JPH0158067B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention provides a thin plate such as a disc-shaped silicon wafer that serves as a base for forming an integrated circuit;
The present invention relates to a device for attaching a ring, such as a circular ring, which serves as a carrier jig for the thin plate, to a single adhesive film.

Previously, the attachment of the film to the ring-shaped carrier jig as described above and the attachment of silicon wafers, etc. to the film were done by hand, and the film protruding from around the ring was also cut by hand. Therefore, it is extremely time-consuming.
In addition, it was difficult to apply the material without wrinkles, and it required skill.

The object of the present invention is to provide an apparatus that can continuously and automatically perform the operations of attaching a film to a ring, attaching a thin plate to the film, and cutting the film along the ring as described above. For this purpose, the tape is stretched and pasted onto the thin plate and ring on the stand waiting in a fixed position, then the tape is cut out on the top of the ring, the unnecessary tape is wound up, and then the ring is removed. The operation of sending it out to a predetermined position is fully automatic.

The apparatus of the present invention will be explained below based on the embodiments shown in the accompanying drawings.

In the figure, reference numeral 1 denotes a metal circular ring serving as a carrier jig, and the rings 1 are stacked at regular intervals in a magazine 2 as shown in FIG. As shown in FIG. 3, this magazine includes a side wall 4 that contacts the straight edge 3 on one side of the ring 1, a front wall 5 and a rear wall 6 that contact the front and rear walls, and front and rear side pieces 7, 8 that contact the outer periphery of the other side. At the bottom of this magazine 2 there is a receiving plate 9 that can move forward and backward, and one ring 1 on this receiving plate 9
A slit 10 is formed in the lower part of the front wall 5 through which the front wall 5 can advance forward.

The sliding part 11 at the bottom of the receiving plate 9 is a support base 12.
It is slidably attached to a pair of guide frames 13 in the front and rear directions provided in the front and back, and is moved forward and backward by an air cylinder 14, and a pair of left and right push pieces 1 are mounted on the receiving plate 9 as shown in FIG.
5 is fixed and brought into contact with the rear side of the ring 1 on the receiving plate 9. As shown in FIG. It is made so that you do not press the button.

Therefore, when a plurality of rings 1 are stacked and housed in the magazine 2 as shown in FIG. is pushed by the pushing piece 15 and advances from the slit 10, and when the ring 1 advances to a certain position, the receiving plate 9 returns to its original position leaving the ring 1 and repeats the stopping action.

Reference numeral 16 in FIG. 1 is a frame that supports the entire apparatus of this invention, the support stand 12 is fixed on this frame 16, and 17 is a vertical machine box provided on the side of the frame 16.

In front of the slit 10, a pair of take-up rollers 21 and 22 are arranged vertically as shown in FIG.
These rollers 21 and 22 are driven by a drive mechanism provided in the machine box 17 in the direction of the arrow in FIG.
It acts to pull out the rings 1 that came out from 0 one by one.

23 is a conveyor in which two thin endless belts 24 on the left and right are wrapped around pulleys 25 and 26 on the front and rear, and rollers 2
The ring 1 that has come out from between 1 and 22 is transferred to the positioning means A. This positioning means A
As shown in FIGS. 1 and 4, a pair of left and right levers 29 that open and close around a fulcrum shaft 28 on a frame 16 are each provided with a positioning rod 30 at the outer end thereof, and a link is connected to the intermediate portion of both levers 29, respectively. 31,
It is connected to a rod 33 of an air cylinder 32 fixed on the frame 16 so that the left and right positioning rods 30 can be opened and closed by moving the rod 33 forward and backward. is provided with a pair of front and rear positioning rods 35 that determine the direction of the linear edge 3 of the ring 1, and the upper end of each of these positioning rods is slightly protruded from the conveying surface of the conveyor 23, so that the left and right positions are aligned as shown by the solid line in FIG. With the space between the positioning rods 30 open, the ring 1 placed on the belt 24 moves from the left side of the figure, and the outer periphery of the ring 1 contacts the positioning rod 34, and the cylinder 32 works to move the left and right positioning rods 30. comes into contact with the outer periphery of the ring 1 as shown by the chain line in FIG. 4 and performs positioning. However, any positioning means other than the illustrated example may be used.

