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JPS6337066B2 - - Google Patents
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JPS6337066B2 - - Google Patents

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Publication number
JPS6337066B2
JPS6337066B2 JP59183636A JP18363684A JPS6337066B2 JP S6337066 B2 JPS6337066 B2 JP S6337066B2 JP 59183636 A JP59183636 A JP 59183636A JP 18363684 A JP18363684 A JP 18363684A JP S6337066 B2 JPS6337066 B2 JP S6337066B2
Authority
JP
Japan
Prior art keywords
sic
sintered body
zrb
tin
subcomponents
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59183636A
Other languages
Japanese (ja)
Other versions
JPS6163573A (en
Inventor
Masaru Segawa
Otojiro Kida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to JP59183636A priority Critical patent/JPS6163573A/en
Priority to US06/751,528 priority patent/US4636481A/en
Priority to EP85108300A priority patent/EP0170889B1/en
Priority to DE8585108300T priority patent/DE3569365D1/en
Publication of JPS6163573A publication Critical patent/JPS6163573A/en
Publication of JPS6337066B2 publication Critical patent/JPS6337066B2/ja
Granted legal-status Critical Current

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Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はZrB2(2硼化ジルコニウム)質焼結体
に関するものである。 一般的に金属硼化物セラミツクスは高融点で高
硬度、高強度、高耐蝕の特徴を有し、従来から切
削工具、熱機関部品材料などとして用いられてい
るが、実際に実用化されているものの多くはチタ
ンの硼化物であつて、ジルコニウムの硼化物は殆
んど実用化されていないのが実状である。 本発明のZrB2複合焼結体は、高融点、高強度、
高耐蝕、高硬度、導電性、耐酸化性等の優れた特
徴を有するので高温耐蝕性部材、機械部材、発熱
体、電極、誘導炉用ルツボ等に広く使用できる材
料である。 〔従来の技術〕 ZrB2質の複合焼結体として現在広く実用化さ
れているものは殆んどないが特許などには種々の
ものが提案されている。 即ち、焼結助剤又は複合材などのZrB2焼結体
における副成分としてはMoSi2などの珪化物、
TaN,HfN,BNなどの窒化物、ZrO2などの酸
化物、SiC,B4Cなどの炭化物、種々の金属など
が知られている。 〔発明が解決しようとする問題点〕 例えば珪化物については特公昭38−6098に
ZrSi2が、また米国特許第3705112号にMoSi2など
が開示されているが、これらのSi系化合物は高温
雰囲気下での焼結で溶融又は分解するため組織が
多孔質で結晶の粒成長が大きくなることが多く、
そのため強度も、耐蝕性も十分でないことが多い
し、耐酸化性もSiO2の皮膜としての効果が予測
されるがこれらの副成分のみで空気中での使用に
は十分でない。 つぎに窒化物については、米国特許第3305374
に開示されているTaNは高硬度材料としてZrB2
TiB2等に添加され、工具材料、装飾材に応用さ
れているが高硬度、高強度の点では優れているが
高温耐蝕部材、発熱体、電極、誘導炉用ルツボ等
の高温酸化雰囲気に使用する場合、耐酸化性、耐
スポール性、耐蝕性などの点で十分ではない。 つぎに炭化物については米国特許第3775137に
SiC、米国特許第3325300にB4CやSiCが開示され
るなどしているが、米国特許第3775137のSiCの
みの添加では耐酸化性の点で不十分であり、又、
第3325300のMoSi2+B4C,MoSi2+SiC+B4Cの
添加ではMoSi2が焼結温度より低融点であり焼結
中に融けて、分解したり、粒成長を促進するなど
組織を多孔質化するため高密度化しにくい。従つ
て特に高温構造部材として要求される材料には至
つていない。 このような点に鑑み、本発明者らは先にMoSi2
を加えることのないSiC+B4Cの添加、又はSiC
+BNの添加をしたものについて検討し改良され
たZrB2焼結体を得ることに成功した。これらは
それなりにZrB2焼結体の実用化を可能とするも
のであつたが、まだ改良されるべき余地が残つて
いることも事実であつた。 例えば、SiC+BNの添加系はBN含有量を増や
すことで耐スポール性を向上させることができる
などの点で満足できるものであつたが、難焼結性
のBNを添加することで緻密質焼結体が得られに
くく強度や硬度などの点では必ずしも十分でな
く、従つて高温高強度部材などの用途には適した
ものとはいえないものであつた。 また、SiC+B4Cの添加系は強度、硬度及び耐
酸化性などの点では満足できるものであつたが、
耐スポール性や耐蝕性、特に鉄やスラグに対する
耐蝕性などの点では必ずしも十分でなく、従つ
て、鉄鋼用などの耐スポール、高温耐蝕部材など
の用途には適したものとは必ずしもいえないもの
であつた。 このような点に鑑み、優れた特質を備えていな
がらその特性を生かしきれず極めて限られた用途
にしか実際に使われていないZrB2質焼結体につ
いて、従来の問題点を克服すべく研究を進めた結
果、優れた高密度、高強度、耐酸化性、耐蝕性さ
らには耐スポール性などの諸性能を兼ね備え、か
ついくつかについてはその特質、特にこの種複合
体としての高温耐蝕性を著しく向上せしめた焼結
体の開発に成功したのである。 〔問題を解決するための手段〕 即ち、本発明は、ZrB2を主成分とし、副成分
としてTiN,B4CおよびSiCを重量%で少くとも
それぞれ1%以上含み、かつこれらの副成分の合
量が10〜50%である高耐蝕性を有するZrB2質複
合焼結体を要旨とするものである。 本発明に用いるZrB2は、例えば酸化ジルコニ
ウム、酸化硼素およびカーボンの混合物を高温で
反応させることにより得られ、本焼結体の製造に
は可及的に純度の高いものを用いるのが好まし
く、また粒径も可及的に小さい粉末が好ましい。 具体的には純度99%以上、平均粒径10μm特に
は1μm以下のものがそれである。 また、副成分として存在せしめるSiC,B4C及
びTiNについては、焼結体としてそのような化
合物として所定量が存在していればよいので、出
発原料としてはどのような形態のものとして配合
してもよいが、SiC,B4C及びTiN以外の原料を
使用した場合には焼結段階で特別な配慮が必要と
なるため、通常配合原料としてSiC,B4C及び
TiNとして調整しておくのがよい。 このSiC,B4C及びTiN原料についても可及的
