JPS6351346B2 - - Google Patents
Info
- Publication number
- JPS6351346B2 JPS6351346B2 JP13589080A JP13589080A JPS6351346B2 JP S6351346 B2 JPS6351346 B2 JP S6351346B2 JP 13589080 A JP13589080 A JP 13589080A JP 13589080 A JP13589080 A JP 13589080A JP S6351346 B2 JPS6351346 B2 JP S6351346B2
- Authority
- JP
- Japan
- Prior art keywords
- locator
- discharge lamp
- glass tube
- view
- stem
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011521 glass Substances 0.000 claims description 20
- 229910000679 solder Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000000853 adhesive Substances 0.000 claims description 3
- 230000001070 adhesive effect Effects 0.000 claims description 3
- 238000000605 extraction Methods 0.000 claims 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 11
- 239000003822 epoxy resin Substances 0.000 description 4
- 229920000647 polyepoxide Polymers 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 238000006957 Michael reaction Methods 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/82—Lamps with high-pressure unconstricted discharge having a cold pressure > 400 Torr
- H01J61/822—High-pressure mercury lamps
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- General Physics & Mathematics (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
- Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
Description
【発明の詳細な説明】
本発明は露光装置等に用いて好適な放電灯保持
装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a discharge lamp holding device suitable for use in an exposure apparatus or the like.
集積回路やカラー受像管の製造を行なう際の微
細パターン加工において、光学系の収差を少なく
するために曲管形の放電灯が使用される。 BACKGROUND OF THE INVENTION A curved discharge lamp is used to reduce aberrations in an optical system in fine pattern processing for manufacturing integrated circuits and color picture tubes.
第１図は曲管形の放電灯を用いた従来の放電灯
保持装置の正面図、第２図はその側面図、第３図
は第１図の−断面図、第４図は第１図の−
断面図である。図において、１は放電部分がθ゜
（約130゜）にわたつて半径Ｒの円弧状に曲つて形
成され、その両端が直線状にのびた電極部分にな
つている石英からなるガラス管、２はガラス管１
の両端にそれぞれ固定された金属からなるステム
であり、これらにより曲管形の放電灯が構成され
ている。３はセラミツクやマイカ粉をレジンで固
めたマイカレツクス等の耐高温性絶縁材からなる
ロケータであり、左右の対称位置にピン孔３ａお
よび端子受穴３ｂがそれぞれ形成されている。ピ
ン孔３ａは図示しないランプハウスに植設された
ピンにはめ込んで、ロケータ３を所定の位置に位
置決めするために用いられる。また、端子受穴３
ｂ内には端子板４，５がそれぞれビス６およびナ
ツト７によつて固定されている。端子板４，５の
取付片４ａ，５ａにははんだ８によつて放電灯の
ステム２がそれぞれ固定されている。また、端子
板４，５の端子片４ｂ，５ｂには電源回路からの
コネクタがはめ込まれるようになつている。した
がつて放電灯は取付片４ａ，５ａに対するステム
２のはんだ付けによつてロケータ３に位置決めし
て取付けられている。 Fig. 1 is a front view of a conventional discharge lamp holding device using a curved discharge lamp, Fig. 2 is a side view thereof, Fig. 3 is a cross-sectional view of Fig. 1, and Fig. 4 is the same as Fig. 1. of-
FIG. In the figure, 1 is a glass tube made of quartz whose discharge part is bent into an arc shape with radius R over θ° (approximately 130°), and both ends of which are linear electrode parts; 2 is a glass tube made of quartz; glass tube 1
A metal stem is fixed to each end of the tube, and these constitute a curved tube-shaped discharge lamp. A locator 3 is made of a high temperature resistant insulating material such as ceramic or mica powder hardened with resin, and has a pin hole 3a and a terminal receiving hole 3b formed at symmetrical positions on the left and right. The pin hole 3a is used to position the locator 3 at a predetermined position by fitting a pin installed in a lamp house (not shown). Also, terminal receiving hole 3
Terminal plates 4 and 5 are fixed inside b by screws 6 and nuts 7, respectively. The stem 2 of the discharge lamp is fixed to the mounting pieces 4a, 5a of the terminal plates 4, 5 by solder 8, respectively. Further, a connector from a power supply circuit is fitted into the terminal pieces 4b, 5b of the terminal plates 4, 5. Therefore, the discharge lamp is positioned and mounted on the locator 3 by soldering the stem 2 to the mounting pieces 4a, 5a.
