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JPS6244864B2 - - Google Patents
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JPS6244864B2 - - Google Patents

Info

Publication number
JPS6244864B2
JPS6244864B2 JP56187898A JP18789881A JPS6244864B2 JP S6244864 B2 JPS6244864 B2 JP S6244864B2 JP 56187898 A JP56187898 A JP 56187898A JP 18789881 A JP18789881 A JP 18789881A JP S6244864 B2 JPS6244864 B2 JP S6244864B2
Authority
JP
Japan
Prior art keywords
alloy
powder
metal powder
solar cells
paste
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56187898A
Other languages
Japanese (ja)
Other versions
JPS57122582A (en
Inventor
Mooton Maakasu Sanfuoodo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EIDP Inc
Original Assignee
EI Du Pont de Nemours and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EI Du Pont de Nemours and Co filed Critical EI Du Pont de Nemours and Co
Publication of JPS57122582A publication Critical patent/JPS57122582A/en
Publication of JPS6244864B2 publication Critical patent/JPS6244864B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/20Electrodes
    • H10F77/206Electrodes for devices having potential barriers
    • H10F77/211Electrodes for devices having potential barriers for photovoltaic cells
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/40Formation of materials, e.g. in the shape of layers or pillars of conductive or resistive materials
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)
  • Conductive Materials (AREA)

Description

【発明の詳細な説明】[Detailed description of the invention]

