JPS6348141B2 - - Google Patents
Info
- Publication number
- JPS6348141B2 JPS6348141B2 JP9075784A JP9075784A JPS6348141B2 JP S6348141 B2 JPS6348141 B2 JP S6348141B2 JP 9075784 A JP9075784 A JP 9075784A JP 9075784 A JP9075784 A JP 9075784A JP S6348141 B2 JPS6348141 B2 JP S6348141B2
- Authority
- JP
- Japan
- Prior art keywords
- potential
- storage
- electrode
- collector electrode
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000003860 storage Methods 0.000 claims description 118
- 238000010894 electron beam technology Methods 0.000 claims description 34
- 239000000758 substrate Substances 0.000 claims description 34
- 239000013078 crystal Substances 0.000 claims description 33
- 238000009825 accumulation Methods 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 12
- 238000006243 chemical reaction Methods 0.000 claims description 11
- 230000000694 effects Effects 0.000 description 17
- 230000001133 acceleration Effects 0.000 description 9
- 230000008878 coupling Effects 0.000 description 9
- 238000010168 coupling process Methods 0.000 description 9
- 238000005859 coupling reaction Methods 0.000 description 9
- 230000003321 amplification Effects 0.000 description 7
- 238000003199 nucleic acid amplification method Methods 0.000 description 7
- 239000007787 solid Substances 0.000 description 7
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- MUJOIMFVNIBMKC-UHFFFAOYSA-N fludioxonil Chemical compound C=12OC(F)(F)OC2=CC=CC=1C1=CNC=C1C#N MUJOIMFVNIBMKC-UHFFFAOYSA-N 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000011017 operating method Methods 0.000 description 2
- 230000037452 priming Effects 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 229910004261 CaF 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 206010047571 Visual impairment Diseases 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J31/00—Cathode ray tubes; Electron beam tubes
- H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
- H01J31/58—Tubes for storage of image or information pattern or for conversion of definition of television or like images, i.e. having electrical input and electrical output
Landscapes
- Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
Description
【発明の詳細な説明】
産業上の利用分野
本発明は走査変換型蓄積管の動作方法に関し、
更に詳細には、絶縁物単結晶基板を用いた蓄積タ
ーゲツトを内蔵する走査変換型蓄積管において短
時間でむらの少ない状態に消去することが可能な
動作方法に関する。DETAILED DESCRIPTION OF THE INVENTION FIELD OF INDUSTRIAL APPLICATION The present invention relates to a method of operating a scan converting storage tube;
More specifically, the present invention relates to an operating method that enables erasing in a short time to a state with less unevenness in a scan conversion type storage tube incorporating a storage target using an insulating single crystal substrate.
従来技術
従来の走査変換型蓄積管は、一般に第1図に概
略的に示す如く、真空外壁1、陰極2、制御グリ
ツド3、加速電極4、コリメーシヨン電極5、フ
イールドメツシユ電極6、蓄積ターゲツト7、偏
向コイル8、及び集束コイル9から成る。そし
て、蓄積ターゲツト7として、背面電極を有する
シリコン基板上にSiO2蓄積層をストライプ状又
は島状に設けたもの又は第2図に示す如くガラス
基板10の上に、ストライプ状、六角形、正方
形、長方形、円筒等の開孔を規則的に有するコレ
クタ電極11を設けたものが使用されている。こ
の種の走査変換型蓄積管によれば、画像又はその
他の情報を電荷パターンで記録し非破壊読み取り
を行うことが可能である。ところがSiO2蓄積層
又はガラス基板10の2次電子放出を利用して情
報の書き込みを行うものであるために、SiO2蓄
積層又はガラス基板10の2次電子放出率δによ
つて書き込み速度が制限され、周波数換算で数M
Hzの書き込み速度しか得られず、高速過渡現象や
繰返しの少ない高周波信号を書き込むことは不可
能であり、主として書き込み速度の遅い画像蓄積
の分野で使用されている。尚従来の蓄積管の書き
込み速度は、電磁偏向によつても制限されるが、
仮に電磁偏向による制限がなくとも、蓄積ターゲ
ツト7における2次電子放出率によつて上述の数
MHzに制限される。Prior Art A conventional scan conversion type storage tube generally includes a vacuum outer wall 1, a cathode 2, a control grid 3, an acceleration electrode 4, a collimation electrode 5, a field mesh electrode 6, and a storage target 7, as shown schematically in FIG. , a deflection coil 8, and a focusing coil 9. Then, as the storage target 7, SiO 2 storage layers are formed in stripes or islands on a silicon substrate having a back electrode, or as shown in FIG. , a collector electrode 11 having regular rectangular or cylindrical openings is used. This type of scan-converting storage tube allows images or other information to be recorded in charge patterns and read out non-destructively. However, since information is written using the secondary electron emission of the SiO 2 accumulation layer or the glass substrate 10, the writing speed depends on the secondary electron emission rate δ of the SiO 2 accumulation layer or the glass substrate 10. limited to several M in terms of frequency
It is only possible to obtain a writing speed of Hz, making it impossible to write high-frequency signals with high-speed transient phenomena and few repetitions, and is mainly used in the field of image storage where writing speeds are slow. The writing speed of conventional storage tubes is also limited by electromagnetic deflection.
Even if there were no limitation due to electromagnetic deflection, the secondary electron emission rate in the storage target 7 would limit it to the above-mentioned several MHz.
発明が解決しようとする問題点
上述の如き欠点を解決するものとして本願発明
者等は絶縁物単結晶基板を用いた蓄積ターゲツト
を提案した。ところが、この新しい蓄積ターゲツ
トに対して従来の蓄積管における消去方法を適用
しても良好な消去が不可能であることが判明し
た。即ち、従来は、例えば陰極2を接地、制御グ
リツド3を0〜−75V、加速電極4を350V、コ
リメーシヨン電極5を300V、フイールドメツシ
ユ電極6を650Vとし、コレクタ電極11には消
去、書き込み、読み取りで要求される電圧を印加
して動作させている。そして消去は、例えばプラ
イムモードとしてコレクタ電極11に第1交差電
圧V1(ガラス基板の場合約30V)以上の300Vの電
圧を印加して全面電子ビーム衝撃をなし、蓄積面
12をコレクタ電極11と同電位とし、しかる
後、コレクタ電極11に例えば20Vを印加し、第
1交差電圧V1以下の状態の蓄積面12を電子ビ
ーム衝撃し、蓄積面12を陰極電位とすることに
よつて行われていた。ところが、この方法を絶縁
物単結晶基板を用いた蓄積管に適用しても短時間
でむらの少ない消去を行うことが不可能である。Problems to be Solved by the Invention In order to solve the above-mentioned drawbacks, the present inventors proposed a storage target using an insulating single crystal substrate. However, it has been found that good erasing is not possible with this new storage target even if the erasing method used in conventional storage tubes is applied. That is, conventionally, for example, the cathode 2 is grounded, the control grid 3 is set to 0 to -75V, the acceleration electrode 4 is set to 350V, the collimation electrode 5 is set to 300V, the field mesh electrode 6 is set to 650V, and the collector electrode 11 is set to erase, write, It operates by applying the voltage required for reading. For erasing, for example, in prime mode, a voltage of 300 V, which is higher than the first cross voltage V 1 (approximately 30 V in the case of a glass substrate), is applied to the collector electrode 11 to perform electron beam bombardment on the entire surface, and the storage surface 12 is connected to the collector electrode 11. The voltage is set to the same potential, and then, for example, 20V is applied to the collector electrode 11, and the storage surface 12 in a state where the first cross voltage V 1 or less is bombarded with an electron beam to bring the storage surface 12 to the cathode potential. was. However, even if this method is applied to a storage tube using an insulating single-crystal substrate, it is impossible to perform erasing with little unevenness in a short time.
