JPS6349208B2 - - Google Patents
Info
- Publication number
- JPS6349208B2 JPS6349208B2 JP13117481A JP13117481A JPS6349208B2 JP S6349208 B2 JPS6349208 B2 JP S6349208B2 JP 13117481 A JP13117481 A JP 13117481A JP 13117481 A JP13117481 A JP 13117481A JP S6349208 B2 JPS6349208 B2 JP S6349208B2
- Authority
- JP
- Japan
- Prior art keywords
- water
- etching
- metal
- circuit pattern
- original plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005530 etching Methods 0.000 claims description 35
- 229910052751 metal Inorganic materials 0.000 claims description 26
- 239000002184 metal Substances 0.000 claims description 26
- 238000000034 method Methods 0.000 claims description 25
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 claims description 18
- 229920002120 photoresistant polymer Polymers 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 8
- 229910000831 Steel Inorganic materials 0.000 claims description 7
- 239000007864 aqueous solution Substances 0.000 claims description 7
- 239000010959 steel Substances 0.000 claims description 7
- 239000003112 inhibitor Substances 0.000 claims description 6
- 230000003449 preventive effect Effects 0.000 claims description 6
- 239000003795 chemical substances by application Substances 0.000 claims description 5
- 238000009736 wetting Methods 0.000 claims description 2
- 239000010408 film Substances 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 239000003960 organic solvent Substances 0.000 description 7
- 235000010724 Wisteria floribunda Nutrition 0.000 description 4
- 239000002253 acid Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229910001315 Tool steel Inorganic materials 0.000 description 3
- ZFAKTZXUUNBLEB-UHFFFAOYSA-N dicyclohexylazanium;nitrite Chemical compound [O-]N=O.C1CCCCC1[NH2+]C1CCCCC1 ZFAKTZXUUNBLEB-UHFFFAOYSA-N 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 2
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- 241000316887 Saissetia oleae Species 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000010962 carbon steel Substances 0.000 description 1
- GTLQZNKUEFUUIS-UHFFFAOYSA-N carbonic acid;cyclohexanamine Chemical compound OC(O)=O.NC1CCCCC1 GTLQZNKUEFUUIS-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- PDDANVVLWYOEPS-UHFFFAOYSA-N nitrous acid;n-propan-2-ylpropan-2-amine Chemical compound [O-]N=O.CC(C)[NH2+]C(C)C PDDANVVLWYOEPS-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229940088417 precipitated calcium carbonate Drugs 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 102220259718 rs34120878 Human genes 0.000 description 1
- 102200082816 rs34868397 Human genes 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Manufacturing Of Printed Circuit Boards (AREA)
- ing And Chemical Polishing (AREA)
Description
【発明の詳細な説明】
本発明は、改良された金属板のエツチング方法
に関するものであり、特にダイスタンプ法により
印刷配線板を製造するのに用いられるスタンピン
グダイの製造に用いて好適なエツチング方法を提
供するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improved etching method for metal plates, and in particular to an etching method suitable for use in manufacturing stamping dies used to manufacture printed wiring boards by die stamping. It provides:
印刷配線板用スタンピングダイの製造方法の1
つとしてエツチング法によるものが従来からよく
知られている。この方法において金属箔から有機
絶縁基板上に回路パターンを打抜くのに適した刃
型を有するスタンピングダイの製造方法として
は、例えば特公昭50―32651号公報、特開昭48―
1864号公報、特開昭51―32959号公報等に記載さ
れた方法がある。これらの公報に記載された方法
では、エツチングレジストの形成に用いられる回
路パターンフオトマスクとして、所望の配線回路
パターンより僅かに広い回路パターンネガフイル
ムと、僅かに狭い回路パターンポジフイルムを作
成し、これらの回路パターンフオトマスクを用い
て2回エツチングを行ない、段差をつけて刃型を
有するスタンピングダイを製造している。 Method 1 of manufacturing stamping die for printed wiring board
One of the well-known methods is the etching method. In this method, methods for manufacturing a stamping die having a blade shape suitable for punching circuit patterns from metal foil onto an organic insulating substrate are disclosed, for example, in Japanese Patent Publication No. 50-32651 and Japanese Patent Application Laid-Open No. 1983-1999.
