JPS6240879B2 - - Google Patents
Info
- Publication number
- JPS6240879B2 JPS6240879B2 JP10173582A JP10173582A JPS6240879B2 JP S6240879 B2 JPS6240879 B2 JP S6240879B2 JP 10173582 A JP10173582 A JP 10173582A JP 10173582 A JP10173582 A JP 10173582A JP S6240879 B2 JPS6240879 B2 JP S6240879B2
- Authority
- JP
- Japan
- Prior art keywords
- laser
- gas
- circuit
- cathode
- gas pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 6
- 239000002184 metal Substances 0.000 description 15
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/031—Metal vapour lasers, e.g. metal vapour generation
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】
この発明は、ガス・レーザー用の点灯回路に関
する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a lighting circuit for a gas laser.
一般にガス・レーザー管においては、長時間安
定した光出力を得るためには、単にガス・レーザ
ー管を直流放電させるのみでなく、次のような制
御を行なう回路を設けることが必要とされてい
る。 In general, for gas laser tubes, in order to obtain stable light output over a long period of time, it is necessary not only to simply discharge direct current from the gas laser tube, but also to provide the following control circuits. .
(1) レーザ管に常に一定電流を流す為の定電流回
路。(1) A constant current circuit that always supplies a constant current to the laser tube.
(2) レーザー管の管電圧が常に最適値に保れるよ
うに管電圧に対応して管内蒸気圧を制御する金
属蒸気圧制御回路。(2) A metal vapor pressure control circuit that controls the vapor pressure inside the laser tube in response to the tube voltage so that the tube voltage of the laser tube is always kept at the optimum value.
(3) 長時間に亘つてレーザー管が点灯された場合
における管内ガス圧の低下を検出し、管内にガ
ス補給する為のガス圧制御回路。(3) A gas pressure control circuit that detects a drop in gas pressure inside the tube when the laser tube is turned on for a long period of time, and replenishes gas inside the tube.
従来ガス・レーザー点灯回路においては、定電
流回路がカソードに接続され、金属蒸気圧制御回
路がアノードに接続され、また、ガス圧制御回路
がガス圧検知素子に接続され、別個独立に構成さ
れるとともに次のような理由から独立の接地電位
を有するグランド・ラインＧ，G1，G2に接続さ
れている。 In conventional gas laser lighting circuits, a constant current circuit is connected to the cathode, a metal vapor pressure control circuit is connected to the anode, and a gas pressure control circuit is connected to a gas pressure detection element, all of which are configured separately. They are also connected to ground lines G, G 1 and G 2 having independent ground potentials for the following reasons.
金属蒸気圧制御回路は、レーザー管の電圧を検
知する為にアノードに接続されるが、制御系の共
通電位即ち、0Vレベルを有するグランド・ライ
ンＧに接続すると、レーザー管の電圧が変化した
場合そのインピーダンス変化分を定電流回路のイ
ンピーダンスで補なつているため、全体のレベル
としては変らずレーザー管の電圧を正確に検知す
ることができない。従つて、金属蒸気制御回路
は、共通電位を有するグランド・ラインＧよりも
略600〜800Vの高い電位を有するグランド・ライ
ンG1に接続されなければならない。また、ガス
圧制御回路は、ガス圧検知素子を介して共通電位
とは絶縁されているグランド・ラインG2に接続
されるが、もし、共通電位を有するグラン・ドラ
インＧに接続された場合カソードとガス圧検知素
子との間に電位差が生じ、カソードとガス圧検知
素子間で放電が生ずる虞れがある。従つて、ガス
圧検知素子は、略カソード電位と絶縁された電位
を有するグランド・ラインG2に接続されてい
る。 The metal vapor pressure control circuit is connected to the anode to detect the voltage of the laser tube, but if it is connected to the ground line G which has a common potential of the control system, that is, 0V level, it will detect the voltage of the laser tube when it changes. Since the impedance of the constant current circuit compensates for the change in impedance, the overall level does not change and the voltage of the laser tube cannot be detected accurately. Therefore, the metal vapor control circuit must be connected to a ground line G1 having a higher potential of approximately 600-800V than a ground line G having a common potential. In addition, the gas pressure control circuit is connected to the ground line G2 which is insulated from the common potential through the gas pressure detection element, but if it is connected to the ground line G having the common potential, the cathode There is a possibility that a potential difference will occur between the cathode and the gas pressure sensing element, and a discharge will occur between the cathode and the gas pressure sensing element. Therefore, the gas pressure sensing element is connected to the ground line G2 having a potential that is approximately insulated from the cathode potential.
