JPS6310581B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention provides a thin plate such as a disc-shaped silicon wafer that serves as a base for forming an integrated circuit;
The present invention relates to a device for attaching a ring, such as a circular ring, which serves as a carrier jig for the thin plate, to a single adhesive film.

Previously, the attachment of the film to the ring-shaped carrier jig as described above and the attachment of silicon wafers, etc. to the film were done by hand, and the film protruding from around the ring was also cut by hand. Therefore, it is extremely time-consuming.
In addition, it was difficult to apply the material without wrinkles, and it required skill.

The object of the present invention is to provide an apparatus that can continuously and automatically perform the operations of attaching a film to a ring, attaching a thin plate to the film, and cutting the film along the ring as described above. After pasting a tape made of heat-shrinkable adhesive film onto the ring,
The entire operation of heating the tape to tension it inside the ring, cutting out the tape on the top of the ring, winding up the unnecessary tape, pulling the ring to its position, and pasting the thin plate to the tape inside the ring is completed. This is done automatically.

The apparatus of the present invention will be explained below based on the embodiments shown in the accompanying drawings.

In the figure, reference numeral 1 denotes a metal circular ring serving as a carrier jig, and the rings 1 are stacked at regular intervals in a magazine 2 as shown in FIG. As shown in FIG. 3, this magazine includes a side wall 4 that contacts the straight edge 3 on one side of the ring 1, a front wall 5 and a rear wall 6 that contact the front and rear walls, and front and rear side pieces 7, 8 that contact the outer periphery of the other side. At the bottom of this magazine 2 there is a receiving plate 9 that can move forward and backward, and one ring 1 on this receiving plate 9
A slit 10 is formed in the lower part of the front wall 5 through which the front wall 5 can advance forward.

The sliding part 11 at the bottom of the receiving plate 9 is a support base 12.
It is slidably attached to a pair of guide frames 13 in the front and rear directions provided in the front and back, and is moved forward and backward by an air cylinder 14, and a pair of left and right push pieces 1 are mounted on the receiving plate 9 as shown in FIG.
5 is fixed and brought into contact with the rear side of the ring 1 on the receiving plate 9.As shown in FIG. It is made so that you do not press the button.

Therefore, when a plurality of rings 1 are stacked and stored in the magazine 2 as shown in FIG. When the ring 1 is pushed forward from the slit 10 by being pushed by the push piece 15 and advances to a certain position, the receiving plate 9 returns to its original position leaving the ring 1 behind and repeats the stopping action.

Reference numeral 16 in FIG. 1 is a frame that supports the entire apparatus of this invention, the support stand 12 is fixed on this frame 16, and 17 is a vertical machine box provided on the side of the frame 16.

In front of the slit 10, as shown in FIG.
are arranged above and below, and these rollers 24 and 25 are intermittently driven in the direction of the arrow in FIG. 1 by a drive mechanism provided in the machine box 17. In addition, the upper sticking roller 24
The rear end is attached to a singing arm 28 attached to the machine box 17 as shown in FIG. 1, and the front end of this arm 28 is attached to a spring 2.
9 to press it onto the ring 1 on the receiving roller 25, and both rollers 24 and 25 are made of silicone rubber with a hardness of 60°.

23 is a wide tape stretched over the ring 1, and is made of a heat-shrinkable film with an adhesive surface on one side.

This tape 23 is supplied from an upper reel (not shown), passes through a guide roller 30 attached to the machine box 17, and is supplied between rollers 24 and 25 with the adhesive side facing down. Further, this tape 23 has a separator 31 stacked thereon to prevent wrinkles, and this separator 31 is wound onto an upper take-up reel (not shown) via a guide roller 32 opposite to a guide roller 30.

Therefore, one ring 1 pushed out by the pushing piece 15 as described above is activated under the condition that it is pushed between the lower side of the sticking roller 24 and the receiving roller 25, and the first ring 1 is pushed out by the pushing piece 15.
Upper and lower rollers 24 and 25 rotate in the direction of the arrow in the figure.
By moving the tape 23 forward, the tape 23 is attached to the upper surface of the ring 1, and the ring 1 is moved forward together with the tape 23.

Reference numeral 33 in FIG. 4 denotes an air cylinder, which is fixed to a bracket 34 attached to the machine box 17, and a cutting means B is attached to an elevating frame 35 fixed to the piston rod of this air cylinder 33.

