JPS635263B2 - - Google Patents
Info
- Publication number
- JPS635263B2 JPS635263B2 JP29040185A JP29040185A JPS635263B2 JP S635263 B2 JPS635263 B2 JP S635263B2 JP 29040185 A JP29040185 A JP 29040185A JP 29040185 A JP29040185 A JP 29040185A JP S635263 B2 JPS635263 B2 JP S635263B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- zirconium
- thickness
- metal
- thin layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 claims description 39
- 239000002184 metal Substances 0.000 claims description 31
- 229910052710 silicon Inorganic materials 0.000 claims description 17
- 229910052726 zirconium Inorganic materials 0.000 claims description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 14
- 239000010703 silicon Substances 0.000 claims description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 10
- 229920000620 organic polymer Polymers 0.000 claims description 10
- 229910052760 oxygen Inorganic materials 0.000 claims description 10
- 239000001301 oxygen Substances 0.000 claims description 10
- 150000002736 metal compounds Chemical class 0.000 claims description 5
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 claims description 2
- 239000010408 film Substances 0.000 description 68
- 239000010410 layer Substances 0.000 description 44
- 238000002834 transmittance Methods 0.000 description 19
- 239000000203 mixture Substances 0.000 description 15
- -1 polyethylene terephthalate Polymers 0.000 description 15
- 239000000243 solution Substances 0.000 description 15
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 13
- 229910052709 silver Inorganic materials 0.000 description 13
- 239000004332 silver Substances 0.000 description 13
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 12
- 238000004544 sputter deposition Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 10
- 238000005299 abrasion Methods 0.000 description 9
- 230000014759 maintenance of location Effects 0.000 description 7
- 150000003755 zirconium compounds Chemical class 0.000 description 7
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 150000003377 silicon compounds Chemical class 0.000 description 6
- 239000000956 alloy Substances 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 150000002739 metals Chemical class 0.000 description 5
- 238000011282 treatment Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- 230000002829 reductive effect Effects 0.000 description 4
- UQMOLLPKNHFRAC-UHFFFAOYSA-N tetrabutyl silicate Chemical compound CCCCO[Si](OCCCC)(OCCCC)OCCCC UQMOLLPKNHFRAC-UHFFFAOYSA-N 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 125000000217 alkyl group Chemical group 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229920002319 Poly(methyl acrylate) Polymers 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- WDJHALXBUFZDSR-UHFFFAOYSA-M acetoacetate Chemical compound CC(=O)CC([O-])=O WDJHALXBUFZDSR-UHFFFAOYSA-M 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- LKEKJWAPSMYJAQ-UHFFFAOYSA-N butan-1-olate ethyl 3-oxobutanoate zirconium(3+) Chemical compound [Zr+3].CCCC[O-].CCCC[O-].CCCC[O-].CCOC(=O)CC(C)=O LKEKJWAPSMYJAQ-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000002845 discoloration Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000001747 exhibiting effect Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000007062 hydrolysis Effects 0.000 description 2
- 238000006460 hydrolysis reaction Methods 0.000 description 2
- 239000000543 intermediate Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- XDLMVUHYZWKMMD-UHFFFAOYSA-N 3-trimethoxysilylpropyl 2-methylprop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C(C)=C XDLMVUHYZWKMMD-UHFFFAOYSA-N 0.000 description 1
- VLHREMCDTPGVEG-UHFFFAOYSA-N 4,4-diethyl-3-oxohexanoic acid Chemical compound CCC(CC)(CC)C(=O)CC(O)=O VLHREMCDTPGVEG-UHFFFAOYSA-N 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229920002799 BoPET Polymers 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910000906 Bronze Inorganic materials 0.000 description 1
- UPWGGXLAZRGSTI-UHFFFAOYSA-N CCCC[Zr](CCCC)(CCCC)CCCC Chemical group CCCC[Zr](CCCC)(CCCC)CCCC UPWGGXLAZRGSTI-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 208000005156 Dehydration Diseases 0.000 description 1
- 229910000737 Duralumin Inorganic materials 0.000 description 1
- JHWNWJKBPDFINM-UHFFFAOYSA-N Laurolactam Chemical compound O=C1CCCCCCCCCCCN1 JHWNWJKBPDFINM-UHFFFAOYSA-N 0.000 description 1
