JPS6320378B2 - - Google Patents
Info
- Publication number
- JPS6320378B2 JPS6320378B2 JP56000593A JP59381A JPS6320378B2 JP S6320378 B2 JPS6320378 B2 JP S6320378B2 JP 56000593 A JP56000593 A JP 56000593A JP 59381 A JP59381 A JP 59381A JP S6320378 B2 JPS6320378 B2 JP S6320378B2
- Authority
- JP
- Japan
- Prior art keywords
- silver paste
- conductive adhesive
- lead frame
- main surface
- adhesive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/011—Apparatus therefor
- H10W72/0113—Apparatus for manufacturing die-attach connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/013—Manufacture or treatment of die-attach connectors
- H10W72/01351—Changing the shapes of die-attach connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/073—Connecting or disconnecting of die-attach connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/073—Connecting or disconnecting of die-attach connectors
- H10W72/07331—Connecting techniques
- H10W72/07337—Connecting techniques using a polymer adhesive, e.g. an adhesive based on silicone or epoxy
Landscapes
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Die Bonding (AREA)
Description
【発明の詳細な説明】
本発明は、半導体装置の組立て方法に関し、特
に導電性接着剤を用いるマウント方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for assembling a semiconductor device, and more particularly to a mounting method using a conductive adhesive.
マウント作業工程は、導電性接着剤を例えばリ
ードフレーム上に塗布する工程と、導電性接着剤
を伸ばし広げる工程と、半導体ペレツトをリード
フレームへ置く工程の3段階に分けられる。導電
性接着剤をリードフレーム上に塗布する方法に
は、スタンプ方式、スクリーン印刷方式、デイス
ペンサー方式がある。スタンプ方式は、スタンプ
を用いて導電性接着剤をリードフレームへ転写す
る方法であるが、容器中の導電性接着剤の上面が
常に空気と接しているため粘度が変化しやすくペ
レツトマウント作業が困難であるという欠点があ
る。又、スクリーン印刷方式は、導電性接着剤を
塗布する部分のみに穴をあけた謄写版の上からゴ
ムヘラを用いてリードフレーム上に導電性接着剤
を塗布する方法であるが、余分な場所にまで導電
性接着剤を塗布しなければならないために無駄が
大きいという欠点がある。これらに比べて、デイ
スペンサー方式は空気圧を用いて導電性接着剤を
細いノズルからリードフレーム上へ射出するよう
にしているので、導電性接着剤の添加率が小さく
作業能率が高く、現在主流を占めている。しか
し、導電性接着剤をリードフレーム上に塗布した
状態では表面張力によりその形状が球状になつて
いて、このままの状態で半導体ペレツトをマウン
トすると、ペレツト側面にまで導電性接着剤がは
い上がり不具合を生じる。特に、ペレツト側面に
接合が露出しているようなLEDペレツトでは短
絡の原因となりやすい。そこで従来は、窒素ガス
を導電性接着剤の真上から垂直に噴射して引き延
ばすようにしていたが、これでもやはり導電性接
着剤は均一に平坦には広がらず中央部がくぼんだ
形状となり、ペレツト側面への接着剤のはい上が
りが依然として残り、歩留を低下させていた。 The mounting process is divided into three steps: applying a conductive adhesive onto the lead frame, spreading the conductive adhesive, and placing the semiconductor pellet on the lead frame. Methods for applying the conductive adhesive onto the lead frame include a stamp method, a screen printing method, and a dispenser method. The stamp method uses a stamp to transfer the conductive adhesive to the lead frame, but because the top surface of the conductive adhesive in the container is always in contact with air, the viscosity tends to change, making pellet mounting difficult. The disadvantage is that it is difficult. In addition, the screen printing method is a method in which conductive adhesive is applied onto the lead frame using a rubber spatula from above the mimeograph plate with holes drilled only in the areas where the conductive adhesive is to be applied. The disadvantage is that there is a large amount of waste because a conductive adhesive must be applied. Compared to these methods, the dispenser method uses air pressure to inject conductive adhesive onto the lead frame from a thin nozzle, so the addition rate of conductive adhesive is small and work efficiency is high, and it is currently the mainstream method. is occupying. However, when the conductive adhesive is applied to the lead frame, its shape becomes spherical due to surface tension, and if the semiconductor pellet is mounted in this state, the conductive adhesive will creep up to the sides of the pellet, causing problems. arise. In particular, LED pellets with exposed junctions on the sides of the pellet are likely to cause short circuits. Conventionally, nitrogen gas was sprayed vertically from directly above the conductive adhesive to stretch it, but even with this, the conductive adhesive did not spread evenly and flatly, leaving a concave shape in the center. Adhesive continued to creep up on the side surfaces of the pellets, reducing yield.