本発明はシリコン太陽電池により太陽エネルギ
ーを電気エネルギーに変換する技術、さらに詳し
く云えばかかる電池に低抵抗接点をつくるための
厚膜ペースト組成物に関する。 半導体本体のP−N接合(ジヤンクシヨン)上
にあたる適当な波長の放射はその本体中に正孔電
子対を生成させるための外部エネルギー源として
役立つことは周知である。P−N接合に存在する
電位差のために正孔および電子は反対方向に接合
面を横切つて移動し、それにより外部回路に出力
を与えうる電流の流れを生ずる。大抵の太陽電池
は、金属化された、すなわち導電性である金属接
点を備えたシリコンウエーハの形態で存在する。 シリコンウエーハのP−N接合部から電流を発
生させる低コストの方法を提供するためには、ス
クリーン印刷および焼成操作によりウエーハを金
属化するのが普通である。ウエーハの表面上に接
点を沈着させるに用いられる商業的に入手しうる
金属化用インクは、一般に金属粉末、微粉化ガラ
スフリツトおよび有機ビヒクルを含有する。代表
的な金属粉末は銀、アルミニウム、ニツケル、金
または銅の粉末あるいはこれらとたとえば白金お
よびパラジウムのような貴金属との合金の粉末で
ある。 Si3N4は、マスキング保護層としても役立つ反
射防止性コーテイングとして太陽電池工業技術に
おいて広く使用されている。これはシリコン上に
沈着された場合、良好な接着性および安定性を有
する。具体的態様では、シリコン太陽電池は反射
防止性コーテイングとして前面のN−型側上にお
いてSi3N4で被覆されそしてその過程中に、背面
のP−型側もSi3N4で被覆されるようになる。下
にあるシリコン基質に対して電気接点をつくるた
めには、エツチング工程が採用されなければなら
ない。当技術分野の技術水準では、接点がつくら
れる部分ではSi3N4は除去されることが必要であ
り、前面側は前面側接点の適用のためのパターン
形態でエツチングされそして背面側も一般には大
面積の背面側接点の適用のために同様にエツチン
グされる。もしこのエツチング工程を省略できれ
ばコストの節約になるであろう。今や本発明によ
れば、Al−Mg合金が金属化ペースト処方中に含
有されるとこの機能を果しうることが見出され
た。 たとえばNi−Sb合金またはアルミニウムのよ
うな卑金属でSi3N4コーテイングの太陽電池を終
端する際に50Al:50Mg合金粉末を金属化用ペー
ストに混入すると電気的特性においての改良が得
られ、そして焼成開始後(firing window)すな
わち充分な放電開始のための温度範囲が広げられ
る。具体的態様では本発明はP−型部分およびN
−型部分およびP/N接合を有する、Si3N4で被
覆されたシリコン太陽電池に対して低抵抗導電性
接点(成端)を提供するのに使用する厚膜金属化
ペーストにあり、その際このペーストは大割合量
の金属粉末(たとえばアルミニウムまたはNi−
Sb合金)、小割合量の微粉化ガラスフリツトおよ
び小量の50Al:50Mg合金の混合物を粒子形態で
含有する有機ビヒクルからなる。本発明はさらに
電池を金属化する方法および得られる製品に関す
る。金属化プロセスは代表的には電池の1表面を
本発明の金属化ペーストでスクリーン印刷しつい
で少くとも500℃の温度で焼成することからな
る。 本発明は以下の実施例により示される。 実施例 1 拡散側上に錐体結晶組織(pyramidal
texture)を生成させるためにエツチングしたP
−型シリコンウエーハ中に深さ0.4〜0.5μのN−
型不純物を適用することにより構成されそして
Si3N4反射防止性コーテイングを有する前面が組
織化されたシリコン太陽電池を金属化して金属接
点すなわち端子を設けた。金属化ペーストは上記
ウエーハのN−表面上にスクリーン印刷され、こ
れは有機ビヒクル(テルピネオール中におけるエ
チルセルロース/ジブチルフタレート)、NiSb合
金、ガラスフリツトおよび少量の50Al:50Mg合
金からなつている。ガラスフリツトの組成は
PbO83重量%、PbF24.9重量%、B2O311重量%お
よびSiO21.1重量%であつた。3種のペースト試
料を調製しそして端子を窒素雰囲気で焼成した。
金属成分の割合は以下の表に示されているように
変化させた。
The present invention relates to techniques for converting solar energy into electrical energy by silicon solar cells, and more particularly to thick film paste compositions for making low resistance contacts in such cells. It is well known that radiation of a suitable wavelength impinging on the PN junction of a semiconductor body serves as an external energy source for generating hole-electron pairs in the body. Because of the potential difference that exists at the P-N junction, holes and electrons move across the junction in opposite directions, thereby creating a current flow that can provide an output to an external circuit. Most solar cells exist in the form of silicon wafers with metal contacts that are metallized, ie conductive. In order to provide a low cost method of generating current from the P-N junction of silicon wafers, it is common to metallize the wafers by screen printing and baking operations. Commercially available metallizing inks used to deposit contacts on the surface of a wafer generally contain metal powder, micronized glass frit, and an organic vehicle. Typical metal powders are powders of silver, aluminum, nickel, gold or copper or their alloys with noble metals such as platinum and palladium. Si 3 N 4 is widely used in solar cell technology as an antireflective coating that also serves as a masking protective layer. It has good adhesion and stability when deposited on silicon. In a specific embodiment, a silicon solar cell is coated with Si 3 N 4 on the front N-type side as an anti-reflective coating and during the process also coated with Si 3 N 4 on the back P-type side. It becomes like this. An etching process must be employed to make electrical contact to the underlying silicon substrate. The state of the art requires that the Si 3 N 4 be removed in the area where the contacts are made, the front side being etched in the form of a pattern for the application of front side contacts and the back side generally also etched. Also etched for large area backside contact applications. If this etching step could be omitted, it would result in cost savings. It has now been found, according to the invention, that an Al-Mg alloy can perform this function when included in the metallization paste formulation. For example, when terminating Si 3 N 4 coated solar cells with base metals such as Ni-Sb alloys or aluminum, the incorporation of 50Al:50Mg alloy powder into the metallization paste results in improvements in electrical properties and during sintering. The firing window, ie the temperature range for sufficient discharge initiation, is widened. In a specific embodiment, the invention provides a P-type moiety and an N
- in thick film metallization pastes used to provide low resistance conductive contacts (terminations) for Si 3 N 4 coated silicon solar cells with mold sections and P/N junctions; In fact, this paste contains a large proportion of metal powder (e.g. aluminum or Ni-
Sb alloy), a small proportion of micronized glass frit and a small amount of a mixture of 50Al:50Mg alloy in particle form in an organic vehicle. The invention further relates to a method of metallizing batteries and the resulting products. The metallization process typically consists of screen printing one surface of the cell with the metallization paste of the invention and firing at a temperature of at least 500°C. The invention is illustrated by the following examples. Example 1 Pyramidal crystal structure on the diffusion side
P etched to generate texture)
-N- type silicon wafer with a depth of 0.4~0.5μ
constructed by applying type impurities and
A front side textured silicon solar cell with a Si 3 N 4 anti-reflective coating was metallized and provided with metal contacts or terminals. A metallization paste was screen printed onto the N-surface of the wafer and consisted of an organic vehicle (ethylcellulose/dibutyl phthalate in terpineol), NiSb alloy, glass frit and a small amount of 50Al:50Mg alloy. The composition of glass frit is
They were 83% by weight of PbO, 4.9% by weight of PbF 2 , 11% by weight of B 2 O 3 and 1.1% by weight of SiO 2 . Three paste samples were prepared and the terminals were fired in a nitrogen atmosphere.
The proportions of metal components were varied as shown in the table below.