B in FIG. 1 is a ring transfer means. This transfer means moves along upper and lower guide rails 39 provided on the side surface of the machine box 17. That is, as shown in FIG. 5, an elevating frame 41 is attached to a mounting base 40 that is slidably engaged with a guide rail 39, and a suction device 43 is attached to the tip of an arm 42 at the upper end of this frame 41.

This adsorber 43 may be an electromagnet if the ring 1 is made of a ferromagnetic material such as iron, but in the illustrated example, it is of a vacuum suction type. In this case, the adsorption device 43 is formed into a hollow disk shape, and a large number of small-diameter suction holes 4 are formed around the lower surface of the adsorption device 43.
4 is provided, and the inside of the suction device 43 is communicated with a vacuum suction device (not shown) through a flexible pipe, so that vacuum suction can be performed as necessary using a solenoid valve or the like.

Although not shown, the mounting base 40 is moved along the guide rail 39 by an arbitrary mechanism such as a cylinder mechanism, a rack and pinion mechanism, or a feed screw mechanism provided in the machine box 17, and the lifting frame 41 is moved from the mounting base. It is raised and lowered using an electromagnet installed at 40.

Reference numeral 45 in FIGS. 2, 6, and 7 is a magazine provided on the frame 16, and the outer periphery of a large number of thin plates 46 is engaged with a large number of grooves 27 provided in multiple stages inside both side walls of the magazine. They are piled up at regular intervals.

Reference numeral 47 in FIGS. 6 and 7 is a support plate fixed on the frame 16, and this support plate is provided with a deep recess 48 from the upper end, and a horizontal support stand 49 that moves up and down within this recess 48. There is. As shown in FIG. 7, this platform 49 is raised and lowered along a support 50 provided on the side of the support plate 47, and is intermittently lowered at a fixed pitch from the top end to a fixed position by a drive mechanism (not shown). Afterwards, it will rise to its original height.

A pair of left and right guide plates 52 are fixed to the upper surface of the support plate 49, and are located on both sides of the upper part of the support plate 47 as shown in FIG.

Reference numeral 54 in FIGS. 6 to 8 denotes a pair of left and right endless belts, which are passed through a plurality of groove pulleys provided above and below on both sides of the support plate 47 and the recess 48, and then passed on both sides of the support plate 47 in front of the recess 48. Groove pulley 5 provided in
5, the pulley is driven by a suitable drive device so that the belt 54 runs on the upper pulley in the direction of the arrow in FIG.

As shown in FIGS. 2 and 8, a pre-alignment section C is provided in front of the upper end of the support plate 47. That is,
Near the upper end of the front part of the support plate 47 is a shaft 56 of the pulley 55 that receives the folded end of the belt 54.
The middle portions of a pair of left and right levers 57 are swingably attached to this shaft 56, and both levers 57
A groove pulley 58 is provided inside each tip. Each of the groove pulleys 55 has two grooves as shown in FIG. 2, the belt 54 is engaged with the inner groove, and a pair of left and right endless belts 60 are engaged with the outer groove and the groove pulley 58. The left and right levers 57 are integrally connected by a frame 61, and the rear side of one lever 57 is connected to an air cylinder 59 attached to the support plate 47 so that the lever 57 can be swung.

In FIG. 8, 68 is the one lever 57.
At the bottom of the lever, a lever is attached to one side of the support plate 47 so that its middle part can swing freely by a shaft 69, and a groove pulley 71 is provided at the front end of the lever to be rotated around a vertical axis by a drive device 70 such as a motor. As shown in FIG. 9, three rotary rods 73, 74, and 75 are provided on a mounting base 72 provided downward from the front of the lever 68 toward the front of the lever 57, and grooves in the lower ends of each of these rods are provided. An endless belt 76 is engaged with the pulley and the pulley 71 so that the rotating rods 73, 74, 75 rotate as shown by the arrows in FIG.
Set 4 slightly forward.

Further, the lever 68 can be swung up and down by an air cylinder (not shown).