As shown in FIGS. 1 and 4, this cutter arm 39, which swings about a shaft 38 as a fulcrum, is attached to a rotating frame 37 driven by a gear motor 36 fixed on an elevating frame 35. A freely rotating disc-shaped cutter 27 is attached to the tip of the arm 39, and the tip of the arm 39 is pressed down by a spring 40.

Also, a vertical shaft 4 fixed at the center of the rotating frame 37
A disc-shaped presser plate 42 is rotatably attached to the lower end of the rotating frame 37, and a circular ring-shaped rubber 43 is attached to the lower outer circumference of the presser plate 42. A roller 44 is provided at the lower part to be in contact with the presser plate 42.

C in FIG. 1 is a heating means, which is provided with a heater 47 such as an electric heater that is raised and lowered by an air cylinder 46 inside a cylindrical heater cover 45 fixed to the frame 16. Further, on the outside of the heater cover 45, a circular annular support stand 18 supported by a bracket 48 is provided to support the ring 1 fed by the rollers 24 and 25.

Therefore, an appropriate detector detects that the ring 1 to which the tape 23 is attached as described above has come onto the support stand 18 together with the tape 23, and the rollers 24, 2
5 and the tape 23 stop, the cylinder 33 shown in FIG. 4 is activated at the same time to lower the lifting frame 35, which is in the raised position as shown in FIGS. 43 presses the tape 23 on the ring 1 together with the ring 1 onto the support base 18 and stops.

On the other hand, the heater 47 also rises under the action of the cylinder 46, presses against the lower surface of the support base 18, is energized, generates heat, and heat-shrinks the tape 23 stretched inside the ring 1 to make it taut, thereby eliminating wrinkles. .

Further, as described above, when the ring 1 moves on the support stand 18 together with the tape 23 and stops, and some detection means detects that the ring 1 is fixed on the support stand 18, the gear motor 36 starts. ,
The outer blade of the cutter 27 is attached to the film 2 on the ring 1.
It rotates around the shaft 41 while cutting 3',
During this time, the shaft 41 and rollers 44 rotate, but the presser plate 42
It doesn't turn. In order to completely cut the film 23', the cutter 27 rotates twice, the gear motor 36 stops, the cylinder 33 works, the elevating plate 35 rises, the cutting means B leaves the ring 1, and the heater 47 also descends.

Reference numerals 19 and 20 in FIG. 1 denote a pair of upper and lower take-up rollers of the pull-out means D provided in front of the cutting means, which are driven in the direction of the arrow in FIG. 1 by a drive mechanism provided within the machine box 17. Further, the upper take-up roller 19 is attached to a swinging arm 49 attached to the machine box 17, and is pressed onto the lower roller 20 by an appropriate pressing mechanism, but this roller 20 is attached to the rear of the conveyor 22. .

Therefore, as described above, the cutter 27 is placed on the ring 1.
The disc-shaped film 23' cut and pasted onto the ring 1 is moved forward together with the ring 1 onto the conveyor 22, and the remaining perforated tape 2
3 faces upward along the upper take-up roller 19, passes through a guide roller 61, and is wound onto a take-up reel (not shown).

The conveyor 22 of the drawer means D has pulleys 5 at both ends of a moving frame 49 that moves back and forth as shown in FIG.
0, a driving pulley 51 at the lower center thereof, and a plurality of thin endless belts engaged with guide pulleys on both sides thereof.

52 in Fig. 1 is a pair of left and right movable positioning frames;
It advances in front and behind the ring 1 that has been pulled out on the conveyor 22 to accurately maintain the position of the ring 1, and after a certain period of time moves to the side so as not to impede the movement of the ring 1. A thin plate pasting means H is provided in this portion.

Reference numeral 55 in FIGS. 2 and 5 to 7 is a magazine provided on the frame 16, and a large number of thin plates 5 are formed in a large number of grooves 66 provided in multiple stages inside both side walls.
They are stacked at regular intervals by engaging the outer peripheries of 6.

The upper part of the frame 16 at the attachment part of the magazine 55 is open, and a support plate 54 is provided inside the frame 16 in this part. This support plate is provided with a deep recess 57 from the upper end, and a horizontal support stand 58 that moves up and down within this recess 57 is provided. This stand 58 is the support plate 5
4, moves up and down along the support column 53 provided on the side of the figure 4, lowers intermittently at a fixed pitch from the top end to a fixed position by a drive mechanism (not shown), and then rises to the original height. It is.