There are methods described in Publication No. 1864, Japanese Patent Application Laid-Open No. 51-32959, etc. In the methods described in these publications, a circuit pattern negative film that is slightly wider than the desired wiring circuit pattern and a circuit pattern positive film that is slightly narrower than the desired wiring circuit pattern are created as a circuit pattern photomask used for forming an etching resist. Etching is performed twice using a circuit pattern photomask, and a stamping die having a blade shape with steps is manufactured.
従来の方法を用いたスタンピングダイの製造工
程の一部を第1図〜第10図を用いて説明する。
第1図に平面図を、第2図に断面図を示すような
所望の配線回路パターンより僅かに広い回路パタ
ーン1を有するネガフイルムAを用いて、第3図
に断面図を示すように金属原板3の上にエツチン
グレジスト2を形成し、この金属原板3にエツチ
ングを行ない第4図に示す突出部4を有する金属
原板5を作る。次にエツチングレジスト2を除去
し、突出部4の上部を表面研摩して、第5図に示
す平型突出回路部7を有する金属原板8を得る。
この金属原板8の凹陥部6に、例えばエポキシ樹
脂よりなる耐酸性樹脂11を第8図に示すように
充填する。次に、第6図に平面図を、第7図に断
面図を示すような所望の配線回路パターンより僅
かに狭い回路パターン9を有するポジフイルムB
を用いて第8図に示すようにエツチングレジスト
10を形成する。再びエツチング法により第9図
に示すように浅くエツチングして凹部13を設け
た後、耐酸性樹脂11を加熱軟化して除去する。
このようにして第10図に示すような刃型14を
有する刃型突出回路部15からなるスタンピング
ダイ12が製造される。 A part of the manufacturing process of a stamping die using a conventional method will be explained using FIGS. 1 to 10.
Using a negative film A having a circuit pattern 1 slightly wider than the desired wiring circuit pattern, as shown in FIG. 1 as a plan view and as a cross-sectional view in FIG. 2, as shown in FIG. An etching resist 2 is formed on the original plate 3, and the original metal plate 3 is etched to form an original metal plate 5 having protrusions 4 as shown in FIG. Next, the etching resist 2 is removed and the surface of the upper part of the protrusion 4 is polished to obtain a metal original plate 8 having a flat protrusion circuit part 7 shown in FIG.
The concave portion 6 of this metal original plate 8 is filled with an acid-resistant resin 11 made of, for example, epoxy resin, as shown in FIG. Next, a positive film B having a circuit pattern 9 slightly narrower than the desired wiring circuit pattern as shown in FIG. 6 in a plan view and in FIG. 7 as a cross-sectional view is shown.
An etching resist 10 is formed as shown in FIG. After shallow etching is performed again using the etching method to form a recess 13 as shown in FIG. 9, the acid-resistant resin 11 is heated and softened and removed.
In this way, a stamping die 12 consisting of a blade protruding circuit portion 15 having a blade 14 as shown in FIG. 10 is manufactured.
この従来例にみられる金型の製造において、エ
ツチング工程でのエツチングレジストとしては、
有機溶剤性フオトレジスト(例えば商品名で東京
応化工業製TPR、富士薬品工業製FPER、イー
ストマン・コダツク社製KPR,KTFR、シプレ
ー社製AZ―111など)あるいは、水溶性フオトレ
ジスト(東京応化工業製G―90、ノンクロン、富
士薬品工業製FR―14,15、FCR―7、吉谷商会
製アクアレジスト#100など)等が使用されてい
た。 In manufacturing the mold seen in this conventional example, the etching resist used in the etching process is as follows:
Organic solvent-based photoresists (for example, product names such as TPR manufactured by Tokyo Ohka Kogyo, FPER manufactured by Fuji Pharmaceutical, KPR, KTFR manufactured by Eastman Kodatsu, AZ-111 manufactured by Shipley, etc.) or water-soluble photoresists (trade names such as G-90, Nonchron, Fuji Pharmaceutical Co., Ltd. FR-14, 15, FCR-7, Yoshitani Shokai Aquaresist #100, etc.) were used.