In this configuration, when a magazine 45 in which a large number of thin plates 46 are stacked is placed on a guide plate 52 as shown in FIG. It is sent out onto the belt 60 which is .
At this time, the upper ends of the three rotating rods 73, 74, 75 are protruding above the belt 60 as shown in FIG. be in contact with When the arcuate periphery of the thin plate 46 is in contact, all the rods 73, 74, 75 are in contact with the periphery of the thin plate 46 as shown in FIG. 10, so the thin plate 46 is turned in the direction of the two rods 74, 75. . In this way, the thin plate 46 rotates and its straight edge 7
7 comes to the part of the rods 73, 74, 75, as shown in FIG. Stop as facing forward.

When the thin plate 46 hits the rods 73 and 75 and stops, the air cylinder 59 is activated by a signal from a timer, the lever 57 is moved, the belt 60 is slightly lowered forward, and at the same time the drive cylinder of the lever 68 is activated to move the mounting base 72. Lower each rotating rod 73, 74, 75
and its upper end is lower than the belt 60,
The thin plate 46 advances forward and downward along the belt 60,
The front straight edge 77 is connected to the next alignment section D.
on the endless belt 80. This endless belt 80 is a pair of thin belts on the left and right sides, and as shown in FIG. 2 and FIG. drive to. As shown in FIGS. 2 and 8, the alignment section D is provided with positioning rods 85 at the outer ends of a pair of left and right levers 84 that open and close around a fulcrum shaft 83, and links 86 connected to the intermediate portions of both levers 84, respectively. is connected to a rod 88 of an air cylinder 87 fixed on the frame 16, and the left and right positioning rods 8 are moved by moving the rod 88 back and forth.
5, and is the same mechanism as the positioning means A described above. Further, a pair of left and right positioning rods 89 are fixed to the front part of this alignment part D, and under the condition that the straight edge 77 of the thin plate 46 placed on the belt 80 hits the positioning rods 89 and stops, act to move the rod 88, rotate the left and right levers 84 inward, and move the left and right positioning rods 85 to the position shown by the solid line in FIG.
is brought inward and brought into contact with the outer periphery of the thin plate 46 as shown by the chain line in FIG. 2 to accurately correct the position of the thin plate 46.

Note that the mechanisms of the pre-alignment section C and the alignment section D may be other than the illustrated example.

E in FIGS. 1, 2, and 8 is a thin plate conveying means, which conveys the conveyor 2 from the front of the alignment section D.
It consists of a moving table 93 that is moved by an appropriate drive device along a guide rail 92 provided toward the tape application means F in front of the device 3, and a thin plate pedestal 94 provided on the top of the moving table 93. It can be freely reversed around 95.

This pedestal 94 is hollow, and has a suction surface 96 that becomes the upper surface when it is on the moving table 93, as shown by the solid line in FIG.
A large number of suction holes are provided in the pedestal 94, and the inside of the pedestal 94 is communicated with a vacuum suction device (not shown) through a flexible pipe, so that vacuum suction can be performed as necessary using a solenoid valve or the like.

Further, since the pedestal 94 is also rotated by an air cylinder or the like, the thin plate 4 is rotated as shown in FIG.
6 is positioned on the belt 80, and this belt 8
Under the condition that the movable table 93 returns to the front of the belt 8, the pedestal 94 rotates half a turn and moves the belt 8 as shown by the chain line in FIG.
Overlaps on 0.

Then, the vacuum suction works to move the thin plate 46 to the suction surface 9.
When the thin plate 46 is attracted to the suction surface 96 facing upward as shown in FIG.

As described above, the guide rail 92 reaches below the tape application means F, and the moving platform 93 enters before the application means F operates.

In this way, the pedestal 94 on which the thin plate 46 is placed is moved to the movable table 9.
3 and enters the sticking means F, the adsorber 43 at the position shown in FIG.
When the ring 1 is moved to the position shown in FIG. Thereafter, the adsorber 43 rises and returns to its original position as indicated by the solid line in FIG.

The tape sticking means F has a rear moving frame 100 and a front moving frame 101 as shown in FIG. Both moving frames 100, 101 move along the guide rail 39 and the guide rail 36 above it, and any mechanism such as a cylinder mechanism, feed screw mechanism, rack and pinion mechanism can be used as the driving means. .

