JPS6324067A - Air lock device for strip - Google Patents

Abstract

PURPOSE:To keep a vacuum chamber always at a high vacuum by forming the air locks on the inlet and outlet sides of the vacuum deposition chamber of a continuous vacuum deposition device with plural differential pressure chambers, and providing a couple of seal belts each wound on two rolls at the upper and lower parts of each differential chamber. CONSTITUTION:A strip metal 4 is introduced into the vacuum chamber 1 through the air lock 2 on the inlet side consisting of plural differential pressure chambers 2a-2d, the vapor of Al, Ti, etc., from a vaporization source 9 is deposited on the strip metal, and the strip metal is taken out through the air lock 3 on the outlet side consisting of plural differential pressure chambers 3d-3a. The endless belt 24 wound on the two upper seal rolls 17 and 18 and the endless belt 25 wound on the two lower seal rolls 19 and 20 are provided respectively at the upper and lower parts of each differential pressure chamber of the air locks on the inlet and outlet sides in the lengthwise direction of each differential pressure chamber, and both endless belts are moved at the same velocity as that of the strip metal 4. Consequently, the air-tightness of each differential pressure chamber is improved, and the penetration of the atmosphere into the vacuum chamber 1 is prevented. The penetration of O2, CO2, and fine suspended matter in the atmosphere into the vacuum chamber 1 is also prevented, and hence the deterioration in the quality of the vapor-deposited film can be prevented.

Description

Detailed Description of the Invention (Industrial Field of Application) The present invention relates to an airlock device for a strip-shaped article, in particular, a metal or ceramic material that is applied to the surface of a strip-shaped article such as a metal strip by a physical vapor deposition method such as ion blasting in a vacuum chamber. The present invention relates to a differential pressure chamber sealing structure of an air lock device having sealing differential pressure chambers provided on the inlet and outlet sides of a continuous vacuum evaporation processing device for strip-shaped objects for continuous coating with other thin films. .

(Prior art) Conventionally, a lubricant was applied to one or both sides of a strip such as a metal strip.
/! , Ti, etc. are known as the inlet and outlet airlocks of a continuous vacuum evaporation apparatus as shown in FIG. The continuous vacuum thin deposition processing apparatus of the type shown in the figure includes a vacuum chamber 1 maintained at a high vacuum for performing vacuum evaporation processing, and an inlet side and an outlet side respectively connected to an inlet 1a and an outlet 1b of this vacuum chamber 1. air lock 2
and 3, and each of these air locks 2 and 3 is composed of a plurality of differential pressure chambers whose pressure is regulated to a high degree of vacuum as it approaches the vacuum chamber 1. 1ff continuously enters the vacuum chamber 1 via the outlet 1b.
The structure is such that vacuum sealing is ensured to maintain the inside of the vacuum chamber 1 at a high vacuum level during vapor deposition processing.

Inlet side of inlet side airlock 2 and outlet side airlock 3
A coil unwinding machine 5 and a winding machine 6 are installed on the exit side of the
is provided, whereby the strip 4 unwound from the coil by the unwinding machine 5 is passed continuously from the lower part between the inlets of the inlet air lock 2 through the vacuum chamber 1 to the outlet opening 8 of the outlet air lock 3. , an evaporation source 9 such as an evaporation pot in the vacuum chamber 1
The metal vapor evaporated from the metal vapor is deposited on the surface of the strip, and the strip 4 that comes out from the outlet opening 8 of the outlet airlock 3 is transferred to the winder 6.
It is configured to be wound into a coil shape.

Multiple differential pressure chambers 2a+ 2b+2 of entrance airlock 2
In order to maintain the degree of vacuum in the vacuum chamber 1 at a predetermined value, the internal pressures of the differential pressure chambers 2b, 2c, and 2d are adjusted sequentially from the differential pressure chamber 2a at the entrance end close to atmospheric pressure to the internal pressures of the differential pressure chambers 2b, 2c, and 2d. While increasing the degree of vacuum, the plurality of differential pressure chambers 3a of the outlet air lock 3
, 3b, 3c, and 3d are gradually lowered from a predetermined degree of vacuum in the vacuum chamber 1 toward the outlet end, so that the pressure in the differential pressure chamber 3a at the outlet end is close to atmospheric pressure. The air is evacuated and the pressure is regulated through a vacuum exhaust duct (not shown) connected to the duct.

(Problems to be Solved by the Invention) As mentioned above, when strip-shaped objects are processed continuously, the atmosphere becomes air-to-air (high vacuum-atmosphere). The problem is how to create a vacuum seal between the two. In other words, if the sealing performance is poor, O2, CO□, and fine suspended matter in the atmosphere will enter the vacuum chamber, which will not only have a negative effect on the deposited film, but also reduce the amount of exhaust air in the vacuum chamber and differential pressure chamber by the vacuum pump. There is a problem in that this increases running costs.