そこで、本発明の目的は絶縁単結晶基板を用い
た蓄積管に於いて、むらの少ない消去を行うこと
が可能な動作方法を提供することにある。 SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide an operation method that enables erasing with less unevenness in a storage tube using an insulating single crystal substrate.
問題点を解決するための手段
上記目的を達成するための本発明は、フイール
ドメツシユ電極を有する静電集束静電偏向型電子
銃と、絶縁物単結晶基板上に少なくともコレクタ
電極を設けた蓄積ターゲツトとを含む走査変換型
蓄積管に於いて、
VK+V1<VC<VM
(但し、VKは前記電子銃の陰極の電位、V1は前
記蓄積ターゲツトの蓄積面の2次電子放出率δが
1となる第1交差電圧、VCは前記コレクタ電極
の電位、VMは前記フイールドメツシユ電極の電
位である)の条件が満足するように前記コレクタ
電極の電位VCを設定して前記蓄積ターゲツトを
電子ビームで衝撃し、次に、VC<VKを満足する
と共にVS<VK+V1を満足するように前記コレク
タ電極の電位VCを設定して前記蓄積ターゲツト
を電子ビームで衝撃し、しかる後、VS<VK+V1
の条件を満足させ且つ前記蓄積面を電子ビームで
衝撃しながら前記コレクタ電極の電位VCを前記
陰極の電位VKよりも高い値まで上昇させて消去
電位差を得ることを特徴とする走査変換型蓄積管
の動作方法に係わるものである。Means for Solving the Problems In order to achieve the above objects, the present invention provides an electrostatic focusing electrostatic deflection type electron gun having a field mesh electrode and an electron storage device having at least a collector electrode on an insulating single crystal substrate. In a scan conversion type storage tube including a target, V K +V 1 <V C <V M (where, V K is the potential of the cathode of the electron gun, and V 1 is the secondary electron potential of the storage surface of the storage target. The potential V C of the collector electrode is set so as to satisfy the following conditions: a first cross voltage at which the emission rate δ is 1, V C is the potential of the collector electrode, and V M is the potential of the field mesh electrode. Then, the potential V C of the collector electrode is set so that V C <V K and V S <V K +V 1 are satisfied, and the storage target is bombarded with an electron beam. is bombarded with an electron beam, and then V S <V K +V 1
A scan conversion type, characterized in that the erase potential difference is obtained by satisfying the following conditions and increasing the potential V C of the collector electrode to a value higher than the potential V K of the cathode while bombarding the accumulation surface with an electron beam. This relates to the method of operation of the storage tube.
本願の別の発明は、フイールドメツシユ電極を
有する静電集束静電偏向型電子銃と、絶縁物単結
晶基板上に少なくともコレクタ電極を設けた蓄積
ターゲツトとを含む走査変換型蓄積管に於いて、
VK+V1<VC<VM
(但し、VKは前記電子銃の陰極の電位、V1は前
記蓄積ターゲツトの蓄積面の2次電子放出率δが
1になる第1交差電圧、VCは前記コレクタ電極
の電位、VMは前記フイールドメツシユ電極の電
位である)の条件が満足するように前記コレクタ
電極の電位VCを設定して前記蓄積ターゲツトを
電子ビームで衝撃し、次に、VK≦VC<VK+V1の
条件を満足するまで前記コレクタ電極の電位VC
を低下させ且つ前記フイールドメツシユ電極の電
位VMを下げるか又は前記蓄積ターゲツトの背面
電極の電位を下げることによつて容量結合的に前
記蓄積面の電位VSをVK≦VS<VK+V1の条件を満
足する値として前記蓄積ターゲツトを電子ビーム
で衝撃することを含んで消去電位差を得ることを
特徴とする走査変換型蓄積管の動作方法に係わる
ものである。 Another invention of the present application is a scan conversion type storage tube including an electrostatic focusing electrostatic deflection type electron gun having a field mesh electrode and a storage target having at least a collector electrode on an insulating single crystal substrate. , V K +V 1 <V C <V M (where, V K is the potential of the cathode of the electron gun, V 1 is the first crossing voltage at which the secondary electron emission rate δ of the storage surface of the storage target is 1, V C is the potential of the collector electrode, V M is the potential of the field mesh electrode), and the potential V C of the collector electrode is set so as to satisfy the following conditions, and the storage target is bombarded with an electron beam; Next, the potential V C of the collector electrode is increased until the condition of V K ≦V C <V K +V 1 is satisfied.
and lowering the potential V M of the field mesh electrode or lowering the potential of the back electrode of the storage target to capacitively reduce the potential V S of the storage surface such that V K ≦V S <V The present invention relates to a method of operating a scan conversion storage tube characterized in that an erase potential difference is obtained by bombarding the storage target with an electron beam to a value that satisfies the condition of K + V 1 .
作 用
上記それぞれの発明の最初のステツプ(プライ
ムモード)において、従来の方法と同様にコレク
タ電極の電位VCはフイールドメツシユ電極の電
位VMよりも低く設定されるが、本発明のターゲ
ツトは絶縁物単結晶基板からなるので、蓄積面の
電位VSが従来より高くなる。このため、仮に、
次のステツプで従来の方法に従つてコレクタ電極
の電位VCを陰極に対して第1交差電圧以下に設
定して電子ビームで蓄積面を衝撃しても、蓄積面
を陰極電位にすることが困難である。これに対し
て、本願の第1番目の発明では、コレクタ電極の
電位VCを陰極電位VKよりも低下させるステツプ
を設け、第2番目の発明では、フイールドメツシ
ユ電極又は背面電極の電位を低下させるステツプ
を設けて、蓄積面の電位を低下させるので、所定
の消去電位差をむらの少ない状態で短時間の内に
得ることが出来る。Operation In the first step (prime mode) of each of the above inventions, the potential V C of the collector electrode is set lower than the potential V M of the field mesh electrode, as in the conventional method, but the target of the present invention is Since it is made of an insulating single crystal substrate, the potential V S of the storage surface is higher than that of the conventional one. For this reason, if
In the next step, even if the potential V C of the collector electrode is set below the first cross voltage with respect to the cathode according to the conventional method and the storage surface is bombarded with an electron beam, the storage surface cannot be brought to the cathode potential. Have difficulty. On the other hand, in the first invention of the present application, a step is provided to lower the potential V C of the collector electrode below the cathode potential V K , and in the second invention, the potential of the field mesh electrode or the back electrode is lowered. Since a lowering step is provided to lower the potential of the storage surface, a predetermined erase potential difference can be obtained in a short time with little unevenness.
