JPS6222830B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a conveying device, and particularly to a device for conveying objects in a dust-free and sterile environment.

Traditionally, electronic industry, precision industry, pharmaceutical industry, hospitals,
In the food industry, etc., when items need to be handled in a dust-free and sterile environment, pass boxes are used to transfer items between rooms or between rooms with different levels of cleanliness. That is, clean gas with a high wind speed flows inside the pass box, thereby promoting cleanup. but,
Although this method could block the movement of dust between rooms, it was not possible to keep things clean all the time. Additionally, when storing items, it was necessary to use a special clean room.

In addition, especially in semiconductor manufacturing processes that require handling in a clean state, semiconductor wafers are transported and stored by storing them in containers in a clean room and then sealing the containers with tape, etc. Therefore, it was very time-consuming and became an obstacle to automation. In addition, small amounts of dust were dispersed inside the clean room by people and machines, causing a reduction in product yield.

Therefore, it has been desired to always maintain a constant level of cleanliness within the transport path regardless of the cleanliness of the room, and to maintain a dust-free and sterile atmosphere that is always separated from people and machines.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a device for transporting objects while always maintaining them in a dust-free and sterile environment.

That is, according to the present invention, there is provided a duct-like conveyance path, a conveyance chamber housed in the conveyance path and having a filter at the top and a discharge port in the floor, and a conveyance chamber provided in the conveyance path and having the filter in the conveyance chamber. A conveyor comprising a blower that sends air through the outlet and suctions air through the discharge port, a cart that runs within the conveyor chamber driven by a motor, and a conductor provided at the bottom of the conveyor chamber that supplies electricity to the motor from the outside. Equipment is provided.

Hereinafter, one embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a sectional view of the conveying device of the present invention. A conveyance chamber 2 is provided within the duct-like conveyance path 1, and a cart 3 carrying an object 4 to be conveyed runs within this conveyance path 2. A blower 5 is further installed within the conveyance path 1, and air is circulated within the conveyance path 1 by this blower 5. That is, the air pumped from the blower 5 is purified through the filter 6, circulates within the transfer chamber 2, and is returned to the blower 5 through the exhaust port 7 provided at the bottom of the transfer chamber 2. The trolley 3 moves within the transport chamber 2 and transports the object 4 to be transported. Power for the motor 9 that drives the wheels 8 of the truck 3 can be taken in from an external power source via a conductor 10. The conductor 10 is usually made of copper or other copper alloy, and the current collector (not shown) on the bottom of the truck which takes in electricity from the conductor 11 is usually made of sintered carbon. When the trolley 3 travels, dust of worn materials mainly composed of carbon is generated due to the friction between the conductor 11 and the current collector, and dust of worn materials is generated due to the friction between the wheels and the floor surface. However, since air is always sent from top to bottom by the blower 5, dust does not fly up, and the air outlet 7 on the floor of the transfer chamber 2
is discharged from. The dust circulates in the conveyance path from bottom to top and is captured by the filter 6, and clean air flows into the conveyance chamber 2 again. According to the present invention, dust is not discharged outside the conveyance path, so it is particularly effective when the conveyance device needs to be installed in a clean room where cleanliness is required.

While the trolley 3 moves within the transport chamber 2, clean air always circulates within the transport chamber 2, and the objects to be transported on the trolley 3 are not contaminated.

FIG. 2 is a schematic diagram of the conveyance device of the present invention installed in a factory. The conveyance path 1 crosses the passage 11,
They are located between each room.

As explained above, according to the transport device of the present invention, it is possible to transport objects to any location in a clean state at all times without being affected by the external atmosphere, thus improving product reliability and yield. This is promising, and it is also possible to downsize the clean room and automate transportation.

[Brief explanation of the drawing]

FIG. 1 is a sectional view of a conveying device according to an embodiment of the present invention, and FIG. 2 is a schematic diagram of the conveying device of the present invention arranged in a factory. 1...Transport path, 2...Transfer room, 3...Dolly, 4
...Object to be transported, 5...Blower, 6...Filter,
7...Discharge port, 8...Wheel, 9...Motor, 1
0...Conductor.

Claims (1)

[Claims] 1 A duct-shaped conveyance path, a conveyance chamber housed in the conveyance path and having a filter at the top and a discharge port at the floor; A conveyance device comprising a blower that sucks air through an exhaust port, a cart that is driven by a motor to travel within the conveyance chamber, and a conductor provided at the bottom of the conveyance chamber that supplies electricity to the motor from the outside.