JPS6318681B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION In the present invention, an object to be measured or a workpiece is placed on a table, and the table is movably displaced to move the object or workpiece to be measured or to be processed. The present invention relates to a displacement table device for changing the position, and particularly to a displacement table device for applying minute displacements to the table.

Conventionally, a device for movably displacing a table on which an object to be measured or a workpiece is mounted to a desired position includes a guide section that supports the table so that it can move linearly, and a guide section that supports the table with respect to the guide section. A displacement table device is known that includes a feeding bolt screwed into the table for relative movement. The amount of displacement of the table in such a displacement table device, that is, the amount of movement, is determined by the pitch of the feed bolt screwed into the table and its rotation angle. Either the pitch of the feed bolt must be made finer, or the rotation angle of the feed bolt must be made finer. However, there is a limit to how fine the pitch of the above-mentioned feeding bolt can be made, and to make the rotation angle of the bolt fine, it is necessary to separately incorporate an angle reduction device, etc. Therefore, a high degree of machining accuracy is required. In order to incorporate the angle reduction device, processing is required on the feed bolt, resulting in high costs. Furthermore, problems remain, such as a limit to the accuracy of positioning due to backlash in the threaded connection between the feed bolt and the table.

The present invention has been made to eliminate the conventional problems as much as possible as described above, and will be described in detail below with reference to embodiments shown in the accompanying drawings.

In FIG. 1, reference numeral 1 indicates a minute displacement table device, and the minute displacement table device 1 includes a first arm 3 having a pressing movement portion 2 at one end, and an elastically bent portion at the other end of the first arm 3. A connecting arm 5 whose one end is connected by a flexible connecting part 4, and a connecting part 6 which can be elastically bent at the other end of the connecting arm 5.
a final arm 7 connected at one end by a displacement table 9 connected to the other end of the final arm 7 by an elastically bendable connecting part 8;
It is comprised of a fixing part 12 that supports the arm 3 and the final arm 7 by elastically bendable connecting parts 10 and 11, respectively. Reference numeral 13 indicates a base, to which the fixing portion 12 is fixed via a spacer indicated by reference numeral 14 (see Figure 2) by bolts (not shown) or adhesive. , a pressing means 15 such as a micrometer that can press the pressing moving part 2 is fixed at a position corresponding to the pressing moving part 2. Second
In the figure, reference numeral 16 is a protrusion that is integrally or separately provided at the bottom of the displacement table 9.
It is slidably fitted into a long groove 17 provided in the base 13.

Next, the operation of this embodiment will be explained. In FIG. 1, when the pressing means 15 is moved, the first arm 3
When the pressing movement part 2 of is the point of effort and the pressing movement is made,
Since the first arm 3 is rotated using the connecting portion 10 as a fulcrum and the connecting portion 4 as a point of action, the connecting arm 5 connected to the first arm 3 by the connecting portion 4 is connected to the pressing moving portion. The movement is opposite to the direction of movement in step 2. At this time, the amount of movement of the pressing moving part 2 is x ₃
Let the distance from the pressing movement part 2 (point of force) to the connecting part 10 (fulcrum) be l ₃ , and the amount of movement of the connecting part 4, that is, the amount of movement of the connecting arm 5, be x ₅ , and the connecting part 10
If the distance to the connecting part 4 is l ₅ , then the connecting part 4
The amount of movement x ₅ is as follows.

x ₅ = x ₃ l ₅ / l ₃ As the connecting arm 5 moves as described above, it is rotated with the connecting part 6 as the point of force, the connecting part 11 as the fulcrum, and the connecting part 8 as the point of action, The displacement table 9 connected to the final arm 7 is thus moved in the opposite direction to the direction of movement of the connected arm 5. The amount of movement of the displacement table 9 due to the movement of the final arm 7 is calculated from the connecting portion 8 to the connecting portion 11, where the amount of movement is _x9
If the distance from the connecting part 6 to the connecting part ₁₁ is l9, the amount of movement of the connecting part 6 is _x7 , and the distance from the connecting part 6 to the connecting part 11 is _l7 , then the following equation is obtained.

x ₉ = x ₇ l ₉ /l ₇ By the way, since the amount of movement x ₇ of the connecting portion 6 is equal to the amount of movement x ₅ of the connecting arm 5, the amount of movement x ₉ of the displacement table 9 is as follows. Become.

x ₉ =x ₃ l ₅ /l ₃ ·l ₉ /l ₇ Therefore, the movement amount x ₉ of the displacement table 9 is changed in direct proportion to the movement amount x ₃ of the pressing moving section 2.

Further, as described above, the displacement table 9 to be moved is linearly moved because the protrusion 16 protruding from the lower part of the displacement table 9 is guided along the long groove 17. Next, the embodiment shown in FIG. 3 will be described.

This embodiment uses the displacement table 9 in the embodiment described above.
, one end extending symmetrically from the displacement table 9 to the displacement table is supported by a support arm 302 connected to the fixed part 12 by an elastically bendable connecting part 301. This embodiment is the same as the embodiment described above except that the protrusion 16 and the long groove 17 are removed.

The operation of this embodiment will be explained in the same manner as in the above-described embodiments, in which the pressing movement unit 2 is pressed and moved to move the displacement table 9. However, in this embodiment, the movement of the displacement table 9 is elastically supported on both sides due to the presence of the support arms 302, so the force applied for movement is divided and supported on the support arms 302 on average. It looks like this. Therefore, when a force for movement is applied to the displacement table 9, the protrusion 1 in the above embodiment
Even if the engagement between the long groove 6 and the long groove 17 is removed, linear movement is possible, and since the regulation is not by sliding but by force balance, there is no fear that accuracy will deteriorate due to wear.