実施例
以下、図面を参照して本発明の実施例について
述べる。Embodiments Hereinafter, embodiments of the present invention will be described with reference to the drawings.
本発明の実施例に係わる静電集束静電偏向走査
変換型蓄積管は第3図に説明的に示す如く、真空
外壁20、陰極21、制御グリツド22、加速電
極23、集束電極24、アステイグ電極25、垂
直偏向板26、水平偏向板27、コリメーシヨン
電極28、フイールドメツシユ電極29、及び蓄
積ターゲツト30から成る。即ち、静電集束型電
子銃と、静電偏向板と、コリメーシヨン電極28
と、フイールドメツシユ電極29と、このフイー
ルドメツシユ電極29に対向配置された蓄積ター
ゲツト30とから成る。 The electrostatic focusing electrostatic deflection scanning converting type storage tube according to the embodiment of the present invention is illustrated in FIG. 25, a vertical deflection plate 26, a horizontal deflection plate 27, a collimation electrode 28, a field mesh electrode 29, and an accumulation target 30. That is, an electrostatic focusing electron gun, an electrostatic deflection plate, and a collimation electrode 28.
, a field mesh electrode 29, and an accumulation target 30 disposed opposite to the field mesh electrode 29.
蓄積ターゲツト30は第4図に示すように絶縁
物単結晶基板31と、該絶縁物単結晶基板31の
一方の表面に密着し且つ規則的に配列された複数
の開孔32aを有する導電性コレクタ電極32と
を有する。上記絶縁物単結晶基板31は、電子ビ
ーム衝撃によつて2次電子を放出するのみなら
ず、固体内に電子−正孔対を発生し、電子及び正
孔が比較的長い寿命を有するものでなければなら
ず、この実施例の場合は99.9%以上の純度を有
し、且つ室温で1014Ωcm以上の抵抗値を有する菱
面体晶系に属するAl2O3単結晶(サフアイヤ)で
形成されている。絶縁物単結晶基板31はAl2O3
単結晶に限ることなく、等軸晶系に属するMgO
+Al2O3単結晶(スピネル)、MgO単結晶、CaF2
単結晶等で形成してもよい。尚Al2O3単結晶の場
合は異方性を有するがいずれの面方位でも実施可
能であり、特にR面(1102)、A面(1010)、
C面(0011)等が望ましい。 As shown in FIG. 4, the storage target 30 includes an insulating single crystal substrate 31 and a conductive collector having a plurality of regularly arranged openings 32a that are in close contact with one surface of the insulating single crystal substrate 31. It has an electrode 32. The insulating single crystal substrate 31 not only emits secondary electrons by electron beam impact, but also generates electron-hole pairs in the solid, and the electrons and holes have a relatively long lifespan. In this example, it is made of Al 2 O 3 single crystal (saphire) belonging to the rhombohedral crystal system with a purity of 99.9% or more and a resistance value of 10 14 Ωcm or more at room temperature. ing. Insulator single crystal substrate 31 is Al 2 O 3
MgO belongs to equiaxed crystal system, not limited to single crystal
+Al 2 O 3 single crystal (spinel), MgO single crystal, CaF 2
It may be formed of a single crystal or the like. In the case of Al 2 O 3 single crystal, it has anisotropy, but it can be carried out with any plane orientation, especially R plane (1102), A plane (1010),
C-plane (0011) etc. is desirable.
絶縁物単結晶基板31の上に密着しているコレ
クタ電極32は、クロムを蒸着又はスパツタで約
1μm以下に被着させ、微細加工技術でストライ
プ状開孔32aを規則的に設け、蓄積面33を規
則的に露出させたものである。勿論、コレクタ電
極32の開孔32aを六角形、正方形、長方形、
円形等にしても差支えなく、またこのコレクタ電
極32はクロム以外の金属又は導電性が得られる
半導体薄膜で形成しても差支えない。 The collector electrode 32, which is in close contact with the insulating single crystal substrate 31, is coated with chromium by vapor deposition or sputtering.
It is deposited to a thickness of 1 μm or less, and striped openings 32a are regularly provided using microfabrication technology, so that the accumulation surface 33 is regularly exposed. Of course, the opening 32a of the collector electrode 32 may be hexagonal, square, rectangular,
It may be circular or the like, and the collector electrode 32 may be formed of a metal other than chromium or a semiconductor thin film that provides conductivity.
次に本発明の第1の実施例に係わる蓄積管の動
作について述べる。この蓄積管を使用するに当つ
ては、例えば、陰極21の電位VKを−900V、制
御グリツド22を陰極電位VK=−900Vを基準に
して0〜−75V、加速電極23とアステイグ電極
25とコリメーシヨン電極28とを接地、集束電
極24を−800V、フイールドメツシユ電極29
の電位VMを1400Vとし、コレクタ電極32の電
位VCはプライム、消去、書き込み、読み取りの
各モードで要求される値とする。 Next, the operation of the storage tube according to the first embodiment of the present invention will be described. When using this storage tube, for example, the potential V K of the cathode 21 is set to -900V, the control grid 22 is set to 0 to -75 V with reference to the cathode potential V K = -900V, and the acceleration electrode 23 and the asteig electrode 25 are and the collimation electrode 28 are grounded, the focusing electrode 24 is -800V, and the field mesh electrode 29 is grounded.
The potential V M of the collector electrode 32 is set to 1400 V, and the potential V C of the collector electrode 32 is set to a value required in each of the prime, erase, write, and read modes.
まず、便宜上、陰極電位VKをアース電位(基
準電位)として示されている第5図を参照してプ
ライムモードについて述べる。プライムモードと
して第5図に示す如くスイツチSによつてコレク
タ電極32をプライム用電源Pに接続し、コレク
タ電極32の電位VCを、蓄積面33の2次電子
放出率δを1以上にすることが可能な電圧即ち
VK+V1以上の電圧で且つフイールドメツシユ電
極29の電位VM(例えば陰極に対して2300V)以
下の例えば陰極21に対して200〜1000Vに設定
して蓄積ターゲツト30の全面即ちすべての蓄積
面33に電子ビーム衝撃する。更に具体的にはタ
ーゲツト電流0.1〜0.2μAの状態で2フレームのテ
レビジヨン走査に相当する走査を行う。この実施
例の場合、加速エネルギー即ちターゲツト(コレ
クタ)電圧に対する2次電子放出率(2次電子
数/1次電子数)δの変化が第6図のようにな
り、第1交差電圧V1が約15VのAl2O3単結晶(サ
フアイヤ)が基板31として使用されているの
で、δ>1の領域で電子ビーム衝撃していること
になる。この走査の時はフイールドメツシユ電極
29の電位がコレクタ電極32の電位よりも高い
ので蓄積面33から放出された2次電子はフイー
ルドメツシユ電極29に捕獲され、蓄積面33の
電位VSはコレクタ電極32の電位VCよりも数十
〜百ボルト高いプライム状態(プライム電位差を
VPとすれば、VP=VS−VCの状態)となり、プラ
イム前に於ける書き込み部分と非書き込み部分と
の区別を確実に無くすことが出来る。 First, for convenience, the prime mode will be described with reference to FIG. 5, in which the cathode potential V K is shown as a ground potential (reference potential). In the prime mode, the collector electrode 32 is connected to the prime power source P by the switch S as shown in FIG. Possible voltage i.e.