然しながら、上述した従来のレーザー点灯回路
にあつては、次のような問題点があることが指摘
されている。第１に各回路が電位差を有している
為に安全性の上から独立した部品を用いることが
必要で、回路全体のコストを下げることができな
い。第２に各回路が電位差を有していることから
回路全体の実装密度を向上させることができず、
装置全体が大型化してしまう。第３に共通電位を
有するグランド・ラインＧに比べてアノードに印
加される電圧が極めて高いことから、特に金属蒸
気制御回路を構成する部品は、制限を受け、選択
性が極めて狭い。 However, it has been pointed out that the conventional laser lighting circuit described above has the following problems. First, since each circuit has a potential difference, it is necessary to use independent components for safety reasons, and the cost of the entire circuit cannot be reduced. Second, since each circuit has a potential difference, it is not possible to improve the packaging density of the entire circuit.
The entire device becomes larger. Thirdly, because the voltage applied to the anode is very high compared to the ground line G, which has a common potential, the components making up the metal vapor control circuit in particular are subject to limitations and have very narrow selectivity.
この発明は、上述したような事情に鑑みなされ
たものであつて回路構成の簡略化並びに確実に作
動されるガスレーザー用の点灯回路を提供するこ
とにある。 The present invention has been made in view of the above-mentioned circumstances, and it is an object of the present invention to provide a lighting circuit for a gas laser that has a simplified circuit configuration and is operated reliably.
以下図面を参照しながら、この発明の一実施例
に係るガスレーザー用の点灯回路について説明す
る。 DESCRIPTION OF THE PREFERRED EMBODIMENTS A gas laser lighting circuit according to an embodiment of the present invention will be described below with reference to the drawings.
第１図を参照すると、レーザー放電管２のアノ
ード４には、高圧電源＋ＶDCに接続され、例え
ば、略＋2000Vの電位に維持されている。このア
ノード４には、このアノード電位の変動に応じて
ヒーター電流を制御し、放電管２内の蒸気圧を調
整する金属蒸気圧制御回路６が接続されている。
この金属蒸気圧制御回路６は、レーザー放電管２
の金属溜８に設けられ、この金属溜８内の金属１
０例えば、Cdを加熱し、Cd蒸気を発生させるヒ
ータ１２を介して0V電位のグランド・ラインＧ
に接続されている。放電管２に設けられたガス補
給容器１４例えば、Heガス補給容器には、放電
管２内のガス圧が低下した際ガス補給容器１４を
加熱してこの容器１４から管内にガスを補給する
為のヒータ１６が設けられている。このヒータ１
６は、電源ＶDD及びヒータ１６に供給される電流
をガス圧検知素子１８例えば、抵抗で検出された
管内ガス圧に応じて制御する為のバツフア・ガス
圧制御回路２０に接続され、バツフア・ガス圧制
御回路２０は、ガス圧検知素子１８を介してグラ
ンド・ラインＧに接続されている。カソード２２
は略グランド・ラインＧの電位即ち、略0V電位
に設定され、このカソード２２は、アノード・カ
ソード間に流れる管電流を略一定に維持する為の
定電流回路２４に接続され、この定電流回路２４
は、負電源−ＶDC例えば、−2000Vの電圧源に接
続されている。定電流回路２４は、また管電流を
検出して放電開始信号を発生し放電が開始された
ことを知らせる放電開始信号発生回路２６に接続
され、同様に管電流を検出して放電管２が不点灯
状態に至つたことを知らせる不点灯警告回路２８
に接続されている。この放電開始信号発生回路２
６及び不点灯警告回路２８は、同様にグランド・
ラインＧに接続されている。 Referring to FIG. 1, the anode 4 of the laser discharge tube 2 is connected to a high voltage power supply +V DC , and is maintained at a potential of approximately +2000V, for example. A metal vapor pressure control circuit 6 is connected to the anode 4, which controls the heater current according to fluctuations in the anode potential and adjusts the vapor pressure within the discharge tube 2.