Reference numeral 53' denotes a pair of left and right guide plates fixed to the upper surface of the support base 58, which are located on both sides of the support plate 54 as shown in FIG.

Reference numeral 59 in FIGS. 5 and 6 denotes a pair of left and right endless belts, which are passed through a plurality of groove pulleys provided above and below on both sides of the support plate 54 and the recess 57, and then passed on both sides of the support plate 54 in front of the recess 57. The pulley is driven by an appropriate drive device so that the belt 59 runs on the upper pulley in the direction of the arrow.

The belt 59 is located near the upper end of the front part of the support plate 54.
There is a shaft 61 of a pulley 60 that receives the folded part at the tip of the shaft 61, and the middle of a pair of left and right levers 62 is swingably attached to this shaft 61. It is provided. Each of the groove pulleys 60 has two grooves as shown in FIG. 6, a belt 59 is engaged with the inner groove, and a pair of left and right endless belts 64 are engaged with the outer groove and the groove pulley 63. The left and right levers 62 are integrally connected by a frame 65, and the rear side of one lever 62 is connected to an air cylinder 67 attached to the support plate 54 so that the lever 62 can swing.

E in FIGS. 5, 6, and 8 is a pre-alignment section, and 68 is a lever whose middle part is swingably attached to one side of the support plate 54 below the one lever 62. A groove pulley 71 is provided at the front end of the pulley 71 to be rotated around a vertical axis by a drive device 70 such as a motor, and a mounting base 72 is provided from the front of the lever 68 downward toward the front of the lever 62. As shown in Fig. 9, three rotating rods 73, 7
4 and 75 are provided, and an endless belt 76 is engaged with the grooved pulley at the lower end of each of these rods and the grooved pulley 71, so that the rotating rods 73, 74, and 75 rotate as shown by the arrows in FIG. Then, move the center rotating rod 74 slightly toward the front.

Further, the lever 68 can be swung up and down by an air cylinder (not shown).

In this configuration, as shown in FIG. 7, when a magazine 55 in which a large number of thin plates 56 are stacked is placed on a guide plate 53', the lowest thin plate 56 contacts the belt 59 and is sent forward by the belt 59. It is fed onto a belt 64 which is approximately horizontal. At this time, the upper ends of the three rotating rods 73, 74, 75 are protruding above the belt 64 as shown in FIG. be in contact with thin plate 56
In the case of arc-shaped edges, all the rods 7 as shown in Figure 10.
3, 74, and 75 are in contact with the thin plate 56, so the thin plate 56
is turned in the direction of the two rods 74, 75. In this way, the thin plate 56 rotates, and its straight edge 77
4, 75, the rod 74 is separated from the straight edge 77 as shown in FIG. 11, and the two rods 73, 75 in opposite rotation directions touch, so that the thin plate 56 is moved away from the straight edge 77.
Stop with 7 facing forward.

When the thin plate 56 hits the rods 73 and 75 and stops, the air cylinder 67 is activated by a signal from a timer, the lever 62 is moved, the belt 64 is slightly lowered forward, and at the same time the driving cylinder of the lever 68 is activated to move the mounting base 72. Lower each rotating rod 73, 74, 75
and its upper end is lower than the belt 64,
The thin plate 56 advances forward and downward along the belt 64,
The front straight edge 77 is moved onto the fine adjustment table 80 of the next alignment section F as shown by the chain line in FIG.

As shown in FIGS. 2 and 8, around the table 80 there is a movable fine adjustment piece 81 driven by an air cylinder, an electromagnet, etc., and each piece 81 is placed around the thin plate 56 placed on the table 80. After accurately and finely adjusting the direction of the thin plate 56 on the table, the thin plate 56 is moved back from the table 80.

However, the mechanisms of the pre-alignment section E and the alignment section F may be other than the illustrated example.

G is a thin plate supply means, which includes a guide rail 82 provided from the front of the fine adjustment table 80 toward the thin plate pasting means H, and a moving table 83 that moves along this rail 82 by an appropriate drive device. It consists of a suction and inversion table 84 made of a thin plate provided on the top of the table.
4 is rotatable around a shaft 85.

This reversing table 84 is hollow, and has a suction surface 8 that becomes the upper surface when it is on the moving table 83 as shown by the solid line in FIG.
6 is provided with a large number of suction holes, and the inside of the inversion table 84 is communicated with a vacuum suction device (not shown) through a flexible pipe, so that vacuum suction can be performed as necessary using a solenoid valve or the like.