The entire surface of the accumulation target 30, that is, all the accumulation, is set at a voltage of V K +V 1 or more and less than the potential V M of the field mesh electrode 29 (for example, 2300 V with respect to the cathode), for example, 200 to 1000 V with respect to the cathode 21. The surface 33 is bombarded with an electron beam. More specifically, scanning equivalent to two frames of television scanning is performed with a target current of 0.1 to 0.2 .mu.A. In the case of this embodiment, the change in the secondary electron emission rate (number of secondary electrons/number of primary electrons) δ with respect to acceleration energy, that is, target (collector) voltage is as shown in FIG. 6, and the first cross voltage V 1 is Since Al 2 O 3 single crystal (Saphire) with a voltage of about 15 V is used as the substrate 31, the electron beam is bombarded in the region of δ>1. During this scanning, the potential of the field mesh electrode 29 is higher than the potential of the collector electrode 32, so the secondary electrons emitted from the storage surface 33 are captured by the field mesh electrode 29, and the potential V S of the storage surface 33 is Prime state (prime potential difference is several tens to hundreds of volts higher than the potential V C of the collector electrode 32)
If V P , the state becomes V P =V S −V C ), and it is possible to reliably eliminate the distinction between the written portion and the non-written portion before the prime.
次に、スイツチSによつてコレクタ電極32を
消去用電源Eに接続し、コレクタ電極32の電位
VCを陰極電位VKよりも低く且つ蓄積面33の2
次電子放出率δを1よりも小さくする電位(VK
+V1以下の電位)である例えば−950〜−1000ボ
ルト(陰極21に対して−50〜−100ボルト)と
して蓄積面33の全部を電子ビームで衝撃する。
即ち、VS<VK+V1の状態となるようにコレクタ
電位VCをVC<VK+V1−VPに設定してビーム走
査する。この結果、プライムモードで高められた
蓄積面33の電位VSが陰極電位VK程度又はこれ
以下になる。 Next, the collector electrode 32 is connected to the erasing power supply E by the switch S, and the potential of the collector electrode 32 is
V C is lower than the cathode potential V K and 2 of the storage surface 33
The potential that makes the secondary electron emission rate δ smaller than 1 (V K
The entire storage surface 33 is bombarded with an electron beam at a potential of, for example, -950 to -1000 volts (-50 to -100 volts with respect to the cathode 21).
That is, beam scanning is performed by setting the collector potential V C to V C <V K +V 1 −V P so that V S <V K +V 1 . As a result, the potential V S of the storage surface 33, which has been increased in the prime mode, becomes about the cathode potential V K or lower.
次に、VS<VK+V1の条件を満足させ且つ電子
ビームで蓄積面33を電子ビームで衝撃しなが
ら、コレクタ電極32の電位VCを徐々に上げる
と、蓄積面33の電位VSは、電子ビームの作用
(δ<1)により、ほぼ陰極電位VKに維持され
る。この作用によつてコレクタ電極32の電位
VCは蓄積面の電位VSを略陰極電位VKに維持した
まま、陰極21の電位VKよりも高くすることが
出来る。即ち、コレクタ電極32の電位VCを上
げることによつて蓄積面33の電位もこれに追従
して上昇しようとするが、蓄積面33はδ<1の
状態即ちVS<VK+V1の状態に保たれているの
で、電子ビーム衝撃でほぼ陰極電位VKに戻され
る。従つて、コレクタ電極32と蓄積面33との
間に消去電位差VE=VC−VS(例えば10V)が生じ
せしめることが出来る。これにより、書き込み可
能な状態になる。 Next, when the potential V C of the collector electrode 32 is gradually increased while satisfying the condition of V S <V K +V 1 and bombarding the storage surface 33 with an electron beam, the potential V S of the storage surface 33 increases. is maintained at approximately the cathode potential V K by the action of the electron beam (δ<1). Due to this action, the potential of the collector electrode 32
V C can be made higher than the potential V K of the cathode 21 while maintaining the potential V S of the storage surface at approximately the cathode potential V K . That is, by increasing the potential V C of the collector electrode 32, the potential of the storage surface 33 also tends to rise, but the storage surface 33 is in the state of δ<1, that is, V S <V K +V 1 . Since it is maintained at this state, it is returned to approximately the cathode potential V K by electron beam bombardment. Therefore, an erase potential difference V E =V C -V S (for example, 10 V) can be generated between the collector electrode 32 and the storage surface 33. This makes it possible to write.
今消去電位差VEを第1交差電圧V1よりも低い
10Vに設定する場合について述べたが、もし、消
去電位差VEを第1交差電圧V1よりも高くしたい
場合には、蓄積面33に電子ビーム衝撃をしてこ
こを陰極電位に保つた状態でコレクタ電極32の
電圧を例えば−880Vとし、消去電位差を20Vと
する。 Now the erase potential difference V E is lower than the first crossing voltage V 1
We have described the case where it is set to 10V, but if you want to make the erase potential difference V E higher than the first cross voltage V 1 , you can apply an electron beam impact to the storage surface 33 and keep it at the cathode potential. The voltage of the collector electrode 32 is set to -880V, for example, and the erase potential difference is set to 20V.
ところで、絶縁基板31を用いた蓄積ターゲツ
ト30は非常に書き込み速度が速いために、書き
込み過ぎ等によつて部分的にプライムしたと同様
になり、プライム電位差VPが大きくなり、従来
の方法では消去が実行出来ない場合が発生した。
しかし、本発明の方法によれば、消去可能にな
る。又通常動作に於いても残像が長時間消えない
場合があるが、このような場合も、本発明の方法
により均一に消去することが可能である。 By the way, since the storage target 30 using the insulating substrate 31 has a very fast writing speed, it becomes the same as partially priming due to overwriting, etc., and the prime potential difference V P becomes large, making it impossible to erase using the conventional method. A case has occurred where it cannot be executed.
However, according to the method of the present invention, it becomes erasable. Also, even in normal operation, afterimages may not disappear for a long time, but even in such cases, it is possible to uniformly erase them using the method of the present invention.
単結晶基板31を使用した場合に従来方法で消
去が難しい理由について述べると、基板31とし
て絶縁物単結晶を使用しているために、蓄積面3
3の絶縁性がよく、蓄積面33がより高い電位に
維持されることによつてプライム後の電位VPが
大きくなり、消去時にコレクタ電極32を陰極2
1に対して第1交差電圧V1以下に設定しても、
蓄積面33の電位VSがコレクタ電極32の電位
VCとプライム電位VPとの和となり、これが第1
交差電圧V1を越えるためと思われる。又、サフ
アイヤ単結晶基板31の場合、第1交差電圧V1
が約15Vであり、SiO2系基板に較べて低いことも
影響していると思われる。 The reason why it is difficult to erase using the conventional method when a single crystal substrate 31 is used is that since an insulating single crystal is used as the substrate 31, the accumulation surface 3
3 has good insulation properties, and the storage surface 33 is maintained at a higher potential, thereby increasing the potential V P after priming, and connecting the collector electrode 32 to the cathode 2 during erasing.
