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JPS6349320B2 - - Google Patents
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JPS6349320B2 - - Google Patents

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Publication number
JPS6349320B2
JPS6349320B2 JP56076466A JP7646681A JPS6349320B2 JP S6349320 B2 JPS6349320 B2 JP S6349320B2 JP 56076466 A JP56076466 A JP 56076466A JP 7646681 A JP7646681 A JP 7646681A JP S6349320 B2 JPS6349320 B2 JP S6349320B2
Authority
JP
Japan
Prior art keywords
memory cell
circuit
test
junction
prom
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56076466A
Other languages
Japanese (ja)
Other versions
JPS57191900A (en
Inventor
Nobuhiko Oono
Katsuya Mizue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Microcomputer System Ltd
Hitachi Ltd
Original Assignee
Hitachi Microcomputer System Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Microcomputer System Ltd, Hitachi Ltd filed Critical Hitachi Microcomputer System Ltd
Priority to JP7646681A priority Critical patent/JPS57191900A/en
Publication of JPS57191900A publication Critical patent/JPS57191900A/en
Publication of JPS6349320B2 publication Critical patent/JPS6349320B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C29/00Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/04Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
    • G11C29/50Marginal testing, e.g. race, voltage or current testing
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2201/00Indexing scheme relating to error detection, to error correction, and to monitoring
    • G06F2201/81Threshold
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C17/00Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards
    • G11C17/14Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards in which contents are determined by selectively establishing, breaking or modifying connecting links by permanently altering the state of coupling elements, e.g. PROM
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C29/00Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/04Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
    • G11C29/50Marginal testing, e.g. race, voltage or current testing
    • G11C2029/5006Current

Landscapes

  • Read Only Memory (AREA)
  • For Increasing The Reliability Of Semiconductor Memories (AREA)
  • Techniques For Improving Reliability Of Storages (AREA)

Description

【発明の詳細な説明】 この発明は、接合破壊型PROM(プログラマブ
ル・リード・オンリー・メモリ)の検査方法に関
する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for testing junction-destructive PROM (programmable read-only memory).

通常、PROMの情報書込はユーザー側で行な
われる。したがつて、メーカー側では未書込状態
で検査する必要がある。接合破壊型メモリセル
は、トランジスタのエミツタ、コレクタ間を接合
破壊させない限り電気的にはオープン状態となつ
ている。したがつて、どのメモリセルを選択して
も、出力には同じ情報しか得られない。
Normally, information is written to PROM by the user. Therefore, the manufacturer needs to inspect it in an unwritten state. A junction destruction type memory cell is in an electrically open state unless the junction between the emitter and collector of the transistor is destroyed. Therefore, no matter which memory cell is selected, only the same information can be obtained at the output.

この場合の検査方法としては、従来から第1図
に示すように、メモリセル部に読み出し専用のテ
ストメモリセル群TSTR1,TSTR2が増設されて
いる。これらのテストメモリセル群を順次読み出
すことにより、読み出し系の各回路の機能検査を
行なつている。また、メモリセルに正常に書き込
めるかどうかという検査は、未書込テストメモリ
セル群TSTW1,TSTW2に実際に書き込むとい
う方法で行なわれる。
As a testing method in this case, conventionally, as shown in FIG. 1, read-only test memory cell groups TSTR 1 and TSTR 2 are added to the memory cell section. By sequentially reading out these test memory cell groups, the functionality of each circuit in the readout system is tested. Further, the test as to whether or not data can be normally written to the memory cells is performed by actually writing to the unwritten test memory cell groups TSTW 1 and TSTW 2 .

しかし、上記の検査方法では、まだ完全な検査
が行なえない。すなわち、次に示すような点で不
十分であつた。
However, the above inspection method still cannot perform a complete inspection. That is, it was insufficient in the following points.

上記の読み出し及び書き込みでは、書込回路が
正常にビツトラインを選択しているか否かは不明
である。例えば、読み出し検査において、ハイレ
ベル(接合破壊)を読み出すとき、2重選択され
た他方のセルがオープン状態でも、接合破壊状態
でも同じくハイレベルが出力されてしまう。
In the above read and write operations, it is unclear whether the write circuit is correctly selecting the bit line. For example, when reading a high level (junction breakdown) in a read test, the same high level will be output even if the other doubly selected cell is in an open state or in a junction breakdown state.

