JPS6239559B2 - - Google Patents
Info
- Publication number
- JPS6239559B2 JPS6239559B2 JP20022382A JP20022382A JPS6239559B2 JP S6239559 B2 JPS6239559 B2 JP S6239559B2 JP 20022382 A JP20022382 A JP 20022382A JP 20022382 A JP20022382 A JP 20022382A JP S6239559 B2 JPS6239559 B2 JP S6239559B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- laser tube
- output
- solenoid valve
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003068 static effect Effects 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims 1
- 230000007423 decrease Effects 0.000 description 18
- 238000001514 detection method Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 2
- 238000010891 electric arc Methods 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】
本発明はイオンレーザ装置に関し、特にレーザ
管封入ガスの減少を補給するようにしたイオンレ
ーザ装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an ion laser device, and more particularly to an ion laser device configured to replenish the amount of gas enclosed in a laser tube.
従来、この種のイオンレーザ装置はレーザ管内
の封入ガスをイオン化するために大電流のアーク
放電をさせる。そのため、ガスクリーンアツプ作
用によりレーザ管内のガスが減少する。封入ガス
が減少するとレーザ管電圧が減少し、それととも
に出力の減少が起こり、さらにガスの減少が進む
と正常なガス放電が行なわれなくなり管の動作が
停止して使用不能となる。 Conventionally, this type of ion laser device uses a large current arc discharge to ionize the gas sealed within the laser tube. Therefore, the gas inside the laser tube decreases due to the gas cleaning up effect. When the filler gas decreases, the laser tube voltage decreases, and the output decreases accordingly.As the gas decreases further, normal gas discharge no longer occurs, the tube stops operating, and becomes unusable.
本発明の目的は、アノード電圧が高い場合、ガ
スの減少が速いため、従来のガス補給レベルより
も高めで補給し、高アノード電圧時の封入ガスの
急激な減少による動作停止を防止し、高電圧、大
電流による長時間の連続使用に対し、安定に動作
するイオンレーザ装置を提供することにある。 The purpose of the present invention is to replenish gas at a higher level than the conventional gas replenishment level because gas decreases quickly when the anode voltage is high, and to prevent operation stoppage due to a rapid decrease in the filled gas when the anode voltage is high. An object of the present invention is to provide an ion laser device that operates stably even when used continuously for long periods of time with high voltage and high current.
次に第１図に示した実施例により本発明を詳細
に説明する。第１図において、１はレーザ管２の
放電を維持させるための主直流電源で、正極出力
はレーザ管２のアノード３に、負極はアースされ
るとともに電流検出抵抗１５を通してレーザ管２
のカソード４に接続されている。５と５′はレー
ザ管２を狭んで対向配置の共振器ミラーであり、
１３はレーザ管２と支管１５により接続された補
助ガスボンベ１４との間を仕切つている電磁弁で
ある。電流検出抵抗１６の出力端は直流電源１に
帰還されて電源１を定電流電源とするとともに比
較増幅器１０の基準電圧入力ともなつている。比
較増幅器１０の他の入力端子にはレーザ管２のア
ノード電圧ＥBを抵抗７と８で分圧したアノード
電圧検知出力Ｖpが加えられており、比較増幅器
１０の出力はタイマー回路１１を経て電磁弁駆動
回路１２に加えられ、駆動回路１２の出力により
電磁弁１３は開閉動作を行う。 Next, the present invention will be explained in detail using the embodiment shown in FIG. In FIG. 1, 1 is the main DC power supply for maintaining the discharge of the laser tube 2. The positive output is connected to the anode 3 of the laser tube 2, and the negative output is grounded and passed through the current detection resistor 15 to the laser tube 2.
is connected to the cathode 4 of. 5 and 5' are resonator mirrors arranged opposite to each other across the laser tube 2;
Reference numeral 13 denotes a solenoid valve that partitions the laser tube 2 and the auxiliary gas cylinder 14 connected by a branch tube 15. The output end of the current detection resistor 16 is fed back to the DC power supply 1, making the power supply 1 a constant current power supply, and also serves as a reference voltage input to the comparator amplifier 10. An anode voltage detection output V p obtained by dividing the anode voltage E B of the laser tube 2 by resistors 7 and 8 is applied to the other input terminal of the comparison amplifier 10 . The output of the solenoid valve 13 is applied to the solenoid valve drive circuit 12, and the solenoid valve 13 performs opening/closing operations based on the output of the drive circuit 12.