Further, since the reversing table 84 is also rotated by an air cylinder or the like, the thin plate 56 is positioned on the fine adjustment table 80 as shown in FIG.
Under the condition that the movable table 83 returns to the front of 0, the reversing table 84 rotates half a turn and overlaps the fine adjustment table 80 as shown by the chain line in FIG.

Then, the vacuum suction works to move the thin plate 56 to the suction surface 8.
6, the suction surface 86 turns upward by 180 degrees and returns to its original position as shown in Figure 8.
The thin plate 56 is placed on the table 84 with the thin plate 56 adsorbed thereon.

The guide rail 82 reaches below the sticking means H as shown in FIG. 12, and the moving table 83 enters after the conveyor 22 has retreated. As shown in FIG. 12, the adhesion means H consists of an adsorption device 88 and an air cylinder 89 for raising and lowering the adsorption device. The adsorber 88 has a hollow disk shape with an open bottom, communicates with a vacuum suction device through a flexible tube, and has an annular rubber gasket 90 at the lower end of the peripheral wall. Further, the strength of the vacuum suction inside the adsorber 88 can be adjusted, and the pressure can also be increased.

In this configuration, as described above, the take-up roller 1
Under the condition that the ring 1 sent onto the conveyor 22 from between 9 and 20 is accurately positioned by the positioning frame 52, the cylinder 89 works and the suction device 88 descends, and the outer periphery of the film 23 stretched on the ring 1 is moved. The packing 90 is in close contact with the upper surface of the part, and at the same time the adsorber 88
Since the inside becomes negative pressure, the ring 1 and the film 23' are adsorbed by the adsorber 88. However, the suction force is set to a level that does not significantly deform the film 23'.

In this way, the adsorber 88 adsorbs the ring 1, and at the same time, the adsorber 88 rises due to the action of the cylinder 89.
Remove ring 1 from conveyor 22. Under the condition that the ring 1 is separated from the conveyor 22, the moving frame 49 moves to the right, and the conveyor 22 is retracted from the thin plate pasting means H.

Under the condition that the conveyor 22 is retracted from the thin plate pasting means H as described above, the moving table 83, which was in the position shown in FIG. 2, moves below the suction device 88 and stops. At this time, as shown in FIG. 12, the thin plate 56 adsorbed on the reversing table 84 is made to be exactly concentric with the ring 1.

Then, when the cylinder 89 works and the suction device 88 descends again, the ring 1 at the lower end of the suction device 88 is located on the outer periphery of the thin plate 56, and the film 23' covers the thin plate 56, as shown in FIG. In this state, when the pressure inside the adsorber 88 is made slightly higher than atmospheric pressure, the film 23' is pressed against the thin plate 56, and the thin plate 56 is stuck to the film 23' by its adhesive surface.

Next, the suction of the thin plate 56 by the reversing table 84 is released, and the inside of the suction device 88 is made negative pressure, and the cylinder 8 is
9 is activated to raise the suction device 88, the ring 1, film 23', and thin plate 56, which are integrated together, are lifted away from the inversion table 84 together with the suction device 88.

Under these conditions, the moving table 83 returns to its original position as shown in FIG. 2, and then the moving frame 49 also returns to its original position as shown in FIG. It rises after being placed on top.

FIG. 1 shows the front magazine support means of the frame 16. This support means is provided with a base frame fixed to the frame 16 and an elevating table 92 that is raised and lowered by an elevating mechanism 91.A magazine 87 for storing rings is placed on this elevating table 92. They are as shown in FIGS. 14 and 15.

That is, the magazine 87 has a pair of left and right side plates 93.
The upper part of the ring 1 is integrally connected by a plurality of horizontal connecting rods 94 and an upper reinforcing member 95, and the opposite sides of the side plates 93 have a large number of grooves 9 into which both sides of the ring 1 fit.
6 are formed at regular intervals.

In the magazine support means described above, the lifting platform 92 is initially at the lowest position, and at this time the magazine 87
The uppermost groove 96 is flush with the upper surface of the conveyor 22. Therefore, the ring 1 sent out by the conveyor 22 enters the magazine 87, and both sides of the ring 1 enter the uppermost groove 96.

In this way, under the condition that the ring 1 is supported by the uppermost groove 96, the elevating mechanism 91 operates and the magazine 8
The second groove 96 from the top of 7 is aligned with the top surface of the conveyor 22.

