrasonic vibrator will be damaged. To prevent corrosion and shorten the life of the ultrasonic vibrator, the ultrasonic processing equipment has a double tank structure, and the ultrasonic vibrator is installed in the outer tank. In addition, the inner tank should be made of a material that allows ultrasonic waves to easily pass through and will not be affected by corrosive solutions. Perform ultrasonic treatment such as

しかしながら、従来用いられている二重槽構造
の超音波処理装置では、外槽材料としてステンレ
ス鋼、内槽材料として腐蝕性溶液に侵され難い合
成樹脂やガラスが用いられているが、大容量の槽
を製作する場合には、強度の点から内槽の肉厚を
大きくする必要があり、材料費が高価になる上
に、内槽の肉厚が増加すると、外槽中に設置され
た超音波振動子から伝達される超音波エネルギー
が内槽を通りぬける際に減衰するため、内槽中の
処理液に適正強度の超音波エネルギーを伝達する
ためには、超音波の出力を増加させてやる必要が
あり、不経済であるという点があつた。
However, in conventional ultrasonic treatment equipment with a double tank structure, stainless steel is used as the outer tank material, and synthetic resin or glass, which is not easily attacked by corrosive solutions, is used as the inner tank material. When manufacturing a tank, it is necessary to increase the wall thickness of the inner tank from the viewpoint of strength, which increases the material cost and increases the wall thickness of the inner tank. The ultrasonic energy transmitted from the sonic vibrator is attenuated when passing through the inner tank, so in order to transmit the appropriate intensity of ultrasonic energy to the processing liquid in the inner tank, the output of the ultrasound must be increased. There was a point that it was necessary and uneconomical.

本発明は、内槽に厚さ2mm以下の樹脂を使用
し、100mm2以上の空間部を有し空間部の面積をS1
とし、周囲の非空間部の面積をS2としたとき、
S2/S1<0.5である補強枠を、空間部を超音波が
通るように収納部と超音波振動子との間に内槽と
当接させて配置することによつて、超音波の減衰
を少なくした超音波処理装置を提供する。
The present invention uses resin with a thickness of 2 mm or less for the inner tank, has a space of 100 mm 2 or more, and has an area of the space of S 1
When the area of the surrounding non-space part is S 2 ,
By placing a reinforcing frame with S 2 /S 1 <0.5 in contact with the inner tank between the housing section and the ultrasonic transducer so that the ultrasonic waves pass through the space, the ultrasonic wave can be reduced. An ultrasonic processing device with reduced attenuation is provided.

以下、図にもとずいて説明する。第1図〜第3
図において、1はステンレス又は樹脂ライニング
鋼製の外槽、2は外槽内に配置された超音波振動
子、3は超音波振動子2間に配置された4角筒状
の組立式の補強枠で、超音波振動子2と対向する
超音波通過部3aが網目状に構成されている。超
音波通過部3aの1つの空間部3bの面積は100
mm2以上あり、非空間部3cの面積と空間部3bの
面積との比(非空間部の面積S2/空間部の面積
S1)が0.5以下になつている。。4は厚さ2mm以下
の樹脂で形成された袋状の内槽で、被処理部材
(図示せず)が収納される収納部4aを有し、補
強枠3と当接して補強されている。
The explanation will be given below based on the figures. Figures 1 to 3
In the figure, 1 is an outer tank made of stainless steel or resin-lined steel, 2 is an ultrasonic transducer placed inside the outer tank, and 3 is a rectangular cylindrical assembly type reinforcement placed between the two ultrasonic transducers. The ultrasonic wave passage part 3a facing the ultrasonic transducer 2 is configured in a mesh shape in the frame. The area of one space 3b of the ultrasound passage section 3a is 100
mm 2 or more, and the ratio of the area of the non-space part 3c to the area of the space part 3b (area of the non-space part S 2 / area of the space part
S 1 ) is below 0.5. . Reference numeral 4 denotes a bag-shaped inner tank made of resin with a thickness of 2 mm or less, which has a storage section 4a in which a member to be processed (not shown) is stored, and is reinforced by abutting against the reinforcing frame 3.

処理液5及び非腐蝕液6を注入する時は、液面
用レベルスイツチ7,8を取り付け、電磁バルブ
9,10を操作し、内槽4に処理液5を注入し、
外槽1に非腐蝕液6を注入する。注入の過程にお
いて、フロート11,12により、外槽1および
内槽4の液面位を液面検出器13,14で検出
し、両液面の差を比較器15で比較し、調整信号
をサーボバルブ16に送り電磁バルブ9または1
0の開閉を行つて、外槽1および内槽4の液面位
を同一に保持しながら液注を行う。
When injecting the treatment liquid 5 and the non-corrosive liquid 6, attach the liquid level switches 7 and 8, operate the electromagnetic valves 9 and 10, and inject the treatment liquid 5 into the inner tank 4.
A non-corrosive liquid 6 is poured into the outer tank 1. During the injection process, the floats 11 and 12 detect the liquid level in the outer tank 1 and the inner tank 4 with the liquid level detectors 13 and 14, and the difference between the two liquid levels is compared with the comparator 15, and an adjustment signal is generated. Solenoid valve 9 or 1 sent to servo valve 16
0, and pouring the liquid while maintaining the same liquid level in the outer tank 1 and the inner tank 4.