次にこのイオンレーザ装置の動作について説明
すると、直流電源１がオンされ、レーザ管２のア
ノードとカソードの間に電圧が印加されてレーザ
管２は放電し、光共振器５と５′の光共振作用に
よつてレーザ管２は発振レーザ光６を出力する。
放電電流は検出抵抗１６により検出され、検出信
号は直流電源１に帰還されて定電流電源として働
き、放電電流は所定の一定電流に安定化され、レ
ーザ管２は安定な動作を続ける。 Next, to explain the operation of this ion laser device, the DC power supply 1 is turned on, a voltage is applied between the anode and cathode of the laser tube 2, the laser tube 2 is discharged, and the light emitted from the optical resonators 5 and 5' is The laser tube 2 outputs an oscillated laser beam 6 due to the resonance effect.
The discharge current is detected by the detection resistor 16, and the detection signal is fed back to the DC power supply 1, which functions as a constant current power supply.The discharge current is stabilized to a predetermined constant current, and the laser tube 2 continues to operate stably.
ここで、レーザ管２が動作を続けているうちに
前述のクリーンアツプ作用により管内の封入ガス
が減少すると、レーザ管２のアノード電圧ＥBが
低下し、出力は減少する。アノード電圧ＥBが減
少すると、それとともに分圧抵抗８の出力電圧Ｖ
pも低下し、それが比較増幅器１０において基準
電圧Ｖnと比較され、基準電圧より低ければ比較
増幅器１０に正の出力が現われ、これによりタイ
マー回路１１の動作を開始させる。タイマー回路
１１は電磁弁駆動回路１２を介して電磁弁１３を
一定時間開き、補助ボンベ６からレーザ管２に対
し、一回分の所定量のガスを補給する。それか
ら、ガス拡散時間を考慮した時間経つとまた電磁
弁１３を開き所定量のガスを補給し、比較増幅器
に正の出力が現われている間、この小刻みの補給
動作をくり返し、ガス補給の結果レーザ管アノー
ド電圧ＥBが上昇し、比較増幅器１０の正の出力
が消失した時点で初めてタイマー回路１１がオフ
となる。このようにタイマー回路１１により補給
量が適正であるか否かを時間において確認しなが
ら補給を行なうことによりガス補給とレーザ管ア
ノード電圧上昇との間の時間遅れによるガスの過
剰補給が防止されるのである。 Here, while the laser tube 2 continues to operate, if the gas sealed inside the tube decreases due to the above-mentioned clean-up effect, the anode voltage E B of the laser tube 2 decreases, and the output decreases. As the anode voltage E B decreases, the output voltage V of the voltage dividing resistor 8
p also decreases and is compared with the reference voltage V n in the comparator amplifier 10, and if it is lower than the reference voltage, a positive output appears in the comparator amplifier 10, thereby starting the operation of the timer circuit 11. The timer circuit 11 opens the solenoid valve 13 for a certain period of time via the solenoid valve drive circuit 12, and supplies a predetermined amount of gas for one time to the laser tube 2 from the auxiliary cylinder 6. Then, after a time that takes into consideration the gas diffusion time, the solenoid valve 13 is opened again and a predetermined amount of gas is replenished, and while a positive output appears in the comparator amplifier, this small replenishment operation is repeated, and as a result of gas replenishment, the laser The timer circuit 11 is turned off only when the tube anode voltage E B increases and the positive output of the comparator amplifier 10 disappears. By performing replenishment while checking whether the replenishment amount is appropriate using the timer circuit 11, excessive gas replenishment due to a time delay between gas replenishment and laser tube anode voltage rise can be prevented. It is.
しかし、前述したようにアノード電圧ＥBが高
く、アノード電流が大きくなると、アーク放電に
よるガスクリーンアツプ作用が強いため、ガス減
少が大きく、またガスの減少によりアノード電圧
が低下するとさらにガスの減少が大きくなるため
タイマー回路１１によるガス補給間隔では、ガス
補給が減少分に追いつかない可能性もあり、レー
ザ管２の動作停止を招く恐れがある。ここでダイ
オード９は第２図のような静特性をもつておりダ
イオードにかかる電圧が低い時は、電流をカツト
するが、電圧が高くなると電流が次第に流れるよ
うになる。この特性を利用しＶpが低い時は基準
電圧Ｖnに対し、Ｖn＞Ｖpになつた時に比較回路
１０が出力し、ガス補給するがアノード電圧ＥB
が高くなると、抵抗８の出力電圧Ｖpも高くなり
ダイオード９は次第に電流をバイパスするように
なり、比較増幅器１０に対する入力電圧Ｖp′はＶ
pよりも小さくなりＶpがＶnより大きくても比較
増幅器１０は出力するようになり、ダイオード挿
入前の電流ＩBに対するガス補給レベルを第３図
の実線とすると、ダイオード挿入後は補給レベル
は同図の破線のようになる。したがつて大電流に
なるほど、基準電圧が高くなつたことと同様にな
り早めにガス補給をするので、大電流動作時の急
激な封入ガスの減少によるレーザ管の動作停止の
危険を防げる。このようにして封入ガスの減少の
速さに対応して補給レベルを少し高めに設定する
ことにより、適切なガス補給が行なわれ、アノー
ド電流ＩBが大きい場合でも長時間安定なレーザ
発振を行なわせることができる。 However, as mentioned above, when the anode voltage E B is high and the anode current is large, the gas cleaning up effect due to arc discharge is strong, so the gas decrease is large, and when the anode voltage decreases due to the gas decrease, the gas decreases even more. Because of this increase, there is a possibility that the gas replenishment interval determined by the timer circuit 11 may not be able to catch up with the decreased gas replenishment, which may cause the laser tube 2 to stop operating. Here, the diode 9 has static characteristics as shown in FIG. 2, and when the voltage applied to the diode is low, the current is cut off, but as the voltage increases, the current gradually flows. Utilizing this characteristic, when V p is low, the comparator circuit 10 outputs an output when V n > V p with respect to the reference voltage V n , and gas is replenished, but the anode voltage E B
As the voltage increases, the output voltage V p of the resistor 8 also increases, the diode 9 gradually bypasses the current, and the input voltage V p ' to the comparator amplifier 10 becomes V p '.
