JPH0121637B2 - - Google Patents
Info
- Publication number
- JPH0121637B2 JPH0121637B2 JP19379183A JP19379183A JPH0121637B2 JP H0121637 B2 JPH0121637 B2 JP H0121637B2 JP 19379183 A JP19379183 A JP 19379183A JP 19379183 A JP19379183 A JP 19379183A JP H0121637 B2 JPH0121637 B2 JP H0121637B2
- Authority
- JP
- Japan
- Prior art keywords
- laser tube
- output
- solenoid valve
- circuit
- timer circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 11
- 230000007423 decrease Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
- H01S3/131—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
- H01S3/134—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation in gas lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】
本発明は、イオンレーザ装置に関し、特にレー
ザ管の封入ガスの減少を補給するようにしたイオ
ンレーザ装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an ion laser device, and more particularly to an ion laser device configured to replenish the amount of gas enclosed in a laser tube.
従来のこの種のイオンレーザ装置は、レーザ管
内の封入希ガスをイオン化するために大電流のア
ーク放電をさせる。そのため、ガスクリーンアツ
プ作用によりレーザ管内のガスが減少する。レー
ザ管封入ガスが減少すると、レーザ管アノード電
圧が減少し、それとともに出力の減少が起り、さ
らにガス減少が進むと正常な放電が行なわれなく
なり、管の動作が停止して使用不能になる。 A conventional ion laser device of this type uses a large current arc discharge to ionize the rare gas sealed in the laser tube. Therefore, the gas inside the laser tube decreases due to the gas cleaning up effect. When the gas filled in the laser tube decreases, the laser tube anode voltage decreases, and the output decreases accordingly.As the gas decreases further, normal discharge no longer occurs, and the tube stops operating and becomes unusable.
本発明の目的は前記レーザ管のガスの減少を自
動的に適正に補給し、よつて長期間にわたり安定
に動作するイオンレーザ装置を提供するにある。 An object of the present invention is to provide an ion laser device that automatically and appropriately replenishes the gas in the laser tube, thereby operating stably over a long period of time.
次に第１図に示した実施例により本発明を詳細
に説明する。図において、１は、レーザ管２の放
電を維持させるための主直流電源で、正極出力は
レーザ管２のアノード３に負極はアースされると
ともに電流検出抵抗１１を通してレーザ管２のカ
ソード４に接続されている。５と５′はレーザ管
２を間にはさんで対向配置の共振器ミラーであ
り、６はレーザ管２と支管７により接続された補
助ガスボンベで、支管７には電磁弁８が設けられ
て、レーザ管２と補助ガスボンベ６との間を仕切
つている。そして電流検出抵抗１１の出力端は直
流電源１に帰還されて、直流電源１を定電流電源
とする。また電流検出抵抗１１に発生する電流検
出電圧Vmと、レーザ管２のアノード電圧Ebを抵
抗９，１０によつて分圧した検出電圧Voとの差
電圧を比較増幅１２で増幅し、その出力電圧はタ
イマー回路１３、アラーム回路１４を経て、電磁
弁駆動回路１５、タイマー回路２０に加えられそ
の出力により電磁弁８は開閉動作を行ない、補助
ガスボンベ６のガスをレーザ管２に供給すべく制
御する手段であり、その制御方法は次の通りであ
る。 Next, the present invention will be explained in detail using the embodiment shown in FIG. In the figure, 1 is the main DC power supply for maintaining the discharge of the laser tube 2, the positive output is connected to the anode 3 of the laser tube 2, the negative electrode is grounded, and the cathode 4 of the laser tube 2 is connected through the current detection resistor 11. has been done. 5 and 5' are resonator mirrors placed opposite each other with the laser tube 2 in between; 6 is an auxiliary gas cylinder connected to the laser tube 2 by a branch pipe 7; the branch pipe 7 is provided with a solenoid valve 8; , partitions between the laser tube 2 and the auxiliary gas cylinder 6. The output end of the current detection resistor 11 is fed back to the DC power supply 1, making the DC power supply 1 a constant current power supply. Further, the difference voltage between the current detection voltage Vm generated in the current detection resistor 11 and the detection voltage Vo obtained by dividing the anode voltage Eb of the laser tube 2 by the resistors 9 and 10 is amplified by the comparison amplifier 12, and the output voltage is is applied to a solenoid valve drive circuit 15 and a timer circuit 20 via a timer circuit 13 and an alarm circuit 14, and the solenoid valve 8 opens and closes according to its output, controlling the gas in the auxiliary gas cylinder 6 to be supplied to the laser tube 2. The control method is as follows.