即ち、内槽4の液面位が外槽1の液面位より高
い場合には、電磁バルブ9が開き電磁バルブ10
が閉じる。一方、外槽1の液面位が内槽4の液面
位より高い場合には電磁バルブ10が開き、電磁
バルブ9が閉じるように液面検出器13,14お
よび比較器15が動作する。従つて、樹脂シート
製の内槽4の外面と内面とは常にほぼ同じ面圧に
保持されるので、大容量の超音波装置を製作する
場合にも従来のように内槽材料の肉厚を大きくす
る必要がなく、薄いシート状の材料を使用するこ
とができる。
That is, when the liquid level in the inner tank 4 is higher than the liquid level in the outer tank 1, the solenoid valve 9 opens and the solenoid valve 10 opens.
closes. On the other hand, when the liquid level in the outer tank 1 is higher than the liquid level in the inner tank 4, the liquid level detectors 13, 14 and the comparator 15 operate so that the electromagnetic valve 10 opens and the electromagnetic valve 9 closes. Therefore, the outer and inner surfaces of the inner tank 4 made of resin sheets are always maintained at approximately the same surface pressure, so even when manufacturing a large-capacity ultrasonic device, it is not necessary to reduce the thickness of the inner tank material as in the past. There is no need to make it large, and a thin sheet of material can be used.

補強枠3は例えば、網目構造に組立てられたス
テンレスが適している。網目の大きさと超音波の
透過率の間には相関関係があり、例えば28KHz
の超音波振動における網目の大きさと超音波の透
過率の関係は第4図に示す通りである。即ち、直
径1mmのステンレス線を使用した網の場合には、
網目の大きさが5mm以下では超音波の透過率は50
%以下になる。一方、網目の大きさが10mm以上に
なると、超音波は網目の影響をほとんど受けずほ
ぼ100%の透過率を示す。従つて、網目の空間の
面積は100mm2以上であることが望ましい。網目の
空間の周囲に存在する非空間部の面積が大きくな
るに従つて超音波エネルギーの減衰が大きくなる
が、上記同様に28KHzの超音波振動において、
直径1mmのステンレス線を用いた場合、第5図に
示すように、網目の非空間部の面積と、網目の非
空間部が取り囲む空間部の面積との比(非空間部
の面積S2/空間部の面積S1)が0.5以下の場合に
は、超音波エネルギーの減衰は、非常にわずかで
ある。
For example, stainless steel assembled into a mesh structure is suitable for the reinforcing frame 3. There is a correlation between the size of the mesh and the transmittance of ultrasound, for example at 28KHz.
The relationship between the mesh size and the ultrasonic transmittance in ultrasonic vibration is shown in FIG. In other words, in the case of a mesh using stainless steel wire with a diameter of 1 mm,
If the mesh size is 5 mm or less, the ultrasonic transmittance is 50
% or less. On the other hand, when the mesh size is 10 mm or more, ultrasonic waves are hardly affected by the mesh and exhibit almost 100% transmittance. Therefore, it is desirable that the area of the mesh space is 100 mm 2 or more. As the area of the non-space around the mesh space increases, the attenuation of ultrasonic energy increases, but as above, in 28KHz ultrasonic vibration,
When stainless steel wire with a diameter of 1 mm is used, as shown in Figure 5, the ratio of the area of the non-space part of the mesh to the area of the space surrounded by the non-space part of the mesh (area of the non-space part S 2 / When the area S 1 ) of the space is less than 0.5, the attenuation of the ultrasonic energy is very small.

また、網目の空間の形状は多角形、円またはこ
れらの組合せによる種々の形状において超音波の
透過率に差が認められない。
In addition, no difference is observed in the transmittance of ultrasonic waves when the shape of the mesh space is polygonal, circular, or a combination thereof.

なお、内槽の材料としては、ポリエステル、ポ
リエチレン、ポリプロピレン、ポリスチレン、テ
フロン、ナイロン、テトロン、ポリビニル系樹脂
などの耐薬品性に優れた樹脂が適している。
Note that resins with excellent chemical resistance such as polyester, polyethylene, polypropylene, polystyrene, Teflon, nylon, Tetron, and polyvinyl resins are suitable as materials for the inner tank.