【表】 窒素焼成された太陽電池のはんだ付けした電気
的特性は表に記載されている。
[Table] The soldered electrical characteristics of nitrogen-fired solar cells are listed in the table.

【表】 表は50Al:50Mg合金を含有していない端子
が550℃近くの比較的低い焼成温度開始域をもつ
けれどもこの開始域はその合金が存在する場合に
は少くとも500℃まで拡大することを示してい
る。また表は太陽電池の電気的特性、すなわち
直列伝導率およびVoc(電池を通つて流れる電流
はないが太陽で照射される際に電池を横切つて発
生する電圧)がこの合金を使用する場合には高め
られることも示している。このことは50Al:
50Mg合金がSi3N4コーテイングを浸透しそしてN
−型領域と接触をなすに有効であることを示して
いる。 実施例 50Al:50Mg合金を厚膜アルミニウムベース金
属化ペーストの3試料のうちの2試料中に混入し
そしてこれらをSi3N4で被覆されたシリコン太陽
電池のP−型背表面にスクリーン印刷により適用
した。得られる端子を空気中で焼成した。表は
このように成端した太陽電池の逆接触抵抗をオー
ムで示している(シリコン電池のP表面上にある
並列導線間の2回のプローブ測定値を使用)。
[Table] The table shows that terminals not containing the 50Al:50Mg alloy have a relatively low sintering temperature onset region near 550°C, but this onset region extends to at least 500°C when the alloy is present. It shows. The table also shows the electrical properties of the solar cell, namely the series conductivity and the Voc (voltage developed across the cell when irradiated by the sun, although no current flows through the cell) when using this alloy. It also shows that it can be enhanced. This is 50Al:
50Mg alloy penetrates Si3N4 coating and N
- Shows effectiveness in making contact with the mold area. EXAMPLE 50Al:50Mg alloy was incorporated into two out of three samples of thick film aluminum-based metallization paste and these were screen printed onto the P-type back surface of a Si 3 N 4 coated silicon solar cell. Applied. The resulting terminal was fired in air. The table shows the reverse contact resistance in ohms for solar cells terminated in this way (using two probe measurements between the parallel conductors on the P surface of the silicon cell).

【表】 表から50Al:50Mgがない場合に比べてこれ
を加えた場合の処方物の接触抵抗は有意に減少す
ることが明らかである。 前記の各実施例は単に説明のための記載にすぎ
ない。他のビヒクル、他の金属粉末、他のガラス
フリツト組成物および他のAl:Mg合金もそれら
がSi3N4で被覆されたシリコン太陽電池に対して
低抵抗導電性接点を設けるのに使用するための厚
膜金属化ペーストを生成するに役立つ限り使用で
きることを理解されたい。前記ではスクリーン印
刷が開示されているけれどもたとえば刷毛塗り、
噴霧、スタンピングなどのようなその他の基質へ
の適用法も使用されうる。印刷ペースト中に用い
られる有機ビヒクルは一般には印刷ペーストが70
〜90%固定分および10〜30%ビヒクルを含有する
ような量で用いられる。当技術分野で普通に使用
される多数の不活性液体ビヒクルは米国特許第
4172919号明細書第4欄第3〜28行に詳しく記載
されている。
[Table] From the table, it is clear that the contact resistance of the formulation when 50Al:50Mg is added is significantly reduced compared to the case without 50Mg. The above embodiments are merely illustrative. Other vehicles, other metal powders, other glass frit compositions and other Al:Mg alloys are also available as they may be used to provide low resistance conductive contacts to Si3N4 coated silicon solar cells . It should be understood that it can be used as long as it helps produce a thick film metallization paste. Although screen printing is disclosed above, for example, brush painting,
Other substrate application methods such as spraying, stamping, etc. may also be used. The organic vehicle used in the printing paste is generally
Amounts are used to contain ~90% fixation and 10-30% vehicle. A number of inert liquid vehicles commonly used in the art are described in U.S. Pat.
It is described in detail in column 4, lines 3 to 28 of specification No. 4172919.