The present invention seeks to solve the above-mentioned problems.

(Means for Solving the Problems) According to the present invention, while maintaining the high vacuum in the vacuum chamber that is evacuated to a high vacuum, the strip to be vacuum-processed is introduced into the vacuum chamber from the entrance atmosphere, and In an air rotor device for a band-shaped object, which is provided with sealing differential pressure chambers provided on the inlet and outlet sides of the vacuum chamber so that the atmosphere can be drawn out from the vacuum chamber into the outlet atmosphere, the differential pressure chambers are installed as shown in FIG. A pair of upper seal rolls 13.14 and a pair of lower seal rolls 15.16 are provided vertically in the differential pressure chamber 10 and are spaced apart from each other in the length direction. , 16f'J are wound with endless seal belts 24 and 25, respectively, so that the pair of upper and lower endless seal belts 24 and 25 substantially block the internal space of the differential pressure chamber 10 by sandwiching the belt-shaped object. It is characterized by being configured so that a strip 4 can be passed through it.

(Function) According to the air rotator device for a strip according to the present invention configured as described above, the differential pressure chamber 10 is connected to the upper and lower seal belts 24, 25.
can be substantially occluded to allow the strip to pass through.

Therefore, it is possible to eliminate the adverse effects on the deposited film caused by the intrusion of 00□, CO2, and fine suspended matter in the atmosphere, and to reduce the running cost required for evacuation of the vacuum chamber and the differential pressure chamber.

(Example) Figures 1 to 3 show an example of the present invention. In the illustrated example,
A pair of upper seal rolls 13.14 and a pair of lower seal rolls 15.16 are provided above and below, spaced apart in the length direction of the differential pressure chamber 10, between the top wall 11 and the bottom wall 12 of the differential pressure chamber 10 for sealing. Each seal roll 13.14, 15.1
The roll shafts 17, 18, 19, and 20 of No. 6 pass through the side wall 21 of the differential pressure chamber 10 via a rotary seal 22 and are rotatably supported by bearings 23, respectively.

Endless seal healds 2 are installed between the upper seal rolls 13 and 14 and the lower seal rolls 15 and 16, respectively.
4°25 is wrapped around these upper and lower seal healds 24.
゜25 is brought into close contact with the strip 4 by the upper seal roll 13, 14 and the lower seal rolls 15, 16, respectively, and sandwiched between the upper and lower seal belts 24, 25, thereby closing the space between the inlet and outlet sides of the differential pressure chamber 10. the seal bell)
24, 25 are configured to substantially occlude and seal.

In the illustrated example, the strip 4 and the upper and lower sealing rolls 13.1
A side seal piece 26 is inserted into the gap created between the seal belt 24.25 and the seal belt 24.25.

The seal pieces 26 are formed to cover the front surfaces of both ends of the roll 13.15 and the rear surfaces of both ends of the roll 14.16,
A spacer 27 is connected between these seal pieces 26 so that the seal pieces 26 are held in a position covering the end of the roll.

(Effects of the Invention) According to the present invention, it is possible to substantially block the differential pressure chamber of the air lock device and allow the strip to pass through. This method has no adverse effect on the deposited film, and can also reduce the running costs required for evacuation of the vacuum chamber and the differential pressure chamber.

[Brief explanation of drawings]

1 is a partial longitudinal sectional view of the air lock device according to the present invention in the longitudinal direction; - FIG. 2 is a sectional view taken along the line ■-■ of FIG. 1; and FIG. A cross-sectional view along the line, FIG. 4, is a schematic diagram of a conventional continuous vacuum evaporation apparatus for strips. 1... Vacuum chambers 13, 14... Upper seal rolls 15, 16... Lower seal roll 24... Upper endless seal belt 25... Lower endless seal heald 26... Side seal piece 27...・Spacer patent applicant Kawasaki Steel Corporation Figure 1 Figure 2 Figure 4

Claims (1)

[Claims] 1. While maintaining a high vacuum in the vacuum chamber that is evacuated to a high vacuum, the strip to be vacuum-processed is introduced into the vacuum chamber from the inlet atmospheric atmosphere, and the vacuum is evacuated so that it can be drawn out from the vacuum chamber into the outlet atmospheric atmosphere. In an air lock device for a band-shaped object, the air lock device is provided with a differential pressure chamber for sealing provided on the inlet side and the outlet side of the chamber,
A pair of upper seal rolls and a pair of lower seal rolls, which are spaced apart in the length direction of the differential pressure chamber, are provided above and below in the differential pressure chamber, and an endless seal belt is wound between each of the upper seal rolls and between the lower seal rolls. 1. An air lock device for a belt-shaped object, characterized in that the pair of upper and lower endless seal belts sandwich the belt-shaped object and substantially close the internal space of the differential pressure chamber to allow the belt-shaped object to pass through.