第５図は放電灯の電極部分の断面図である。ガ
ラス管１の先端封止部には管軸方向にのび管内お
よび管外に突出したタングステン等からなる電極
１０が封着され、また、管内には電極１０の先端
を所定寸法露出するように水銀１１が収容されて
いる。電極１０の外方端には裸導線のリード線１
２が溶接され、また、ガラス管１の先端部の外周
面にはステム２がはめ込まれ、このステム２の長
さはリード線１２の先端部までのびている。そし
て、ステム２の内部には、ガラス管１の先端部お
よび電極１０とリード線１２の接合部を埋め込む
ようにエポキシレジン１３が充填され固定されて
いる。さらに、ステム２の先端開口には封止金具
１４が挿入されるとともに、この封止金具１４の
中心をリード線１２が貫通して外部に突出し、ス
テム２と封止金具１４とリード線１２とははんだ
１５によつて一体に接合されている。したがつ
て、電極１０はステム２と電気的に接続されてい
る。 FIG. 5 is a sectional view of the electrode portion of the discharge lamp. An electrode 10 made of tungsten or the like that extends in the axial direction of the glass tube 1 and protrudes outside the tube is sealed at the sealed end of the glass tube 1, and mercury is sealed inside the tube so that the tip of the electrode 10 is exposed to a predetermined extent. 11 are accommodated. A bare conductor lead wire 1 is attached to the outer end of the electrode 10.
2 is welded to the glass tube 1, and a stem 2 is fitted into the outer peripheral surface of the tip of the glass tube 1, and the length of the stem 2 extends to the tip of the lead wire 12. The inside of the stem 2 is filled with an epoxy resin 13 and fixed so as to embed the tip of the glass tube 1 and the joint between the electrode 10 and the lead wire 12. Further, a sealing metal fitting 14 is inserted into the tip opening of the stem 2, and a lead wire 12 passes through the center of this sealing metal fitting 14 and protrudes to the outside, so that the stem 2, the sealing metal fitting 14, and the lead wire 12 are connected to each other. are integrally joined by solder 15. Therefore, the electrode 10 is electrically connected to the stem 2.
このような構成において、電源装置から端子片
４ｂ，５ｂ間に高電圧を印加すると、取付片４
ａ，５ａ、ステム２、はんだ１５、リード線１２
を経て電極１０間に電圧が加わり、ガラス管１の
管内が放電し曲管部分の中心が発光する。 In such a configuration, when a high voltage is applied between the terminal pieces 4b and 5b from the power supply device, the mounting piece 4
a, 5a, stem 2, solder 15, lead wire 12
A voltage is applied between the electrodes 10 through , a discharge occurs inside the glass tube 1, and the center of the curved tube portion emits light.
このような従来の放電灯保持装置においては、
放電灯のステムが電極に電気的に接続されてお
り、しかもロケータ上に固定された端子板にステ
ムをはんだ付けしてロケータに放電灯を取付けて
いるため、ロケータは絶縁材料で作らざるを得な
かつた。しかも、電極部分は高温になるので、耐
高温性、耐高圧性が要求され、従来はセラミツク
やマイカレツクス等が使用されていた。 In such a conventional discharge lamp holding device,
The locator must be made of insulating material because the discharge lamp stem is electrically connected to the electrodes and the discharge lamp is attached to the locator by soldering the stem to a terminal board fixed on the locator. Nakatsuta. Moreover, since the electrode portion is exposed to high temperatures, it is required to have high temperature resistance and high pressure resistance, and conventionally ceramics, michaels, etc. have been used.
しかしながら、このようなロケータでは、高価
になるとともに、焼成品であるため形状の寸法精
度が落ちるので光源位置を正確にセツトするのが
難しく、また機械的強度が劣る等の欠点があつ
た。 However, such a locator is expensive, and since it is a fired product, the dimensional accuracy of the shape is reduced, making it difficult to accurately set the light source position, and it also has drawbacks such as poor mechanical strength.
本発明は従来のこのような欠点を解消するため
になされたもので、その目的とするところは、光
源位置を高精度に保持でき、かつ価格の低減化も
はかれるような放電灯保持装置を提供することに
ある。 The present invention has been made in order to eliminate these conventional drawbacks, and its purpose is to provide a discharge lamp holding device that can hold the light source position with high precision and that can also reduce the cost. It's about doing.
このような目的を達成するために、本発明は、
放電灯のガラス管の非発光部の外周面に巻きつけ
たコイルスプリングをロケータ上に固定された取
付板にはんだまたは接着剤で固定して、放電灯を
ロケータに取付けるように構成したものである。 In order to achieve such an objective, the present invention
The discharge lamp is configured to be mounted on the locator by fixing a coil spring wrapped around the outer circumferential surface of the non-light emitting part of the glass tube of the discharge lamp to a mounting plate fixed on the locator using solder or adhesive. .