Claims (1)

【特許請求の範囲】 1 大割合量の金属粉末、小割合量の微粉化され
たガラスフリツトおよび小量の50Al:50Mg合金
を粒子形態で含有する有機ビヒクルからなること
を特徴とする、Si3N4で被覆されたシリコン太陽
電池に導電性接点を設けるための金属化用ペース
ト。 2 金属粉末がAl粉末である前記特許請求の範
囲第1項に記載の金属化用ペースト。 3 金属粉末がNiSb合金の粉末である前記特許
請求の範囲第1項に記載の金属化用ペースト。
[Claims] 1. Si 3 N, characterized in that it consists of an organic vehicle containing a major amount of metal powder, a minor amount of micronized glass frit and a small amount of 50Al:50Mg alloy in particle form. Metallization paste for providing conductive contacts on silicon solar cells coated with 4 . 2. The metallizing paste according to claim 1, wherein the metal powder is Al powder. 3. The metallizing paste according to claim 1, wherein the metal powder is a NiSb alloy powder.
JP56187898A 1980-11-26 1981-11-25 Metallized paste Granted JPS57122582A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/210,553 US4347262A (en) 1980-11-26 1980-11-26 Aluminum-magnesium alloys in low resistance contacts to silicon

Publications (2)

Publication Number Publication Date
JPS57122582A JPS57122582A (en) 1982-07-30
JPS6244864B2 true JPS6244864B2 (en) 1987-09-22

Family

ID=22783361

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56187898A Granted JPS57122582A (en) 1980-11-26 1981-11-25 Metallized paste

Country Status (7)