Even if the first cross voltage V is set to less than 1 with respect to 1,
The potential V S of the storage surface 33 is the potential of the collector electrode 32
This is the sum of V C and prime potential V P , which is the first
This seems to be because the cross voltage exceeds V1 . In addition, in the case of the Sapphire single crystal substrate 31, the first cross voltage V 1
is approximately 15V, which is lower than that of SiO 2 -based substrates, which seems to have an effect.
蓄積面33に情報を書き込むときには、変調電
子ビームによつてターゲツト30に選択的に衝撃
する。尚この際、コレクタ電極32をスイツチS
によつて書き込み電源Wに接続し、コレクタ電極
32にフイールドメツシユ電極29の電圧
(1400V)よりも高い例えば+9.1kV(陰極に対し
て+10kV)を印加する。この書き込みは、蓄積
面33の電位をカソードに対して第1交差電位
V1以上で行うので、ビーム衝撃で書き込みがな
された蓄積面33の電位は、電子ビーム衝撃量に
応じて9090V(カソードに対して9990V)からコ
レクタ電極32の電位にほぼ等しい9100V(カソ
ードに対して10000V)の間になる。また電子ビ
ームが衝撃されない蓄積面33の電位はコレクタ
電極電位VCから消去電位差VE=10Vを差し引い
た9090ボルト(カソードに対して9990V)とな
る。これにより、ターゲツト面にはコレクタ電極
32に対して0〜−10Vの電位差のある電荷パタ
ーンが形成される。 When writing information to storage surface 33, target 30 is selectively bombarded with a modulated electron beam. At this time, switch the collector electrode 32 to S.
is connected to the write power source W, and a voltage higher than the voltage (1400 V) of the field mesh electrode 29, for example, +9.1 kV (+10 kV with respect to the cathode) is applied to the collector electrode 32. This writing changes the potential of the storage surface 33 to a first cross potential with respect to the cathode.
Since the voltage is V 1 or more, the potential of the storage surface 33 written by the beam impact varies from 9090 V (9990 V to the cathode) to 9100 V (to the cathode), which is almost equal to the potential of the collector electrode 32, depending on the amount of electron beam impact. (10000V). Further, the potential of the storage surface 33, which is not bombarded by the electron beam, is 9090 volts (9990 V with respect to the cathode), which is the collector electrode potential V C minus the erase potential difference V E =10 V. As a result, a charge pattern having a potential difference of 0 to -10 V with respect to the collector electrode 32 is formed on the target surface.
この蓄積管で書き込み電子ビーム衝撃すれば、
蓄積面33が絶縁物単結晶基板31で形成されて
いるために、2次電子が放出されるのみならず、
基板31内即ち固体内に電子−正孔対が発生す
る。絶縁物単結晶基板31は、電子−正孔対の寿
命τが長く、易動度μが大きい低不純物濃度、低
結晶欠陥のサフアイヤであるから、電子ビーム衝
撃で蓄積面から深さ約1μm以内に発生した電子
−正孔対は、第7図の一次元バンドダイヤグラム
に示すように電界によつて分離され、正孔hは蓄
積面33の負電荷を中和し表面電位を上げる。電
子eはドリフトしてコレクタ電極32に捕獲され
る。捕獲効率は前述した基板31の不純物濃度及
び結晶欠陥即ち電子、正孔の寿命τ、及び易動度
μに依存するのみならず、コレクタ電極32の形
状、基板31の厚さ、蓄積面33とコレクタ電極
32との電位差等にも依存する。 If this storage tube is bombarded with a writing electron beam,
Since the storage surface 33 is formed of the insulating single crystal substrate 31, not only secondary electrons are emitted, but also secondary electrons are emitted.
Electron-hole pairs are generated within the substrate 31, that is, within the solid. The insulating single crystal substrate 31 is a sapphire with a low impurity concentration and low crystal defects, which has a long lifetime τ of electron-hole pairs and a large mobility μ, so that it can be absorbed by electron beam bombardment to a depth of about 1 μm or less from the accumulation surface. The generated electron-hole pairs are separated by an electric field as shown in the one-dimensional band diagram of FIG. 7, and the holes h neutralize the negative charges on the accumulation surface 33 and raise the surface potential. The electrons e drift and are captured by the collector electrode 32. The capture efficiency not only depends on the impurity concentration of the substrate 31 and the lifetime τ of crystal defects, that is, electrons and holes, and the mobility μ, but also depends on the shape of the collector electrode 32, the thickness of the substrate 31, the accumulation surface 33, etc. It also depends on the potential difference with the collector electrode 32 and the like.
上述の如くこの蓄積管では2次電子放出効果
と、固体内電子−正孔発生による固体内増幅効果
との両方で書き込みがなされ、加速エネルギーが
大きい領域では第8図に示す如く固体内増幅効果
によつて支配的になされる。第8図は電子ビーム
の加速エネルギー(keV)と、書き込み速度と比
例関係を有する電子衝撃効果(相対値)との関係
を示し、aは2次電子放出効果による寄与を示
し、bは固体内増幅効果による寄与を示す。この
第8図から明らかなように、約3KeVまでは2次
電子放出効果が電子衝撃効果(書き込み速度)に
寄与するが、これ以上では殆んど寄与しない。こ
れに対して、固体内増幅効果は加速エネルギーに
比例して大きくなる。尚第8図で点線で示すフイ
ールドメツシユ電位VM(陰極に対して2300V)に
対応する加速エネルギーを越える領域では、2次
電子が蓄積面33に再分布するために、aで示す
2次電子放出効果は固有のものからずれている。
本実施例に係わる蓄積ターゲツト30は上述の如
く固体内増幅効果を有するが、従来の非晶質又は
多結晶質の蓄積層のターゲツトでは固体内増幅効
果を殆んど有さない。 As mentioned above, in this storage tube, writing is performed by both the secondary electron emission effect and the solid-state amplification effect due to the generation of electrons and holes in the solid. In the region where acceleration energy is large, the solid-state amplification effect occurs as shown in Figure 8. dominated by. Figure 8 shows the relationship between the acceleration energy (keV) of the electron beam and the electron impact effect (relative value), which is proportional to the writing speed, where a represents the contribution from the secondary electron emission effect and b represents the contribution within the solid. This shows the contribution from the amplification effect. As is clear from FIG. 8, the secondary electron emission effect contributes to the electron impact effect (writing speed) up to about 3 KeV, but it hardly contributes above this. On the other hand, the in-solid amplification effect increases in proportion to the acceleration energy. In addition, in the region exceeding the acceleration energy corresponding to the field mesh potential V M (2300 V with respect to the cathode) shown by the dotted line in FIG. 8, the secondary electrons are redistributed to the storage surface 33, so that The electron emission effect deviates from the intrinsic one.
The storage target 30 according to this embodiment has an in-solid amplification effect as described above, but a conventional target with an amorphous or polycrystalline storage layer has almost no in-solid amplification effect.