A pair of upper and lower rollers 62 and 63 are provided near the top of each of the moving frames 100 and 101, respectively, and a rubber tape sticking roller 64 is provided near the bottom of the moving frame 100. There is a roller 65 for taking up the tape after cutting out.
Install.

Reference numeral 66 in FIG. 1 is a tape reel installed in the machine box 17, and the adhesive tape 1 pulled out from this reel 66
A separator 19 is overlaid on the adhesive surface of 8 to prevent wrinkles. The tape 18 pulled out from the reel 66 is guided forward by a guide roller 67 with the adhesive side facing down, and the separator 19 peeled off at this point is wound onto a winding shaft 76 provided in the machine box 17.

The tape 18 guided forward from the lower part of the guide roller 67 is sandwiched between the upper and lower rollers 62 of the moving frame 100 and guided downward and rearward, passes from the rear side of the sticking roller 64 to the lower side, and then is transferred to the moving frame 101. It goes from the lower side of the provided take-up roller 65 through the front side to the rear, is sandwiched between the upper rollers 63 and goes around the front part from the lower part of the guide roller 78 provided in the machine box 17, and then passes through the winding roller provided in the machine case 17. It is wound up by a reel 79.

The winding shaft 76 is provided with an intermittent drive means in the direction of the arrow in order to wind up the separator 19, and the reel 66
an intermittent drive means for feeding out the tape 18;
A control means is provided to prevent the tape 18 from being fed out when the tape is wound up after cutting out, and the reel 79 is also provided with an intermittent drive means to wind up the tape after cutting out, and a control means to prevent the tape from returning when the tape is pasted. establish.

Reference numeral 98 in FIGS. 1 and 12 denotes an air cylinder, which is fixed to a bracket 99 attached to the machine box 17, and a cutting means G is attached to an elevating frame 105 fixed to the piston rod of this air cylinder 98. As shown in FIG.
The cutter arm 1 swings around the shaft 108 as a fulcrum.
09 is attached, and a freely rotating disk-shaped cutter 37 is attached to the tip of this arm 109, and the tip of the arm 109 is pressed down by a spring 38.

Further, a disc-shaped presser plate 112 is rotatably attached to the lower end of a vertical shaft 111 fixed at the center of the rotating frame 107, and a circular annular rubber 113 is attached to the lower surface of the outer periphery of this presser plate 112. Rotating frame 107
A presser plate 1 is installed at the bottom of the plurality of legs provided around the bottom of the
A roller 114 is provided on and in contact with 12.

H in FIG. 1 is a sending means, and the above-mentioned transporting means B
It has an adsorber 103 having the same structure as the adsorber 43 of
This suction device 103 is attached to an arm of an elevating frame 53 attached to a mounting base 51 that moves along a guide rail 39, and a drive means similar to that of the transfer means B is used. In addition, 115 in FIG. 1 is a conveyor provided in front of the pasting means F, and a pair of left and right thin endless belts 116 are connected to front and rear pulleys 117, 11.
It is multiplied by 8.

To explain the operation of the pasting means F, as described above, the pedestal 94 on which the ring 1 and the thin plate 46 are placed stops at the position of the pasting means F, and the movable frames 100, 101
is in the position shown in FIG. 1, the tape reel 66 and take-up reel 79 are braked, and the movable frame 100 is moved rearward with the movable frame 101 fixed.
That is, when moving to the left in FIG. 1, the tape 18 is moved between the rollers 64 and 65 as shown in FIG.
is expanded. In this way, the roller 64
8, the rubber roller 64 presses the tape 18 onto the ring 1 and the thin plate 46, so that the tape 18 is pushed against the ring 1.
is attached to the thin plate 46.

