JPS6222829B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a conveying device, and particularly to a device for conveying objects in a dust-free and sterile environment.

Traditionally, electronic industry, precision industry, pharmaceutical industry, hospitals,
In the food industry, etc., when items need to be handled in a dust-free and sterile environment, pass boxes are used to transfer items between rooms or between rooms with different levels of cleanliness. That is, clean gas with a high wind speed flows inside the pass box, thereby promoting cleanup. but,
Although this method could block the movement of dust between rooms, it was not possible to keep things clean all the time. Additionally, when storing items, it was necessary to use a special clean room.

In addition, especially in semiconductor manufacturing processes that require handling in a clean state, semiconductor wafers are transported and stored by storing them in containers in a clean room and then sealing the containers with tape, etc. Therefore, it was very time-consuming and became an obstacle to automation. In addition, small amounts of dust were dispersed inside the clean room by people and machines, causing a reduction in product yield.

Therefore, it has been desired to always maintain a constant level of cleanliness within the transport path regardless of the cleanliness of the room, and to maintain a dust-free and sterile atmosphere that is always separated from people and machines.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a device for transporting objects while always maintaining them in a dust-free and sterile environment.

That is, according to the present invention, there is provided a cylinder including an upper air intake port, a bottom air outlet port, a blower for taking air from the outside through the air intake port, and a filter for cleaning the air taken in by the blower. There is provided an apparatus for transporting semiconductor components or devices, which comprises a transport path and a cart that runs within the transport chamber, which is separated from the air intake port through the filter.

An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a sectional view of the conveying device of the present invention. An air intake port 2 and a blower 3 are provided at the top of the conveyance path 1 for taking in air from the outside, and an air outlet 4 for discharging air to the outside is provided at the bottom. Air taken in from the outside by the blower 3 is purified by passing through the filter 5 and enters the transfer chamber 6. The trolley 7 moves within the transport chamber 6 and transports the object 8 to be transported. Power for the motor 10 that drives the wheels 9 of the truck 7 can be taken in from an external power source via a conductor 11.
Alternatively, it is also possible to install a battery on the trolley 7 and use its power source. In the former case, conductor 1
1 is usually made of copper alloy or other copper alloy, and a current collector (not shown), which is located on the bottom of the truck and takes in electricity from this conductor 11, is usually made of sintered carbon. When the trolley 7 travels, dust of worn materials mainly composed of carbon is generated due to the friction between the conductor 11 and the current collector, and dust of worn materials is generated due to the friction between the wheels and the floor surface. However, since air is always sent from top to bottom by the blower 3, the dust does not fly up and is discharged outside from the air outlet 4 on the floor of the transfer chamber 6, leaving the transfer chamber empty. kept in dust.

While the carriage 7 moves within the transfer chamber 6, clean air always circulates within the transfer chamber 6, and the objects to be transferred on the carriage 7 are not contaminated.

FIG. 2 is a schematic diagram of the conveyance device of the present invention installed in a factory. The conveyance path 1 crosses the passage 12,
They are located between each room.

As explained above, according to the transport device of the present invention, it is possible to transport objects to any location in a clean state at all times without being affected by the external atmosphere, thus improving product reliability and yield. This is promising, and it is also possible to downsize the clean room and automate transportation.

[Brief explanation of the drawing]

FIG. 1 is a sectional view of a conveying device according to an embodiment of the present invention, and FIG. 2 is a schematic diagram of the conveying device of the present invention arranged in a factory. 1... Conveyance path, 2... Air intake port, 3... Blower, 4... Air exhaust port, 5... Filter, 6...
Transfer chamber, 7... Cart, 8... Object to be transported, 9... Wheels, 10... Motor, 11... Conductor, 12...
aisle.

Claims (1)

[Claims] 1. A cylindrical conveyance path comprising an upper air intake port, a bottom air outlet port, a blower for taking in air from the outside through the air intake port, and a filter for cleaning the air taken in by the blower; A transporting device for semiconductor components or devices, which comprises a carriage running in a transporting chamber separated from the air intake port via the filter in a transporting path.