JPS633470B2 - - Google Patents
Info
- Publication number
- JPS633470B2 JPS633470B2 JP53159522A JP15952278A JPS633470B2 JP S633470 B2 JPS633470 B2 JP S633470B2 JP 53159522 A JP53159522 A JP 53159522A JP 15952278 A JP15952278 A JP 15952278A JP S633470 B2 JPS633470 B2 JP S633470B2
- Authority
- JP
- Japan
- Prior art keywords
- laser
- output
- laser beam
- photodetector
- prism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/0014—Monitoring arrangements not otherwise provided for
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】
本発明は、イオンレーザ装置に関し、特にレー
ザ出力モニタ方式に改良を図つたイオンレーザ装
置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an ion laser device, and more particularly to an ion laser device with an improved laser output monitoring system.
従来、イオンレーザ装置ではレーザ出力のモニ
タをするため、レーザ出力の一部を検出して増幅
し、メータを振らす方式が用いられている。すな
わち、第１図に示すように、レーザ電源１の一つ
の出力端をレーザ管２のカソード３に接続し、他
端をレーザ管２のアノード４に接続する。そし
て、レーザ光７の一部のレーザ光８の光検出器９
で検出し、出力抵抗１０の両端に現われる出力電
圧（Vs）を入力抵抗１１（Rin）を通して増幅器
１５で次式の通り増幅し、メータ１７を振らすメ
ータ電圧（Vm）を得る。 Conventionally, in order to monitor laser output in an ion laser device, a method has been used in which a portion of the laser output is detected and amplified to cause a meter to swing. That is, as shown in FIG. 1, one output end of the laser power source 1 is connected to the cathode 3 of the laser tube 2, and the other end is connected to the anode 4 of the laser tube 2. A photodetector 9 for the laser beam 8 that is a part of the laser beam 7
The output voltage (Vs) appearing across the output resistor 10 is amplified by the amplifier 15 according to the following formula through the input resistor 11 (Rin) to obtain the meter voltage (Vm) that causes the meter 17 to swing.
Vm＝Vs×負帰還抵抗（Rf）／Rin
しかし、イオンレーザはプリズム２２とミラー
５とを一体にして傾けプリズム２２へのレーザ光
７の入射角を調節することにより数本の発振波長
が得られるため、レーザ光７の１部のレーザ光８
を検出している光検出器９の波長感度に応じて、
増幅器１５の増幅率を調節する必要がある。この
ため、スイツチ１６により負帰還抵抗１２，１
３，１４を切換しなければならない。すなわちス
イツチ１６を規定のレンジに切換えないでレーザ
光７をモニターした場合には光検出器９の波長感
度分の誤差を生じるという欠点がある。 Vm=Vs×Negative feedback resistance (Rf)/Rin However, in the ion laser, several oscillation wavelengths can be obtained by tilting the prism 22 and mirror 5 together and adjusting the incident angle of the laser beam 7 to the prism 22. Therefore, part of the laser beam 8
Depending on the wavelength sensitivity of the photodetector 9 detecting the
It is necessary to adjust the amplification factor of the amplifier 15. Therefore, the negative feedback resistors 12 and 1 are controlled by the switch 16.
3 and 14 must be switched. That is, if the laser beam 7 is monitored without switching the switch 16 to a specified range, there is a drawback that an error corresponding to the wavelength sensitivity of the photodetector 9 will occur.
本発明の目的はレーザ光の波長が変化しても自
動的に、レーザ光を正確にモニターすることがで
きるイオンレーザ装置を提供することにある。 An object of the present invention is to provide an ion laser device that can automatically and accurately monitor laser light even if the wavelength of the laser light changes.
本発明によれば、複数波長のレーザ出力光が得
られるイオンレーザ装置において、レーザ出力光
の一部を受け分散させるプリズムと、この分散し
た各波長毎のレーザ光を検出する複数の光検出器
と、各光検出器と組合せて波長感度をそれぞれ補
正することができる複数の抵抗と、これらの検出
出力を指示するメータとを設けたことを特徴とす
るイオンレーザ装置が得られる。 According to the present invention, in an ion laser device that can obtain laser output light of multiple wavelengths, a prism that receives and disperses a portion of the laser output light, and a plurality of photodetectors that detect the dispersed laser light of each wavelength. The present invention provides an ion laser device characterized in that it includes a plurality of resistors that can be combined with each photodetector to respectively correct wavelength sensitivity, and a meter that indicates the detection output of these resistors.
次に第２図に示した実施例について本発明を具
体的に説明する。 Next, the present invention will be specifically explained with reference to the embodiment shown in FIG.
レーザ電源１の一つの出力端をレーザ管２のカ
ソード３に接続し、他端をレーザ管２のアノード
４に接続すると、レーザ管２は放電し、ミラー
５，５′とプリズム２２が構成する光共振器との
相互作用でレーザ光７が発振する。そしてレーザ
光７の一部のレーザ光８はプリズム２１で屈折
し、光検出器９で検出され出力抵抗１８，１０に
光検出電流が流れ出力抵抗１０の両端に現われる
出力電圧（Vs）を入力抵抗１１（Rin）を通して
増幅器１５で次式の通り増幅し、メータ１７を振
らすメータ電圧（Vm）を得る。 When one output end of the laser power source 1 is connected to the cathode 3 of the laser tube 2 and the other end is connected to the anode 4 of the laser tube 2, the laser tube 2 is discharged, and the mirrors 5, 5' and the prism 22 constitute Laser light 7 is oscillated by interaction with the optical resonator. A part of the laser beam 8 of the laser beam 7 is refracted by the prism 21, detected by the photodetector 9, and a photodetection current flows through the output resistors 18 and 10, inputting the output voltage (Vs) appearing at both ends of the output resistor 10. It is amplified by the amplifier 15 through the resistor 11 (Rin) according to the following formula to obtain the meter voltage (Vm) that swings the meter 17.