This metal vapor pressure control circuit 6 controls the laser discharge tube 2
is provided in the metal reservoir 8, and the metal 1 in this metal reservoir 8 is
0 For example, the ground line G at 0V potential is connected via a heater 12 that heats Cd and generates Cd vapor.
It is connected to the. A gas replenishment container 14 provided in the discharge tube 2, for example, a He gas replenishment container, is provided with a gas replenishment container 14 for heating the gas replenishment container 14 and replenishing gas from this container 14 into the tube when the gas pressure in the discharge tube 2 decreases. A heater 16 is provided. This heater 1
6 is connected to a buffer gas pressure control circuit 20 for controlling the current supplied to the power supply V DD and the heater 16 in accordance with the gas pressure in the pipe detected by the gas pressure detection element 18, for example, a resistor. The gas pressure control circuit 20 is connected to the ground line G via the gas pressure sensing element 18. cathode 22
is set to approximately the potential of the ground line G, that is, approximately 0V potential, and this cathode 22 is connected to a constant current circuit 24 for maintaining the tube current flowing between the anode and cathode approximately constant. 24
is connected to a negative voltage source -V DC , for example -2000V. The constant current circuit 24 is also connected to a discharge start signal generation circuit 26 which detects the tube current and generates a discharge start signal to notify that discharge has started. Non-lighting warning circuit 28 that notifies you that the lighting state has been reached.
It is connected to the. This discharge start signal generation circuit 2
6 and the non-lighting warning circuit 28 are similarly grounded.
Connected to line G.
上記のようなレーザー点灯回路によれば、アノ
ード４に高電圧＋ＶDCが印加され、ヒータ１０に
金属蒸気圧制御回路６からヒータ電流が供給され
ると、アノード４及びカソード２２間でガス及び
金属蒸気の混合放電が生じ、レーザーが発生され
る。レーザー発振中において、放電電流は、定電
流回路２４によつて一定に保れ、また、アノード
４及びカソード２２間電圧は、検出されたカソー
ド電位を基に金属蒸気圧が金属蒸気圧制御回路６
によつて調整されることから一定に維持される。
しかも、長時間に亘つて常にバツフア・ガス圧制
御回路２０によつて放電管２内のガス圧は、一定
に維持される。従つて、レーザー放電管には安定
した放電が生じしかも、レーザー放電管の長寿命
化が達成される。 According to the laser lighting circuit as described above, when a high voltage +V DC is applied to the anode 4 and a heater current is supplied to the heater 10 from the metal vapor pressure control circuit 6, gas and metal A mixed discharge of vapor occurs and a laser is generated. During laser oscillation, the discharge current is kept constant by the constant current circuit 24, and the voltage between the anode 4 and the cathode 22 is controlled by the metal vapor pressure control circuit 6, which adjusts the metal vapor pressure based on the detected cathode potential.
It is maintained constant because it is adjusted by .
Furthermore, the gas pressure within the discharge tube 2 is always maintained constant by the buffer gas pressure control circuit 20 over a long period of time. Therefore, stable discharge occurs in the laser discharge tube, and the life of the laser discharge tube is extended.
