JPS6322939B2 - - Google Patents
Info
- Publication number
- JPS6322939B2 JPS6322939B2 JP14851381A JP14851381A JPS6322939B2 JP S6322939 B2 JPS6322939 B2 JP S6322939B2 JP 14851381 A JP14851381 A JP 14851381A JP 14851381 A JP14851381 A JP 14851381A JP S6322939 B2 JPS6322939 B2 JP S6322939B2
- Authority
- JP
- Japan
- Prior art keywords
- cylindrical body
- crystal plate
- curvature
- cylindrical
- crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 claims description 43
- 238000000034 method Methods 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 239000010432 diamond Substances 0.000 description 4
- 229910003460 diamond Inorganic materials 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- 239000006061 abrasive grain Substances 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B5/00—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
- B24B5/36—Single-purpose machines or devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【発明の詳細な説明】
本発明はシリンドリカル水晶振動子の製造方法
に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a cylindrical crystal resonator.
水晶板のATカツトやBTカツトなどの回転Y
板を用いた厚みすべり振動子で、特に外形寸法に
規制されない場合には、正方形板や円形板が多く
用いられ、特に、厚みすべり振動の漏れを防止
し、Qの高い振動子を得る場合にはコンベツクス
形状の振動子が多く用いられている。 Rotation Y of AT cut, BT cut, etc. of crystal plate
For thickness-shear resonators using plates, square plates and circular plates are often used when there are no restrictions on external dimensions, especially when preventing leakage of thickness-shear vibration and obtaining a high-Q resonator. Convex-shaped resonators are often used.
また、最近では、小型の電子機器や電子ウオツ
チに用いるため、水晶振動子の小型化、薄型化が
要望されると同時に、消費電力を少なくするた
め、水晶振動子の等価抵抗の小さなものが望まれ
ている。これらの要求を満すものとしては、例え
ば、水晶片の振動変化方向の寸法を長くし、か
つ、振動変位に直角な方向の寸法を短くした矩形
板をコンベツクス状に加工したものである。 Recently, there has been a demand for smaller and thinner crystal resonators for use in small electronic devices and electronic watches, and at the same time, in order to reduce power consumption, crystal resonators with low equivalent resistance are desired. It is rare. A device that satisfies these requirements is, for example, a rectangular plate formed into a convex shape by increasing the dimension of the crystal piece in the direction of vibration change and shortening the dimension in the direction perpendicular to the vibration displacement.
しかしながら、このような小型の振動子を得る
ために、従来は、半凹球面状の研摩板を用いて手
で研摩加工を行つたり、半凸球面状の基板に水晶
板を貼り付け、半凹球面状の研摩板を用いて研摩
を行つていたが、振動子の寸法が小さいために加
工自体が困難であり、このため寸法のバラツキが
非常に大きかつた。 However, in order to obtain such a small oscillator, conventionally, polishing was performed by hand using a semi-concave spherical polishing plate, or a crystal plate was pasted on a semi-convex spherical substrate. Polishing was carried out using a concave spherical polishing plate, but the machining itself was difficult due to the small size of the vibrator, resulting in very large variations in size.
本発明は上記点に鑑みて成されたものであり、
前述の要望を満足するような小型の振動子を、容
易にしかも精度良く製造する方法を提供するもの
である。 The present invention has been made in view of the above points,
The object of the present invention is to provide a method for easily and accurately manufacturing a small-sized vibrator that satisfies the above-mentioned requirements.
すなわち、本発明は、半径がRの円筒体の外周
面に矩形の水晶板を貼り付け、この円筒体と少く
とも外周面が砥石で形成された円筒体を、水晶板
および砥石を接触させた状態で回転させ、水晶板
の主平面を曲率のRの曲面に加工し、次にr<R
の条件にある半径rの円筒体の外周面に加工され
た水晶板を貼り付け、再度、外周面が砥石で形成
された円筒体と回転状態において接触させて、水
晶板の曲率Rの曲面の両端に曲率rの面取り部を
形成し、しかる後、この水晶板を所定の大きさに
切断することを特徴とするものである。 That is, in the present invention, a rectangular crystal plate is pasted on the outer peripheral surface of a cylindrical body with a radius of R, and the crystal plate and the grindstone are brought into contact with this cylinder and a cylinder whose outer peripheral surface is formed of a grindstone at least. The main plane of the crystal plate is processed into a curved surface with a curvature of R, and then r<R
A processed crystal plate is pasted on the outer circumferential surface of a cylindrical body with a radius r under the conditions of The crystal plate is characterized in that chamfered portions with a curvature r are formed at both ends, and then the crystal plate is cut into a predetermined size.