Under the condition that the tape 18 is stretched between the rollers 64 and 65, the cylinder 98 of the cutting means G shown in FIG. Rotating frame 107
and lower the rubber 1 on the lower side of the presser plate 112.
13 presses the tape 18 on the ring 1 together with the ring 1 onto the pedestal 94 and stops. Also, at the same time as the cylinder 98 starts, the gear motor 106
is started, and the outer blade of the cutter 37 rotates around the shaft 111 while cutting the tape 18 on the ring 1. During this time, the shaft 111 and the roller 114 rotate, but the presser plate 112 does not rotate. Thus tape 18
When the cutter 37 rotates twice to completely cut the
The gear motor 106 stops, the cylinder 98 works, the lifting frame 105 rises, and the cutting means G removes the ring 1.
Get off the top.

When the tape 18 is heat-shrinkable and the tape 18 is heat-shrinked after being attached to the ring 1, the pedestal 94
A heater such as an electric heater is installed inside the ring 1, and after the tape 18 is pasted on the ring 1, the heater is made to generate heat to shrink and tighten the tape 18 stretched inside the ring 1.

As described above, after the tape 18 is pasted onto the ring 1 and the tape 18 is cut out by the cutter 37, the moving frame 101 begins to move rearward. At this time, since the reels 66 and 79 remain in the braking state, the tape after being cut out leaves the ring 1 as shown in FIG. As shown in Fig. 16, the moving frame 10
Under the condition that 0 and 101 are located at the rear end and stopped, the sending means H is started and the adsorber 1 is stopped.
03 moves onto ring 1 and follows the chain line b in Figure 16.
It descends as shown in FIG. 16, picks up the ring 1 and rises, returns to its original position and descends again, and places the ring 1 on the conveyor 115 and rises as shown by the chain line c in FIG. At this time, a plastic film cut out from the tape 18 is stretched on the upper surface of the ring 1, and a thin plate 46 is attached to the lower surface of this film, and the ring 1 in this state is sent out by the conveyor 115.

Next, the brake on the reel 66 is released to allow it to rotate freely, and the moving frames 100 and 101 are moved forward together while driving the winding shaft 76 and reel 79 in the winding direction, so that the tape 18 from which the separator 19 has been peeled is moved between the guide roller 67 and the roller. The tape 18 after being stretched between 62 and cut out is wound onto a take-up reel 79 and returns to the state shown in FIG.

When the moving frames 100 and 101 are moved forward in this way, if the tape reel 66 is appropriately braked, the tape 1 is stretched between the guide roller 67 and the roller 62.
8 is nervous. Therefore, by adjusting the braking force of the tape reel 66, the tension of the tape 18 can be adjusted.

I in FIG. 1 is magazine support means in front of the frame 16. This support means I is provided with an elevating table 122 that is raised and lowered by an elevating mechanism 121 on a base frame fixed to a frame 16.
A magazine 97 for storing rings is placed on top, and this magazine 97 is of the type shown in FIGS. 13 and 14.

That is, the magazine 97 has a pair of left and right side plates 11.
9 are integrally connected by a plurality of horizontal connecting rods 120 and upper reinforcing members 123, and both side plates 11
A large number of grooves 124 into which both sides of the ring 1 fit are formed at regular intervals on the opposing surfaces of the ring 9.

In the above magazine support means I, the lifting platform 122 is initially at the lowest position, and at this time the magazine 9
The uppermost groove 124 of No. 7 is flush with the upper surface of the conveyor 115. Therefore, the ring 1 sent out by the conveyor 115 enters the magazine 97, and both sides of the ring 1 enter the uppermost groove 124.

In this way, under the condition that the ring 1 is supported by the uppermost groove 124, the elevating mechanism 121 operates to move the second groove 124 from the top of the magazine 97 to the conveyor 11.
Match the top surface of 5.

By repeating this action, the ring 1 to which the disc-shaped film and thin plate 46 are attached as described above is housed in each groove 124 of the magazine 97, and the magazine 97
When the inside is full of rings 1, the lifting platform 122 is lowered and another empty magazine 97 is placed thereon.

Note that the operating conditions of each cylinder, motor, etc. during the operation of each of the above-mentioned parts are obtained from signals from position detection sensors, timers, etc. provided at various locations.

