JPS6247341B2 - - Google Patents
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- Publication number
- JPS6247341B2 JPS6247341B2 JP52145305A JP14530577A JPS6247341B2 JP S6247341 B2 JPS6247341 B2 JP S6247341B2 JP 52145305 A JP52145305 A JP 52145305A JP 14530577 A JP14530577 A JP 14530577A JP S6247341 B2 JPS6247341 B2 JP S6247341B2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- metal film
- black metal
- chamber
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
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- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
Description
【発明の詳細な説明】
本発明はカラー受像管の黒色金属皮膜形成方
法、特にフエースパネルの内面に形成された螢光
体層を覆う光反射性金属膜上に真空蒸着法によつ
て形成する黒色金属皮膜形成方法に関するもので
ある。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for forming a black metal film on a color picture tube, in particular, a method for forming a black metal film on a light reflective metal film covering a phosphor layer formed on the inner surface of a face panel by a vacuum evaporation method. The present invention relates to a method for forming a black metal film.
第１図はカラー受像管の一例を示す要部断面図
である。同図において、カラー受像管は、フエー
スパネル１の内面に塗布された螢光体層２に対向
してシヤドウマスク３が配置されており、電子銃
４より放射された電子ビーム５がシヤドウマスク
３の微細な孔を通り、シヤドウマスク３の孔に対
応する螢光体層２に射突させて画像を映出させ
る。この場合、シヤドウマスク３の孔を通過する
電子ビーム５の透過率は約15〜30％であり、残り
の70〜85％の電子ビーム５はシヤドウマスク３に
入射してシヤドウマスク３を加熱させ、熱変形を
起すことになる。この結果、映出された画像に色
ずれを発生することは一般に良く知られている。
したがつて、従来のカラー受像管においては、こ
の熱変形を軽減させるため、フエースパネル１内
面に形成された螢光体層２を覆う図示しない光反
射性金属膜上に熱線を吸収させる黒色金属皮膜６
を真空蒸着法によつて形成していた。 FIG. 1 is a sectional view of essential parts of an example of a color picture tube. In the figure, in the color picture tube, a shadow mask 3 is arranged opposite to a phosphor layer 2 coated on the inner surface of a face panel 1, and an electron beam 5 emitted from an electron gun 4 passes through the fine particles of the shadow mask 3. The image is projected by passing through the hole and hitting the phosphor layer 2 corresponding to the hole of the shadow mask 3. In this case, the transmittance of the electron beam 5 passing through the hole in the shadow mask 3 is about 15-30%, and the remaining 70-85% of the electron beam 5 enters the shadow mask 3, heats the shadow mask 3, and causes thermal deformation. will occur. It is generally well known that as a result, color shift occurs in the projected image.
Therefore, in conventional color picture tubes, in order to reduce this thermal deformation, a black metal that absorbs heat rays is placed on a light-reflective metal film (not shown) that covers the phosphor layer 2 formed on the inner surface of the face panel 1. Film 6
was formed by vacuum evaporation.
第２図は上記黒色金属皮膜の形成方法を説明す
るための装置の一例を示す要部構成図である。同
図において、７は第１図に示したフエースパネル
１を気密状態に保持させる真空槽、８は真空槽７
を所定の真空度に排気する真空ポンプ、９は真空
槽７と真空ポンプ８を連結する配管１０に装着さ
れた排気弁、１１は真空槽７に接続された大気導
入弁、１２は黒色金属を蒸着させる加熱装置によ
つて構成されている。 FIG. 2 is a diagram illustrating a main part of an example of an apparatus for explaining the method for forming the black metal film. In the figure, 7 is a vacuum chamber for keeping the face panel 1 shown in FIG. 1 in an airtight state, and 8 is a vacuum chamber 7.
9 is an exhaust valve attached to piping 10 connecting vacuum chamber 7 and vacuum pump 8, 11 is an atmosphere introduction valve connected to vacuum chamber 7, and 12 is a black metal It consists of a heating device for vapor deposition.