しかしながら、これらを鋼材のエツチングレジ
ストとして使用し、塩化第2鉄液でエツチング処
理を施してスタンピングダイを製造するとき、有
機溶剤性フオトレジストを用いると作業性(有機
溶剤による火災の危険性)や環境(有機溶剤によ
る臭気、有害性)の問題があつた。一方、水溶性
フオトレジストを用いると、作業性、環境の問題
は改善されるが、鋼材をエツチングする時、水溶
性フオトレジストを塗布する前の表面処理が非常
に重要となり、表面処理が適切に行なわれていな
いと水溶性フオトレジストを鋼材の表面に塗布
し、乾燥したときに小さな金属の錆が発生し、所
望のエツチングができず困るという問題があつ
た。 However, when using these as etching resists for steel materials and manufacturing stamping dies by etching with ferric chloride solution, the use of organic solvent-based photoresists may result in poor workability (risk of fire due to organic solvents). There were environmental problems (odor and toxicity caused by organic solvents). On the other hand, using a water-soluble photoresist improves workability and environmental issues, but when etching steel materials, surface treatment before applying the water-soluble photoresist is extremely important, and surface treatment must be done properly. If this is not done, a water-soluble photoresist will be applied to the surface of the steel material, and when it dries, small metal rust will occur, making it difficult to perform the desired etching.
例えば鋼材(炭素工具鋼SK3、機械構造用炭素
鋼S45C,S55C,合金工具鋼SKD11,SKS3など)
に付着している油脂分やよごれをアルカリ脱脂に
よつて取り去り、次に化学研摩によつて表面をあ
らし、中和、水洗の工程で表面処理を行なつたあ
と、水溶性フオトレジスト(東京応化工業製G―
90、ノンクロン、富士薬品工業製FR―14、FR―
15,FCR―7、吉谷商会アクアレジスト#100な
ど)を除泡し、回転塗布機80〜100r.p.mで水を与
えてから塗布、乾燥すると金属表面に微細な錆が
発生し、所望のパターンが形成できず、刃型を有
するスタンピングダイを製造できないという欠点
がある。 For example, steel materials (carbon tool steel SK3, machine structural carbon steel S45C, S55C, alloy tool steel SKD11, SKS3, etc.)
The oil and dirt adhering to the film are removed by alkaline degreasing, the surface is roughened by chemical polishing, and the surface is treated with neutralization and water washing processes. Industrial G-
90, Nonkron, Fuji Pharmaceutical FR-14, FR-
15, FCR-7, Yoshitani Shokai Aquaresist #100, etc.) is de-foamed, applied with water using a rotary coating machine at 80 to 100 rpm, and when it dries, fine rust appears on the metal surface, forming the desired pattern. There is a drawback that a stamping die having a blade type cannot be manufactured.
本発明は上記従来例の欠点を解消するためにな
されたものであり、作業性、環境の問題を有する
有機溶剤性フオトレジストを用いずに、鋼材から
成る金属原板をエツチングする方法を提供するも
のである。すなわち、本発明のエツチング方法
は、金属原板を表面処理したのち、その表面を気
化性防錆剤を含む水溶液でぬらし、その後水溶性
フオトレジストを塗布することを特徴としたもの
であり、本発明を採用することにより、従来のエ
ツチング方法による水溶性フオトレジストの問題
点を解決することができ、作業性、環境、生産性
にすぐれたスタンピングダイの製造が可能とな
る。 The present invention has been made in order to eliminate the drawbacks of the above-mentioned conventional examples, and provides a method for etching a metal original plate made of steel without using an organic solvent-based photoresist that has problems in workability and environment. It is. That is, the etching method of the present invention is characterized in that after surface-treating a metal original plate, the surface is wetted with an aqueous solution containing a volatile rust preventive agent, and then a water-soluble photoresist is applied. By adopting this method, the problems of water-soluble photoresists caused by conventional etching methods can be solved, and it becomes possible to manufacture stamping dies with excellent workability, environment, and productivity.
以下、本発明のエツチング方法を、従来例で説
明したスタンピングダイの製造に適用した実施例
について、図面を参照して説明する。 Hereinafter, an embodiment in which the etching method of the present invention is applied to manufacturing the stamping die described in the conventional example will be described with reference to the drawings.