また、書き込み検査では、すべてのテスト用メ
モリセルに接合破壊を生じしめるために、同様に
2重選択を検出することができない。
Furthermore, in the write test, double selection cannot be similarly detected because junction breakdown occurs in all test memory cells.

さらに、ユーザー側で使用される未書込メモリ
セルに対しては、実質的な検査を行なつていない
ので、断線の有無、特性の劣化等が一切検出でき
ないものである。
Furthermore, since no actual test is performed on the unwritten memory cells used by the user, it is impossible to detect any disconnection, deterioration of characteristics, etc.

この発明の目的は、信頼性を高めた接合破壊型
PROM検査方法を提供することにある。
The purpose of this invention is to provide a bond-breaking type with improved reliability.
The objective is to provide a PROM testing method.

この発明の基本的特徴によれば、書込回路を通
して、テスト用メモリセル及び、又は未書込メモ
リセルに対して、メモリセルを構成するトランジ
スタの接合破壊電流以下の電流値であつて、コレ
クタ、エミツタ間にブレークダウンを生じしめる
電圧を供給する電流源回路の出力端子電圧を読み
取ることにより良否の判別が行なわれる。
According to the basic feature of the present invention, a current value that is less than or equal to the junction breakdown current of a transistor constituting the memory cell is applied to the test memory cell and/or the unwritten memory cell through the write circuit. The quality of the product is determined by reading the output terminal voltage of a current source circuit that supplies a voltage that causes breakdown between the emitters.

以下、この発明を実施例とともに詳細に説明す
る。
Hereinafter, this invention will be explained in detail together with examples.

この発明では、第1図に示すような接合破壊型
PROMにおいて、前記説明したようにテスト用
メモリセル群を用いて前記説明したような読み出
し検査及び書き込み検査を行なう。そして、次の
検査方法を追加するものである。
In this invention, a joint breaking type as shown in FIG.
In the PROM, the read test and write test as described above are performed using the test memory cell group as described above. Then, the following inspection method is added.

すなわち、第3図の要部一実施例回路図に示す
ように、出力端子OUT1に定電流回路I0を接続し
て、メモリセルを構成するトランジスタの接合破
壊電流(例えば、130mA程度)以下の小さな電
流値(例えば、20mA程度)であつて、コレク
タ、エミツタ間にブレークダン(一次降伏)を生
じしめる電圧(例えば20ボルト)VCCの下で電流
供給を行なう。そして、この定電流回路I0の出力
端子電圧、言い換えれば、上記出力端子OUT1
おける電圧値をコンパレータC1,C2で読み取る。
これらのコンパレータC1,C2には予め設定され
た上限値VHと下限値VLがそれぞれ印加されてお
り、その判定出力をANDゲート回路Gに入力し
て、良否判定出力GO/NGを得るものである。
すなわち、上記電圧値が上限値VHと下限値VL
中間であるとき良品とされる判定出力GOが得ら
れる。
In other words, as shown in the circuit diagram of the main part of the embodiment in FIG . The current is supplied at a small current value (for example, about 20 mA) under a voltage (for example, 20 volts) V CC that causes breakdown (primary breakdown) between the collector and emitter. Then, the output terminal voltage of this constant current circuit I0 , in other words, the voltage value at the output terminal OUT1 is read by the comparators C1 and C2 .
A preset upper limit value V H and lower limit value V L are applied to these comparators C 1 and C 2, respectively, and the judgment output is input to the AND gate circuit G to obtain the pass/fail judgment output GO/NG. It's something you get.
That is, when the voltage value is between the upper limit value VH and the lower limit value VL , a determination output GO is obtained indicating that the product is non-defective.

書込回路WRの検査にあたつては、テスト用メ
モリセル群TSTR1を選択することにより行なわ
れる。
The write circuit WR is tested by selecting the test memory cell group TSTR1 .