また、第３図は上記黒色金属皮膜の形成方法を
説明するための装置の他の一例を示す要部構成図
である。同図において、１３は上記フエースパネ
ル１を挿入する供給室、１４は黒色金属皮膜形成
室、１５はフエースパネル１に黒色金属皮膜６を
反応させる反応金属皮膜形成室を兼ね備えかつこ
のフエースパネル１を取り出す取出室、１６，１
７，１８，１９は上記各室の出入口に設けられた
真空弁、２０，２１，２２は供給室１３、形成室
１４、取出室１５の各室を排気する真空ポンプ、
２３，２４，２５は上記各室１３，１４，１５と
真空ポンプ２３，２４，２５との間を連結する配
管２６，２７，２８に装着された真空弁、２９，
３０，３１は上記各室に設けられたリーク弁によ
つて構成されている。 Moreover, FIG. 3 is a diagram showing the main part of another example of the apparatus for explaining the method of forming the black metal film. In the figure, 13 is a supply chamber into which the face panel 1 is inserted, 14 is a black metal film forming chamber, and 15 is a reactive metal film forming chamber in which the black metal film 6 is reacted with the face panel 1. Removal chamber, 16,1
7, 18, and 19 are vacuum valves provided at the entrances and exits of the respective chambers; 20, 21, and 22 are vacuum pumps for evacuating each of the supply chamber 13, the formation chamber 14, and the extraction chamber 15;
23, 24, 25 are vacuum valves attached to pipes 26, 27, 28 connecting each of the chambers 13, 14, 15 and the vacuum pumps 23, 24, 25, 29,
Reference numerals 30 and 31 are constituted by leak valves provided in each of the above-mentioned chambers.
このように構成された上記２種類の黒色金属皮
膜形成装置において、フエースパネル１が真空槽
７または黒色金属皮膜形成室１４の所定の位置に
配置された後、真空ポンプ８，２１によつて所定
の真空度である10-1Torr〜1Torrに排気し、所定
真空度に到達した時点で加熱装置１２を加熱して
蒸着を開始し、フエースパネル１内面の螢光体層
２を覆う図示しない光反射性金属皮膜上に黒色金
属皮膜６を蒸着形成していた。そして、この黒色
金属皮膜６は一般にアルミニウムが使用されてい
る。 In the two types of black metal film forming apparatuses configured in this way, after the face panel 1 is placed at a predetermined position in the vacuum chamber 7 or the black metal film forming chamber 14, it is moved to a predetermined position by the vacuum pumps 8, 21. The vacuum level is 10 -1 Torr to 1 Torr, and when the predetermined vacuum level is reached, the heating device 12 is heated to start vapor deposition, and a light (not shown) is applied to cover the phosphor layer 2 on the inner surface of the face panel 1. A black metal film 6 was formed by vapor deposition on the reflective metal film. The black metal film 6 is generally made of aluminum.
しかしながら、上記黒色金属皮膜の形成方法に
おいて、蒸着時の真空度は黒色金属皮膜６を形成
する上で極めて重要な要因であり、その真空度が
良好な場合は黒色にならず、金属光沢を有する白
色になり熱吸収効率が悪くなる。また、真空度が
悪い場合は黒色金属皮膜６の形成後の熱処理工程
にて容易に酸化されて白色となるため、シヤドウ
マスク３の熱変形の軽減の程度が悪くなる。した
がつて、蒸着時の真空度は、真空槽７または黒色
金属皮膜形成室１４の大きさあるいは被蒸着物で
あるフエースパネル１と蒸発源の距離等によつて
10-1Torr〜1Torr間の例えば２×10-1Torr〜４×
10-1Torrの極めて狭い範囲にのみその効果が得
られた。つまり、極めて狭い範囲の真空度におい
てのみ黒色金属皮膜６を形成することができた。 However, in the above method for forming a black metal film, the degree of vacuum during vapor deposition is an extremely important factor in forming the black metal film 6, and if the degree of vacuum is good, it will not turn black and will have a metallic luster. It becomes white and has poor heat absorption efficiency. In addition, if the degree of vacuum is poor, the black metal film 6 is easily oxidized and becomes white in the heat treatment step after formation, so that the degree of reduction in thermal deformation of the shadow mask 3 becomes worse. Therefore, the degree of vacuum during vapor deposition depends on the size of the vacuum chamber 7 or the black metal film forming chamber 14, the distance between the face panel 1, which is the object to be vaporized, and the evaporation source, etc.
Between 10 -1 Torr and 1 Torr, e.g. 2 x 10 -1 Torr - 4 x
The effect was obtained only in an extremely narrow range of 10 -1 Torr. In other words, the black metal film 6 could be formed only in an extremely narrow range of vacuum degrees.