第1図〜第10図に示す製造工程は本発明にお
いても適用できるので、以下、この工程に従つて
本発明の一実施例を説明する。第3図の金属原板
3には、合金工具鋼SKS3(日立ハガネ製)を最
初から板材として取り出したものを使用し、黒皮
を切削して焼鈍し、真空焼入れによりHRC50゜〜
60゜の硬度とした後に平面研削して所定の形に形
成する。次いで、この平面研削した金属原板3
を、沈降性炭酸カルシウムに水と少量のアンモニ
ア水を加えてペースト状としたものを塗布して研
摩し、その後水洗いして空気乾燥する。次に、
0.1〜4.0重量%の気化性防錆剤デイシクロヘキシ
ルアンモニウムナイトライト(C6H11)2NH2NO2
を含む本発明の水溶液で金属原板3をぬらし、そ
の後、従来の水溶性フオトレジスト(例えば、富
士薬品工業製FCR―7、FR―14、FR―15、東京
応化工業製G―90、ノンクロンなど)を回転塗布
機で塗布し、プレベークを行ない、次いでネガフ
イルムA(第1図,第2図)を使用して露光した
後水で現像し、ポストベークを行ないエツチング
レジスト2(第3図)を形成する。その後第1回
目のエツチング処理をして第4図に示す突出部4
を作る。エツチングは45゜Be′の塩化第2鉄液を液
温27℃〜31℃として毎分500パドル回転数のパド
ル型腐食機によつて行なう。凹陥部6(第4図,
第5図)の深さは、切断する金属箔の種類と厚さ
とによつて300〜700μmの範囲で決定する。第4
図のエツチングレジスト2を除去すれば、第5図
に示す平型突出回路部7を有する金属原板8が得
られる。この凹陥部6に第8図に示すように耐酸
性樹脂11としてエポキシ樹脂材を充填したの
ち、第3図の場合と同様に、この表面を処理し、
0.1〜4.0重量%の気化性防錆剤デイシクロヘキシ
ルアンモニウムナイトライトを含む本発明の水溶
液で表面をぬらした後従来の水溶性フオトレジス
トを塗布し、ポジフイルムB(第6図,第7図)
を使用し、露光する。その後水で現像し、ポスト
ベークを行なつた後に第2回目のエツチング処理
を施して第9図に示す凹陥部13を作る。エツチ
ングは、第1回目の場合と同一条件で行ない、凹
陥部13の深さは目的に応じて50〜200μmの範
囲で決定する。次いでエツチングレジスト10を
剥離し、凹陥部11に充填されたエポキシ樹脂を
加熱軟化させて除去すれば、第10図に示す刃型
突出回路部15を有するスタンピングダイ12が
得られる。 Since the manufacturing process shown in FIGS. 1 to 10 can be applied to the present invention, one embodiment of the present invention will be described below according to this process. The metal base plate 3 shown in Fig. 3 is made of alloy tool steel SKS3 (manufactured by Hitachi Steel), which is taken out as a plate material from the beginning, and the black scale is cut off, annealed, and then vacuum quenched to HRC50°.
After the hardness is set to 60°, surface grinding is performed to form the desired shape. Next, this surface ground metal original plate 3
A paste made by adding water and a small amount of aqueous ammonia to precipitated calcium carbonate is applied and polished, then washed with water and air-dried. next,
0.1-4.0% by weight volatile rust inhibitor dicyclohexylammonium nitrite ( C6H11 ) 2NH2NO2
The metal original plate 3 is wetted with the aqueous solution of the present invention containing the following: and then a conventional water-soluble photoresist (for example, FCR-7, FR-14, FR-15 manufactured by Fuji Pharmaceutical Co., Ltd., G-90 manufactured by Tokyo Ohka Kogyo Co., Ltd., Nonchron, etc. ) was coated with a rotary coater, pre-baked, exposed using negative film A (Figures 1 and 2), developed with water, and post-baked to form etching resist 2 (Figure 3). form. After that, a first etching process is performed to form the protrusion 4 shown in FIG.
make. Etching is carried out using a ferric chloride solution of 45 DEG Be' at a temperature of 27 DEG C. to 31 DEG C. using a paddle type etching machine with a paddle rotation speed of 500 per minute. Concave portion 6 (Fig. 4,
The depth of FIG. 5) is determined in the range of 300 to 700 μm depending on the type and thickness of the metal foil to be cut. Fourth
If the etching resist 2 shown in the figure is removed, a metal original plate 8 having a flat protruding circuit portion 7 shown in FIG. 5 is obtained. After filling this concave portion 6 with an epoxy resin material as an acid-resistant resin 11 as shown in FIG. 8, this surface is treated in the same manner as in the case of FIG.
