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JPS6235399B2 - - Google Patents
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JPS6235399B2 - - Google Patents

Info

Publication number
JPS6235399B2
JPS6235399B2 JP56124597A JP12459781A JPS6235399B2 JP S6235399 B2 JPS6235399 B2 JP S6235399B2 JP 56124597 A JP56124597 A JP 56124597A JP 12459781 A JP12459781 A JP 12459781A JP S6235399 B2 JPS6235399 B2 JP S6235399B2
Authority
JP
Japan
Prior art keywords
substrate
glaze
glass
top cover
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56124597A
Other languages
Japanese (ja)
Other versions
JPS5825967A (en
Inventor
Nobuo Kamehara
Makoto Katsuta
Koichi Niwa
Kyohei Murakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP12459781A priority Critical patent/JPS5825967A/en
Publication of JPS5825967A publication Critical patent/JPS5825967A/en
Publication of JPS6235399B2 publication Critical patent/JPS6235399B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1645Manufacturing processes thin film formation thin film formation by spincoating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1623Manufacturing processes bonding and adhesion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Description

【発明の詳細な説明】 本発明はオンデマンド方式のインクジエツトプ
リンタ用ヘツドの製造方法、特に微細なインク通
路を多数もつマルチノズルヘツドの製造方法に関
する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of manufacturing a head for an on-demand type inkjet printer, and more particularly to a method of manufacturing a multi-nozzle head having a large number of fine ink passages.

インクジエツトプリンタ用ヘツドはインク通路
を設けた基板と圧電素子からの信号を伝える役目
をする上蓋とを貼り合わせて一体に形成せしめた
ものであるが、その概略構造は第1図に示すとお
りのものである。ここで第1図aは上蓋を、第1
図bは基板をそれぞれ示したものであるが、上蓋
1は適度な機械的強度と耐水性が要求されるので
通常アルミナ、ムライト、セラミツクまたはガラ
ス・セラミツクなどの材料を使用して製作され、
該上蓋1には圧電素子5が装着される。一方基板
はベース基板2の上面にグレーズ層3を形成した
二重構造とし、ベース基板2は適度の機械的強度
と耐水性をそなえ、かつ寸法安定性が良好で、グ
レーズ材料との密着性の優れた材料が好ましく、
一般にはガラス・セラミツクまたはガラス・セラ
ミツクなどが使用され、またグレーズ材料として
は酸化鉛(PbO)系ガラスが主として使用され
る。かかる基板にインク通路4をエツチングによ
り形成し、しかる後エポキシ、アクリルなどの比
較的低温で使用する接着剤あるいは低融点ガラス
ペーストのように溶融接着するものを用いて上蓋
と基板を接着してインクジエツトプリンタ用ヘツ
ドは製作されるものである。
The head for an inkjet printer is formed by bonding together a substrate with ink passages and a top cover that serves to transmit signals from a piezoelectric element, and its general structure is as shown in Figure 1. It is something. Here, Fig. 1 a shows the top cover and the first
Figure b shows the respective substrates, and since the upper cover 1 is required to have appropriate mechanical strength and water resistance, it is usually manufactured using materials such as alumina, mullite, ceramic, or glass/ceramic.
A piezoelectric element 5 is attached to the upper lid 1. On the other hand, the substrate has a double structure with a glaze layer 3 formed on the top surface of the base substrate 2, and the base substrate 2 has appropriate mechanical strength and water resistance, has good dimensional stability, and has good adhesion with the glaze material. Good materials are preferred;
Generally, glass/ceramic or glass/ceramic is used, and lead oxide (PbO) based glass is mainly used as the glaze material. Ink passages 4 are formed on the substrate by etching, and then the top cover and the substrate are bonded using an adhesive that is used at a relatively low temperature such as epoxy or acrylic, or a material that melts and bonds such as a low-melting point glass paste. Heads for jet printers are manufactured.