に純度の高いものが好ましく、通常99%以上のも
のがよい。 原料混合物は通常これら3種の微粉末を均一に
混合する事により調整するが、粉砕混合を目的と
して超微粉砕しても同様である。一般に混合原料
の粒度は10μm以下がよく、好ましくは平均粒径
1μm以下にまで十分調整しておくことである。 これらの粉砕はSiCボールを用いることが適当
である。 本発明焼結体はこれらの混合物を例えば黒鉛型
に充填し、真空又はアルゴン,ヘリウム,一酸化
炭素などの中性或は還元性の雰囲気下でホツトプ
レスするか、上記混合物をラバープレスで成形し
たものを常圧焼成するかで焼結可能である。 なお、焼成温度は1700〜2200℃、焼成時間は
0.5〜3時間程度が適当である。 副成分としてのTiN,B4C及びSiCはれぞれ1
%(重量%;以下同じ)以上必要であるが、これ
はTiNが1%以下では高耐食の特徴が十分発揮
されず、B4Cが1%以下では高密度化が困難であ
り、SiCが1%以下では耐酸化性が十分でないな
どのためである。 また、副成分であるTiN,B4C及びSiCの合量
が少なすぎると鉄やスラグに対する耐蝕性や耐酸
化性が不十分であつたり、高密度焼結体が得られ
ないなどの点で十分でなく、少くとも合量で10%
は必要である。 一方、TiN,B4C及びSiCはそれぞれが焼結体
中において半分量程度まで存在せしめることが可
能であるが、TiNが略50%を越えると耐酸化性
が低下し、B4Cが略50%を越えると耐熱性と耐蝕
性が劣り、SiCが略50%を越えると耐スポール性
の効果も発揮されなくなるので好ましくなく、い
ずれにしてもZrB2質の特質を本質的に損わない
ためにはTiNとB4CとSiCの合量を50%までにと
どめる必要がある。 なお、これらの範囲において、さらに望ましい
範囲はTiNとB4CとSiCはそれぞれがいずれも3
%以上で合量が10%以上、望ましくは20%以上40
%までとすることである。 また、副成分のそれぞれの好ましい範囲は、
TiNが3〜15%、BiCが3〜25%、SiCが3〜30
%である。 なお、本発明焼結体は、これらの副成分以外の
成分、即ち主成分である残部は実質的にZrB2
らなるものであるが、ZrB2質の特質を損わない
範囲でZrB2以外の成分、例えばTiB2などが主成
分の一部として少量含まれていても勿論差支えは
ないが可及的少量にとどめることが望ましい。 また、副成分としても本発明焼結体の目的効果
を本質的に損わない範囲において他の成分が含ま
れていても勿論差支えないが不可避的不純物を含
めて可及的少量にとどめることが必要である。 このような本発明の焼結体は組織的にはZrB2
結晶を主成分とし、この間をTiN,B4C,SiCが
強度に結合している緻密なものであつて、ZrB2
結晶は極めて微細な結晶で存在し、その特質を存
分に発揮せしめるに至つている。 具体的に言えば、本発明焼結体におけるZrB2
結晶はその大部分が粒径10μm以下として存在し
ているものである。 〔発明の効果〕 このようにして得られた本発明焼結体は、高密
度、高硬度、高強度、高耐酸化性であるとともに
特に高温耐蝕性に著しく優れたものであるため、
高温構造部材、高温耐蝕部材等に好ましく適用可
能であり、そのほかZrB2質焼結体の特質を発揮
した種々の用途に使用できるものでありその実用
的な価値は多大である。 〔実施例〕 実施例 1 ZrB2粉末(純度99%以上)75重量部、TiN粉
末(純度99%)10部、B4C粉末(純度99%)10
部、SiC粉末(純度99%)5部を十分に混合粉砕
すべく、ポツトミルを使用しエタノール溶媒中で
SiCボールを用い3日間粉砕混合した。得られた
粉末をエバポレーターでアルコール除去して十分
乾燥し、平均粒径0.15μmの粉末を得た。この粉
末を黒鉛型に充填しアルゴン雰囲気下で350Kg/
cm2の圧力下、1900℃で30分間加熱して焼結体を得
た。 得られた焼結体の特性は相対密度98%、曲げ強
度72Kg/mm2、耐酸化性(注1)変化なし、純鉄、
スラグに対する侵食性(注2)がなく、硬度2100
Kg/mm2であつた。 また、この焼結体におけるZrB2結晶の大きさ
はほとんどが5μm以下であつてZrB2結晶のまわ
りにTiN,B4C,SiCが強度に結合している緻密
な組織構造を有していた。 このようにして得られた焼結体の特性を第1表
に示す。 注1 耐酸化性は酸化雰囲気下、1000℃×12hrの
条件下での酸化状況を示す。 注2 侵蝕性は試料を1cm角に調整し、純鉄ある
いはスラグ中に埋め込み1500℃で2時間処理し
た後の試料の侵蝕状況を生成した変質層の厚み
から判断した。なお、侵蝕実験はアルゴン雰囲
気下で測定した。 実施例2乃至6及び批較例1乃至4 所定の配合原料を実施例1に準じて調整し、所
定の焼成条件で処理して得た各試料についての結
果を第1表に示す。 【表】
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a ZrB 2 (zirconium diboride) sintered body. In general, metal boride ceramics have the characteristics of high melting point, high hardness, high strength, and high corrosion resistance, and have traditionally been used as cutting tools and heat engine parts materials, but although they have not been put into practical use yet. Most of them are titanium borides, and the reality is that zirconium borides are hardly ever put into practical use. The ZrB2 composite sintered body of the present invention has a high melting point, high strength,
It has excellent characteristics such as high corrosion resistance, high hardness, electrical conductivity, and oxidation resistance, so it is a material that can be widely used for high-temperature corrosion-resistant parts, mechanical parts, heating elements, electrodes, crucibles for induction furnaces, etc. [Prior Art] There are currently very few ZrB 2- quality composite sintered bodies that are in widespread practical use, but various patents have been proposed. That is, silicides such as MoSi 2 ,
Nitrides such as TaN, HfN, and BN, oxides such as ZrO 2 , carbides such as SiC and B 4 C, and various metals are known. [Problems to be solved by the invention] For example, regarding silicides, the Japanese Patent Publication No. 38-6098
