JPS6325705B2 - - Google Patents

Description

[Detailed Description of the Invention] [Object of the Invention] (Industrial Application Field) The present invention is applicable to the positioning of a stem when mounting a chip on the stem, for example, in the manufacture of surface wave devices and can type semiconductor devices. The present invention relates to a positioning device used.

(Prior Art) Generally, a semiconductor device is made by mounting a chip (pellet) 12 at a predetermined position on a stem 11, as shown in FIGS. 1, 2, and 3. When a large-sized chip 12 such as a wave element or a can type semiconductor is to be targeted, the above-mentioned two components are usually assembled as follows. That is, as shown in FIG. 4, the chips 12 are transferred from the dicing wafer to the chip tray 14. Further, the stems 11 are inserted into the carrier tape 15 in the same direction, and are sequentially conveyed by the carrier tape 15 to a predetermined mounting position. Then, it is pushed up from the carrier tape 15 by a work holder (not shown) at a predetermined mounting position, and is positioned and held by a stem gauging claw (not shown). On the other hand, the chips 12 are transported by a chip transfer device (not shown) to a chip gauging unit 16 spaced apart from the chip tray 14 by a distance l.
After being positioned here, it is transported again by the chip transfer device to the above-mentioned mounting position separated by a distance l, and is mounted at a predetermined position on the stem 11 held by the stem gauging claw.

(Problems to be Solved by the Invention) The positional relationship between the stem 11 and the chip 12 mounted as described above depends on the shape of the stem 11 and its pin arrangement as shown in FIGS. 1, 2, and 3. It is divided into several types such as. That is, in FIG. 1, the center of the tip 12 is aligned with the center of the stem 11. Also, Figures 2 and 3 are for chip 1.
The centers of the stems 1 and 2 are offset from the center of the stem 11 by dimensions β ₁ and β ₂ . In this way, if there is a difference in the positional relationship between the stem 11 and the chip 12, there is no problem if you use a dedicated mounter that corresponds to each positional relationship. It is necessary to share the information so that it can correspond to the following.

As one means for the above-mentioned common use, it is conceivable to change the transport distance l of the chip transfer device. However, for this purpose, as is clear from FIG. 4, it is necessary to change the position of the chip tray 14, which complicates the entire device and leads to an increase in cost. Note that this type of device includes, for example,
The one published in Japanese Patent Application Laid-open No. 55-65444 is known,
This device also does not show any means for solving the above problem.

An object of the present invention is to provide a positioning device that can easily accommodate various positional relationships without requiring major changes to the entire device.

(Structure of the Invention) (Means for Solving the Problems) The positioning device according to the present invention includes a holding section that includes a first and a second holding body that are provided to be openable and closable so as to clamp the periphery of the object to be positioned. and first and second actuating rods, each of which has the first and second holders attached to one end thereof and is supported by a base so as to be movable back and forth along the opening/closing direction of the first and second holders; First and second joint pieces provided on the first and second actuating rods and arranged such that the distance between them changes as the holding section opens and closes; and the first and second joint pieces. The cam has tapered cam sides with equal inclination angles for sliding contact, and is provided so as to be able to move forward and backward in a direction perpendicular to the forward and backward directions of the first and second actuating rods, and this forward and backward movement opens and closes the holding section and holds it. a cam having a cam side formed such that the cam side is spaced a predetermined distance from the first and second joint pieces to permit eccentric movement of the entire holding section when the holding section is in a closed state; On the other hand, the first springs each having a different spring force individually apply an acting force in the direction of closing the holding part.
and a second spring, which is provided opposite to one of the base and the holding body of the holding unit, respectively, to stop eccentric movement of the entire holding unit due to the difference in spring force between the first and second springs. It is equipped with a stopper that abuts each other and an adjustment bolt that can move forward and backward.

(Function) In the present invention, the first and second joint pieces 28, which come into sliding contact with the cam side 33 of the cam 31 in the standby state,
29 are brought close to each other against the spring force of the first and second springs 35 and 36, and the holding part 23 is in an open state where the first and second holding bodies 24 and 25 are sufficiently spaced apart. It has become a state.

In this state, when the object to be positioned 11 is supplied between the first and second holding bodies 24 and 25 and the cam 31 is operated, the first and second joint pieces 28, which come into sliding contact with the cam side 33, Reference numeral 29 indicates that the object to be positioned 11 is moved by the spring force of the first and second springs 35 and 36.
the first and second holding bodies 24,
25 is closed, and the periphery of the object to be positioned 11 located between them is clamped.

In this closed state, a contact/separation distance α occurs between the cam side 33 and the first and second joint pieces 28 and 29, and due to the difference in spring force between the first spring 35 and the second spring 36, The entire holding part 23 is the object to be positioned 1
1, and stops when the stopper 41 and adjustment bolt 42 come into contact with each other. As a result, the center of the object to be positioned 11 is positioned eccentrically by the distance β from the original center position. Also,
The distance β from the stopper 41 is arbitrarily adjusted using the adjustment bolt 42 to obtain a desired positional relationship.