Further, the embodiment shown in FIG. 4 will be explained.

The present embodiment is an improvement of the embodiment shown in FIG. That's true.

That is, to explain this embodiment in more detail according to FIG. 4, reference numeral 401 in the figure indicates a minute displacement table device, and the minute displacement table device 401
The first arms 404, 404 are connected to both ends of the pressing moving part 402 by elastically bendable connecting parts 403, 403, and the first arm is 404,404
Elastically bendable connecting portions 405, 4 at the other end
A connecting arm 40 whose one end is connected by 05
6, 406, a final arm 408, 408 connected to the other end of the connecting arm by an elastically bendable connecting portion 407, 407, and the final arm 4
Balance member 4 connected to the other end of 08, 408 by elastically bendable connecting parts 409, 409
10, and a displacement table 4 connected to the balance member 410 by an elastically bendable connecting part 411.
12, the first arms 404, 404, and the final arms 408, 408 are supported by elastically bendable connecting portions 413, 413, respectively, and
The displacement table 412
A support arm 415 extending to the object via the displacement table...a connecting part 4 whose one end can be elastically bent
16, and a fixing portion 417 supported by.

Next, the operation of this embodiment will be explained.

In FIG. 4, the pressing moving part 402 is pressed and moved in the direction of the arrow in the figure. The pressing movement section 402
The movement is transmitted to the first arms 404, 404 by the connecting portions 403, 403, and thereafter the final arms 408, 408 are moved in the same manner as in the above-described embodiment. The displacement table 412 is moved through the . In this embodiment, the pressing movement section 40
2 is transmitted approximately evenly to the first, connecting, and final arms of the pair, and is transmitted to the connecting portions 40 on both sides of the balance member 410.
9 and is further transmitted to the displacement table 412 via the connecting part 411, so when the balance member 410 is moved, it can be moved linearly while maintaining the attitude at the start of the movement. In addition, even if there is a difference in the forces transmitted from the final arms 408, 408, the balance member 411 tilts due to the elasticity of the connecting portion 411 according to the difference in the transmitted forces, and balances the transmitted forces. Since the force transmitted to the displacement table 412 can always be in the same direction, the linear movement of the displacement table 412 is more reliable.

As described above, a first arm having a pressing moving part at one end, a connecting arm having one end connected to the other end of the first arm by an elastically bendable connecting part, and the connecting arm. A final arm whose one end is connected to the other end of the arm by an elastically bendable connection directly or through another arm, and an elastically bendable connection to the other end of the final arm. a displacement table connected by a portion of the displacement table;
According to the present invention, which has a fixed part that supports the arm and the final arm by an elastically bendable connecting part, pressing movement can be achieved by appropriately setting the aforementioned l ₃ , l ₅ , l ₇ , and l ₉ . Since the amount of displacement of the displacement table can be reduced to a minute amount with respect to the amount of displacement of the part, and this reduction can be performed by the arm and the elastically bendable connecting part, there is no possibility that play will occur during the reduction process. Therefore, an accurate displacement amount of the displacement table can be obtained with respect to the displacement amount of the pressing moving part, there is no need for bolt machining that requires precision as in the conventional method, and positional deviation due to bolt backlash can be prevented as much as possible. Furthermore, since mechanical sliding parts are removed during the shrinking process, there is no loss of precision due to wear and no need for lubrication.
etc., various effects can be achieved.

In the above embodiment, an example was shown in which the connecting arm and the final arm were directly connected by the connecting part, but it is also possible to reduce the size by placing another arm at any stage between the connecting arm and the final arm. can also be made even smaller. Furthermore, in the embodiments shown in FIGS. 3 and 4,
Although we have shown an example in which the support arm is connected only to the fixed part by the connecting part, it is also possible to connect the support arm and the displacement table.
Further, the support arm and the displacement table and the support arm and the fixing part may be connected by a connecting part.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing one embodiment of the present invention, FIG. 2 is a sectional view taken along the line AA in FIG. 1, and FIGS. 3 and 4 are diagrams showing other embodiments of the present invention. 1.401...Minute displacement table device, 2.4
02...Press movement part, 3.404...First arm, 4.6.8.10.11.301.403.
405・407・409・411・413・41
4.416...Connection part, 5.406...Connection arm, 7.408...Final arm, 9.412...
Displacement table, 12/417...Fixed part, 410
... Balance member, 415 ... Support arm.

Claims (1)

[Scope of Claims] 1. A first arm having a pressing portion at one end, the other end serving as a point of action, and a fulcrum connected to a table close to the point of action; A connected arm with the other end as the point of action; a fulcrum connected to the table close to the point of action, with the point of action of the linked arm as the point of action, and the other end as the point of action of a displacement table; a final arm; a displacement table connected to the other end of the final arm by an elastically bendable connecting part; and at least the first arm and the final arm connected to the other end by an elastically bendable connecting part. 1. A micro-displacement table device, comprising: a fixed portion that supports the table. 2. A patent characterized in that the first arm and the connecting arm, and the connecting arm and the final arm are arranged at substantially right angles, and the first arm and the final arm extend in the same direction. A minute displacement table device according to claim 1. 3. Micro displacement according to claims 1 and 2, characterized in that the first and final arms are arranged in pairs so as to be symmetrical with respect to the pressing movement section and the displacement table. table equipment. 4. The displacement table is supported by a support arm whose one end extending symmetrically with respect to the displacement table is connected to the fixed part by an elastically bendable connecting part. A minute displacement table device according to claims 1 to 3, characterized in that: 5. The displacement table is connected to the final arm via a balance member that is connected to the displacement table at one end and to the final arm at the other end by elastically bendable connecting parts. A minute displacement table device according to claims 1 to 4.