また、黒色金属皮膜の形成方法において、黒色
金属皮膜はフエースパネル１の内壁面にのみ蒸着
形成されるのではなく、真空槽７または黒色金属
皮膜形成室１４の内壁面にも附着されることにな
り、多数個のフエースパネル１を１台の装置で蒸
着を繰り返し行なうため、上記真空槽７または黒
色金属皮膜形成室１４の内壁面などの不必要な部
分に蒸着積層されることになる。この結果、この
黒色金属皮膜はその表面積が大きくなつて気体吸
着性が良好となり、フエースパネル１を取り出す
際、真空槽７内を大気圧に戻すとき、真空槽７内
壁面に蒸着積層された黒色金属皮膜に気体が吸着
されることになる。そして、フエースパネル１の
蒸着を多数回繰り返すことによつて真空槽７およ
び黒色金属皮膜形成室１４内壁面の気体吸着性が
ますます増大することになり、真空槽７または黒
色金属皮膜形成室１４を所定の真空度に排気する
際、上記内壁面に吸着された気体のために長時間
の排気を要するようになる。このため、蒸着装置
１台当りの処理面数が低下するので、排気速度の
低下した時点で真空槽７内に蒸着して積層された
黒色金属皮膜を除去する必要があつた。つまり、
黒色金属皮膜の除去回数をできる限り少なくする
ことが装置を能率的に運用する上で必要であつ
た。そして上記排気速度の低下を改善しようとし
たものとしては、真空ポンプ８，２１の排気容量
を大きくすることによつて排気速度の低下を解決
したものが提案されているが、この場合には、内
壁面に黒色金属皮膜が附着しないうちに排気時間
が大幅に短かくなり所定の真空度の狭い範囲に調
整することが極めて困難となるとともに、真空度
が急速に10-1Torr以下となつてしまう不都合な
問題点を有していた。 In addition, in the method for forming the black metal film, the black metal film is not only deposited on the inner wall surface of the face panel 1 but also attached to the inner wall surface of the vacuum chamber 7 or the black metal film forming chamber 14. Since a large number of face panels 1 are repeatedly vapor-deposited using one device, they are deposited on unnecessary portions such as the inner wall surface of the vacuum chamber 7 or the black metal film forming chamber 14. As a result, this black metal film has a larger surface area and has better gas adsorption properties, so that when the face panel 1 is taken out and the inside of the vacuum chamber 7 is returned to atmospheric pressure, the black metal film deposited on the inner wall of the vacuum chamber 7 is removed. Gas will be adsorbed to the metal film. By repeating the vapor deposition of the face panel 1 many times, the gas adsorption properties of the inner wall surfaces of the vacuum chamber 7 and the black metal film forming chamber 14 are further increased. When evacuation to a predetermined degree of vacuum, the evacuation takes a long time because of the gas adsorbed on the inner wall surface. As a result, the number of surfaces to be processed per vapor deposition apparatus decreases, and it becomes necessary to remove the black metal film deposited and laminated in the vacuum chamber 7 when the exhaust speed decreases. In other words,
In order to operate the apparatus efficiently, it was necessary to reduce the number of times the black metal film was removed as much as possible. As an attempt to improve the reduction in pumping speed, a method has been proposed in which the reduction in pumping speed is solved by increasing the pumping capacity of the vacuum pumps 8 and 21, but in this case, Before the black metal film adheres to the inner wall surface, the evacuation time becomes significantly shorter, and it becomes extremely difficult to adjust the vacuum level within a narrow range, and the vacuum level quickly drops below 10 -1 Torr. However, there were some inconvenient problems.
したがつて、本発明の目的は上記の欠点を改善
するためになされたものであり、黒色金属皮膜を
高安定性でかつ高生産性に形成できるようにした
カラー受像管の黒色金属皮膜形成方法を提供する
ことにある。 Therefore, an object of the present invention was to improve the above-mentioned drawbacks, and to provide a method for forming a black metal film for a color picture tube, which enables the formation of a black metal film with high stability and high productivity. Our goal is to provide the following.
このような目的を達成するために本発明による
カラー受像管の黒色金属皮膜形成方法は、真空度
を10-1Torr以下にした後に一定量の気体を導入
し、所定の圧力に調整するようにしたものであ
る。以下図面を用いて本発明によるカラー受像管
の黒色金属皮膜形成方法について詳細に説明す
る。 In order to achieve this purpose, the method of forming a black metal film on a color picture tube according to the present invention involves reducing the degree of vacuum to 10 -1 Torr or less and then introducing a certain amount of gas to adjust the pressure to a predetermined level. This is what I did. The method for forming a black metal film on a color picture tube according to the present invention will be described in detail below with reference to the drawings.