(Example) Hereinafter, an example of the present invention will be described with reference to the drawings. In this embodiment, the above-mentioned stem 11 is exemplified as the object to be positioned.

In FIG. 5, reference numeral 21 denotes a base fixed on the base surface, and a holding part 23 for positioning the stem 11 is provided at the upper end base 22 of the base 21 so as to be openable and closable. As shown in FIG. 6, this holding part 23 holds the stem 1 supplied to the held position.
first and second holders 24, which are located on both sides of the holder 24 and have V-shaped notches for holding the periphery thereof;
Consists of 25. As shown in FIG. 7, this first holder 24 is connected to one end of a first actuating rod 26 which has a tubular shape and is supported within the upper end base 22 of the base 21 so as to be movable back and forth along the axial direction. The second holder 25 is attached to one end of a second actuating rod 27 that is supported in the tubular first actuating rod 26 so as to be movable back and forth along the axial direction. The first and second holding bodies 24 and 25 are connected to the first and second actuating rods 2.
6 and 27 move in opposite directions, opening and closing operations occur.

First and second joint pieces 28 and 29 are provided at the other ends of the first and second actuating rods 26 and 27, respectively, to open and close the first and second holders 24 and 25. They are arranged so that the spacing changes with the operation.

Reference numeral 31 denotes a cam for opening and closing, which is guided and supported by a guide 32 shown in FIG. At the same time, a tapered cam side 33 having an equal inclination angle and slidingly contacts the first and second joint pieces 28 and 29 is provided on the inside of the upper part of the cam 31. The cam 31 moves upward as shown by the arrow _P1 to open the first and second holding bodies 24 and 25 as shown by the arrow _Q1 , and as the cam 31 moves downward as shown by the arrow _P2 , the first and second holding bodies 24, 25 open as shown by the arrow P2. The second holders 24 and 25 are closed as shown by arrow _Q2 . Further, the cam side 33 is connected to the first and second holding bodies 24 and 25.
When in the closed state holding the stem 11, the cam side 33 is formed to be separated from the first and second joint pieces 28, 29 by a distance α, as shown in FIG. This separation distance α allows eccentric movement of the entire holding portion 23 holding the stem 11, which will be described later.

In FIGS. 5 and 6, 35 and 36 are first and second springs for the closing operation, and a pin 37 that is integral with the first and second joint pieces 28 and 29;
They are stretched between the base 21 and pins 39 implanted in a support plate 38 integral with the base 21, and the holding portion 2
Apply the acting force to close 3 individually. Also,
As this second spring 36, one whose spring force (tensile force) is larger than that of the first spring 35 is used.

A stopper 41 is attached to the upper end base 22 of the base 21.
is provided, and this stopper 41 is connected to the holding portion 23.
As shown in FIG. 6, the tip of the adjustment bolt 42, which is movably provided on one of the holders 25 of the holder 25, is opposed to the tip of the adjustment bolt 42 with a distance β therebetween. This stopper 41 is
The eccentric movement of the entire holding portion 23 to the left in the drawing, which is caused by the difference in spring force between the first and second springs 35 and 36, is stopped by contact with the adjustment bolt 42.

Reference numeral 44 denotes a work holder that is provided to be able to move up and down, and the stem 11 is conveyed to a predetermined mounting position by the carrier tape 15 by the upward movement of the work holder.
While holding it at the upper end, push up the holding part 23.
Supply to the held position by. For this reason, a vacuum holding device for holding the stem 11 by suction is built into its upper end. Further, the lower end of this work holder 44 is connected to one end of a lever 45, the middle part of which is rotatably supported on the base 21 by a support shaft 46, and the other end is connected to a disk cam 47. is engaged with. Therefore, the work holder 44 rotates as the disc cam 47 rotates.
It is driven in the vertical direction via the lever 45.

In addition, the cam 31 for driving the opening and closing is connected to the connecting rod 4.
9, one end of which is connected to the other end of a lever 51 rotatably supported by the base 21 via a support shaft 50, and a disc cam that slides into contact with a joining pin 53 provided at an intermediate portion of the lever 51. It is driven in the vertical direction by the rotation of 54.

A drive motor 56 drives the disc cams 47, 54 and other disc cams provided on the common shaft 57. The vertical movement of the opening/closing drive cam 31 and the work holder 44 and the conveyance operation of the carrier tape 15 are driven in conjunction with each other.

Next, the operation will be explained.

First, in the standby state, the cam 3 for opening/closing drive
1 is in the raised position, and the first and second joint pieces 28 and 29 that are in sliding contact with the cam side 33 are brought close to each other against the spring force of the first and second springs 35 and 36. ing. For this reason, the holding part 23
is in an open state in which the first and second holding bodies 24 and 25 are sufficiently spaced apart.