ZrSi 2 and MoSi 2 are disclosed in U.S. Patent No. 3705112, but these Si-based compounds melt or decompose during sintering in a high-temperature atmosphere, resulting in porous structures and slow crystal grain growth. Often larger,
Therefore, the strength and corrosion resistance are often insufficient, and although the oxidation resistance is expected to be effective as a SiO 2 film, these subcomponents alone are not sufficient for use in air. Next, regarding nitrides, U.S. Patent No. 3305374
TaN disclosed in ZrB 2 as a high hardness material,
Added to TiB 2 , etc., and applied to tool materials and decorative materials, it is excellent in terms of high hardness and high strength, but is used in high-temperature oxidizing atmospheres such as high-temperature corrosion-resistant parts, heating elements, electrodes, induction furnace crucibles, etc. In this case, the oxidation resistance, spalling resistance, corrosion resistance, etc. are not sufficient. Next, regarding carbides, refer to U.S. Patent No. 3775137.
SiC, B 4 C and SiC are disclosed in U.S. Patent No. 3,325,300, but the addition of only SiC as in U.S. Pat. No. 3,775,137 is insufficient in terms of oxidation resistance.
In addition of MoSi 2 + B 4 C and MoSi 2 + SiC + B 4 C in No. 3325300, MoSi 2 has a lower melting point than the sintering temperature and melts during sintering, decomposing and promoting grain growth, making the structure porous. Therefore, it is difficult to increase the density. Therefore, it has not yet reached the level of a material that is particularly required as a high-temperature structural member. In view of these points, the present inventors first developed MoSi 2
Addition of SiC + B 4 C without adding or SiC
We investigated the addition of +BN and succeeded in obtaining an improved ZrB 2 sintered body. Although these have made it possible to put ZrB 2 sintered bodies to practical use, it is also true that there is still room for improvement. For example, the addition system of SiC + BN was satisfactory in that spalling resistance could be improved by increasing the BN content, but by adding BN, which is difficult to sinter, dense sintering It was difficult to obtain a solid body, and the strength and hardness were not necessarily sufficient, and therefore it could not be said to be suitable for applications such as high-temperature, high-strength members. In addition, although the SiC + B 4 C additive system was satisfactory in terms of strength, hardness, and oxidation resistance,
It is not necessarily sufficient in terms of spall resistance and corrosion resistance, especially corrosion resistance against iron and slag, and therefore it is not necessarily suitable for uses such as spall resistance for steel and high temperature corrosion resistant parts. It was hot. In view of these points, we are conducting research to overcome the conventional problems with ZrB 2- material sintered bodies, which have excellent properties but are not fully utilized and are actually used for only extremely limited applications. As a result of progressing in the development of this type of composite material, it has achieved various properties such as high density, high strength, oxidation resistance, corrosion resistance, and even spalling resistance. They succeeded in developing a sintered body with significantly improved performance. [Means for solving the problem] That is, the present invention contains ZrB 2 as a main component, TiN, B 4 C, and SiC as subcomponents at least 