本発明の目的は、上記のような欠点を取り除
き、安定したペレツトマウントを可能とし歩留を
向上させる方法を提供することにある。 SUMMARY OF THE INVENTION An object of the present invention is to provide a method that eliminates the above-mentioned drawbacks, enables stable pellet mounting, and improves yield.
本発明においては、導電性接着剤を例えばリー
ドフレームに塗布後、リードフレームの垂直方向
より30〜60゜の角度をもつて接着剤の斜め上方よ
り窒素ガスを吹きつける事により平坦で均一な厚
さの接着剤面を得るようにしたものである。 In the present invention, after applying a conductive adhesive to a lead frame, for example, nitrogen gas is sprayed diagonally above the adhesive at an angle of 30 to 60 degrees from the vertical direction of the lead frame, thereby creating a flat and uniform thickness. It is designed to have a thin adhesive surface.
従つて、垂直方向からの吹きつけでは接着剤は
平坦には広がらないが、斜め方向からの吹きつけ
により圧力を一定の方向に向けて加えることがで
きるため平坦に広がつた均一な厚さの接着剤層を
得ることができる。 Therefore, when spraying from a vertical direction, the adhesive does not spread flatly, but when spraying from an oblique direction, pressure can be applied in a fixed direction, resulting in a uniform thickness that spreads flatly. An adhesive layer can be obtained.
次に図面を参照し実施例に即して本発明を説明
する。 Next, the present invention will be explained based on embodiments with reference to the drawings.
第1図に示すようにデイスペンサー方式により
約0.1mgの銀ペースト11をリードフレーム12
上に塗布した後、内径1mmφのノズル13を用い
て、リードフレーム上の銀ペーストから1cmの距
離にノズル先端を固定する。ここで、銀ペースト
の粘度は1/2インチ長の#21針から60P.S.I.G.の圧
力を加えた場合の射出速度が1.9±0.3g/min.と
規定されているものを使用した。尚、リードフレ
ーム上の銀ペーストの端に向けて垂直方向より噴
射圧1.0〜3.0Kg/cm2の範囲で窒素ガスを吹きつけ
た結果、銀ペースト11″は第2図bのようにな
り平坦に延在させることはできなかつた。そこで
第1図の如くノズルに垂直方向より30〜60゜の範
囲(θ)で角度をもたせ窒素噴射圧を2.5Kg/cm2、
銀ペーストの量を約0.1mgとした場合、横方向へ
ひじようによく広がり均一な厚みの銀ペースト層
11′を得ることができた(第2図a)。この状態
のところへ0.3mm□のGaP LED ペレツトを接着
し顕微鏡(×50)を用いて側面を観察したとこ
ろ、従来では0.2mm以上の銀ペーストのはい上が
りが100本中に少なくとも2〜3本は見られたが、
本方式で行つた結果、銀ペーストのはい上がり
は、0.1mm以下にすべて収まつていることが確認
され、最終的な製品歩留は92%から97%へと向上
した。 As shown in Figure 1, approximately 0.1 mg of silver paste 11 is applied to the lead frame 12 using a dispenser method.
After coating the silver paste on the lead frame, the nozzle tip is fixed at a distance of 1 cm from the silver paste on the lead frame using a nozzle 13 having an inner diameter of 1 mmφ. Here, the viscosity of the silver paste used was such that the injection speed was specified as 1.9±0.3 g/min. when a pressure of 60 P.SIG was applied from a 1/2 inch long #21 needle. In addition, as a result of spraying nitrogen gas vertically toward the edge of the silver paste on the lead frame at a spray pressure of 1.0 to 3.0 kg/cm 2 , the silver paste 11'' became flat as shown in Figure 2 b. Therefore, as shown in Figure 1, the nozzle was angled at an angle of 30 to 60 degrees (θ) from the vertical direction, and the nitrogen injection pressure was set at 2.5 kg/cm 2 .