書き込みによつて生じた電荷パターンを読み取
る時には、コレクタ電極32をスイツチSを介し
て読み取り電源Rに接続し、陰極21に対して例
えば+5V程度に設定し、無変調電子ビームによ
つて例えばテレビジヨン受像機に於ける走査と同
様な走査をなし、電荷パターンを読み取る。この
場合書き込みがなされた部分の電位は原理的には
陰極21に対して−5V〜+5Vの間の電位になつ
ているが、普通は消去状態の蓄積面33に対して
+1Vも書き込みがなされていれば充分読み取り
を行うことが出来る。従つて書き込み状態の蓄積
面33の電位を陰極21に対して−5〜−4V程
度とする。書き込み部分は蓄積面33の電位が上
昇しているため読み取りビームは書き込みレベル
に応じて変調されコレクタ電極32に流入するが
非書き込み部分は平面グリツド効果が大きく読み
取りビームのコレクタへの流入を阻止する。これ
によつて書き込みに対応した電荷パターンの読み
取りが可能になる。蓄積面33の電位は書き込ま
れた部分で陰極21に対して例えば−4V、書き
込まれなかつた部分で陰極21に対して例えば−
5Vとなり、陰極よりも負電位になつているため
読み取りビームは蓄積面33には到達しない。こ
のため読み取りを行なつても、蓄積面33の電荷
パターンは破壊されない。このような読み取り方
式を非破壊読み取りと呼んでいるが、この蓄積管
ではこれが可能である。 When reading the charge pattern generated by writing, the collector electrode 32 is connected to the reading power supply R via the switch S, and the voltage is set to about +5V with respect to the cathode 21. A scan similar to that in a television receiver is performed to read the charge pattern. In this case, the potential of the written part is theoretically between -5V and +5V with respect to the cathode 21, but normally as much as +1V is written to the storage surface 33 in the erased state. It is possible to perform sufficient reading. Therefore, the potential of the storage surface 33 in the written state is set to about -5 to -4 V with respect to the cathode 21. In the written part, the potential of the storage surface 33 has increased, so the read beam is modulated according to the write level and flows into the collector electrode 32, but in the non-written part, the planar grid effect is large and prevents the read beam from flowing into the collector. . This makes it possible to read a charge pattern corresponding to writing. The potential of the storage surface 33 is, for example, -4V with respect to the cathode 21 in the written part, and -4V with respect to the cathode 21 in the unwritten part, for example.
The reading beam does not reach the storage surface 33 because it is 5V and has a more negative potential than the cathode. Therefore, even when reading is performed, the charge pattern on the storage surface 33 is not destroyed. This type of reading method is called non-destructive reading, and this storage tube makes it possible.
次に、第2の実施例に係わる動作方法について
述べる。この第2の実施例におけるプライムモー
ドは第1の実施例のプライムモードと同じであ
る。即ち、コレクタ電極32の電位VCを蓄積面
33をδ>1にすることが可能な電圧(VK+V1
以上の電圧例えば−900+15=−885V)で且つフ
イールドメツシユ電極29の電位VM以下の例え
ば陰極21に対して200〜1000Vに設定して、蓄
積面33を電子ビームで衝撃する。これにより、
実施例1と同じプライム状態が得られる。次に
VK≦VC<VK+V1を満足するまでコレクタ電位
VCを下げ、しかる後電源Mに接続されたフイー
ルドメツシユ電極29の電位VMを数100V以上
(例えば1000V)低下させて蓄積面33の電位VS
を容量結合的に低下させ、蓄積面33の電位VS
をVK≦VS<VK+V1の状態とし、蓄積面33を電
子ビームで衝撃する。これにより蓄積面33の電
位VSはほぼ陰極電位VKになる。そして、δ<1
の状態での電子ビーム衝撃を維持しつつコレクタ
電極32の電位を上昇させて所定の消去電位差
(例えば10V)を得る。またこのδ<1の状態で
の電子ビーム衝撃中にフイールドメツシユ電極2
9の電位を元に戻す。なお、容量結合的に電位
VSを下げる時にVK<VCに設定されていれば、電
子ビーム衝撃でVS=VKとなつた時にVC−VKの消
去電位差が得られ、動作の簡略化が図れる。 Next, an operating method according to the second embodiment will be described. The prime mode in this second embodiment is the same as the prime mode in the first embodiment. That is, the potential V C of the collector electrode 32 is set to a voltage (V K +V 1
The storage surface 33 is bombarded with an electron beam by setting the voltage above (for example, -900+15=-885V) and below the potential V M of the field mesh electrode 29, for example, 200 to 1000V to the cathode 21. This results in
The same prime state as in Example 1 is obtained. next
Collector potential until V K ≦V C <V K +V 1 is satisfied.
V C is lowered, and then the potential V M of the field mesh electrode 29 connected to the power source M is lowered by several hundred volts or more (for example, 1000 V), and the potential V S of the storage surface 33 is lowered.
is capacitively reduced, and the potential V S of the storage surface 33
is set to a state of V K ≦V S <V K +V 1 and the storage surface 33 is bombarded with an electron beam. As a result, the potential V S of the storage surface 33 becomes approximately the cathode potential V K . And δ<1
While maintaining the electron beam impact in the state shown in FIG. Also, during the electron beam impact in this state of δ<1, the field mesh electrode 2
Return the potential of 9. Note that the potential is capacitively coupled
If V K <V C is set when V S is lowered, when V S = V K due to electron beam impact, an erase potential difference of V C − V K is obtained, which simplifies the operation.
この実施例に於いて、ターゲツト30に背面電
極を設けなくとも所定の消去電位差VEを得るこ
とは可能であるが、説明の都合上、第10図に示
す如く背面電極34があるとすれば、蓄積面33
とコレクタ電極32、フイールドメツシユ電極2
9、及び背面電極34との間に容量CC、CM、及
びCBが生じ、フイールドメツシユ電極電位VMを
低下させると、蓄積面33の電位VSも容量結合
的に低下し、VK≦VS≦VK+V1を満足させること
が可能になる。 In this embodiment, it is possible to obtain a predetermined erase potential difference V E without providing a back electrode on the target 30, but for convenience of explanation, it is assumed that a back electrode 34 is provided as shown in FIG. , accumulation surface 33
and collector electrode 32, field mesh electrode 2
9 and the back electrode 34, and when the field mesh electrode potential V M is lowered , the potential V S of the storage surface 33 is also lowered in a capacitive manner. It becomes possible to satisfy V K ≦V S ≦V K +V 1 .