1% or more by weight, and each of these subcomponents contains The gist is a ZrB dual- composite sintered body having high corrosion resistance with a total content of 10 to 50%. ZrB 2 used in the present invention can be obtained, for example, by reacting a mixture of zirconium oxide, boron oxide, and carbon at high temperature, and it is preferable to use ZrB 2 with as high purity as possible for producing the present sintered body. Further, a powder having a particle size as small as possible is preferable. Specifically, it has a purity of 99% or more and an average particle diameter of 10 μm, particularly 1 μm or less. In addition, regarding SiC, B 4 C, and TiN, which are present as subcomponents, it is sufficient that they are present in a predetermined amount as such compounds in the sintered body, so it is important to note in what form they should be blended as starting materials. However, if raw materials other than SiC, B 4 C, and TiN are used, special consideration is required in the sintering stage, so SiC, B 4 C, and
It is better to adjust it as TiN. The raw materials for SiC, B 4 C and TiN are also preferably as high in purity as possible, usually 99% or higher. The raw material mixture is usually prepared by uniformly mixing these three types of fine powders, but the same effect can be obtained by ultrafinely pulverizing them for the purpose of pulverizing and mixing. In general, the particle size of the mixed raw material is preferably 10 μm or less, preferably the average particle size
It is necessary to sufficiently adjust the thickness to 1 μm or less. It is appropriate to use SiC balls for these pulverizations. The sintered body of the present invention can be obtained by filling these mixtures into a graphite mold, for example, and hot pressing in a vacuum or in a neutral or reducing atmosphere such as argon, helium, carbon monoxide, etc., or by molding the above mixture with a rubber press. It is possible to sinter something by firing it under normal pressure. The firing temperature is 1700-2200℃, and the firing time is
Approximately 0.5 to 3 hours is appropriate. TiN, B 4 C and SiC as subcomponents are each 1
% (wt%; the same applies hereafter), but this is because if TiN is less than 1%, the high corrosion resistance characteristics will not be fully exhibited, and if B 4 C is less than 1%, it will be difficult to increase the density, and SiC will This is because, if it is less than 1%, oxidation resistance is insufficient. Furthermore, if the total amount of the subcomponents TiN, B 4 C and SiC is too small, the corrosion resistance and oxidation resistance against iron and slag may be insufficient, or a high-density sintered body cannot be obtained. Not enough, at least 10% in total
is necessary. On the other hand, TiN, B 4 C, and SiC can each be present in the sintered body up to about half the amount, but if TiN exceeds about 50%, the oxidation resistance decreases, and B 4 C If it exceeds 50%, the heat resistance and corrosion resistance will be poor, and if the SiC content exceeds about 50%, the spalling resistance will not be effective, so it is not desirable.In any case, the characteristics of the ZrB 2 quality will not be essentially impaired. To achieve this, it is necessary to limit the total amount of TiN, B 4 C, and SiC to 50%. In addition, in these ranges, a more desirable range is that TiN, B 4 C, and SiC are all 3
% or more, the total amount is 10% or more, preferably 20% or more40