しかして上蓋と基板の接着に際しては、従来、
例えば第2図に示すように上蓋1の全面に接着剤
を塗布しa、これを基板に貼り合せるb方法、ま
たは第3図に示すように基板のインク通路4以外
の場所に接着剤6を塗布し、これを上蓋1と貼り
合せる方法が用いられている。しかしながら、第
2図に示す方法では加圧接着に際して接着剤がイ
ンク通路に流れまたはたれ込み、目詰りを起こし
易いという欠点がありb、特にインク通路は通
常、幅50〜60μm、深さ50μm程度の小さいもの
であるために、わずかの流れ込みでも目詰りを起
こす危険性があり、その対策が望まれているとこ
ろである。また、第3図に示す方法は前記欠点を
解決すべくインク通路の真上に接着剤が存在しな
いような接着方法を実現しようとしたものである
が、インク通路を形成する突起部分の幅が通常60
〜70μm程度と非常に狭小なものであるため、こ
の部分にのみ接着剤を塗布することは技術的に非
常に困難となつている。なお、第2図と第3図
中、第1図と同符号のものは同じ部分を表わす
が、インク通路4はベース基板2に設けたグレー
ズ層3部分に形成されるものであることが示され
ている。
However, when bonding the top cover and the substrate, conventionally,
For example, as shown in FIG. 2, there is a method (a) in which adhesive is applied to the entire surface of the upper lid 1 and the adhesive is bonded to the substrate (b), or as shown in FIG. A method is used in which the coating is applied and then bonded to the upper lid 1. However, the method shown in Figure 2 has the disadvantage that the adhesive flows or drips into the ink channel during pressure bonding, easily causing clogging. Since they are small, there is a risk that even a small amount of flow may cause clogging, and countermeasures are desired. In addition, the method shown in FIG. 3 is an attempt to solve the above-mentioned drawback by realizing an adhesive method in which no adhesive is present directly above the ink passage, but the width of the protrusion forming the ink passage is large. Usually 60
Since the area is very narrow, about 70 μm, it is technically very difficult to apply adhesive only to this area. Note that in FIGS. 2 and 3, the same reference numerals as in FIG. has been done.

本発明の目的は上記課題を解決するにあり、イ
ンク目詰りを起こすことなくグレーズ基板と上蓋
とを接着し、印字性能の優れたマルチノズルヘツ
ドを提供することにある。
SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems, and to provide a multi-nozzle head with excellent printing performance by bonding a glaze substrate and a top cover without causing ink clogging.

以下本発明の実施例を添付図面にもとづいて説
明する。
Embodiments of the present invention will be described below based on the accompanying drawings.

第4図は本発明にかかるグレーズ基板と上蓋の
接着方法をその工程にしたがつて示したものであ
るが、本実施例においては上蓋にはガラスを、ベ
ース基板にはセラミツを用い、またグレーズ材料
として下記に示す組成のものを用いた。
FIG. 4 shows the method of bonding a glazed substrate and a top lid according to the process according to the present invention. In this example, glass was used for the top lid, ceramic was used for the base substrate, and the glaze was Materials having the composition shown below were used.

重量比 PbO−B2O3−SiO2ガラス 100 エチルセルローズ 2 テルビネオール 30 先ずベース基板4を用意し(a)、その上に上記組
成の酸化鉛(PbO)系ガラスを塗布し、それを
860℃で30分間焼成してグレーズ層13を形成し
(b)、次いでフツ化水素−硫酸(HF−H2SO4)系エ
ツチング液によりエツチングして前記した寸法の
微細なインク通路14を形成する(c)。一方きわめ
て平滑なガラス板17上に低融点ガラスペースト
16をスピンコートまたはスプレー法などで塗布
したものを用意し(d)、この面に前記要領で製作し
たグレーズ基板を押しつける(e)。かかる方法によ
りグレーズ基板には接着剤が反転され(f)、これに
別途用意した上蓋13を押し付け、加圧しながら
400〜600℃で焼成して接着は完了する(g)。かかる
接着方法によりインク通路の真上には接着剤が存
在しないため、接着剤の流れ込みによる目詰りは
回避できるものである。
Weight ratio PbO−B 2 O 3 −SiO 2 Glass 100 Ethyl cellulose 2 Tervineol 30 First, a base substrate 4 is prepared (a), and lead oxide (PbO) glass having the above composition is applied thereon.
The glaze layer 13 is formed by baking at 860°C for 30 minutes.
(b) Next, etching is performed using a hydrogen fluoride-sulfuric acid (HF-H 2 SO 4 ) based etching solution to form fine ink passages 14 having the dimensions described above (c). On the other hand, a very smooth glass plate 17 is coated with a low melting point glass paste 16 by spin coating or spraying (d), and the glaze substrate produced in the above manner is pressed onto this surface (e). By this method, the adhesive is inverted onto the glazed substrate (f), and a separately prepared upper cover 13 is pressed onto it, and while applying pressure,
The bonding is completed by baking at 400-600℃ (g). With this bonding method, no adhesive is present directly above the ink passage, so clogging due to adhesive flowing in can be avoided.