抵抗９，１０を調節し、前記Eb検出電圧Voと
電流検出電圧Vmの差が０になるようにしてお
く。 The resistors 9 and 10 are adjusted so that the difference between the Eb detection voltage Vo and the current detection voltage Vm becomes zero.
このときアノード電圧Eb、アノード電流Ibの
関係は第２図のレーザ管２の正規のEb−Ib曲線
１６上にある。このレーザ管２が動作をし続けて
いるうちに、前述のガスクリーンアツプ作用によ
り管内の封入希ガスが減少し、アノード電圧Eb
−アノード電流Ibの実効抵抗特性が第２図の曲線
１６の下側にずれればVmに対しVoは小くなり、
したがつて、比較増幅器１２に十の出力が現われ
その出力は、タイマー回路１３がONになつてい
ればアラーム回路１４を通つて電磁弁駆動回路１
５が作動し、タイマ回路２０が一定時間ONし電
磁弁を一定時間開いてガスを補給し、ガス補給の
結果Eb−Ib実効抵抗特性が曲線１６の上側に来
るとVm＜Voとなり、比較増幅器１２にマイナ
ス（−）出力が生じ、タイマ回路１３アラーム回
路１４、電磁弁駆動回路１５、タイマ回路２０を
通して、電磁弁８は閉じる。しかし、レーザ管２
は冷状態からスイツチオンされて動作開始後、管
内温度が徐々に上昇し、レーザ管２のEb−ｂ
特性が安定するまでは数十分の時間を要する。第
３図はこのような起動特性を示すもので、横軸は
動作開始からの経過時間、縦軸はアノード電圧
Ebを示す。この図で、特性曲線１９は放電電流
１０Ａ一定に保持したときのもの、曲線１８は２
０Ａ、曲線１７は３０Ａのときの特性で、定常値
に達するにはそれぞれ約20分を要している。した
がつてスイツチON後一定時間OFFするタイマー
回路１３なしに比較増幅器１２の出力により電磁
弁８を駆動したならば、レーザ管２には適正量の
ガスが封入されているとしてもスイツチオン直後
はアノード電圧検知出力Voは電流検出電圧Vm
よりも低いので、比較増幅器１２の出力には正の
信号が現われ電磁弁８が開きガス補給動作をして
しまう。このような不都合はスイツチON後一定
時間（20分程度）信号をOFFするタイマ回路１
３により解消される。またタイマ回路２０は、電
磁弁８が開きガス補給され前記のようにアノード
電圧Ebが上昇するまでの応答速度遅れによるガ
スの補給しすぎを防止するため、一定時間（0.5
秒程度）ONするタイマーである。 At this time, the relationship between the anode voltage Eb and the anode current Ib is on the normal Eb-Ib curve 16 of the laser tube 2 shown in FIG. While this laser tube 2 continues to operate, the rare gas sealed inside the tube decreases due to the gas cleaning up effect mentioned above, and the anode voltage Eb
-If the effective resistance characteristic of the anode current Ib shifts to the lower side of curve 16 in Fig. 2, Vo becomes smaller with respect to Vm,
Therefore, an output of 10 appears in the comparator amplifier 12, and if the timer circuit 13 is turned on, the output is passed through the alarm circuit 14 to the solenoid valve drive circuit 1.
5 is activated, the timer circuit 20 is turned on for a certain period of time, and the solenoid valve is opened for a certain period of time to replenish gas. As a result of gas replenishment, when the Eb-Ib effective resistance characteristic comes to the upper side of curve 16, Vm<Vo, and the comparator amplifier A negative (-) output is generated at 12, and the solenoid valve 8 is closed through the timer circuit 13, alarm circuit 14, solenoid valve drive circuit 15, and timer circuit 20. However, laser tube 2
After the switch is turned on from a cold state and operation starts, the temperature inside the tube gradually rises, and the Eb-b of laser tube 2 increases.
It takes several tens of minutes until the characteristics become stable. Figure 3 shows such startup characteristics, where the horizontal axis is the elapsed time from the start of operation, and the vertical axis is the anode voltage.
Shows Eb. In this figure, the characteristic curve 19 is the one when the discharge current is kept constant at 10A, and the characteristic curve 18 is the one when the discharge current is kept constant at 10A.
