JPS628168B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a cleaning brush used for cleaning the surfaces of glass, various ceramics, metals, etc.

[Prior art]

Generally, this type of cleaning brush has a brush made of animal hair or a large number of thin resin fibers, and the brush is made of the above-mentioned glass, ceramics, etc.
Or rotate it by contacting the surface of metal etc.
Alternatively, the surface of these various materials can be cleaned by moving it back and forth and left and right.

By the way, many people skilled in the art recognize that when such a cleaning brush is considered from the viewpoint of cleaning efficiency, it cannot be said that the cleaning efficiency of the cleaning brush is excellent.

In other words, since such a cleaning brush simply scatters dirt and dust (collectively referred to as dust) adhering to the various materials mentioned above, this scattered dust is returned to the above-mentioned materials. There is a high possibility that it will adhere to the material surface. In reality, such a phenomenon occurs that the scattered dust re-adheres to the material and reduces the efficiency of the cleaning operation.

Another major reason why the cleaning efficiency of such a cleaning brush cannot be improved is considered to be the combination of the above-mentioned materials and dust due to so-called Coulomba. In other words, when the above-mentioned materials are particularly glass or ceramics, they are often electrically charged (sometimes charged due to friction with the brushes), and the dust itself is also electrically charged. After all, these materials and dust are often unexpectedly strongly combined by the Coulomba. Therefore, it is difficult to completely remove the same dust by the above-described cleaning method using this cleaning brush. Further, the above-mentioned phenomenon of re-deposition of dust is largely due to this coulomba.

As described above, it is nearly impossible to completely remove dust adhering to the surfaces of the various materials described above using the conventional cleaning brushes described above. In particular, this problem is serious in cleaning brushes used in semiconductor mask cleaning machines, etc., and some kind of countermeasure has been desired for the structure or cleaning method.

[Purpose of the invention]

SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems and provide a cleaning brush that can efficiently and completely remove any dust.

[Structure of the invention]

In order to achieve the above object, the present invention comprises a portion of the brush made of a large number of thin fibrous conductors, which are appropriately grounded, so that when the brush is brought into contact with the surface of the material, The electric charge present on the material surface and the dust adhering to it is automatically removed, and the brush support (which is a conductor and is actually a conductor and is in fact grounded through which the brush is grounded) supports the brush. one or more holes are provided in the brush support, and an air suction device is provided via a suitable surrounding means that surrounds the brush support from behind, and the dust that has been neutralized and removed by the brush is provided in the brush support. suction is forced through the hole and the surrounding means.

〔Effect of the invention〕

Therefore, according to the cleaning brush of the present invention, no matter what material is being cleaned or what kind of dust is attached to it, it can be cleaned without causing the dust to re-adhere to the material. It can be removed effectively and with high efficiency.

〔Example〕

FIG. 1 shows an embodiment of a cleaning brush according to the present invention.

First, the structure of the cleaning brush of this embodiment will be explained.

In FIG. 1, 1 is a brush made of a large number of thin fibrous conductors, and 2 is a conductive brush support that maintains electrical continuity with the brush 1 and supports it. The support 2 is electrically grounded by a suitable grounding device 3. That is, the brush 1 is also integrally grounded via the support 2. Furthermore, the brush support 2
has a plurality of holes H as shown in the same figure,
It has a structure that allows dust to pass through which is sucked during the cleaning operation of the brush of the same embodiment, which will be described later. In the figure, 4 is a housing that surrounds the brush support 2 from behind, and the other end of the housing 4 is mechanically connected to a vacuum pump 6, which is an intake device, through a suitable pipe 5. . Also, 7 in the figure
is a filter, and as shown in the figure, the pipe 5
It functions to actively collect dust that is interposed therein and sucked during the cleaning operation of the brush of the same embodiment, which will be described later. Note that FIG. 1b shows the structure of the brush 1 and the brush support 2 viewed from the bottom, and the cross-sectional structure taken along line AA in FIG. 1 and the brush support 2.

Next, a cleaning operation using the cleaning brush of this embodiment will be explained.

First, as an operation when using this cleaning brush, the vacuum pump 6 is driven. This starts suction, and the air around the brush 1 and the air in the housing 4 and tube 5 rapidly flow in the manner shown by the broken line arrows in FIG. 1a. As a subsequent operation, the brush 1 is brought into contact with the surface of the material to be cleaned (not shown), and the brush 1 is moved appropriately to remove dust adhering to the surface. As a result, even if the material or dust is electrically charged, as soon as the brush 1 comes into contact with the surface of the material, this electrical charge is automatically grounded, and the dust is removed by the brush 1. It is in a state where it is easy to transport, and furthermore, due to the above-mentioned movement of the brush 1 and the above-mentioned suction by the vacuum pump 6,
This neutralized dust is easily removed from the surface of the material and is efficiently collected into the filter 7 through the holes H of the brush support 2. Of course,
Once collected, the dust will not re-deposit on the material surface.

In this embodiment, the vacuum pump 6 is used as the suction device, but any other device having a similar suction function may be used.

Further, the number and size of the holes H provided in the brush support 2 may be arbitrarily determined depending on the type of dust to be removed, and the present invention can be realized with at least one hole.

Further, in this embodiment, the filter 7 is used to collect the removed dust, but the present invention can also be realized with a configuration in which the filter 7 is omitted.

Furthermore, the manner in which the housing 4 and the vacuum pump 6 are connected is arbitrary, and is not limited to the configuration shown in the drawings.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram showing the construction of an embodiment of a cleaning brush according to the present invention. DESCRIPTION OF SYMBOLS 1...Brush, 2...Brush support body, 3...Grounding device, 4...Housing, 5...Pipe, 6...Vacuum pump,
7...Filter, H...hole.

Claims (1)

[Claims] 1. A brush made of a large number of thin fibrous conductors, and a conductive brush support that maintains electrical continuity with and supports the brush, and has one or more holes in the gaps between the brushes. , a means for grounding the brush support, a surrounding means for surrounding the brush support from behind, and a means for discharging dust that has been neutralized and removed by the brush into the holes of the brush support and the surrounding means. A cleaning brush equipped with a suction device and a suction device.