JPS6351345B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a discharge lamp holding device that allows a light emitting source to be easily positioned at a predetermined position.

In the manufacture of integrated circuits and color picture tubes, it is necessary to accurately position the light source of an exposure device in order to perform fine pattern processing.

FIG. 1 is a front view of a conventional discharge lamp device, FIG. 2 is a side view thereof, FIG. 3 is a cross-sectional view taken from FIG. 1, and FIG. 4 is a cross-sectional view taken from FIG. 1. In the figure, 1 is a glass tube whose discharge part is formed in the shape of an arc with radius R over θ° (approximately 130°), and both ends of which are linear electrode parts, and 2 is a glass tube at both ends of glass tube 1. The stem is made of metal and is fixed to the metal, and these make up the discharge lamp. Reference numeral 3 denotes a locator made of an insulating material such as ceramic or michael oxide, and has a pin hole 3a and a terminal receiving hole 3b formed on the left and right sides, respectively. The pin hole 3a is used to position the locator 3 at a predetermined position by fitting a pin installed in a lamp house (not shown). Further, terminal plates 4 and 5 are fixed to the terminal receiving hole 3b with screws 6 and nuts 7, respectively. The stem 2 is fixed to the mounting pieces 4a, 5a of the terminal plates 4, 5 by solder 8, respectively. Note that 4b and 5b are terminal pieces formed on the terminal plates 4 and 5, into which connectors from the power supply circuit are fitted.

FIG. 5 is a sectional view of a conventional discharge lamp holding device. Mercury 10 is housed in an electrode portion at the tip of the glass tube 1, and an electrode 11 made of tungsten whose tip protrudes from the surface of the mercury 10 into the tube is sealed. The other end of the electrode 11 is connected to the glass tube 1
The lead wire 1 of the bare conductor is pulled out to this part.
2 is welded. A stem 2 is placed on the outer peripheral surface of the glass tube 1 so as to cover the welded portion of the electrode 11 and the lead wire 12, and an epoxy resin 13 is placed in between.
is filled and fixed. A sealing fitting 14 is fitted into the end of the stem 2, and further, the stem 2 and the lead wire 12 are connected by a solder 15.

In such a configuration, when a power supply voltage is applied to the terminal pieces 4b and 5b, a voltage is built up between the electrodes 11 of the discharge lamp, causing a discharge, and the center of the glass tube 1 emits light in an arc shape with a radius R.

Moreover, in such conventional discharge lamp holding devices, the outer peripheral surface of the glass tube is held by a stem fixed to a locator, so if the central light source is not concentric with the outer peripheral surface of the glass tube or if the epoxy resin When the stem and glass tube become eccentric due to contraction, there is a problem in that the position of the light source deviates from the reference position. Moreover, since the stem and the glass tube are fixed, there is a drawback that the light source position cannot be adjusted at this portion.

The present invention has been made to solve these conventional drawbacks, and its object is to provide a discharge lamp holding device that can easily position a light source at a reference position.

In order to achieve such an objective, the present invention
The stem fixed to the locator and the glass tube are connected via a coil spring, the coil spring is deformed to adjust the position of the glass tube relative to the locator, and then the coil spring is fixed with solder or adhesive. .

Hereinafter, the present invention will be explained in detail based on examples.

FIG. 6 is a sectional view of one embodiment of the discharge lamp holding device according to the present invention. In the figure, the same parts as in FIG. 5 are given the same reference numerals. 17 is a stem serving as a reference base, and 18 is a coil spring formed by winding phosphor bronze wire. coil spring 1
The inner diameter of one end of the stem 8 is smaller than the outer diameter of the glass tube 1, and the inner diameter of the other end is smaller than the outer diameter of the mounting step 17a of the stem 17. Therefore, when the inner diameters of both ends of the coil spring 18 are expanded and fitted into the outer peripheral surfaces of the mounting steps 17a of the glass tube 1 and the stem 17, respectively, the both ends of the coil spring 18 are held together by their elasticity. can be installed respectively.

Further, 19 is an insulated lead wire, the tip of which is welded to the tip of the electrode 11 of the discharge lamp. 20 is a coil spring attached to cover this welded part and the tip of the glass tube, 21 is an insulating tube attached longer to cover this coil spring 20, and 22 is a stem 17.
silicone resin filled between the inner surface of the glass tube 1 and the outer surface of the insulating tube 21; 23, a silicone resin filled between the inner surface of the insulating tube 21 and the outer surfaces of the coil spring 20 and the lead wire 19; is a water-resistant sealant filled in the open end of the stem 17.

In such a configuration, the stem 17 is fixed to the mounting piece similarly to the example shown in FIGS. 1-4. After positioning and installing the locator in the lamp house, turn on the discharge lamp to project light, and if the light source position deviates from the reference position,
The glass tube 1 is moved using a jig, the coil spring 18 is deformed, and the position of the glass tube 1 with respect to the stem 17 is adjusted to align the light source with the reference position. Next, in this positional relationship, the entire coil spring 18 is soldered to solidify the shape of the coil spring 18 and fix the coil spring 18 to the stem 17. After that, remove the jig. At this time, even if both ends of the coil spring 18, which are fixed to the glass tube 1 and the stem 17, are eccentric, the displacement of the tapered middle part is distributed over the entire coil, so one coil cannot be significantly displaced. No loss of adhesion.

An adhesive may also be used to solidify the coil spring 18. Because both solder and adhesive form a thin film-like layer on the surface of each coil, the amount used is small and the adhesive strength is high. Therefore, even if an adhesive is used, there will be no change in relative position between the stem and the glass tube due to shrinkage. Furthermore, since the stem is insulated from the electrode, there is no need to use an expensive insulating material such as ceramic for the locator, and a metal plate can be used for the locator, resulting in cost reduction.

As described above, according to the discharge lamp holding device according to the present invention, the light source can be easily positioned at the reference position, and the position can be stably held, and an exposure device with high precision can be obtained. There is.

[Brief explanation of the drawing]

Figure 1 is a front view of a conventional discharge lamp device, Figure 2 is a side view, Figure 3 is a cross-sectional view of Figure 1, Figure 4 is a cross-sectional view of Figure 1, and Figure 5 is a discharge lamp. FIG. 6 is a sectional view of an embodiment of the discharge lamp holding device according to the present invention. 1... Glass tube, 10... Mercury, 11... Electrode, 17... Stem, 18, 20... Coil spring, 19... Lead wire, 21... Insulating tube.

Claims (1)

[Claims] 1. A glass tube with electrodes sealed at both ends, a locator attached to the locator, a stem fixed on the locator, one end fixed to the stem and the other end fixed to the glass tube. A discharge lamp holder comprising a coil spring, wherein the coil spring is deformed to adjust the position of the glass tube with respect to the locator, and then the coil spring is fixed with solder or adhesive. Device.