以下、本発明の一実施例について図面を参照し
て詳細に説明する。第1図は本実施例に用いる製
造装置の主要部を示したものであり、矩形の水晶
板(例えばATカツト板)3は、半径Rの円筒体
1の外周面に貼り付けられている。また、円筒体
1の近くには、外周面が砥石4で形成された円筒
体5を加工手段とする外径研削機6が配置されて
おり、円筒体1と外径研削機6は矢印7および8
で示すように同一方向に回転している。このよう
な状態において、水晶板3と砥石4を接触させる
と、砥石4によつて水晶板3の外側面が研削さ
れ、水晶板3の一方の主面に曲率Rの曲面が形成
され、プラノコンベツクス形の水晶板が得られ
る。この時、円筒体1および外径研削機6のうち
少くとも一方をX−X′方向に往復運動させなが
ら、円筒体1と外径研削機6の距離を1回ごとに
微少間隔ずつ狭めていけば(以下トラバース運動
と言う)、研削加工をより早く、かつ効率的に行
なうことができる。 Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings. FIG. 1 shows the main parts of the manufacturing apparatus used in this embodiment, and a rectangular crystal plate (for example, an AT cut plate) 3 is attached to the outer peripheral surface of a cylindrical body 1 having a radius R. Further, an outer diameter grinder 6 is disposed near the cylindrical body 1 and uses a cylindrical body 5 whose outer peripheral surface is formed by a grindstone 4 as a processing means. and 8
They are rotating in the same direction as shown in . In such a state, when the crystal plate 3 and the grindstone 4 are brought into contact, the outer surface of the crystal plate 3 is ground by the grindstone 4, a curved surface with a curvature R is formed on one main surface of the crystal plate 3, and a planar surface is formed. A convex-shaped crystal plate is obtained. At this time, while reciprocating at least one of the cylindrical body 1 and the outer diameter grinder 6 in the X-X' direction, the distance between the cylindrical body 1 and the outer diameter grinder 6 is narrowed by a minute interval each time. (hereinafter referred to as traverse motion), the grinding process can be performed more quickly and efficiently.
次に、1回目の研削加工で得られたプラノコン
ベツクス形の水晶板3を加工面を内側にして再び
円筒体1に貼り付け、外径研削機6によつて再度
研削加工を行えば、第2図に示すような両面に曲
率Rの曲面を有するダブルコンベツクス形の水晶
板10が得られる。 Next, the planoconvex-shaped crystal plate 3 obtained in the first grinding process is attached to the cylindrical body 1 again with the machined surface facing inside, and the grinding process is performed again using the outer diameter grinding machine 6. A double convex crystal plate 10 having curved surfaces with a curvature R on both sides as shown in FIG. 2 is obtained.
次に、このダブルコンベツクス形の水晶板を、
さらにr<Rの条件にある半径rの円筒体の外周
面に貼り付け、第1図の製造装置を用い、曲率R
の曲面を形成した場合と同様の方法で、rの曲率
で面取りを行い、第3図に示すようなシリンドリ
カル水晶板20を得る。なお、第3図において、
21はRの曲率で加工された主面、22はrの曲
率で加工された面取り部である。このようにして
得られた水晶板20を、第3図に示すY−Y′方
向に適当な幅で切断することにより、第4図に示
す形状の、等価抵抗の小さいシリンドリカル水晶
振動子30が得られる。 Next, this double convex type crystal plate,
Furthermore, it is pasted on the outer circumferential surface of a cylindrical body with radius r under the condition of r<R, and using the manufacturing apparatus shown in Fig. 1, the curvature R
A cylindrical crystal plate 20 as shown in FIG. 3 is obtained by chamfering with a curvature of r in the same manner as in the case of forming the curved surface. In addition, in Figure 3,
21 is a main surface processed with a curvature of R, and 22 is a chamfered portion processed with a curvature of r. By cutting the thus obtained crystal plate 20 to an appropriate width in the Y-Y′ direction shown in FIG. 3, a cylindrical crystal resonator 30 having a small equivalent resistance and having a shape shown in FIG. can get.