本発明による超音波処理装置は、内槽材料とし
て薄い樹脂板を用いることができるので、内槽材
料による超音波エネルギーの減衰も極めて少な
く、超音波振動子の出力を軽減することもでき、
内槽材料の材料費低減とあわせて、極めて経済性
に優れている。
Since the ultrasonic processing apparatus according to the present invention can use a thin resin plate as the inner tank material, the attenuation of ultrasonic energy by the inner tank material is extremely small, and the output of the ultrasonic vibrator can be reduced.
In addition to reducing the material cost of the inner tank material, it is extremely economical.

また、内槽による超音波エネルギーの減衰がほ
とんどないために、内槽中の処理液中に直接超音
波振動子を設置した場合とほぼ同程度の強力な超
音波エネルギーが得られ、電気めつきなどの超音
波電解処理や超音波洗浄の高速処理が可能とな
る。
In addition, since there is almost no attenuation of ultrasonic energy by the inner tank, it is possible to obtain almost the same amount of strong ultrasonic energy as when an ultrasonic transducer is placed directly into the processing liquid in the inner tank. This enables high-speed processing such as ultrasonic electrolytic treatment and ultrasonic cleaning.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実施例の断面図、第2図
は第1図の−線における断面図、第3図は補
強枠の正面図、第4図は補強枠の網目の大きさと
超音波の透過率の関係を示す説明図、第5図は網
目の空間の面積に対する非空間部の面積の比と超
音波の透過率との関係を示す説明図である。図
中、1は外槽、2は超音波振動子、3は補強枠、
3aは超音波通過部、3bは空間部、3cは非空
間部、4は内槽、4aは収納部である。なお、各
図中、同一符号は同一又は相当部分を示す。
Fig. 1 is a cross-sectional view of one embodiment of the present invention, Fig. 2 is a cross-sectional view taken along the - line in Fig. 1, Fig. 3 is a front view of the reinforcing frame, and Fig. 4 shows the size and size of the mesh of the reinforcing frame. FIG. 5 is an explanatory diagram showing the relationship between the ultrasound transmittance and the ratio of the area of the non-space portion to the area of the mesh space and the ultrasound transmittance. In the figure, 1 is an outer tank, 2 is an ultrasonic vibrator, 3 is a reinforcing frame,
3a is an ultrasonic wave passage part, 3b is a space part, 3c is a non-space part, 4 is an inner tank, and 4a is a storage part. In each figure, the same reference numerals indicate the same or equivalent parts.

Claims (1)

【特許請求の範囲】[Claims] 1 非腐蝕性液が充填される外槽内に、処理液が
充填され被処理部材が収納される収納部を有する
厚さ2mm以下の樹脂によつて形成された内槽を配
置し、上記両槽間に超音波振動子を配置し、100
mm2以上の空間部を複数個有し上記空間部の面積を
S1とし、周囲の非空間部の面積をS2としたとき、
S2/S1<0.5である補強枠を、上記空間部を超音
波が通るように上記収納部と上記超音波振動子と
の間に上記内槽と当接させて配置したことを特徴
とする超音波処理装置。
1. An inner tank made of resin with a thickness of 2 mm or less and having a housing section filled with a processing solution and containing a member to be processed is arranged in an outer tank filled with a non-corrosive liquid, and both of the above-mentioned An ultrasonic transducer is placed between the tanks, and 100
It has multiple spaces of mm 2 or more, and the area of the above spaces is
When S 1 and the area of the surrounding non-space part are S 2 ,
A reinforcing frame having S 2 /S 1 <0.5 is disposed between the storage section and the ultrasonic vibrator in contact with the inner tank so that the ultrasonic waves pass through the space. Ultrasonic treatment equipment.
JP14712981A 1981-09-17 1981-09-17 Ultrasonic treating device Granted JPS5849434A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14712981A JPS5849434A (en) 1981-09-17 1981-09-17 Ultrasonic treating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14712981A JPS5849434A (en) 1981-09-17 1981-09-17 Ultrasonic treating device

Publications (2)

Publication Number Publication Date
JPS5849434A JPS5849434A (en) 1983-03-23
JPS621291B2 true JPS621291B2 (en) 1987-01-12

Family

ID=15423208

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14712981A Granted JPS5849434A (en) 1981-09-17 1981-09-17 Ultrasonic treating device

Country Status (1)

Country Link
JP (1) JPS5849434A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5060365B2 (en) * 2008-03-31 2012-10-31 株式会社東芝 Plating apparatus, plating method, and electronic device manufacturing method
CN103572344B (en) * 2013-09-29 2016-03-09 杭州电子科技大学 Ultrasonic precision electroplanting device

Also Published As

Publication number Publication date
JPS5849434A (en) 1983-03-23

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