Country Link
US (1) US4347262A (en)
EP (1) EP0052791B1 (en)
JP (1) JPS57122582A (en)
CA (1) CA1168856A (en)
DE (1) DE3166071D1 (en)
DK (1) DK523181A (en)
GR (1) GR76306B (en)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2533754A1 (en) * 1982-09-23 1984-03-30 Comp Generale Electricite Method of manufacturing solar cells
US4451969A (en) * 1983-01-10 1984-06-05 Mobil Solar Energy Corporation Method of fabricating solar cells
JPH03502627A (en) * 1988-06-10 1991-06-13 エイエスイー・アメリカス・インコーポレーテッド Improved method of making contacts for solar cells
US5698451A (en) * 1988-06-10 1997-12-16 Mobil Solar Energy Corporation Method of fabricating contacts for solar cells
US5178685A (en) * 1991-06-11 1993-01-12 Mobil Solar Energy Corporation Method for forming solar cell contacts and interconnecting solar cells
US5557146A (en) * 1993-07-14 1996-09-17 University Of South Florida Ohmic contact using binder paste with semiconductor material dispersed therein
US7491442B2 (en) * 2003-05-02 2009-02-17 E. I. Du Pont De Nemours And Company Fibers and ribbons for use in the manufacture of solar cells
US7163596B2 (en) * 2002-06-07 2007-01-16 E. I. Du Pont Nemours And Company Fibers and ribbons for use in the manufacture of solar cells
EP1836879A2 (en) * 2004-12-27 2007-09-26 Quantum Paper, Inc. Addressable and printable emissive display
US7572334B2 (en) * 2006-01-03 2009-08-11 Applied Materials, Inc. Apparatus for fabricating large-surface area polycrystalline silicon sheets for solar cell application
JP2008166344A (en) * 2006-12-27 2008-07-17 Kyocera Corp Conductive paste for photoelectric conversion element, photoelectric conversion element, and method for producing photoelectric conversion element
US9018833B2 (en) 2007-05-31 2015-04-28 Nthdegree Technologies Worldwide Inc Apparatus with light emitting or absorbing diodes
US8846457B2 (en) 2007-05-31 2014-09-30 Nthdegree Technologies Worldwide Inc Printable composition of a liquid or gel suspension of diodes
US8674593B2 (en) 2007-05-31 2014-03-18 Nthdegree Technologies Worldwide Inc Diode for a printable composition
US9425357B2 (en) 2007-05-31 2016-08-23 Nthdegree Technologies Worldwide Inc. Diode for a printable composition
US8877101B2 (en) 2007-05-31 2014-11-04 Nthdegree Technologies Worldwide Inc Method of manufacturing a light emitting, power generating or other electronic apparatus
US9534772B2 (en) 2007-05-31 2017-01-03 Nthdegree Technologies Worldwide Inc Apparatus with light emitting diodes
US9419179B2 (en) 2007-05-31 2016-08-16 Nthdegree Technologies Worldwide Inc Diode for a printable composition
US8809126B2 (en) 2007-05-31 2014-08-19 Nthdegree Technologies Worldwide Inc Printable composition of a liquid or gel suspension of diodes
US8852467B2 (en) 2007-05-31 2014-10-07 Nthdegree Technologies Worldwide Inc Method of manufacturing a printable composition of a liquid or gel suspension of diodes
US8889216B2 (en) * 2007-05-31 2014-11-18 Nthdegree Technologies Worldwide Inc Method of manufacturing addressable and static electronic displays
US8456393B2 (en) 2007-05-31 2013-06-04 Nthdegree Technologies Worldwide Inc Method of manufacturing a light emitting, photovoltaic or other electronic apparatus and system
US9343593B2 (en) 2007-05-31 2016-05-17 Nthdegree Technologies Worldwide Inc Printable composition of a liquid or gel suspension of diodes
US8133768B2 (en) * 2007-05-31 2012-03-13 Nthdegree Technologies Worldwide Inc Method of manufacturing a light emitting, photovoltaic or other electronic apparatus and system
US8415879B2 (en) 2007-05-31 2013-04-09 Nthdegree Technologies Worldwide Inc Diode for a printable composition
US8309844B2 (en) * 2007-08-29 2012-11-13 Ferro Corporation Thick film pastes for fire through applications in solar cells
CN101981630A (en) * 2008-04-09 2011-02-23 E.I.内穆尔杜邦公司 Conductive compositions and processes for use in the manufacture of semiconductor devices
US8127477B2 (en) 2008-05-13 2012-03-06 Nthdegree Technologies Worldwide Inc Illuminating display systems
US7992332B2 (en) 2008-05-13 2011-08-09 Nthdegree Technologies Worldwide Inc. Apparatuses for providing power for illumination of a display object
ES2684721T3 (en) * 2013-04-02 2018-10-04 Heraeus Deutschland GmbH & Co. KG Particles comprising AI, Si and Mg in electroconductive pastes and preparation of photovoltaic cells

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4072771A (en) * 1975-11-28 1978-02-07 Bala Electronics Corporation Copper thick film conductor
GB1558764A (en) * 1976-11-15 1980-01-09 Ferranti Ltd Formation of contacts for semiconductor devices
US4190321A (en) * 1977-02-18 1980-02-26 Minnesota Mining And Manufacturing Company Microstructured transmission and reflectance modifying coating
US4172919A (en) * 1977-04-22 1979-10-30 E. I. Du Pont De Nemours And Company Copper conductor compositions containing copper oxide and Bi2 O3
US4163678A (en) * 1978-06-30 1979-08-07 Nasa Solar cell with improved N-region contact and method of forming the same

Also Published As

Publication number Publication date
CA1168856A (en) 1984-06-12
DK523181A (en) 1982-05-27
JPS57122582A (en) 1982-07-30
EP0052791A1 (en) 1982-06-02
EP0052791B1 (en) 1984-09-12
DE3166071D1 (en) 1984-10-18
US4347262A (en) 1982-08-31
GR76306B (en) 1984-08-04

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