すなわち、アドレスデコーダ回路ADBの出力信
号を受けるダイオード論理回路で書込回路WRの
一つが選択され、ビツト線選択が行なわれる。
That is, one of the write circuits WR is selected by the diode logic circuit receiving the output signal of the address decoder circuit AD B , and bit line selection is performed.

例えば、ダイオードQ13〜Q14がオフするデコ
ーダ出力信号に対しては、トランジスタQ12
Q11がオンして、ビツト線B1が選択される。
For example, for a decoder output signal in which diodes Q 13 to Q 14 are turned off, transistors Q 12 ,
Q11 turns on and bit line B1 is selected.

一方、アドレスデコーダ回路ADWのデコーダ
出力信号を受けるワード線選回路WDによつて、
テスト用ワード線WTが選択される。
On the other hand, by the word line selection circuit WD that receives the decoder output signal of the address decoder circuit AD W ,
Test word line W T is selected.

今、ビツト線B1を選択して、未書込メモリセ
ルQT1に定電流回路I0から略20mAの電流を流す
と、メモリセルQT1のコレクタ、エミツタ間ブレ
ークダウン電圧と、サイリスタ構成のトランジス
タQ11のベース、エミツタ間電圧及びトランジス
タQ12のコレクタ、エミツタ間電圧並びにワード
線選択トランジスタQTのコレクタ、エミツタ間
電圧の総和の電圧約10Vが出力端子OUT1に得ら
れる。したがつて、このときの期待値である上限
電圧VHと下限電圧VLとは、例えば11V、9V程度
にそれぞれ設定される。
Now, if bit line B 1 is selected and a current of approximately 20 mA is applied to unwritten memory cell Q T1 from constant current circuit I 0 , the breakdown voltage between the collector and emitter of memory cell Q T1 and the thyristor configuration A voltage of about 10V is obtained at the output terminal OUT1, which is the sum of the base-to-emitter voltage of the transistor Q11 , the collector-to-emitter voltage of the transistor Q12 , and the collector-to - emitter voltage of the word line selection transistor QT . Therefore, the upper limit voltage V H and lower limit voltage V L , which are the expected values at this time, are set to, for example, about 11V and 9V, respectively.

今、上記回路ルートに断線があつたり、異常個
所があつて電流駆動能力が不足していると、12〜
20Vの高い電圧が出力端子OUT1があらわれる。
また、他の回路間でリークがあつたり、二重選択
により書き込み済のトランジスタQTをも選択し
ていたり、あるいはメモリセルQT1の耐圧が劣化
していると、8V以下の低い電圧が出力端子
OUT1にあらわれる。
Now, if there is a disconnection or an abnormality in the above circuit route and the current drive capacity is insufficient, 12~
A high voltage of 20V appears at the output terminal OUT 1 .
In addition, if there is a leak between other circuits, if the programmed transistor Q T is also selected by double selection, or if the withstand voltage of the memory cell Q T1 has deteriorated, a low voltage of 8V or less will be output. terminal
Appears on OUT 1 .

一方、例えば、ビツト線B2を選択して、書込
み済のメモリセルQT2に定電流回路I0から略20m
Aの電流を流すと、上記同様の選択回路における
トランジスタQ21,Q22,QTのベース、エミツタ
間電圧及びコレクタ、エミツタ間電圧に、メモリ
セルQT2のベース、エミツタ間電圧を加えた電圧
約6Vが出力端子OUT1に得られる。したがつて、
このときの期待値である上限値VH′と下限値VL
とは、例えば、7V、5Vにそれぞれ設定される。
On the other hand, for example, select the bit line B 2 and connect it to the written memory cell Q T2 by about 20 m from the constant current circuit I 0 .
When a current of A flows, the voltage is the sum of the base-to-emitter voltage and the collector-to-emitter voltage of transistors Q 21 , Q 22 , and Q T in the same selection circuit as above, and the base-to-emitter voltage of memory cell Q T2 . Approximately 6V is available at the output terminal OUT 1 . Therefore,
The upper limit value V H ′ and lower limit value V L ′ are the expected values at this time.
For example, they are set to 7V and 5V, respectively.