In this state, when the stem 11 is conveyed to a predetermined mounting position by the carrier tape 15, the work holder 44 rises, holds the stem 11 by suction at its upper end, and pushes it up from the carrier tape 15. Second holding body 2
Supply between 4 and 25. Next, when the opening/closing driving cam 31 is lowered as shown by the arrow P ₂ , the first and second joint pieces 2 come into sliding contact with the cam side 33 .
8 and 29 move as shown by arrow _Q2 by the spring force of the first and second springs 35 and 36, closing the first and second holding bodies 24 and 25, and opening the stem 11 located between them. Hold the surrounding area.

In this closed state, as described above, the cam side 33
Since there is a separation distance α between the first and second joint pieces 28 and 29, and the spring force of the second spring 36 is made larger than that of the first spring 35, the holding part 23 The entire body moves in the direction of arrow _R1 while holding the stem 11. Then, the stopper 41 and the adjustment bolt 42 come into contact and stop. As a result, the center of the stem 11 is positioned eccentrically by a distance β from the original center position. At this time, β is set to be (0βα).

When the chip 12 is mounted as shown in FIG. 4 on the stem 11 positioned as described above, the center of the stem 11 itself is shifted by β from the original center position even though the distance l of the chip 12 carried by the mounter is the same. Because of the offset, the tip 12 is mounted eccentrically by β on the stem 11. Further, since the distance β between the stopper 41 and the adjustment bolt 42 can be adjusted arbitrarily from (O to α), the first
The positional relationships shown in FIGS. 2, 2, and 3 can be immediately obtained.

After mounting is completed, open/close drive cam 3
1 as shown by arrow _P1 . As a result of this operation, the entire holding part 23 first moves toward the arrow shown in the arrow while holding the stem 11 against the spring force of the second spring 36.
It is driven in the direction shown by R ₂ and returns to its original center position. Then, as the cam 31 continues to rise, the first and second holding bodies 24 and 25 move toward the arrow Q ₁ against the spring force of the first and second springs 35 and 36.
The opening operation is performed as shown in , and the grip on the stem 11 is released. Next, the work holder 44 descends while holding the stem 11 with a vacuum, and the stem 11 is returned onto the carrier tape 15. Then, the holding by the vacuum is released, and the work holder 44 is further lowered, leaving the stem 11 on the carrier tape 15, and stopped at a predetermined lower limit position. In this state, when the next stem 11 is conveyed to the mounting position by the carrier tape 15, the work holder 44 is raised again and the above-described operation is repeated to perform the chip mounting operation.

In the embodiment described above, the adjustment bolt 42 for adjusting the interval β is provided on the holding portion 23 side, and the stopper 41 is provided on the upper end base 22 side of the base 21, but these positional relationships may be reversed.

Further, if the adjustment bolt 42 is made of a readable item such as a scale, for example, a micrometer head, adjustment becomes easier. Further, although concentric rods are shown as the first and second actuating rods 26 and 27, rods disposed parallel to each other may also be used.

(Effects of the Invention) According to the present invention, by simply operating the adjustment bolt, without requiring any major changes in equipment,
It is possible to obtain various positional relationships of the object to be positioned, and therefore the mounting work of various surface wave elements and semiconductor elements with different positional relationships between the stem and chip, wire bonding work, etc. can be mechanized with a common type. This makes it possible to reduce equipment costs.

[Brief explanation of the drawing]

Figure 1 a, b, Figure 2 a, b and Figure 3 a,
b is a plan view and a front view showing the positional relationship between a stem and a chip, which is an example of an object to be positioned, FIG. FIG. 6 is a perspective view showing an embodiment of the positioning device according to the invention, FIG. 6 is a plan view showing the main part of FIG. 5, and FIG. 7 is a sectional view taken along line AA in FIG. 6. 11... Stem as a body to be positioned, 21...
...base, 23...holding section, 24, 25...first
and second holding body, 26, 27...first and second actuating rods, 28, 29...first and second joint pieces, 31...cam, 33...cam side, 3
5, 36...first and second springs, 41...stopper, 42...adjustment bolt.

Claims (1)

[Scope of Claims] 1. A holding section consisting of a first and second holding body that is provided to be openable and closable so as to hold the periphery of the object to be positioned, and the first and second holding bodies are each attached to one end. Attachment: first and second actuating rods supported by the base so as to be freely retractable along the opening and closing directions of the first and second holding bodies; and the holding portions provided on the first and second actuating rods, respectively. and a tapered cam side having an equal inclination angle that makes sliding contact with the first and second joint pieces; 1st
and a second actuating rod that is movable back and forth in a direction perpendicular to the forward and backward direction of the second actuating rod, and this forward and backward movement opens and closes the holding part, and when the holding part is in the closed state, the cam side is connected to the first and second joint pieces. a cam whose cam side is formed at a predetermined distance from the holder to permit eccentric movement of the entire holding part; and a cam having a spring force that individually applies an acting force to the first and second actuating rods in the direction of closing the holding part. Different first and second springs are provided opposite to one of the base and one of the holding parts, respectively, to prevent eccentric movement of the entire holding part due to a difference in spring force between the first and second springs. A positioning device comprising: a stopper that comes into contact with each other for stopping; and an adjustment bolt that can move forward and backward.