JPS6317233B2 - - Google Patents
Info
- Publication number
- JPS6317233B2 JPS6317233B2 JP55179373A JP17937380A JPS6317233B2 JP S6317233 B2 JPS6317233 B2 JP S6317233B2 JP 55179373 A JP55179373 A JP 55179373A JP 17937380 A JP17937380 A JP 17937380A JP S6317233 B2 JPS6317233 B2 JP S6317233B2
- Authority
- JP
- Japan
- Prior art keywords
- laser
- output
- photodetector
- laser beam
- prism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/0014—Monitoring arrangements not otherwise provided for
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Lasers (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
Description
【発明の詳細な説明】
本発明は、イオンレーザ装置に関し、特にレー
ザ出力モニタ方式に改良を図つたイオンレーザ装
置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an ion laser device, and more particularly to an ion laser device with an improved laser output monitoring system.
従来、イオンレーザ装置ではレーザ出力のモニ
タをするため、レーザ出力の一部を検出して増幅
し、メータを振らす方式が用いられている。すな
わち、第１図に示すように、レーザ電源１の一つ
の出力端をレーザ管２のカソード３に接続し、他
端をレーザ管２のアノード４に接続する。そし
て、レーザ光７の一部のレーザ光８を光検出器９
で検出し、出力抵抗１０の両端に現われる出力電
圧（Vs）を入力抵抗１１（Rin）を通して増幅器
１５で次式の通り増幅し、メータ１７を振らすメ
ータ電圧（Vm）を得る。 Conventionally, in order to monitor laser output in an ion laser device, a method has been used in which a portion of the laser output is detected and amplified to cause a meter to swing. That is, as shown in FIG. 1, one output end of the laser power source 1 is connected to the cathode 3 of the laser tube 2, and the other end is connected to the anode 4 of the laser tube 2. Then, a part of the laser beam 7 is transmitted to a photodetector 9.
The output voltage (Vs) appearing across the output resistor 10 is amplified by the amplifier 15 according to the following formula through the input resistor 11 (Rin) to obtain a meter voltage (Vm) that causes the meter 17 to swing.
Vm＝Vs×負帰還抵抗（Rf）／Rin
しかし、イオンレーザはプリズム１９とミラー
５を一体にして傾けプリズム１９のレーザ光７の
入射角を調節することにより数本の発振波長が得
られるため、レーザ光７の一部のレーザ光８を検
出している光検出器９の波長感度に応じて、増幅
器１５の増幅率を調節する必要がある。このた
め、スイツチ１６により負帰還抵抗１２，１３，
１４を切換なければならない。すなわちスイツチ
１６を規定のレンジに切換えないでレーザ光７を
モニターした場合には光検出器９の波長感度分の
誤差を生じるという欠点がある。 Vm=Vs×Negative feedback resistance (Rf)/Rin However, in the ion laser, several oscillation wavelengths can be obtained by tilting the prism 19 and mirror 5 together and adjusting the incident angle of the laser beam 7 on the prism 19. , it is necessary to adjust the amplification factor of the amplifier 15 according to the wavelength sensitivity of the photodetector 9 that detects the laser beam 8 that is part of the laser beam 7. Therefore, the negative feedback resistors 12, 13,
14 must be switched. That is, if the laser beam 7 is monitored without switching the switch 16 to a specified range, there is a drawback that an error corresponding to the wavelength sensitivity of the photodetector 9 will occur.
本発明の目的はレーザ光の波長が変化しても自
動的に、レーザ光を正確にモニターすることがで
きるイオンレーザ装置を提供することにある。 An object of the present invention is to provide an ion laser device that can automatically and accurately monitor laser light even if the wavelength of the laser light changes.
本発明によれば、複数波長のレーザ出力光が得
られるイオンレーザ装置において、レーザ出力光
の一部を受け分散させるプリズムと、この分散し
た各波長毎のレーザ光を減衰させる複数個のフイ
ルターと、各フイルターを通過したレーザ光を検
出する光検出器と、この検出出力を指示するメー
タとを設け、各フイルターは光検出器の波長感度
を補正するような減衰特性を有することを特徴と
するイオンレーザ装置が得られる。 According to the present invention, an ion laser device that can obtain laser output light of multiple wavelengths includes a prism that receives and disperses a portion of the laser output light, and a plurality of filters that attenuates the dispersed laser light of each wavelength. , a photodetector for detecting laser light passing through each filter, and a meter for indicating the detection output, each filter having an attenuation characteristic that corrects the wavelength sensitivity of the photodetector. An ion laser device is obtained.
次に第２図に示した実施例について本発明を具
体的に説明する。レーザ電源１の一つの出力端を
レーザ管２のカソード３に接続し、他端をレーザ
管２のアノード４に接続すると、レーザ管２は放
電し、ミラー５，５′とプリズム１９が構成する
光共振器との相互作用でレーザ光７が発振する。 Next, the present invention will be specifically explained with reference to the embodiment shown in FIG. When one output end of the laser power source 1 is connected to the cathode 3 of the laser tube 2 and the other end is connected to the anode 4 of the laser tube 2, the laser tube 2 is discharged, and the mirrors 5, 5' and the prism 19 constitute Laser light 7 is oscillated by interaction with the optical resonator.
そして、レーザ光７の一部のレーザ光８はプリ
ズム２０で屈折し、フイルタ１８で減衰し、光検
出器９で検出され出力抵抗１０に光検出電流が流
れ出力抵抗１０の両端に現われる出力電圧〔Vs）
を入力抵抗１１（Rin）を通して増幅器１５で次
式の通り増幅し、メータ１７を振らすメータ電圧
（Vm）を得る。 A part of the laser beam 8 of the laser beam 7 is refracted by the prism 20, attenuated by the filter 18, detected by the photodetector 9, and a photodetection current flows through the output resistor 10. An output voltage appears at both ends of the output resistor 10. [Vs]
is amplified by the amplifier 15 through the input resistor 11 (Rin) according to the following formula to obtain the meter voltage (Vm) that swings the meter 17.