When the amount of silver paste was about 0.1 mg, it was possible to obtain a silver paste layer 11' that spread well in the horizontal direction like an elbow and had a uniform thickness (FIG. 2a). When we glued a 0.3mm□ GaP LED pellet to this state and observed the side surface using a microscope (x50), we found that conventionally, at least 2 to 3 out of 100 pieces of silver paste bulged out with a size of 0.2mm or more. was seen, but
As a result of using this method, it was confirmed that all silver paste creep-up was kept to 0.1 mm or less, and the final product yield improved from 92% to 97%.
以上説明したように、本発明によれば銀ペース
トが均一の厚さで平坦に広がりペレツトの側面へ
のはい上がり及びペレツト自身の傾斜を防止する
ことができるので歩留を著しく改善することがで
きる。 As explained above, according to the present invention, it is possible to spread the silver paste flat with a uniform thickness and prevent it from creeping up to the sides of the pellets and from tilting the pellets themselves, so that the yield can be significantly improved. .
上記実施例では、デイスペンサー方式を用いて
銀ペーストを塗布した例について述べたが、スタ
ンプ方式、スクリーン印刷方式等銀ペースト供給
方式の種類に限ることなく適用でき、さらに銀ペ
ースト以外の導電性接着剤や非導電性接着剤の使
用、及びリードフレーム以外の基材例えば、ステ
ム、プリント基板等の使用にも十分適用できるこ
とは言うまでもない。 In the above example, an example was described in which silver paste was applied using a dispenser method, but the application is not limited to the type of silver paste supply method such as a stamp method or a screen printing method. Needless to say, the present invention is also fully applicable to the use of adhesives and non-conductive adhesives, and to the use of base materials other than lead frames, such as stems and printed circuit boards.
第1図は本発明の一実施例における窒素吹きつ
けノズルの位置を示す正面図、第2図aは従来の
銀ペースト層の断面図、bは本実施例による銀ペ
ースト層の断面図である。
11,11′,11″……銀ペースト、12……
リードフレーム、13……窒素ノズル、θ……吹
き付け角度(30〜60゜)。
FIG. 1 is a front view showing the position of a nitrogen spray nozzle in an embodiment of the present invention, FIG. 2 a is a cross-sectional view of a conventional silver paste layer, and FIG. 2 b is a cross-sectional view of a silver paste layer according to this embodiment . 11, 11', 11''...Silver paste, 12...
Lead frame, 13...Nitrogen nozzle, θ...Blowing angle (30 to 60°).
Claims (1)
性ペーストを付加し、該付加された導電性ペース
トに対して前記一主面に垂直な方向より前記一主
面側に30〜60゜傾いた斜め方向から気体噴射する
事により前記基材の前記一主面上に前記導電性ペ
ーストを一様に延在させ、その上に半導体素子を
載置して接着することを特徴とする半導体装置の
組立方法。1. A conductive paste is added to one flat main surface of a substrate for mounting a semiconductor element, and the applied conductive paste is tilted 30 to 60 degrees toward the one main surface from a direction perpendicular to the one main surface. A semiconductor characterized in that the conductive paste is uniformly spread on the one main surface of the base material by injecting gas from an oblique direction, and a semiconductor element is placed and bonded thereon. How to assemble the device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56000593A JPS57114245A (en) | 1981-01-06 | 1981-01-06 | Assembling of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56000593A JPS57114245A (en) | 1981-01-06 | 1981-01-06 | Assembling of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57114245A JPS57114245A (en) | 1982-07-16 |
| JPS6320378B2 true JPS6320378B2 (en) | 1988-04-27 |
Family
ID=11478029
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56000593A Granted JPS57114245A (en) | 1981-01-06 | 1981-01-06 | Assembling of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57114245A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5961141A (en) * | 1982-09-30 | 1984-04-07 | Nec Corp | Bonding method of pellet |
| JPS60146342U (en) * | 1984-03-10 | 1985-09-28 | 新日本無線株式会社 | adhesive applicator |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5363870A (en) * | 1976-11-19 | 1978-06-07 | Hitachi Ltd | Assembling method of semiconductor device |
-
1981
- 1981-01-06 JP JP56000593A patent/JPS57114245A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57114245A (en) | 1982-07-16 |
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