%. In addition, the preferable range of each of the subcomponents is as follows:
TiN 3-15%, BiC 3-25%, SiC 3-30
%. In the sintered body of the present invention, the components other than these subcomponents, that is, the remainder of the main component, is substantially composed of ZrB 2 , but other than ZrB 2 may be used as long as the characteristics of the ZrB 2 quality are not impaired. Of course, there is no problem even if a small amount of a component such as TiB 2 is included as part of the main component, but it is desirable to keep the amount as small as possible. In addition, it is of course possible to include other components as subcomponents as long as they do not essentially impair the intended effects of the sintered body of the present invention, but they should be kept in as small a quantity as possible, including unavoidable impurities. is necessary. The sintered body of the present invention is structurally ZrB 2
ZrB 2
Crystals exist in the form of extremely fine crystals, and their properties have been fully demonstrated. Specifically, ZrB 2 in the sintered body of the present invention
Most of the crystals exist as particles with a particle size of 10 μm or less. [Effects of the Invention] The sintered body of the present invention thus obtained has high density, high hardness, high strength, high oxidation resistance, and is particularly excellent in high temperature corrosion resistance.
It can be preferably applied to high-temperature structural members, high-temperature corrosion-resistant members, etc., and can also be used in a variety of other applications that exhibit the characteristics of the ZrB 2 -substance sintered body, so its practical value is great. [Example] Example 1 ZrB 2 powder (purity 99% or more) 75 parts by weight, TiN powder (purity 99%) 10 parts, B 4 C powder (purity 99%) 10
and 5 parts of SiC powder (99% purity) were thoroughly mixed and ground in an ethanol solvent using a pot mill.
Grinding and mixing was carried out for 3 days using SiC balls. The obtained powder was thoroughly dried by removing alcohol with an evaporator to obtain a powder with an average particle size of 0.15 μm. This powder was packed into a graphite mold and heated to 350 kg/kg under an argon atmosphere.
A sintered body was obtained by heating at 1900° C. for 30 minutes under a pressure of cm 2 . The properties of the obtained sintered body are: relative density 98%, bending strength 72Kg/mm 2 , no change in oxidation resistance (Note 1), pure iron,
No erodibility (Note 2) against slag, hardness 2100
It was Kg/ mm2 . In addition, the size of most of the ZrB 2 crystals in this sintered body was less than 5 μm, and it had a dense structure in which TiN, B 4 C, and SiC were strongly bonded around the ZrB 2 crystals. . Table 1 shows the properties of the sintered body thus obtained. Note 1: Oxidation resistance indicates the oxidation status under the conditions of 1000℃ x 12 hours in an oxidizing atmosphere. Note 2: Erosion properties were determined from the thickness of the altered layer formed by adjusting the sample to a 1 cm square, embedding it in pure iron or slag, and treating it at 1500°C for 2 hours. Note that the corrosion experiment was measured under an argon atmosphere. Examples 2 to 6 and Comparative Examples 1 to 4 Table 1 shows the results for each sample obtained by adjusting predetermined mixed raw materials according to Example 1 and processing them under predetermined firing conditions. 【table】