第４図、第５図は本発明によるカラー受像管の
黒色金属皮膜形成方法の一例を説明するための黒
色金属皮膜形成装置の一例を示す要部構成図であ
り、第２図、第３図と同記号は同一要素となるの
でその説明は省略する。まず、第４図において
は、真空槽７にリーク弁３２を介して計量容器３
３、真空弁３４が連結されている。また、第５図
においては、黒色金属皮膜形成室１４にリーク弁
３２を介して計量容器３３、真空弁３４が連結さ
れている。 4 and 5 are main part configuration diagrams showing an example of a black metal film forming apparatus for explaining an example of a method for forming a black metal film on a color picture tube according to the present invention, and FIGS. Since the same symbol as , is the same element, the explanation thereof will be omitted. First, in FIG. 4, the measuring container 3 is connected to the vacuum chamber 7 via the leak valve 32.
3. A vacuum valve 34 is connected. Further, in FIG. 5, a measuring container 33 and a vacuum valve 34 are connected to the black metal film forming chamber 14 via a leak valve 32.
このように構成された形成装置において、まず
フエースパネル１を所定の位置に配置し、リーク
弁３２を閉じ、排気弁９，２４を開け、真空ポン
プ８，２１で排気し、真空槽７、黒色金属皮膜形
成室１４内を10-1Torr以下にする、ここで、予
め真空弁３４を開けて計量容器３３内に気体を充
填して真空弁３４を閉じておく。次に、排気弁
９，２４を閉じ、リーク弁３２を開け、真空槽
７、黒色金属皮膜形成室１４に気体を導入し、所
定の圧力を例えば0.2Torr〜0.3Torrの範囲に調整
する。この場合、計量容器３３の容量は予めリー
クさせたときに所定の真空度となるように設定さ
れている。 In the forming apparatus configured in this way, first, the face panel 1 is placed in a predetermined position, the leak valve 32 is closed, the exhaust valves 9 and 24 are opened, the vacuum pumps 8 and 21 are used to exhaust the air, and the vacuum chamber 7 is closed. The inside of the metal film forming chamber 14 is brought to 10 -1 Torr or less. Here, the vacuum valve 34 is opened in advance, gas is filled into the measuring container 33, and the vacuum valve 34 is closed. Next, the exhaust valves 9 and 24 are closed, the leak valve 32 is opened, gas is introduced into the vacuum chamber 7 and the black metal film forming chamber 14, and the predetermined pressure is adjusted to a range of, for example, 0.2 Torr to 0.3 Torr. In this case, the capacity of the measuring container 33 is set in advance so that a predetermined degree of vacuum is achieved when leakage occurs.
このような方法によれば、蒸着の繰り返しによ
つて発生する真空度および排気速度の低下は、真
空ポンプ８，２１の排気容量を十分に大きく選ぶ
とともに、排気速度の高速化にともなう内部圧力
の調整困難性は気体の一定量を導入することによ
つて圧力調整のバラツキを抑え、安定した蒸着雰
囲気を形成することができる。 According to this method, the decrease in the degree of vacuum and the pumping speed caused by repeated vapor deposition can be avoided by selecting the pumping capacity of the vacuum pumps 8 and 21 to be sufficiently large, and by reducing the internal pressure as the pumping speed increases. To overcome the difficulty of adjustment, by introducing a certain amount of gas, variations in pressure adjustment can be suppressed and a stable vapor deposition atmosphere can be formed.
なお、上記実施例においては、第５図に示した
形成装置に限定されるものではなく、反射金属皮
膜形成室を兼ねた取出口を黒色金属皮膜形成室と
供給室との間に配設した装置においても上記同様
の効果が得られることは明らかである。 In addition, in the above embodiment, the forming apparatus is not limited to the one shown in FIG. 5, and an outlet that also serves as a reflective metal film forming chamber is arranged between the black metal film forming chamber and the supply chamber. It is clear that the same effects as described above can be obtained in the apparatus as well.