そこでプリズム１９とミラー５とを一体にして
傾けプリズム１９へのレーザ光７の入射角を調節
し、レーザ光７の発振波長を短かい方向へ移行さ
せると、レーザ光７の一部のレーザ光８はプリズ
ム２０により屈折し、屈折率が小さくなるため、
レーザ光８′となりフイルタ１８′で減衰し、光検
出器９で検出され、出力抵抗１０に光検出電流が
流れ出力抵抗１０の両端に現われる出力電圧
（Vs）となり前記同様に増幅器１５で増幅されメ
ータ１７を振らす。ここで前もつてフイルタ１
８′を光検出器９の波長感度に合わせた減衰特性
にしておくことにより、自動的にレーザ光８′を
正確にモニターすることができる。また前記と同
様にしてレーザ光７の発振波長をさらに短かい方
向へ移行させると、レーザ光７の一部のレーザ光
８はプリズム２０により屈折し、屈折率がさらに
小さくなり、レーザ光８″となり、フイルター１
８″で減衰し、光検出器９で検出され出力抵抗１
０に光検出電流が流れ出力抵抗１０の両端に現わ
れる出力電圧（Vs）となり前記同様に増幅器１
５で増幅されメータ１７を振らす。また前もつて
フイルタ１８″の減衰特性を合わせておくことに
より、自動的にレーザ光８″を正確にモニターす
ることができる。 Therefore, by tilting the prism 19 and the mirror 5 together and adjusting the incident angle of the laser beam 7 to the prism 19 and shifting the oscillation wavelength of the laser beam 7 to a shorter direction, part of the laser beam 7 is 8 is refracted by the prism 20 and the refractive index becomes small, so
It becomes a laser beam 8', is attenuated by a filter 18', is detected by a photodetector 9, and a photodetection current flows through an output resistor 10, becoming an output voltage (Vs) appearing at both ends of the output resistor 10, which is amplified by an amplifier 15 as before. Shake the meter 17. Here, add filter 1
By setting the attenuation characteristic of the laser beam 8' to match the wavelength sensitivity of the photodetector 9, the laser beam 8' can be automatically and accurately monitored. Further, when the oscillation wavelength of the laser beam 7 is shifted to a shorter direction in the same manner as described above, a part of the laser beam 8 of the laser beam 7 is refracted by the prism 20, and the refractive index is further reduced, and the laser beam 8'' So, filter 1
8″, detected by photodetector 9 and output resistance 1
The photodetection current flows through the output voltage (Vs) that appears across the output resistor 10, and the output voltage (Vs) appears across the output resistor 10.
It is amplified by 5 and causes the meter 17 to swing. Furthermore, by adjusting the attenuation characteristics of the filter 18'' in advance, it is possible to automatically and accurately monitor the laser beam 8''.
第１図は従来のイオンレーザ装置を示すブロツ
ク図、第２図は本発明のイオンレーザ装置を示す
ブロツク図である。
１……レーザ電源、２……レーザ管、３……カ
ソード、４……アノード、５，５″……ミラー、
６……ビームスプリツタ、７，８，８′，８″……
レーザ光、９……光検出器、１０……出力抵抗、
１１……入力抵抗、１２，１３，１４……帰還抵
抗、１５……増幅器、１６……スイツチ、１７…
…メータ、１８，１８′，１８″……フイルター、
１９，２０……プリズム。
FIG. 1 is a block diagram showing a conventional ion laser device, and FIG. 2 is a block diagram showing an ion laser device according to the present invention. 1... Laser power supply, 2... Laser tube, 3... Cathode, 4... Anode, 5,5''... Mirror,
6... Beam splitter, 7, 8, 8', 8''...
Laser light, 9...photodetector, 10...output resistance,
11...Input resistance, 12, 13, 14...Feedback resistance, 15...Amplifier, 16...Switch, 17...
...Meter, 18, 18', 18''...Filter,
19, 20...prism.
Claims (1)
装置において、レーザ出力光の一部を分散させる
プリズムと、分散した各波長毎のレーザ光を減衰
させる複数個のフイルターと、前記各フイルター
を通過したレーザ光を検出する光検出器と、前記
光検出器の出力を指示するメータとを具備し、前
記各フイルターは前記光検出器の波長感度を補正
するような減衰特性を有することを特徴とするイ
オンレーザ装置。1. In an ion laser device that emits laser light of multiple wavelengths, a prism that disperses a portion of the laser output light, a plurality of filters that attenuates the dispersed laser light of each wavelength, and a laser that has passed through each of the filters. An ionizer comprising a photodetector that detects light and a meter that indicates the output of the photodetector, each of the filters having an attenuation characteristic that corrects the wavelength sensitivity of the photodetector. laser equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17937380A JPS57103381A (en) | 1980-12-18 | 1980-12-18 | Ion laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17937380A JPS57103381A (en) | 1980-12-18 | 1980-12-18 | Ion laser device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57103381A JPS57103381A (en) | 1982-06-26 |
| JPS6317233B2 true JPS6317233B2 (en) | 1988-04-13 |
Family
ID=16064713
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17937380A Granted JPS57103381A (en) | 1980-12-18 | 1980-12-18 | Ion laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57103381A (en) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5248994A (en) * | 1975-10-17 | 1977-04-19 | Hitachi Ltd | Method and apparatus for measuring laser light output |
-
1980
- 1980-12-18 JP JP17937380A patent/JPS57103381A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57103381A (en) | 1982-06-26 |
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