このレーザー点灯回路にあつては、従来の回路
が単電源であつたに対して２電源＋ＶDC及び−Ｖ
DCによつて回路が作動され、しかもカソード電位
が略グランド・ラインＧの電位即ち、0Vに設定
されている。従つて、カソード２２とガス圧検知
素子１８間での放電を阻止することができる。し
かも、各回路が全て共通のグランド・ラインＧに
接続されていることから回路の簡素化を達成し得
また、回路全体の実装密度を向上させることがで
きる。結果として、装置の小型化並びに低価格化
を達成することができる。 This laser lighting circuit uses two power supplies, +V DC and -V, whereas the conventional circuit uses a single power supply.
The circuit is operated by DC , and the cathode potential is set to approximately the potential of the ground line G, that is, 0V. Therefore, discharge between the cathode 22 and the gas pressure sensing element 18 can be prevented. Furthermore, since all the circuits are connected to a common ground line G, the circuits can be simplified and the packaging density of the entire circuit can be improved. As a result, the device can be made smaller and lower in price.
図は、この発明のレーザー点灯回路の一実施例
を示す回路図である。
２……レーザー放電管、４……アノード、８…
…金属溜、１０，１６……ヒータ、１８……ガス
圧険知素子、２２……カソード。
The figure is a circuit diagram showing an embodiment of the laser lighting circuit of the present invention. 2... Laser discharge tube, 4... Anode, 8...
...metal reservoir, 10, 16... heater, 18... gas pressure sensing element, 22... cathode.
Claims (1)
路が規定されるアノード及びカソードと、アノー
ドに接続される高圧正電源と、カソードに接続さ
れ、カソード電位をアース電位に設定し、放電電
流を略一定に維持する定電流回路と、この定電流
回路に接続される負電源と、放電路外であつてカ
ソード近傍のレーザ放電管管内に設けられ、レー
ザ放電管管内のガス圧力を検出するガス圧検知素
子と、レーザ放電管に連結され、レーザ放電管に
ガスを供給するガス補給容器と、ガス圧検知素子
を介してアースされ、ガス圧検知素子からの出力
に応じてガス補給容器からレーザ放電管管内に供
給されるガスを制御する制御回路とから成ること
を特徴とするレーザ点灯回路。1. An anode and a cathode arranged in a laser discharge tube with a discharge path defined between them, a high-voltage positive power supply connected to the anode, and a high-voltage positive power supply connected to the cathode, with the cathode potential set to ground potential and the discharge current approximately equal to A constant current circuit that maintains a constant current, a negative power supply connected to this constant current circuit, and a gas pressure sensor installed outside the discharge path and inside the laser discharge tube near the cathode to detect the gas pressure inside the laser discharge tube. A detection element, a gas replenishment container connected to the laser discharge tube and supplying gas to the laser discharge tube, and a gas replenishment container that is grounded through the gas pressure detection element and generates a laser discharge from the gas replenishment container in accordance with the output from the gas pressure detection element. 1. A laser lighting circuit comprising a control circuit for controlling gas supplied into a pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10173582A JPS58218184A (en) | 1982-06-14 | 1982-06-14 | Laser lighting circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10173582A JPS58218184A (en) | 1982-06-14 | 1982-06-14 | Laser lighting circuit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58218184A JPS58218184A (en) | 1983-12-19 |
| JPS6240879B2 true JPS6240879B2 (en) | 1987-08-31 |
Family
ID=14308509
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10173582A Granted JPS58218184A (en) | 1982-06-14 | 1982-06-14 | Laser lighting circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58218184A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0626278B2 (en) * | 1984-07-10 | 1994-04-06 | 浜松ホトニクス株式会社 | Gas laser device |
| JPS61168278A (en) * | 1985-01-21 | 1986-07-29 | Hiromi Kawase | Porcelain cathode type metal ion laser |
| JPS61172385A (en) * | 1985-09-27 | 1986-08-04 | Hiromi Kawase | Operating method of hollow cathode type metallic ion laser |
-
1982
- 1982-06-14 JP JP10173582A patent/JPS58218184A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58218184A (en) | 1983-12-19 |
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