After wetting the surface with the aqueous solution of the present invention containing 0.1 to 4.0% by weight of the volatile rust inhibitor dicyclohexylammonium nitrite, a conventional water-soluble photoresist was applied to form a positive film B (Figures 6 and 7).
Use and expose. Thereafter, the film is developed with water, post-baked, and then subjected to a second etching process to form the recessed portion 13 shown in FIG. Etching is performed under the same conditions as the first time, and the depth of the recessed portion 13 is determined in the range of 50 to 200 μm depending on the purpose. Next, the etching resist 10 is peeled off, and the epoxy resin filled in the concave portion 11 is heated and softened to be removed, thereby obtaining a stamping die 12 having a blade-shaped protruding circuit portion 15 as shown in FIG. 10.
上記実施例で示したように、本発明の気化性防
錆剤を含む水溶液で金属表面をぬらしてから水溶
性フオトレジストを塗布すれば従来例で示した様
な、水溶性フオトレジストを鋼材の表面に塗布
し、乾燥したとき、金属表面に微細な錆が発生
し、エツチングレジストパターンが形成できず、
所望のパターンのエツチングが不可能という問題
を解決することができる。 As shown in the above example, if the metal surface is wetted with an aqueous solution containing the volatile rust preventive of the present invention and then a water-soluble photoresist is applied, the water-soluble photoresist can be applied to the steel material as shown in the conventional example. When applied to the surface and dried, fine rust occurs on the metal surface, making it impossible to form an etching resist pattern.
The problem that it is impossible to etch a desired pattern can be solved.
なお、防錆剤としては、イミダゾール系の防錆
剤など各種のものがあるが、本発明においては、
防錆剤そのものがナフタリンのようにガス化(昇
華)し、金属表面に吸着して薄い膜を作り、この
膜によつて水や酸素が存在しても錆を生じさせな
い気化性防錆剤を用いることが最適であり、この
ような気化性防錆剤には、実施例で示したデイシ
クロヘキシルアンモニウムナイトライト以外に、
ジイソプロピルアンモニウムナイトライト、シク
ロヘキシルアンモニウムカーボネート等がある。 In addition, there are various types of rust preventive agents such as imidazole type rust preventive agents, but in the present invention,
The rust inhibitor itself gasifies (sublimates) like naphthalene and adsorbs to the metal surface to form a thin film.This film creates a volatile rust inhibitor that does not cause rust even in the presence of water or oxygen. In addition to dicyclohexyl ammonium nitrite shown in the examples, such volatile rust inhibitors include:
Examples include diisopropylammonium nitrite and cyclohexylammonium carbonate.
また、気化性防錆剤を含む水溶液の濃度として
は、0.1〜4.0重量%が適当であり、0.1重量%未満
だと錆を生じ、4.0重量%をこえると飽和して水
に完全に溶けなくなり、水溶性フオトレジストを
塗布したときに異物として残り、パターン形成が
できない。 In addition, the appropriate concentration of an aqueous solution containing a volatile rust preventive agent is 0.1 to 4.0% by weight; less than 0.1% by weight will cause rust, and more than 4.0% by weight will become saturated and become completely insoluble in water. , when a water-soluble photoresist is applied, it remains as a foreign substance, making it impossible to form a pattern.
以上説明したように、本発明のエツチング方法
によれば、フオトレジストとして有機溶剤性フオ
トレジストを用いたときの作業性(有機溶剤によ
る火災の危険性)や環境(有機溶剤による臭気、
有害性)の問題、また水溶性フオトレジストを用
いたときの金属表面の錆の発生によるエツチング
レジストの形成不能の問題が解決され、さらに製
造された金属板の表面が非常にきれいに仕上がる
ため、高品質の印刷配線板用スタンピングダイを
製造する場合などその効果は極めて大である。 As explained above, according to the etching method of the present invention, workability (risk of fire due to organic solvent) and environment (odor due to organic solvent,
This solves the problem of ``hazardousness'' and the inability to form an etching resist due to rust on the metal surface when water-soluble photoresists are used.Furthermore, the surface of the manufactured metal plate is finished very cleanly, resulting in high quality The effect is extremely large when producing high-quality stamping dies for printed wiring boards.