なお、上記実施例において、砥石の選択にあた
つては、水晶の硬度が7と硬い材料であることか
ら、ダイヤモンド砥粒を含んだ砥石であることが
望ましい。更に、砥粒の粒径は、#500〜#2000
の範囲にあることが望ましく、#500より大きい
と、加工時における水晶板のかけの面で問題が発
生する。同様の理由で、砥石の送りは、1往復の
トラバース運動当り10μm以下であることが望ま
しい。 In the above embodiment, when selecting a grindstone, since quartz is a hard material with a hardness of 7, it is desirable to use a grindstone containing diamond abrasive grains. Furthermore, the particle size of the abrasive grains is #500 to #2000.
It is desirable that it be within the range of #500, and if it is larger than #500, problems will occur with respect to the quartz plate during processing. For the same reason, it is desirable that the feed of the grindstone be 10 μm or less per reciprocating traverse movement.
以下、本発明の具体例を示す。 Specific examples of the present invention will be shown below.
曲率Rが80mmで長さが50mmの円筒体の外周面
に、長さ10mmで、幅が8mm、厚みが0.43mmのAT
カツト矩形水晶平板を30枚貼り付け、#600の
ダイヤモンド砥粒を含んだ砥石を取付けた外径研
削機を用いて、円筒体を回転およびトラバース運
動をさせながら、1往復トラバースあたり3μm
の切り込みになるように、外径研削機の送りを調
節して加工を行い、ダブルコンベツクス形の水晶
板を得た。 An AT with a length of 10 mm, a width of 8 mm, and a thickness of 0.43 mm is placed on the outer peripheral surface of a cylindrical body with a curvature R of 80 mm and a length of 50 mm.
Using an outer diameter grinder equipped with a grindstone containing #600 diamond abrasive grains, 30 pieces of cut rectangular crystal flat plates were pasted, and the cylindrical body was rotated and traversed while the cylindrical body was rotated and traversed to a diameter of 3 μm per reciprocating traverse.
Machining was carried out by adjusting the feed of the external diameter grinder so that the cutting depth was , and a double convex type crystal plate was obtained.
次に、このダブルコンベツクス形の水晶板を、
さらに、曲率rが30mmで長さが50mmの円筒体の円
筒面に、15枚ずつ貼り付け、同様に、#600のダ
イヤモンド砥石で加工を行い、非常に面精度の良
いシリンドリカル水晶板を得た。 Next, this double convex type crystal plate,
Furthermore, 15 pieces were attached to the cylindrical surface of a cylinder with a curvature r of 30 mm and a length of 50 mm, and similarly processed using a #600 diamond grindstone to obtain cylindrical crystal plates with very good surface precision. .
このシリンドリカル水晶板を、幅が2.4mmにな
るように、ダイヤモンドカツターで切断し、所要
のエツチング、電極蒸着を行い、共振周波数が
3.9MHzで、等価抵抗が50Ω以下の矩形の小形シ
リンドリカル水晶振動子を180個得た。 This cylindrical crystal plate was cut with a diamond cutter to a width of 2.4 mm, and the required etching and electrode deposition were performed to adjust the resonance frequency.
We obtained 180 small rectangular cylindrical crystal resonators with a frequency of 3.9MHz and an equivalent resistance of 50Ω or less.
以上のごとく本発明によれば、面精度が非常に
よく、かつ小型で等価抵抗の小さいシリンドリカ
ル水晶振動子を、容易にしかも一度に多量に製造
できるため、その産業上の価値は大なるものがあ
る。 As described above, according to the present invention, cylindrical crystal resonators with very good surface precision, small size, and low equivalent resistance can be easily manufactured in large quantities at one time, and therefore have great industrial value. be.