以下、本発明を実施例にもとずいて詳細に説明
する。 Hereinafter, the present invention will be explained in detail based on examples.
第６図は本発明に係る放電灯保持装置の一実施
例の正面図、第７図はその側面図、第８図は取付
板の正面図である。図において、第１図と同一部
分には同一符号を付してある。２０は金属からな
るロケータ、２０ａはピン孔、２１は黄銅板から
なり第８図に示すように取付孔２１ａを有するＬ
字形に形成された取付板である。この取付板２１
はビス２２およびナツト２３によりロケータ２０
の対称位置にそれぞれ固定されている。２４はガ
ラス管１の非発光部、すなわち電極部分の外周面
上に巻き付かれた燐青銅からなるコイルスプリン
グであり、自身の弾力でガラス管１上に強く取付
いている。このコイルスプリング２４ははんだ２
５によつて取付板２１の先端に接合され、これに
よつて放電灯は位置決めしてロケータ２０に取付
けられる。なお、２６は放電灯のリード線であ
る。 FIG. 6 is a front view of one embodiment of the discharge lamp holding device according to the present invention, FIG. 7 is a side view thereof, and FIG. 8 is a front view of a mounting plate. In the figure, the same parts as in FIG. 1 are given the same reference numerals. 20 is a locator made of metal, 20a is a pin hole, and 21 is a brass plate having a mounting hole 21a as shown in FIG.
This is a mounting plate shaped like a letter. This mounting plate 21
Locator 20 is secured by screw 22 and nut 23.
are fixed at symmetrical positions. A coil spring 24 made of phosphor bronze is wound around the outer peripheral surface of the non-light emitting part of the glass tube 1, that is, the electrode part, and is strongly attached to the glass tube 1 by its own elasticity. This coil spring 24 is soldered 2
5 to the tip of the mounting plate 21, whereby the discharge lamp is positioned and mounted on the locator 20. Note that 26 is a lead wire of the discharge lamp.
放電灯はガラス管１をコイルスプリング２４で
保持し、はんだ２５、取付板２１を介してロケー
タ２０に取付けられているため、ロケータ２０は
放電灯を単に機械的に支持するのみで電気的には
全く絶縁されている。このためにロケータ２０は
金属で作ることができる。 The discharge lamp holds the glass tube 1 with a coil spring 24 and is attached to the locator 20 via the solder 25 and the mounting plate 21, so the locator 20 only supports the discharge lamp mechanically and does not electrically support it. Completely insulated. For this purpose, the locator 20 can be made of metal.
第９図は放電灯の電極部分の断面図である。図
において、第５図と同一部分には同一符号を付し
てある。２７はガラス管１の細くなつた先端封止
部から電極１０とリード線２６の芯線２６ａとの
接合部にわたつてこれらの上に巻き付かれた補強
用のコイルスプリング、２８はコイルスプリング
２７の外周にかん合されたシリコンゴム等からな
る絶縁チユーブ、２９はリード線２６の絶縁被覆
２６ｂの先端部と絶縁チユーブ２８を完全に埋め
込むようにステム２の内側に充填されたエポキシ
レジンである。電極１０と芯線２６ａの接合部は
コイルスプリング２７によつて補強されているの
で、リード線２６を外部から曲げたり引つぱつた
りして力を加えても破損することはない。また、
ステム２は電極１０からは完全に電気的に絶縁さ
れているので、両方のステム２が取付板２１に同
時に接触しても短絡事故を起こすことはない。 FIG. 9 is a sectional view of the electrode portion of the discharge lamp. In the figure, the same parts as in FIG. 5 are given the same reference numerals. Reference numeral 27 denotes a reinforcing coil spring that extends from the tapered end sealing portion of the glass tube 1 to the junction between the electrode 10 and the core wire 26a of the lead wire 26 and is wound thereon. An insulating tube 29 made of silicone rubber or the like fitted to the outer periphery is an epoxy resin filled inside the stem 2 so as to completely embed the tip of the insulating coating 26b of the lead wire 26 and the insulating tube 28. Since the joint between the electrode 10 and the core wire 26a is reinforced by the coil spring 27, it will not be damaged even if force is applied to the lead wire 26 by bending or pulling it from the outside. Also,
Since the stems 2 are completely electrically insulated from the electrodes 10, even if both stems 2 contact the mounting plate 21 at the same time, no short circuit will occur.