図面はフオトマスクを用いて、印刷配線板用ス
タンピングダイを製造する各工程を説明するため
の図で、このうち第1図、第2図はそれぞれ所望
の配線回路パターンより僅かに広い回路パターン
を有するネガフイルムの平面図および断面図、第
3図、第4図および第5図は金属原板上に第1図
のネガフイルムの回路パターンをエツチングによ
り得る手順を説明するための断面図、第6図、第
7図はそれぞれ所望の配線回路パターンより僅か
に狭い回路パターンを有するポジフイルムの平面
図および断面図、第8図、第9図、第10図は第
5図の金属板をエツチング処理し、刃型回路パタ
ーンを有するスタンピングダイを製造する手順を
説明するための断面図である。
2,10…エツチングレジスト、3,5,8…
金属原板、4…突出部、7…平型突出回路部、1
1…耐酸性樹脂、12…スタンピングダイ、14
…刃型、15…刃型突出回路部。
The drawings are diagrams for explaining each process of manufacturing a stamping die for a printed wiring board using a photomask. Of these, Figures 1 and 2 each have a circuit pattern slightly wider than the desired wiring circuit pattern. A plan view and a cross-sectional view of the negative film; FIGS. 3, 4, and 5 are cross-sectional views for explaining the procedure for obtaining the circuit pattern of the negative film shown in FIG. 1 on a metal original plate by etching; FIG. , FIG. 7 is a plan view and a cross-sectional view of a positive film having a circuit pattern slightly narrower than the desired wiring circuit pattern, and FIGS. FIG. 2 is a cross-sectional view for explaining a procedure for manufacturing a stamping die having a blade-shaped circuit pattern. 2, 10... Etching resist, 3, 5, 8...
Metal original plate, 4... Protrusion part, 7... Flat protrusion circuit part, 1
1... Acid-resistant resin, 12... Stamping die, 14
...blade type, 15...blade type protruding circuit section.
Claims (1)
を含む水溶液でぬらした後、前記金属原板に水溶
性フオトレジストを塗布、乾燥し、しかる後前記
水溶性フオトレジストによつて前記金属原板の表
面に所望のパターンを形成した後、前記金属原板
をエツチング処理することを特徴とするエツチン
グ方法。 2 特許請求の範囲第1項の記載において、水溶
液として、気化性防錆剤を0.1重量%〜4.0重量%
含むものを用いることを特徴とするエツチング方
法。[Scope of Claims] 1. After wetting the surface of a metal base plate made of steel with an aqueous solution containing a volatile rust preventive agent, a water-soluble photoresist is applied to the metal base plate and dried, and then the water-soluble photoresist is coated with the water-soluble photoresist. Therefore, the etching method is characterized in that after forming a desired pattern on the surface of the metal original plate, the metal original plate is etched. 2. In the statement of claim 1, the volatile rust inhibitor is contained in an aqueous solution of 0.1% to 4.0% by weight.
An etching method characterized by using a material containing
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56131174A JPS5834174A (en) | 1981-08-20 | 1981-08-20 | Etching method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56131174A JPS5834174A (en) | 1981-08-20 | 1981-08-20 | Etching method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5834174A JPS5834174A (en) | 1983-02-28 |
| JPS6349208B2 true JPS6349208B2 (en) | 1988-10-04 |
Family
ID=15051734
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56131174A Granted JPS5834174A (en) | 1981-08-20 | 1981-08-20 | Etching method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5834174A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100556145B1 (en) * | 2000-12-19 | 2006-03-03 | 유우이치로 니이자키 | Filamentary brush bristle material |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7913382B2 (en) | 2006-10-20 | 2011-03-29 | Soligie, Inc. | Patterned printing plates and processes for printing electrical elements |
-
1981
- 1981-08-20 JP JP56131174A patent/JPS5834174A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100556145B1 (en) * | 2000-12-19 | 2006-03-03 | 유우이치로 니이자키 | Filamentary brush bristle material |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5834174A (en) | 1983-02-28 |
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