今、上記回路ルートに断線があつたり、異常個
所があつて電流駆動能力が不足していると、7.5
〜20Vの高い電圧が出力端子OUT1にあらわれ
る。また、回路ルートの途中で地落していると、
5V以下の電圧が出力端子OUT1にあらわれる。
Now, if there is a disconnection or abnormality in the circuit route above, and the current drive capacity is insufficient, then 7.5
A high voltage of ~20V appears at the output terminal OUT 1 . Also, if the ground falls in the middle of the circuit route,
A voltage below 5V appears at the output terminal OUT 1 .

このような、未書込メモリセルQT1、書込み済
メモリセルQT2に対する定電流回路I0からの電流
値に対する出力端子電圧との関係は、第2図に示
されている。したがつて、期待値VH,VL及び
VH′,VL′は、同図点線で示すように、所定の幅
をもつて設定されるものである。
The relationship between the output terminal voltage and the current value from the constant current circuit I0 for the unwritten memory cell Q T1 and the written memory cell Q T2 is shown in FIG. Therefore, the expected values V H , V L and
V H ′ and V L ′ are set to have a predetermined width, as shown by the dotted line in the figure.

同様の検査が他のメモリセルQT3〜QToについ
て同様に行なわれる。
Similar tests are performed on other memory cells Q T3 -Q To .

一方、ユーザー側で使用する(選択的書き込み
を行なう)メモリセルMCに対しては、すべて未
書込メモリセルであるので、上記期待値VH,VL
を例えば11V、9Vとして同様な検査を行なうも
のである。
On the other hand, all of the memory cells MC used by the user (selective writing) are unwritten memory cells, so the above expected values V H , V L
A similar test is performed by setting the voltage to 11V or 9V, for example.

この場合、書込回路WRの検査終了後に行なう
ことが望ましい。すなわち、書込回路WRが良品
とされた後に、メモリセルMCの検査を行なうこ
とによつて、不良があつた場合にはメモリセルの
不良であることが明確に判定できるからである。
In this case, it is desirable to carry out the test after completing the test of the write circuit WR. That is, by inspecting the memory cell MC after the write circuit WR has been determined to be a non-defective product, if a defect is found, it can be clearly determined that the memory cell is defective.

この実施例では、未書込メモリセルに接合破壊
を生じしめない小さな電流を流し込むことによつ
て検査を行なうものであるので、テスト用メモリ
セルの他に、ユーザー側で使用するメモリセルに
ついても確実な非破壊的検査を行なうことができ
る。
In this example, the test is performed by flowing a small current that does not cause junction breakdown into unwritten memory cells, so in addition to the test memory cells, the memory cells used by the user are also tested. Reliable non-destructive inspection can be performed.

また、ある程度の電流駆動能力も判別すること
ができるので、例えば、実際に書き込みを行なう
テスト用メモリセル群TSTW1,TSTW2を省略
するものであつてもよい。
Furthermore, since a certain degree of current drive ability can also be determined, for example, the test memory cell groups TSTW 1 and TSTW 2 to which writing is actually performed may be omitted.

なお、第1図のブロツク図において、SEはセ
ンス回路、Q1〜Q4は出力バツフア回路である。
In the block diagram of FIG. 1, SE is a sense circuit, and Q1 to Q4 are output buffer circuits.

この発明は前記実施例に限定されず、良否判定
を行なう回路は何んであつてもよい。また、判定
レベルは、種々変更できるものである。
The present invention is not limited to the above-mentioned embodiments, and any circuit for determining pass/fail may be used. Further, the determination level can be changed in various ways.

また、検査対象である接合破壊型PROMのブ
ロツク構成及び具体的回路は、種々変形できるも
のである。
Furthermore, the block configuration and specific circuit of the junction-destructive PROM to be tested can be modified in various ways.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、接合破壊型PROMの一例を示すブ
ロツク図、第2図は、この発明を説明するための
試験電流と判定電圧との関係を示す特性図、第3
図は、この発明の一実施例を示す要部回路図であ
る。
FIG. 1 is a block diagram showing an example of a junction breakdown type PROM, FIG. 2 is a characteristic diagram showing the relationship between test current and judgment voltage for explaining the present invention, and FIG.
The figure is a main circuit diagram showing an embodiment of the present invention.