Claims (1)

【特許請求の範囲】 1 ZrB2を主成分とし、副成分としてTiN,
B4CおよびSiCを重量%で少くともそれぞれ1%
以上含み、かつこれらの副成分の合量が10〜50%
である高耐蝕性を有するZrB2質複合焼結体。 2 TiN,B4CおよびSiCの副成分がいずれも重
量%で3%以上である特許請求の範囲第1項記載
の焼結体。 3 重量%でTiNが3〜15%、B4Cが3〜25%、
SiCが3〜30%である特許請求の範囲第2項記載
の焼結体。 4 TiN,B4CおよびSiCの合量が重量%で20〜
40%である特許請求の範囲第1項乃至第3項いず
れか記載の焼結体。 5 ZrB2結晶は、その大部分が粒径10μm以下で
ある特許請求の範囲第1項乃至第4項いずれか記
載の焼結体。
[Claims] 1 ZrB 2 as the main component, TiN, as subcomponents.
At least 1% each of B 4 C and SiC by weight
Contains the above, and the total amount of these subcomponents is 10 to 50%
ZrB dual -composite sintered body with high corrosion resistance. 2. The sintered body according to claim 1, wherein the subcomponents of TiN, B 4 C, and SiC are all 3% or more by weight. 3 TiN is 3-15%, B 4 C is 3-25%,
The sintered body according to claim 2, wherein the SiC content is 3 to 30%. 4 Total amount of TiN, B4C and SiC is 20~20% by weight
40% of the sintered body according to any one of claims 1 to 3. 5. The sintered body according to any one of claims 1 to 4, wherein most of the ZrB 2 crystals have a grain size of 10 μm or less.
JP59183636A 1984-07-10 1984-09-04 High corrosion resistance zrb2 base composite sintered body Granted JPS6163573A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP59183636A JPS6163573A (en) 1984-09-04 1984-09-04 High corrosion resistance zrb2 base composite sintered body
US06/751,528 US4636481A (en) 1984-07-10 1985-07-03 ZrB2 composite sintered material
EP85108300A EP0170889B1 (en) 1984-07-10 1985-07-04 Zrb2 composite sintered material
DE8585108300T DE3569365D1 (en) 1984-07-10 1985-07-04 Zrb2 composite sintered material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59183636A JPS6163573A (en) 1984-09-04 1984-09-04 High corrosion resistance zrb2 base composite sintered body

Publications (2)

Publication Number Publication Date
JPS6163573A JPS6163573A (en) 1986-04-01
JPS6337066B2 true JPS6337066B2 (en) 1988-07-22

Family

ID=16139245

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59183636A Granted JPS6163573A (en) 1984-07-10 1984-09-04 High corrosion resistance zrb2 base composite sintered body

Country Status (1)

Country Link
JP (1) JPS6163573A (en)

Also Published As

Publication number Publication date
JPS6163573A (en) 1986-04-01

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