以上説明したように、本発明によるカラー受像
管の黒色金属皮膜形成方法によれば、安定した蒸
着雰囲気を容易に形成することができ、これによ
つて黒色金属皮膜の生産効率を大幅に向上させる
ことができるなどの極めて優れた効果が得られ
る。 As explained above, according to the method for forming a black metal film on a color picture tube according to the present invention, a stable vapor deposition atmosphere can be easily formed, thereby greatly improving the production efficiency of the black metal film. Extremely excellent effects can be obtained.
第１図はカラー受像管の一例を示す要部断面
図、第２図、第３図は従来のカラー受像管の黒色
金属皮膜形成装置の一例を示す要部構成図、第４
図、第５図は本発明によるカラー受像管の黒色金
属皮膜形成方法を説明するための黒色金属皮膜形
成装置の一例を示す要部構成図である。
１……フエースパネル、２……螢光体層、３…
…シヤドウマスク、４……電子銃、５……電子
銃、６……黒色金属皮膜、７……真空槽、８……
真空ポンプ、９……排気弁、１０……配管、１１
……導入弁、１２……加熱装置、１３……供給
室、１４……黒色金属皮膜形成室、１５……取出
口、１６，１７，１８，１９……真空弁、２０，
２１，２２……真空ポンプ、２３，２４，２５…
…真空弁、２６，２７，２８……配管、２９，３
０，３１，３２……リーク弁、３３……計量容
器、３４……真空弁。
FIG. 1 is a sectional view of a main part showing an example of a color picture tube, FIGS. 2 and 3 are main part configuration diagrams showing an example of a conventional black metal film forming apparatus for a color picture tube, and FIG.
5 are main part configuration diagrams showing an example of a black metal film forming apparatus for explaining the method for forming a black metal film on a color picture tube according to the present invention. 1... Face panel, 2... Fluorescent layer, 3...
...Shadow mask, 4...Electron gun, 5...Electron gun, 6...Black metal film, 7...Vacuum chamber, 8...
Vacuum pump, 9... Exhaust valve, 10... Piping, 11
...Introduction valve, 12...Heating device, 13...Supply chamber, 14...Black metal film forming chamber, 15...Outlet port, 16, 17, 18, 19...Vacuum valve, 20,
21, 22... Vacuum pump, 23, 24, 25...
...Vacuum valve, 26,27,28...Piping, 29,3
0, 31, 32...Leak valve, 33...Measuring container, 34...Vacuum valve.
Claims (1)
槽にリーク弁を介して計量容器、真空弁を連結し
て設け、前記排気弁を開放し真空ポンプにより真
空槽内を10-1Torr以下に排気した後、前記排気
弁を閉じ、予め前記真空弁を開放し前記計量容器
の容量に対応して充填した一定量の気体をリーク
弁を開けて導入することによつて前記真空槽内の
真空度を0.2〜0.3Torrに調整した後に真空蒸着を
行なつたことを特徴とするカラー受像管の黒色金
属皮膜形成方法。1. A measuring container and a vacuum valve are connected via a leak valve to a vacuum chamber to which a vacuum pump is connected via an exhaust valve, and the exhaust valve is opened and the inside of the vacuum chamber is reduced to 10 -1 Torr or less using the vacuum pump. After evacuation, the exhaust valve is closed, and the vacuum in the vacuum chamber is reduced by opening the leak valve and introducing a certain amount of gas, which has been filled in accordance with the capacity of the measuring container by opening the vacuum valve in advance. A method for forming a black metal film on a color picture tube, characterized in that vacuum deposition is performed after adjusting the temperature to 0.2 to 0.3 Torr.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14530577A JPS5477568A (en) | 1977-12-02 | 1977-12-02 | Black metal film forming method for color picture tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14530577A JPS5477568A (en) | 1977-12-02 | 1977-12-02 | Black metal film forming method for color picture tube |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5477568A JPS5477568A (en) | 1979-06-21 |
| JPS6247341B2 true JPS6247341B2 (en) | 1987-10-07 |
Family
ID=15382069
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14530577A Granted JPS5477568A (en) | 1977-12-02 | 1977-12-02 | Black metal film forming method for color picture tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5477568A (en) |
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| CN103133405A (en) * | 2011-11-24 | 2013-06-05 | 高玉森 | Mud sand pump impeller provided with supra polymer weight polyethylene protection layer |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS579185B2 (en) * | 1973-08-13 | 1982-02-19 |
-
1977
- 1977-12-02 JP JP14530577A patent/JPS5477568A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5477568A (en) | 1979-06-21 |
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