スプリングコイル２４ははんだ２５を取付板２
１との接合だけに用いず、全周にわたつて付けて
ガラス管１との固定強度を増すこともできる。ま
た、はんだのかわりにエポキシレジン等の接着剤
を用いることもできる。 The spring coil 24 is attached to the solder 25 on the mounting plate 2.
It can be used not only for joining with the glass tube 1, but can also be attached around the entire circumference to increase the fixing strength with the glass tube 1. Furthermore, an adhesive such as epoxy resin can be used instead of solder.
このように、本発明に係る放電灯保持装置によ
ると、ロケータに金属材料を用いることができる
ので、ロケータを高い寸法精度で作ることができ
放電灯の光源位置を正確に設定することができ
る。また機械的強度が高くて破損することがな
く、かつコストの低減もはかれる等優れた効果が
ある。 As described above, according to the discharge lamp holding device according to the present invention, since a metal material can be used for the locator, the locator can be made with high dimensional accuracy, and the light source position of the discharge lamp can be accurately set. In addition, it has excellent mechanical strength, does not break, and can reduce costs.
第１図は従来の放電灯保持装置の正面図、第２
図はその側面図、第３図は第１図の−断面
図、第４図は第１図の−断面図、第５図は放
電灯の電極部分の断面図、第６図は本発明に係る
放電灯保持装置の一実施例の正面図、第７図はそ
の側面図、第８図は取付板の正面図、第９図は放
電灯の電極部分の断面図である。
１……ガラス管、２……ステム、２０……ロケ
ータ、２０ａ……ピン孔、２１……取付板、２４
……コイルスプリング、２５……はんだ、２６…
…リード線、２７……補強用のコイルスプリン
グ、２８……絶縁チユーブ、２９……エポキシレ
ジン。
Figure 1 is a front view of a conventional discharge lamp holding device, Figure 2 is a front view of a conventional discharge lamp holding device;
The figure is a side view, FIG. 3 is a sectional view of FIG. 1, FIG. 4 is a sectional view of FIG. 1, FIG. 5 is a sectional view of the electrode part of the discharge lamp, and FIG. FIG. 7 is a front view of one embodiment of such a discharge lamp holding device, FIG. 7 is a side view thereof, FIG. 8 is a front view of a mounting plate, and FIG. 9 is a sectional view of an electrode portion of a discharge lamp. 1... Glass tube, 2... Stem, 20... Locator, 20a... Pin hole, 21... Mounting plate, 24
...Coil spring, 25...Solder, 26...
... Lead wire, 27 ... Coil spring for reinforcement, 28 ... Insulation tube, 29 ... Epoxy resin.
Claims (1)
電極取出部を保護してガラス管の先端に固定され
たステムからなる放電灯と、位置決めして取付け
られた金属からなるロケータと、このロケータ上
に固定された取付板と、前記ガラス管の非発光部
の外周面に巻きつけたコイルスプリングとを備
え、このコイルスプリングを前記取付板にはんだ
または接着剤で固定して前記放電灯を前記ロケー
タに取付けたことを特徴とする放電灯保持装置。1. A discharge lamp consisting of a glass tube with electrodes sealed at both ends, a stem fixed to the tip of the glass tube while protecting the electrode extraction part, a locator made of metal attached in a positioned manner, and a locator on the locator. a mounting plate fixed to the locator, and a coil spring wound around the outer circumferential surface of the non-light emitting part of the glass tube, and the coil spring is fixed to the mounting plate with solder or adhesive to mount the discharge lamp at the locator. A discharge lamp holding device characterized in that it is attached to.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13589080A JPS5763760A (en) | 1980-10-01 | 1980-10-01 | Discharge lamp holding device |
| US06/306,714 US4482842A (en) | 1980-10-01 | 1981-09-29 | Curved tube type ultra high pressure mercury arc discharge lamp device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13589080A JPS5763760A (en) | 1980-10-01 | 1980-10-01 | Discharge lamp holding device |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15522990A Division JPH0465049A (en) | 1990-06-15 | 1990-06-15 | Discharge lamp |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5763760A JPS5763760A (en) | 1982-04-17 |
| JPS6351346B2 true JPS6351346B2 (en) | 1988-10-13 |
Family
ID=15162183
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13589080A Granted JPS5763760A (en) | 1980-10-01 | 1980-10-01 | Discharge lamp holding device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5763760A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2730790B2 (en) * | 1990-05-09 | 1998-03-25 | 東芝ライテック株式会社 | Low pressure discharge lamp and display device using the same |
-
1980
- 1980-10-01 JP JP13589080A patent/JPS5763760A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5763760A (en) | 1982-04-17 |
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