0A and curve 17 are the characteristics at 30A, and each takes about 20 minutes to reach a steady value. Therefore, if the solenoid valve 8 is driven by the output of the comparator amplifier 12 without the timer circuit 13 turning off for a certain period of time after the switch is turned on, even if the laser tube 2 is filled with an appropriate amount of gas, the anode will be turned off immediately after the switch is turned on. Voltage detection output Vo is current detection voltage Vm
, a positive signal appears at the output of the comparator amplifier 12, causing the solenoid valve 8 to open and perform a gas replenishment operation. This kind of inconvenience is caused by the timer circuit 1, which turns off the signal for a certain period of time (about 20 minutes) after the switch is turned on.
This is resolved by 3. Furthermore, the timer circuit 20 operates for a certain period of time (0.5
This is a timer that turns on (about seconds).
よつて前記レーザ管２のガスの減少が防止さ
れ、アノード電圧Eb、アノード電流Ibはほぼ正
規のEb−Ib曲線１６上に保たれ、レーザ出力の
安定化と寿命を長くすることができる。 As a result, the gas in the laser tube 2 is prevented from decreasing, and the anode voltage Eb and anode current Ib are kept approximately on the normal Eb-Ib curve 16, making it possible to stabilize the laser output and extend the life.
第１図は本発明の構成概要図、第２図はレーザ
管のアノード電流Ibとアノード電圧Ebとの関係
（実効抵抗を示す曲線図、第３図はレーザ管のア
ノード電圧Ebの起動特性を示す曲線図である。
１……直流電源、２……イオンレーザ管、３…
…アノード、４……カソード、５，５′……光共
振器、６……補助ガスボンベ、７……支管、８…
…電磁弁、９，１０……アノード電圧分圧抵抗、
１１……電流検出抵抗、１２……比較増幅器、１
３，２０……タイマー回路、１４……アラーム回
路、１５……電磁弁駆動回路。
Fig. 1 is a schematic diagram of the configuration of the present invention, Fig. 2 is a curve diagram showing the relationship between the anode current Ib and anode voltage Eb of the laser tube (a curve showing the effective resistance), and Fig. 3 is a graph showing the starting characteristics of the anode voltage Eb of the laser tube. It is a curve diagram showing 1... DC power supply, 2... Ion laser tube, 3...
...anode, 4... cathode, 5, 5'... optical resonator, 6... auxiliary gas cylinder, 7... branch pipe, 8...
... Solenoid valve, 9, 10 ... Anode voltage dividing resistor,
11...Current detection resistor, 12...Comparison amplifier, 1
3, 20...Timer circuit, 14...Alarm circuit, 15...Solenoid valve drive circuit.
Claims (1)
えたレーザ管と、このレーザ管の動作電圧を供給
する直流電源と、前記レーザ管のアノード電圧検
知出力と基準電圧を比較する比較増幅器と、この
比較増幅器の出力信号を一定時間OFFする第１
のタイマ回路と、この第１のタイマ回路の出力に
より駆動されるアラーム回路と、このアラーム回
路の出力により駆動され、電磁弁駆動回路と、こ
の電磁弁駆動回路の出力により一定時間電磁弁を
駆動する第２のタイマー回路とを備えたことを特
徴とするイオンレーザ装置。1. A laser tube equipped with an auxiliary gas cylinder separated by a solenoid valve, a DC power supply that supplies the operating voltage of this laser tube, a comparator amplifier that compares the anode voltage detection output of the laser tube with a reference voltage, and this comparator amplifier. The first step is to turn off the output signal for a certain period of time.
a timer circuit, an alarm circuit driven by the output of this first timer circuit, a solenoid valve drive circuit driven by the output of this alarm circuit, and a solenoid valve drive circuit driven by the output of this solenoid valve drive circuit for a certain period of time. An ion laser device comprising: a second timer circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19379183A JPS6085581A (en) | 1983-10-17 | 1983-10-17 | Ion laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19379183A JPS6085581A (en) | 1983-10-17 | 1983-10-17 | Ion laser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6085581A JPS6085581A (en) | 1985-05-15 |
| JPH0121637B2 true JPH0121637B2 (en) | 1989-04-21 |
Family
ID=16313846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19379183A Granted JPS6085581A (en) | 1983-10-17 | 1983-10-17 | Ion laser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6085581A (en) |
-
1983
- 1983-10-17 JP JP19379183A patent/JPS6085581A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6085581A (en) | 1985-05-15 |
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