JPS6347224B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of manufacturing an electric field deflection type deflection electrode for an image pickup tube.

For image pickup tubes, we mainly use single-tube color cameras for home use and three-tube color cameras for broadcasting.
Each of these devices is becoming smaller and more sophisticated.

Recently, research has been progressing on new electric field deflection systems such as the electron beam generator and MS type, which are used in laminar flow electron guns and high-definition TVs.

In an electric field deflection type image pickup tube, a conductive film is attached to the inner peripheral surface of a glass tube and a predetermined pattern is formed to create a deflection electrode.

Conventionally, conductive films on the inner surface of glass tubes, such as chromium and nickel, have been formed by vacuum evaporation, but vacuum evaporation on the inner surface of glass tubes is difficult to mass-produce, makes it difficult to make the film thickness uniform, and has problems with film adhesion. A major problem remains: insufficient strength.

In order to solve the above problem, the present inventor conducted studies using electroless plating, and as a result, was able to obtain a good conductive film.

That is, the present invention provides a method for manufacturing a deflection electrode for an image pickup tube in which a metal conductive film is attached to the inner peripheral surface of a glass tube by an electroless plating method and the metal conductive film is patterned into a predetermined shape.
A method for manufacturing a deflection electrode for an image pickup tube, which comprises performing a treatment with an aqueous solution of an alkali metal salt of hypophosphorous acid such as sodium hypophosphite or potassium hypophosphite after degreasing treatment, sensitization treatment, and activation treatment. It is.

The present invention will be described in more detail below. As shown in FIG. The film is patterned into a predetermined shape to become the divided deflection electrodes 2, and the boundaries thereof are insulating regions 3 where the conductive film is removed and the glass surface is exposed.

To create such a deflection electrode 2, it is common to first uniformly form a conductive film on the inner peripheral surface of the glass tube 1, and then pattern it.

However, the conductive film needs to be formed with high adhesion strength to the glass surface.
The required high adhesion strength cannot be obtained only by the activation treatment known as the conventional electroless plating method, that is, the degreasing, sensitization, and activation treatments.

In view of this point, the present invention is characterized in that after the activation treatment, a treatment with an aqueous solution such as sodium hypophosphite is performed. This treatment is for sufficiently reducing the palladium chloride applied in the activation treatment to reliably generate metallic palladium that will serve as precipitation nuclei, and can be considered a type of reduction treatment. By doing so, the adhesion of nickel and chromium becomes good in the subsequent electroless plating, and as a result, a plated conductive film with high adhesion strength can be obtained.

In the case of an electric field deflection type image pickup tube, it is necessary to pattern the conductive film. One such method is the photoetching method. In other words, a photoresist is applied to the entire surface, a mask having a predetermined light-shielding pattern is closely attached to the inner peripheral surface of the tube, and after exposure and development, the exposed conductive film not covered by the resist is etched away with a corrosive solution. In addition, using the lift-off method, a photoresist is applied to the inner surface of the glass tube before plating, a resist pattern is formed by exposure, and the conductive film applied on the portion where the resist remains is removed together with the resist. By doing so, it is also possible to form an electrode pattern. Furthermore, it is also possible to form an electrode pattern by a laser processing method in which unnecessary portions are removed by irradiating laser light after electroless plating.

When forming a film by electroless plating, Cr
and Ni are considered, but Ni was better in terms of properties such as adhesiveness of the formed film.

In the case of image pickup tubes, the film is only needed on the inner surface of the glass tube, so the outer surface can be coated with a mask, or in the case of Ni after plating, it can be removed by dissolving only the outer surface with dilute nitric acid. It can be formed into

According to the present invention, compared to vacuum evaporation, mass production is easier and can be produced at a lower cost.

Furthermore, the film formed by the method of the present invention has uniformity and
It has good adhesion and is extremely excellent as a film for this image pickup tube.

Examples of the present invention will be described below.

[Example 1] Electroless nickel plating was performed on a glass tube L-29F (manufactured by Nippon Electric Glass Co., Ltd.) for a 1/2-inch image pickup tube using the following process.

Add 1 g of stannic chloride to the degreased and water-washed glass tube.
An aqueous solution (25
℃) for 3 minutes for sensitization, then rinse with running water.
After 30 seconds of water washing, palladium chloride ( _PdCl2 ) 0.1
An aqueous solution of g and 0.2 ml of hydrochloric acid dissolved in 1 part of water (45℃)
Activation treatment was carried out by immersing it in water for 1 minute, and then immersing it in a 2% aqueous solution of sodium hypophosphite for 30 seconds at room temperature. After washing with water, it is used as an electroless nickel plating liquid by Kaseihin Kogyo Co., Ltd.
Using a 20% aqueous solution of Nitsuka Chrome (trade name) manufactured by Co., Ltd.,
Electroless plating was performed by dipping at a temperature of 55°C for 7 minutes. After washing with water, air dry for 1 hour at room temperature.
Heat drying was performed at a temperature of 200°C for 2 hours. In addition,
This heat drying slightly improves the adhesion between the plating conductive film and the glass surface.

After forming a homogeneous nickel conductive film with a thickness of 0.3 μm on the inner circumferential surface of the glass tube as described above, the conductive film at a predetermined position was removed using a laser processing machine to form an insulating region, which was then used as a deflection electrode.

[Example 2] A glass tube L-29F for a 1/2-inch image pickup tube was subjected to degreasing and sensitization treatment in the same manner as in Example 1, and after washing with water, photoresist AZ-1350 (manufactured by Shippray, Inc., USA) was applied. It was applied inside a glass tube by the dipping method. At that time, the outer periphery of the glass tube was covered with adhesive tape. After applying the photoresist, pre-baking was performed at 90°C for 30 minutes. For printing, since the print width of the pattern to be applied was as rough as 200 microns, the original film was placed in close contact with the outer periphery of the glass and irradiated with an ultra-high pressure mercury lamp (1KW).

After baking and developing with developer for AZ-1350,
Electroless plating of nickel was performed by performing the post-electroless plating process in the same manner as in Example 1.

Finally, a predetermined good electrode pattern was formed using a lift-off method in which the AZ resist was removed using a special AZ stripping solution.

[Brief explanation of the drawing]

FIG. 1 is an explanatory diagram showing an example of a deflection electrode for an image pickup tube to be manufactured by the manufacturing method of the present invention. 1... Glass tube, 2... Deflection electrode, 3... Insulating region.

Claims (1)

[Scope of Claims] 1. A method for manufacturing a deflection electrode for an image pickup tube, in which a metal conductive film is attached to the inner peripheral surface of a glass tube by an electroless plating method, and the metal conductive film is patterned into a predetermined shape. A method for manufacturing a deflection electrode for an image pickup tube, which comprises performing treatment with an aqueous alkali metal salt solution of hypophosphorous acid after degreasing treatment, sensitization treatment, and activation treatment. 2. The method for manufacturing a deflection electrode for an image pickup tube according to claim 1, wherein the metal conductive film is made of nickel or chromium. 3. The method for manufacturing a deflection electrode for an image pickup tube according to claim 1, wherein the metal conductive film is patterned by a photoetching method, a lift-off method, or a laser processing method.