Vm＝Vs×負帰還抵抗１２（Rf）／Rin
そこでプリズム２２とミラー５とを一体にして
傾けプリズム２２へのレーザ光７の入射角を調節
し、レーザ光７の発振波長を短かい方向に移行さ
せると、レーザ光７の一部のレーザ光８はプリズ
ム２１により屈折し、屈折率が小さくなるため、
レーザ光８′となり光検出器９′で検出され出力抵
抗１９，１０に光検出電流が流れ出力抵抗１０の
両端に現われる出力電圧（Vs）となり前記同様
に増幅器１５で増幅されメータ１７を振らす。こ
こで前もつて出力抵抗１９を光検出器９′の波長
感度に合せて調節しておくことにより、自動的に
レーザ光８′を正確にモニターすることができる。
また前記と同様にしてレーザ光７の発振波長をさ
らに短かい方向に移行させると、レーザ光７の一
部のレーザ光８はプリズム２１により屈折し、屈
折率がさらに小さくなり、レーザ光８″となり光
検出器９″で検出され、出力抵抗２０，１０に光
検出電流が流れ出力抵抗１０の両端に現われる出
力電圧（Vs）となり前記同様に増幅器１５で増
幅されメータ１７を振らす。また、前もつて出力
抵抗２０を調節しておくことにより自動的にレー
ザ光８″を正確にモニターすることができる。 Vm=Vs×Negative feedback resistor 12 (Rf)/Rin Therefore, the prism 22 and the mirror 5 are integrated and tilted to adjust the incident angle of the laser beam 7 to the prism 22 to shorten the oscillation wavelength of the laser beam 7. When the laser beam 8 is shifted, a part of the laser beam 8 of the laser beam 7 is refracted by the prism 21, and the refractive index becomes smaller.
The laser beam 8' is detected by the photodetector 9', and a photodetection current flows through the output resistors 19 and 10, resulting in an output voltage (Vs) appearing across the output resistor 10, which is amplified by the amplifier 15 in the same manner as described above and causes the meter 17 to swing. . By adjusting the output resistor 19 in advance in accordance with the wavelength sensitivity of the photodetector 9', it is possible to automatically and accurately monitor the laser beam 8'.
Further, when the oscillation wavelength of the laser beam 7 is shifted to a shorter direction in the same manner as described above, a part of the laser beam 8 of the laser beam 7 is refracted by the prism 21, and the refractive index is further reduced, and the laser beam 8'' This is detected by the photodetector 9'', and a photodetection current flows through the output resistors 20 and 10, resulting in an output voltage (Vs) appearing across the output resistor 10, which is amplified by the amplifier 15 and causes the meter 17 to swing. Further, by adjusting the output resistor 20 in advance, the laser beam 8'' can be automatically and accurately monitored.
第１図は従来のイオンレーザ装置を示すブロツ
ク図、第２図は本発明のイオンレーザ装置を示す
ブロツク図である。
１……レーザ電源、２……レーザ管、３……カ
ソード、４……アノード、５，５′……ミラー、
６……ビームスプリツタ、７，８，８′，８″……
レーザ光、９，９′，９″……光検出器、１０，１
８，１９，２０……出力抵抗、１１……入力抵
抗、１２，１３，１４……負帰還抵抗、１５……
増幅器、１６……スイツチ、１７……メータ、２
１，２２……プリズム。
FIG. 1 is a block diagram showing a conventional ion laser device, and FIG. 2 is a block diagram showing an ion laser device of the present invention. 1... Laser power supply, 2... Laser tube, 3... Cathode, 4... Anode, 5, 5'... Mirror,
6... Beam splitter, 7, 8, 8', 8''...
Laser light, 9,9',9''...Photodetector, 10,1
8, 19, 20... Output resistance, 11... Input resistance, 12, 13, 14... Negative feedback resistance, 15...
Amplifier, 16... Switch, 17... Meter, 2
1, 22...prism.
Claims (1)
装置において、レーザ出力光の一部を分散させる
プリズムと、分散した各波長毎のレーザ光を検出
する複数の光検出器と、前記光検出器と組合せて
波長感度を補正する複数の抵抗と、前記光検出器
の出力を指示するメータとを具備したことを特徴
とするイオンレーザ装置。1. In an ion laser device that emits laser light of multiple wavelengths, a prism that disperses a portion of the laser output light, a plurality of photodetectors that detect the dispersed laser light of each wavelength, and a combination with the photodetector What is claimed is: 1. An ion laser device comprising: a plurality of resistors for correcting wavelength sensitivity; and a meter for indicating the output of the photodetector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15952278A JPS5585089A (en) | 1978-12-21 | 1978-12-21 | Ion laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15952278A JPS5585089A (en) | 1978-12-21 | 1978-12-21 | Ion laser device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5585089A JPS5585089A (en) | 1980-06-26 |
| JPS633470B2 true JPS633470B2 (en) | 1988-01-23 |
Family
ID=15695597
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15952278A Granted JPS5585089A (en) | 1978-12-21 | 1978-12-21 | Ion laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5585089A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06101603B2 (en) * | 1986-11-06 | 1994-12-12 | 三菱電機株式会社 | Laser oscillator |
| JPH05308164A (en) * | 1992-04-08 | 1993-11-19 | Nec Corp | Evaluating apparatus for laser mirror |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5248994A (en) * | 1975-10-17 | 1977-04-19 | Hitachi Ltd | Method and apparatus for measuring laser light output |
-
1978
- 1978-12-21 JP JP15952278A patent/JPS5585089A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5585089A (en) | 1980-06-26 |
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