次に本発明の第3の実施例について述べる。こ
の実施例は第2の実施例の変形であつて、第9図
及び第10図に示す如く背面電極34を設け、第
2の実施例でフイールドメツシユ電極29の電位
を下げて蓄積面33の電位を容量結合的に低下さ
せる代りに、背面電極34の電位を下げて蓄積面
33の電位VSを下げる方法に係わる。従つて、
背面電極34には第9図に示す如く背面電極用電
源Bが接続されている。この実施例では、例えば
背面電極34をコレクタ電極32と同電位にし
て、第1及び第2の実施例と同様なプライム動作
をなし、プライム状態を得る。しかる後、コレク
タ電極32の電位VCを下げてVK≦VC≦VK+V1
を満足させる。しかる後、背面電極34の電位
VBを例えば100V程度下げ、容量CBによる結合を
利用して蓄積面33の電位VSをVK+V1以下に
し、VK≦VS<VK+V1の状態を作り、電子ビーム
衝撃をなす。そして蓄積面33の電位VSをほぼ
陰極電位VKに保ちつつコレクタ電極32の電位
を上昇させ所定の消去電位差VEを得る。なお、
第1交差電圧よりも高い消去電位差を得る場合に
は、第1の実施例において説明した方法を採用す
るか、又は背面電極34にコレクタ電極32の電
圧よりも高い電圧を印加した状態で電子ビーム衝
撃をなし、しかる後背面電極34の電圧を低下さ
せて蓄積面33の電位を下げることによつて蓄積
面33とコレクタ電極32との間に第1交差電圧
以上の電位差を生じさせる。 Next, a third embodiment of the present invention will be described. This embodiment is a modification of the second embodiment, in which a back electrode 34 is provided as shown in FIGS. This relates to a method of lowering the potential V S of the storage surface 33 by lowering the potential of the back electrode 34 instead of lowering the potential of the storage surface 33 in a capacitive coupling manner. Therefore,
A power source B for the back electrode is connected to the back electrode 34 as shown in FIG. In this embodiment, for example, the back electrode 34 is set to the same potential as the collector electrode 32, and a prime operation similar to that of the first and second embodiments is performed to obtain a prime state. After that, the potential V C of the collector electrode 32 is lowered so that V K ≦V C ≦V K +V 1
satisfy. After that, the potential of the back electrode 34
V B is lowered, for example, by about 100 V, and the potential V S of the storage surface 33 is made lower than V K + V 1 using the coupling by the capacitor C B , creating a state of V K ≦V S < V K + V 1 , and the electron beam impact to do. Then, while maintaining the potential V S of the storage surface 33 at approximately the cathode potential V K , the potential of the collector electrode 32 is increased to obtain a predetermined erase potential difference VE . In addition,
In order to obtain an erase potential difference higher than the first cross voltage, the method explained in the first embodiment is adopted, or the electron beam is applied with a voltage higher than the voltage of the collector electrode 32 applied to the back electrode 34. A shock is generated, and then the voltage of the back electrode 34 is lowered to lower the potential of the storage surface 33, thereby creating a potential difference greater than or equal to the first cross voltage between the storage surface 33 and the collector electrode 32.
第10図に示すターゲツト30aの容量結合を
更に詳しく説明する。今、コレクタ電極32はス
トライプ状に形成され紙面に垂直に延びているも
のとし、この方向をY軸と定める。コレクタ電極
32の幅は2lで、ピツチは2Lとする。又厚みは
0.1μm程度であるが、ここでは無視するものとす
る。コレクタ電極32と直交する蓄積面33の方
向をX軸、蓄積面33に直交する方向にZ軸を選
ぶ。フイールドメツシユ電極29は蓄積面33か
らZD、基板31の厚さはZ1でその位置に背面電極
34があるものとする。このように幾何学系を決
めると、蓄積面33のX方向の容量分布C(X)が次
式で与えられる。 The capacitive coupling of the target 30a shown in FIG. 10 will be explained in more detail. It is assumed that the collector electrode 32 is formed in a stripe shape and extends perpendicularly to the plane of the paper, and this direction is defined as the Y axis. The width of the collector electrode 32 is 2L, and the pitch is 2L. Also, the thickness is
Although it is approximately 0.1 μm, it will be ignored here. The direction of the storage surface 33 perpendicular to the collector electrode 32 is selected as the X axis, and the direction perpendicular to the storage surface 33 is selected as the Z axis. It is assumed that the field mesh electrode 29 is Z D from the storage surface 33 , the thickness of the substrate 31 is Z 1 , and the back electrode 34 is located at that position. When the geometrical system is determined in this way, the capacitance distribution C (X) in the X direction of the storage surface 33 is given by the following equation.
C(X)=−1/2L(1+εS)ε0{tanπ/2〔1−1/
L(x+l)〕−tanπ/2
〔1−1/L(x−l)〕}+ε0(1−l/L)εS
/Z1+ε0(1−l/L)1/ZD……(1)
ここでε0は真空の誘電率、εSは基板31の実効
的な誘電率である。(1)式の第1項は蓄積面33と
コレクタ電極32の容量結合の関係を示し、第2
項は背面電極34との結合CBの関係を示し、第
3項はフイールドメツシユ電極29との結合CM
の関係を示す項である。重要なことは蓄積面33
に於いて容量結合の大きさがXに依存することで
ある。このため各電極の単位を変化させると蓄積
面33の電位VSは容量結合の強さによつてXの
関数になる。従つて本発明に於いては蓄積面33
の電位はあたかも一定のように扱つたが実効的な
平均電位と解釈されるべきである。コレクター電
極32が他の形状をとる場合も当然であるが蓄積
面33の電位VSは形状の関数になる。従つて蓄
積面33の電位VSは実効的な平均電位と解釈す
る。第10図の例により(1)式が導かれるが、容量
結合の大きさは幾何学形状依存性が非常に大き
い。従つて本発明ではこれらに応じて適切な動作
電位を設定しなければならない。C (X) = -1/2L (1 + ε S ) ε 0 {tanπ/2 [1-1/
L(x+l)]-tanπ/2 [1-1/L(x-l)]}+ε 0 (1-l/L)ε S
/Z 1 +ε 0 (1-l/L) 1/Z D (1) Here, ε 0 is the dielectric constant of vacuum, and ε S is the effective dielectric constant of the substrate 31. The first term in equation (1) indicates the relationship between the capacitive coupling between the storage surface 33 and the collector electrode 32, and the second term
The term indicates the relationship between the coupling C B with the back electrode 34, and the third term indicates the coupling C M with the field mesh electrode 29.
This is a term that shows the relationship between The important thing is the accumulation aspect 33
The difference is that the magnitude of capacitive coupling depends on X. Therefore, when the unit of each electrode is changed, the potential V S of the storage surface 33 becomes a function of X depending on the strength of capacitive coupling. Therefore, in the present invention, the accumulation surface 33
Although the potential is treated as if it were constant, it should be interpreted as the effective average potential. Of course, even when the collector electrode 32 has a different shape, the potential V S of the storage surface 33 becomes a function of the shape. Therefore, the potential V S of the storage surface 33 is interpreted as an effective average potential. Equation (1) is derived from the example shown in FIG. 10, but the magnitude of capacitive coupling has a very large dependence on geometric shape. Therefore, in the present invention, an appropriate operating potential must be set in accordance with these.
以上、本発明の実施例について述べたが、本発
明はこれに限定されるものではなく、更に変形可
能なものである。例えば、第1及び第2の実施例
と同一方法で、背面電極34を有するターゲツト
に於ける消去をすることが出来る。 Although the embodiments of the present invention have been described above, the present invention is not limited thereto and can be further modified. For example, erasing in a target having a back electrode 34 can be performed in the same manner as in the first and second embodiments.
発明の効果
上述から明らかな如く、本発明によれば、絶縁
物単結晶基板を使用したターゲツトであつても、
むらのない消去を行うことが出来る。Effects of the Invention As is clear from the above, according to the present invention, even if the target uses an insulating single crystal substrate,
It is possible to erase evenly.