This invention includes a pre-alignment section that keeps the thin plate that is intermittently sent out in a substantially constant direction as described above, and a pre-alignment section that finely adjusts the direction of the thin plate that is now oriented in a substantially constant direction to ensure accurate orientation. and a thin plate conveying means for placing the thin plate, which has been oriented accurately by the alignment part, on the top surface of the pedestal and conveying it to the tape applying means, and a thin plate conveying means for conveying the thin plate, which is oriented accurately by the alignment section, to the tape sticking means, and the thin plate is intermittently sent out. a positioning means for positioning the ring; and a ring transfer means for transporting the ring after positioning to the tape pasting means, placing the thin plate thereon on a waiting pedestal, and surrounding the thin plate with the ring. , a tape adhering means for adhering the thin plate and the ring together by spreading and pressing an adhesive tape with the lower surface as an adhesive surface onto the ring and the thin plate; and a tape adhering means for adhering the thin plate and the ring together; A cutting means for cutting out the tape, and a taking-up means for taking over the unnecessary tape after it has been cut out;
It consists of a sending means that sends out the rings one by one to a predetermined position after pasting the tape, and it is pasted onto a stationary stand on which the thin plate and ring are placed, which are accurately positioned by the positioning means and alignment section. Since the tape is stretched by the attaching means and then pressed against the ring and the thin plate for attachment, there is less risk of misalignment during attachment. Furthermore, since the application of the tape to the thin plate and the ring and the cutting of the tape after application of the tape onto the ring are performed in one place, the apparatus becomes smaller. By changing the positioning means and alignment, the orientation of the thin plate or ring can be set arbitrarily. In addition, there are other effects such as the ability to freely adjust the tension of the tape in the sticking means.

[Brief explanation of drawings]

Fig. 1 is a partially longitudinal side view showing an embodiment of the device of the present invention, Fig. 2 is a plan view of the same as above, Fig. 3 is an enlarged plan view of a ring magazine, and Fig. 4 is an example of a ring positioning means. FIG. 5 is an enlarged partially vertical front view showing an example of the ring transfer means;
Fig. 6 is a side view of the thin plate magazine support section and the vicinity of the pre-alignment section, Fig. 7 is an enlarged longitudinal cross-sectional view taken along the - line in Fig. 6, and Fig. 8 is a partially longitudinal enlarged side view of the pre-alignment and alignment section. , FIG. 9 is an enlarged plan view of the main part of the pre-alignment section, FIG.
Fig. 11 is an enlarged plan view for explaining the same operation as above, Fig. 12 is an enlarged longitudinal sectional front view of the main part showing an example of the tape cutting means, and Fig. 13 is a partial cross-sectional view of the vicinity of the ring storage magazine after the film has been pasted. A plan view, FIG. 14 is a front view of the same magazine, and FIGS. 15 and 16 are side views of the tape sticking means in various states. 1...Circular ring, 2,45,97...Magazine, 18...Adhesive tape, 23,115...Conveyor, 43,103...Adsorber, 46...Thin plate,
64...Adhesive roller, 66...Tape reel, 6
7... Guide roller, 76... Winding shaft, 79... Winding reel, 94... cradle, 100, 101...
...Moving frame, A... Positioning means, B... Transfer means, C... Pre-alignment section, D... Alignment section, E... Thin plate conveyance means, F... Tape pasting means, G... Cutting means, H...Sending means.

Claims (1)

[Claims] 1. A pre-alignment section that keeps the thin plate that is intermittently sent out in a nearly constant orientation, and an alignment section that finely adjusts the orientation of the thin plate that has been oriented almost constant in this pre-alignment section so that it has an accurate orientation. a thin plate conveying means for placing the thin plate, which has been accurately oriented by the alignment part, on the upper surface of the pedestal and conveying it to the adhering means; and a positioning means for positioning the ring that is intermittently fed out. A ring transfer means that transfers the ring after positioning to the above-mentioned adhesion means, places the thin plate thereon on a waiting stand, and surrounds the thin plate with the ring, and an adhesive whose lower surface is an adhesive surface. a tape pasting means for stretching and pressing a tape onto the ring and the thin plate to adhere the thin plate and the ring together; a cutting means for cutting out the tape on the ring after pasting the tape on the pedestal; A device for laminating thin plates and rings, which comprises a taking-off means for taking over unnecessary tape, and a sending-out means for sending out the rings one by one to a predetermined position after the tape has been pasted.