本発明は、以上説明したように接着に起因する
インク通路の目詰りを防止する効果があり、しか
もその方法は何ら技術的な困難性を有せず容易に
行うことが可能であり、かかる方法により印字性
能の優れた、信頼性の高いインクジエツトプリン
タ用ヘツドの供給が可能となるものである。
As explained above, the present invention has the effect of preventing clogging of ink passages caused by adhesion, and the method thereof does not involve any technical difficulty and can be easily carried out. This makes it possible to supply a highly reliable inkjet printer head with excellent printing performance.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はインクジエツトヘツドの構造図、第2
図と第3図は従来技術のグレーズ基板と上蓋の接
着方法を示す図、第4図は本発明にかかるグレー
ズ基板と上蓋の接着方法を示す図である。 1,11……上蓋、2,12……ベース基板、
3,13……グレーズ層、14……インク通路、
5……圧電素子、6,16……接着剤、17……
ガラス板。
Figure 1 is a structural diagram of the inkjet head, Figure 2 is a structural diagram of the inkjet head.
3 and 3 are diagrams showing a method of bonding a glaze substrate and a top cover according to the prior art, and FIG. 4 is a diagram showing a method of bonding a glaze substrate and a top cover according to the present invention. 1, 11... Top lid, 2, 12... Base board,
3, 13... glaze layer, 14... ink passage,
5... Piezoelectric element, 6, 16... Adhesive, 17...
glass plate.

Claims (1)

【特許請求の範囲】 1 ガラス、セラミツクまたはガラス・セラミツ
クよりなるベース基板上にグレーズ層を形成する
工程と、 該グレーズ層のエツチングによりインク通路を
形成し、グレーズ基板とする工程と、 低融点ガラスペーストが塗布された平滑な板上
に該グレーズ基板を押し付け、上記低融点ガラス
ペーストを、該インク通路部には存在しないよう
に、該グレーズ基板に転写する工程と、 セラミツクまたはガラス・セラミツクよりなる
上蓋を上記グレーズ基板に押し付け、加圧しなが
ら焼成して上蓋とグレーズ基板とを接着する工程
を有することを特徴とするマルチノズルヘツドの
製造方法。
[Scope of Claims] 1. A step of forming a glaze layer on a base substrate made of glass, ceramic, or glass-ceramic; A step of etching the glaze layer to form ink passages to form a glaze substrate; and a step of forming a glaze substrate using low melting point glass. pressing the glaze substrate onto a smooth plate coated with paste and transferring the low melting point glass paste onto the glaze substrate so that it does not exist in the ink passage; A method for manufacturing a multi-nozzle head, comprising the steps of pressing the top cover against the glaze substrate and baking the top cover while applying pressure to bond the top cover and the glaze substrate.
JP12459781A 1981-08-08 1981-08-08 Manufacture of multi-nozzle head Granted JPS5825967A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12459781A JPS5825967A (en) 1981-08-08 1981-08-08 Manufacture of multi-nozzle head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12459781A JPS5825967A (en) 1981-08-08 1981-08-08 Manufacture of multi-nozzle head

Publications (2)

Publication Number Publication Date
JPS5825967A JPS5825967A (en) 1983-02-16
JPS6235399B2 true JPS6235399B2 (en) 1987-08-01

Family

ID=14889386

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12459781A Granted JPS5825967A (en) 1981-08-08 1981-08-08 Manufacture of multi-nozzle head

Country Status (1)

Country Link
JP (1) JPS5825967A (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5053468A (en) * 1973-09-12 1975-05-12
JPS585785B2 (en) * 1978-05-10 1983-02-01 株式会社日立製作所 Inkjet recording nozzle head
JPS5569474A (en) * 1978-11-17 1980-05-26 Seiko Epson Corp Ink jet recording head
JPS5586768A (en) * 1978-12-23 1980-06-30 Seiko Epson Corp Ink jet recording head
JPS6052951B2 (en) * 1980-11-28 1985-11-22 富士通株式会社 Multi-nozzle head manufacturing method

Also Published As

Publication number Publication date
JPS5825967A (en) 1983-02-16

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