第1図は本発明において使用する製造装置の主
要部を示す斜視図、第2図および第3図は第1図
の装置により得られるダブルコンベツクス形およ
びシリンドリカル水晶板の斜視図、第4図は本発
明により得られる小形シリンドリカル水晶振動子
の一例の斜視図である。
1……円筒体、3,10,20……水晶板、4
……砥石、6……外径研削機、21……曲率Rの
主面、22……曲率rの面取り部、30……小形
シリンドリカル水晶振動子。
Figure 1 is a perspective view showing the main parts of the manufacturing equipment used in the present invention, Figures 2 and 3 are perspective views of double convex type and cylindrical crystal plates obtained by the equipment shown in Figure 1, and Figure 4. 1 is a perspective view of an example of a small cylindrical crystal resonator obtained according to the present invention. 1... Cylindrical body, 3, 10, 20... Crystal plate, 4
. . . Grindstone, 6 . . . External diameter grinder, 21 .
Claims (1)
板の水晶板を貼り付け、この第1の円筒体と少な
くとも外周面が砥石で形成された第2の円筒体
を、前記水晶板および砥石を接触させた状態で回
転させて、前記水晶板の一方の主平面を曲率Rの
曲面に加工し、次に、同様に他方主平面を曲率R
の曲面に加工し、次に、r<Rの条件にある半径
rの第3の円筒体の外周面に前記水晶板を貼り付
け、再度、前記第2の円筒体と回転状態において
接触させて、前記水晶板の一方の主平面の曲率R
の両端に曲率rの面取り部を形成し、さらに、他
方の主平面の曲率Rの両端に曲率rの面取り部を
形成し、しかる後、この水晶板を所定の大きさに
切断することを特徴とするシリンドリカル水晶振
動子の製造方法。 2 第1の円筒体および第2の円筒体と、前記第
2の円筒体および第3の円筒体を、回転方向に相
対的に移動させ、かつ前記各円筒体間の距離を回
転軸方向への移動ごとに微小間隔狭めることを特
徴とする特許請求の範囲第1項に記載のシリンド
リカル水晶振動子の製造方法。[Claims] 1. A rectangular flat crystal plate is attached to the outer peripheral surface of a first cylindrical body having a radius of R, and a second cylinder whose at least the outer peripheral surface is formed of a grindstone is attached to the first cylindrical body. The body is rotated with the crystal plate and the grindstone in contact with each other to process one main plane of the crystal plate into a curved surface with a curvature R, and then similarly process the other main plane into a curved surface with a curvature R.
Next, the crystal plate is pasted on the outer peripheral surface of a third cylindrical body with a radius r under the condition r<R, and is brought into contact with the second cylindrical body in a rotating state again. , curvature R of one main plane of the crystal plate
A chamfered portion with a curvature r is formed at both ends of the quartz crystal plate, and a chamfered portion with a curvature r is further formed at both ends of the other main plane with a curvature r, and then this crystal plate is cut into a predetermined size. A method for manufacturing a cylindrical crystal resonator. 2 The first cylindrical body and the second cylindrical body, and the second cylindrical body and the third cylindrical body are relatively moved in the rotation direction, and the distance between the respective cylindrical bodies is changed in the rotation axis direction. 2. The method of manufacturing a cylindrical crystal resonator according to claim 1, wherein the distance is narrowed by a minute distance each time the cylindrical crystal resonator is moved.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56148513A JPS5851032A (en) | 1981-09-18 | 1981-09-18 | Manufacture of cylindrical crystal oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56148513A JPS5851032A (en) | 1981-09-18 | 1981-09-18 | Manufacture of cylindrical crystal oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5851032A JPS5851032A (en) | 1983-03-25 |
| JPS6322939B2 true JPS6322939B2 (en) | 1988-05-13 |
Family
ID=15454441
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56148513A Granted JPS5851032A (en) | 1981-09-18 | 1981-09-18 | Manufacture of cylindrical crystal oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5851032A (en) |
-
1981
- 1981-09-18 JP JP56148513A patent/JPS5851032A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5851032A (en) | 1983-03-25 |
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