By repeating this action, the disc-shaped film 23'
The ring 1 to which the thin plate 56 is attached is the magazine 87.
When the inside of the magazine 87 is full of rings 1, the lifting table 92 is lowered and another empty magazine 87 is placed thereon.

Note that when the moving frame 49 of the conveyor 22 moves and the conveyor 22 is retracted from the thin plate pasting means H, the front part of the conveyor 22 enters the magazine 87, but the ring 1 in the magazine 87 is There is no problem because there is nothing missing. Further, the center portion of the lifting platform 92 is also recessed downward as shown in FIG. 15 so that there is no problem even when the conveyor 22 enters.

The operating conditions of each cylinder, motor, etc. during the above operation are obtained from signals from position detection sensors, timers, etc. provided at various locations.

This invention includes a tape adhering means for adhering a tape made of a heat-shrinkable adhesive film with the adhesive side facing down to the upper surface of a ring that is intermittently sent out as described above; a heating means for tensioning the tape by heating the tape to heat shrink it; a cutting means for cutting out the tape on the ring; a winding means for winding up the unnecessary tape after it has been cut out; A pull-out means for pulling out a ring with a film stretched on its upper surface to a fixed position, a pre-alignment section that keeps the thin plate that is intermittently delivered in a substantially constant direction, and the direction of the thin plate that is set in a substantially constant direction by this pre-alignment section. an alignment section that finely adjusts the orientation of the thin plate, and a thin plate supply means that feeds the thin plate, which has been oriented accurately by the alignment section, to the lower part of the ring in the fixed position; It consists of a thin plate sticking means that attaches the thin plate fed into the lower part of the machine to the film attached to the ring waiting in a fixed position, so if it is done manually, it is very time consuming and requires skill. The film can be pasted and cut out automatically, quickly, and accurately on the ring that had previously been attached to the ring.Moreover, the film is heat-shrinkable and is heated by a heating device to shrink and tighten it. Strength is improved. Therefore, when attaching the thin plate to the film by vacuum suctioning the ring after attaching the film,
Although the film is lifted by vacuum suction, the recovery property at this time can be improved, and therefore the speed of the thin plate pasting operation can be increased, and productivity can be improved. Further, by setting the thin plate in a fixed direction in advance in the pre-alignment section and then finely adjusting the direction in the next alignment section, there is an effect that the ring and the thin plate can be bonded together with high precision.

[Brief explanation of the drawing]

Fig. 1 is a partially longitudinal side view showing an embodiment of the device of the present invention, Fig. 2 is a plan view of the same as above, Fig. 3 is a plan view of the ring magazine, and Fig. 4 is a longitudinal sectional front view of the main part of the cutting means. Figure 5 is a side view of the thin plate magazine support section and the vicinity of the pre-alignment section, Figure 6 is a plan view of the same as above, Figure 7 is an enlarged vertical cross-sectional view along the line of Figure 5, and Figure 8 is the pre-alignment section. FIG. 9 is an enlarged plan view of the main part of the pre-alignment section, FIG. 10 and FIG.
FIG. 13 is an enlarged vertical sectional front view of each state of the thin plate pasting means, FIG. 14 is a partially cross-sectional plan view of the vicinity of the ring storage magazine after film pasting, and FIG. 15 is a front view of the same magazine. 1...Ring, 23...Tape, 23'...Film, 56...Thin plate, A...Tape sticking means,
B... Cutting means, C... Heating means, D... Drawing means, E... Pre-alignment section, F... Alignment section, G... Thin plate supply means, H... Thin plate sticking means.

Claims (1)

[Claims] 1. A pasting means for pasting a tape made of a heat-shrinkable adhesive film with the sticky side facing down on the top surface of the ring that is intermittently sent out, and a heat-shrinkable film that heats the tape pasted onto the ring. a heating means for tensioning the tape by stretching the tape, a cutting means for cutting out the tape on the ring, a winding means for winding up the unnecessary tape after being cut out, and a ring on the top surface of which a film cut out from the tape is stretched. a pre-alignment section that keeps the intermittently fed thin plates in a nearly constant orientation; and a pre-alignment section that finely adjusts the orientation of the thin plates that are now in a nearly constant orientation. a thin plate feeding means for feeding the thin plate accurately oriented by the alignment part to the lower part of the ring in the fixed position; A ring and thin plate bonding device comprising a thin plate sticking means for bonding a thin plate to a film attached to a ring waiting in a fixed position.