第1図は従来の蓄積管の概略的断面図、第2図
は第1図の蓄積管のターゲツトを示す一部拡大断
面図、第3図は本発明の第1の実施例に係わる静
電集束静電偏向走査変換型蓄積管の概略的断面
図、第4図は第3図の蓄積管のターゲツトを示す
一部拡大断面図、第5図は第3図の蓄積管の動作
を説明するための説明的回路図、第6図は第3図
の蓄積管における単結晶基板の加速エネルギーと
2次電子放出率との関係を示すグラフ、第7図は
第3図の蓄積管におけるターゲツトの説明的な一
次元バンドダイヤグラム、第8図は第3図の蓄積
管におけるターゲツトの2次電子放出効果と固体
内増幅効果とを示すグラフ、第9図は本発明の第
2の実施例に係わる静電集束静電偏向走査変換型
蓄積管のターゲツト部分を説明的に示す回路図、
第10図は第9図のターゲツトの拡大断面図であ
る。
尚図面に用いられている符号において、29は
フイールドメツシユ電極、30はターゲツト、3
1は絶縁物単結晶基板、32はコレクタ電極、3
3は蓄積面である。
FIG. 1 is a schematic sectional view of a conventional storage tube, FIG. 2 is a partially enlarged sectional view showing the target of the storage tube of FIG. 1, and FIG. 4 is a partially enlarged sectional view showing the target of the storage tube of FIG. 3; and FIG. 5 is a diagram illustrating the operation of the storage tube of FIG. 3. 6 is a graph showing the relationship between the acceleration energy of the single crystal substrate and the secondary electron emission rate in the storage tube of FIG. 3, and FIG. 7 is an explanatory circuit diagram of the target in the storage tube of FIG. 3. An explanatory one-dimensional band diagram, FIG. 8 is a graph showing the target secondary electron emission effect and solid-state amplification effect in the storage tube of FIG. 3, and FIG. 9 is a graph related to the second embodiment of the present invention. A circuit diagram illustrating a target portion of an electrostatic focusing electrostatic deflection scan conversion type storage tube,
FIG. 10 is an enlarged cross-sectional view of the target of FIG. 9. In the symbols used in the drawings, 29 is a field mesh electrode, 30 is a target, and 3 is a field mesh electrode.
1 is an insulating single crystal substrate, 32 is a collector electrode, 3
3 is the accumulation side.
Claims (1)
電偏向型電子銃と、絶縁物単結晶基板上に少なく
ともコレクタ電極を設けた蓄積ターゲツトとを含
む走査変換型蓄積管に於いて、 VK+V1<VC<VM (但し、VKは前記電子銃の陰極の電位、V1は前
記蓄積ターゲツトの蓄積面の2次電子放出率δが
1となる第1交差電圧、VCは前記コレクタ電極
の電位、VMは前記フイールドメツシユ電極の電
位である)の条件が満足するように前記コレクタ
電極の電位VCを設定して前記蓄積ターゲツトを
電子ビームで衝撃し、次に、VC<VKを満足する
と共にVS<VK+V1を満足するように前記コレク
タ電極の電位VCを設定して前記蓄積ターゲツト
を電子ビームで衝撃し、しかる後、VS<VK+V1
の条件を満足させ且つ前記蓄積面を電子ビームで
衝撃しながら前記コレクタ電極の電位VCを前記
陰極の電位VKよりも高い値まで上昇させて消去
電位差を得ることを特徴とする走査変換型蓄積管
の動作方法。 2 フイールドメツシユ電極を有する静電集束静
電偏向型電子銃と、絶縁物単結晶基板上に少なく
ともコレクタ電極を設けた蓄積ターゲツトとを含
む走査変換型蓄積管に於いて、 VK+V1<VC<VM (但し、VKは前記電子銃の陰極の電位、V1は前
記蓄積ターゲツトの蓄積面の2次電子放出率δが
1になる第1交差電圧、VCは前記コレクタ電極
の電位、VMは前記フイールドメツシユ電極の電
位である)の条件が満足するように前記コレクタ
電極の電位VCを設定して前記蓄積ターゲツトを
電子ビームで衝撃し、次に、VK≦VC<VK+V1の
条件を満足するまで前記コレクタ電極の電位VC
を低下させ且つ前記フイールドメツシユ電極の電
位VMを下げるか又は前記蓄積ターゲツトの背面
電極の電位を下げることによつて容量結合的に前
記蓄積面の電位VSをVK≦VS<VK+V1の条件を満
足する値として前記蓄積ターゲツトを電子ビーム
で衝撃することを含んで消去電位差を得ることを
特徴とする走査変換型蓄積管の動作方法。[Scope of Claims] 1. A scan conversion type storage tube including an electrostatic focusing electrostatic deflection type electron gun having a field mesh electrode and a storage target having at least a collector electrode on an insulating single crystal substrate. , V K +V 1 <V C <V M (where, V K is the potential of the cathode of the electron gun, V 1 is the first crossing voltage at which the secondary electron emission rate δ of the storage surface of the storage target is 1, V C is the potential of the collector electrode, V M is the potential of the field mesh electrode), and the potential V C of the collector electrode is set so as to satisfy the following conditions, and the storage target is bombarded with an electron beam; Next, the potential V C of the collector electrode is set so that V C <V K and V S <V K +V 1 are satisfied, and the storage target is bombarded with an electron beam . <V K +V 1
A scan conversion type, characterized in that the erase potential difference is obtained by satisfying the following conditions and increasing the potential V C of the collector electrode to a value higher than the potential V K of the cathode while bombarding the accumulation surface with an electron beam. How storage tubes work. 2. In a scan conversion type storage tube including an electrostatic focusing electrostatic deflection type electron gun having a field mesh electrode and a storage target having at least a collector electrode on an insulating single crystal substrate, V K +V 1 < V C <V M (where, V K is the potential of the cathode of the electron gun, V 1 is the first cross voltage at which the secondary electron emission rate δ of the storage surface of the storage target is 1, and V C is the voltage of the collector electrode The storage target is bombarded with an electron beam by setting the potential V C of the collector electrode so as to satisfy the following conditions: V K is the potential of the field mesh electrode, and V M is the potential of the field mesh electrode, and then V K ≦ The potential of the collector electrode V C until the condition of V C <V K +V 1 is satisfied.
and lowering the potential V M of the field mesh electrode or lowering the potential of the back electrode of the storage target to capacitively reduce the potential V S of the storage surface such that V K ≦V S <V A method for operating a scan conversion type storage tube, characterized in that the erase potential difference is obtained by bombarding the storage target with an electron beam to a value that satisfies the condition of K + V 1 .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9075784A JPS59224037A (en) | 1984-05-07 | 1984-05-07 | Operating method of scanning conversion type storage tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9075784A JPS59224037A (en) | 1984-05-07 | 1984-05-07 | Operating method of scanning conversion type storage tube |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP53124376A Division JPS5939857B2 (en) | 1978-10-09 | 1978-10-09 | How a scan converting storage tube works |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59224037A JPS59224037A (en) | 1984-12-15 |
| JPS6348141B2 true JPS6348141B2 (en) | 1988-09-27 |
Family
ID=14007475
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9075784A Granted JPS59224037A (en) | 1984-05-07 | 1984-05-07 | Operating method of scanning conversion type storage tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59224037A (en) |
-
1984
- 1984-05-07 JP JP9075784A patent/JPS59224037A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59224037A (en) | 1984-12-15 |
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