Even if V p is smaller than V p and V p is larger than V n , the comparator amplifier 10 will output an output.If the solid line in Figure 3 is the gas replenishment level for the current I B before the diode insertion, then the gas replenishment level will be the same after the diode insertion. looks like the broken line in the same figure. Therefore, the larger the current becomes, the higher the reference voltage becomes, and the gas is replenished earlier, which prevents the danger of the laser tube stopping due to a sudden decrease in the amount of gas filled during large current operation. In this way, by setting the replenishment level slightly higher in response to the rate of decrease in the filler gas, appropriate gas replenishment is performed and stable laser oscillation is performed for a long time even when the anode current I B is large. can be set.
第１図は本発明の構成概略図、第２図はダイオ
ードの静特性、第３図はアノード電流に対するガ
ス補給の設定曲線を示す。
１……直流電源、２……イオンレーザ管、３…
…アノード、４……カソード、５，５′……光共
振器、６……レーザ出力、７，８……アノード電
圧分圧抵抗、９……ダイオード、１０……比較増
幅器、１１……タイマー回路、１２……電磁弁駆
動回路、１３……電磁弁、１４……補助ガスボン
ベ、１５……支管、１６……電流検出抵抗。
FIG. 1 is a schematic diagram of the configuration of the present invention, FIG. 2 is a static characteristic of a diode, and FIG. 3 is a set curve of gas replenishment with respect to anode current. 1...DC power supply, 2...Ion laser tube, 3...
...Anode, 4...Cathode, 5,5'...Optical resonator, 6...Laser output, 7,8...Anode voltage dividing resistor, 9...Diode, 10...Comparison amplifier, 11...Timer Circuit, 12... Solenoid valve drive circuit, 13... Solenoid valve, 14... Auxiliary gas cylinder, 15... Branch pipe, 16... Current detection resistor.
Claims (1)
えたレーザ管と、前記レーザ管を放電させるため
の直流電源と、前記レーザ管のアノード電圧とア
ノード電流を入力する比較増幅器と、この比較増
幅器の出力信号を受けて間欠制御出力を発生する
タイマー回路と、このタイマー回路の出力により
前記電磁弁を駆動するための電磁弁駆動回路と、
アノード電圧をその静特性によつて補償し、前記
比較増幅器に入力するダイオードとを備えたこと
を特徴とするイオンレーザ装置。1. A laser tube equipped with an auxiliary gas cylinder separated by a solenoid valve, a DC power source for discharging the laser tube, a comparison amplifier that inputs the anode voltage and anode current of the laser tube, and an output signal of this comparison amplifier. a timer circuit that generates an intermittent control output in response to the received signal, and a solenoid valve drive circuit that drives the solenoid valve using the output of the timer circuit.
An ion laser device comprising: a diode that compensates an anode voltage by its static characteristics and inputs it to the comparison amplifier.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20022382A JPS5989478A (en) | 1982-11-15 | 1982-11-15 | Ion laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20022382A JPS5989478A (en) | 1982-11-15 | 1982-11-15 | Ion laser device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5989478A JPS5989478A (en) | 1984-05-23 |
| JPS6239559B2 true JPS6239559B2 (en) | 1987-08-24 |
Family
ID=16420850
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20022382A Granted JPS5989478A (en) | 1982-11-15 | 1982-11-15 | Ion laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5989478A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61255081A (en) * | 1985-05-08 | 1986-11-12 | Olympus Optical Co Ltd | Laser device |
| US4794613A (en) * | 1987-07-27 | 1988-12-27 | Prc Corporation | Laser fluid flow control apparatus and method |
-
1982
- 1982-11-15 JP JP20022382A patent/JPS5989478A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5989478A (en) | 1984-05-23 |
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