Claims (1)

【特許請求の範囲】 1 複数のワード線と、複数のビツト線と、各ワ
ード線とピツト線との間に設けられたユーザ側で
使用されるべきトランジスタ構造の未書込メモリ
セルと、ワード線選択回路と、書込回路とを備え
てなる接合破壊型PROMの検査方法であつて、
未書込メモリセルのコレクタ、エミツタ間にブレ
ークダウンを生じしめる電圧のもとでメモリセル
の接合破壊電流以下の値の電流を出力する電流源
回路と、かかる電流源回路の出力レベルを判定す
る判定手段とを用い、上記書込回路と上記ワード
線選択回路とによつて未書込メモリセルを選択せ
しめかつ上記書込回路を介して上記電流源回路の
出力を選択のメモリセルに供給せしめ、その時の
上記判定手段の出力によつて良否の判別を行なう
ようにしてなることを特徴とする接合破壊型
PROMの検査方法。 2 接合破壊型PROMがテスト用メモリセルを
含み、テスト用メモリセルに対する上記の検査が
終了した後に、上記未書込メモリセルの検査に移
行するものとしたことを特徴とする特許請求の範
囲第1項記載の接合破壊型PROMの検査方法。
[Claims] 1. A plurality of word lines, a plurality of bit lines, an unwritten memory cell having a transistor structure to be used on the user side provided between each word line and the pit line, and a word line. A method for testing a junction-destroying PROM comprising a line selection circuit and a write circuit, the method comprising:
Determining a current source circuit that outputs a current with a value less than the junction breakdown current of a memory cell under a voltage that causes breakdown between the collector and emitter of an unwritten memory cell, and the output level of such a current source circuit. and determining means to select an unwritten memory cell by the write circuit and the word line selection circuit, and to supply the output of the current source circuit to the selected memory cell via the write circuit. , a joint destruction type characterized in that pass/fail is determined based on the output of the above-mentioned determining means at that time.
PROM inspection method. 2. Claim No. 2 characterized in that the junction destruction type PROM includes a test memory cell, and after the above-mentioned test of the test memory cell is completed, the test of the unwritten memory cell is started. A method for inspecting a junction-destructive PROM as described in Section 1.
JP7646681A 1981-05-22 1981-05-22 Method for junction destructive prom test Granted JPS57191900A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7646681A JPS57191900A (en) 1981-05-22 1981-05-22 Method for junction destructive prom test

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7646681A JPS57191900A (en) 1981-05-22 1981-05-22 Method for junction destructive prom test

Publications (2)

Publication Number Publication Date
JPS57191900A JPS57191900A (en) 1982-11-25
JPS6349320B2 true JPS6349320B2 (en) 1988-10-04

Family

ID=13605935

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7646681A Granted JPS57191900A (en) 1981-05-22 1981-05-22 Method for junction destructive prom test

Country Status (1)

Country Link
JP (1) JPS57191900A (en)

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JP2010198693A (en) * 2009-02-26 2010-09-09 Semiconductor Energy Lab Co Ltd Method for inspecting otp memory, method for manufacturing the otp memory, the otp memory, and method for manufacturing semiconductor device

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JPS61184799A (en) * 1985-02-13 1986-08-18 Nec Corp Programmable read-only memory
JPS61187200A (en) * 1985-02-14 1986-08-20 Nec Corp Programmable read only memory
JPS61204898A (en) * 1985-03-06 1986-09-10 Nec Corp Programmable read-only semiconductor storage device
JPS61230700A (en) * 1985-04-05 1986-10-14 Nec Corp Programmable read-only memory
JPH0711920B2 (en) * 1986-11-06 1995-02-08 株式会社日立製作所 Programmable ROM
US6584589B1 (en) 2000-02-04 2003-06-24 Hewlett-Packard Development Company, L.P. Self-testing of magneto-resistive memory arrays

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JPS59919B2 (en) * 1978-11-27 1984-01-09 富士通株式会社 semiconductor storage device

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010198693A (en) * 2009-02-26 2010-09-09 Semiconductor Energy Lab Co Ltd Method for inspecting otp memory, method for manufacturing the otp memory, the otp memory, and method for manufacturing semiconductor device

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