- 229920000299 Nylon 12 Polymers 0.000 description 1
- 229920002292 Nylon 6 Polymers 0.000 description 1
- 229920002302 Nylon 6,6 Polymers 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004962 Polyamide-imide Substances 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 239000004734 Polyphenylene sulfide Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229920001328 Polyvinylidene chloride Polymers 0.000 description 1
- 229910000676 Si alloy Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000005083 Zinc sulfide Substances 0.000 description 1
- 229910001093 Zr alloy Inorganic materials 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000003712 anti-aging effect Effects 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 239000002216 antistatic agent Substances 0.000 description 1
- 229920006233 biaxially oriented polyamide Polymers 0.000 description 1
- 229920006378 biaxially oriented polypropylene Polymers 0.000 description 1
- 239000011127 biaxially oriented polypropylene Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910000416 bismuth oxide Inorganic materials 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- YHWCPXVTRSHPNY-UHFFFAOYSA-N butan-1-olate;titanium(4+) Chemical compound [Ti+4].CCCC[O-].CCCC[O-].CCCC[O-].CCCC[O-] YHWCPXVTRSHPNY-UHFFFAOYSA-N 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- 229920002301 cellulose acetate Polymers 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- OTARVPUIYXHRRB-UHFFFAOYSA-N diethoxy-methyl-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CCO[Si](C)(OCC)CCCOCC1CO1 OTARVPUIYXHRRB-UHFFFAOYSA-N 0.000 description 1
- IJKVHSBPTUYDLN-UHFFFAOYSA-N dihydroxy(oxo)silane Chemical compound O[Si](O)=O IJKVHSBPTUYDLN-UHFFFAOYSA-N 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 235000019441 ethanol Nutrition 0.000 description 1
- NKSJNEHGWDZZQF-UHFFFAOYSA-N ethenyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C=C NKSJNEHGWDZZQF-UHFFFAOYSA-N 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 229920001519 homopolymer Polymers 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- BFXIKLCIZHOAAZ-UHFFFAOYSA-N methyltrimethoxysilane Chemical compound CO[Si](C)(OC)OC BFXIKLCIZHOAAZ-UHFFFAOYSA-N 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920002239 polyacrylonitrile Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 229920001707 polybutylene terephthalate Polymers 0.000 description 1
- 238000006068 polycondensation reaction Methods 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920006380 polyphenylene oxide Polymers 0.000 description 1
- 229920000069 polyphenylene sulfide Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000005033 polyvinylidene chloride Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 150000004760 silicates Chemical class 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 229910000898 sterling silver Inorganic materials 0.000 description 1
- 239000010934 sterling silver Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- GYZQBXUDWTVJDF-UHFFFAOYSA-N tributoxy(methyl)silane Chemical compound CCCCO[Si](C)(OCCCC)OCCCC GYZQBXUDWTVJDF-UHFFFAOYSA-N 0.000 description 1
- CPUDPFPXCZDNGI-UHFFFAOYSA-N triethoxy(methyl)silane Chemical compound CCO[Si](C)(OCC)OCC CPUDPFPXCZDNGI-UHFFFAOYSA-N 0.000 description 1
- ZNOCGWVLWPVKAO-UHFFFAOYSA-N trimethoxy(phenyl)silane Chemical compound CO[Si](OC)(OC)C1=CC=CC=C1 ZNOCGWVLWPVKAO-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 239000010938 white gold Substances 0.000 description 1
- 229910000832 white gold Inorganic materials 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Landscapes
- Laminated Bodies (AREA)
Description
〔産業上の利用分野〕
本発明は、可視光線を透過し、赤外線を反射す
る、選択光透過性を有する積層フイルムに関す
る。
本発明の望ましい具体例は、窓あるいは面体に
取りつけることにより、赤外線を遮断し、しか
も、可視光線に対しては充分な透過性を有する積
層フイルムである。かかる積層フイルムは、溶
接、溶解、消化等の高温作業における人体、特に
顔面の保護に有用であるばかりではなく、建物、
容器、乗物等のガラス窓から入射する太陽光線の
うち、可視光線の採光を妨げることなく赤外線を
遮断し、冷暖房効果を向上させるのに有効であ
る。また、グリーンハウスにおける保温、冷凍・
冷蔵ケースにおける保冷、太陽熱利用コレクター
の窓部からの放熱防止等にも広く利用することが
できる。
〔従来技術〕
従来、可視光線を透過し、赤外線を遮断する目
的で、有機重合体フイルム上に、アルミニウム、
銀、銅、金等の金属薄層を真空蒸着した積層フイ
ルムが知られている。これらの積層フイルムは、
金属薄層の傷つき、汚染、酸化を防止する目的で
金属表面を1〜100μの厚さの有機重合体保護層
で被覆されているのが通常である。かかる積層フ
イルムの赤外線反射率は、前記金属層の厚さに依
存し、高い赤外線反射率を得るためには、該金属
層の厚さを充分厚くする必要がある。この結果赤
外線の遮断効果を増大させようとすると、可視光
線の透過率が著しく減少することになり、不充分
な採光と物体の不明瞭な認識をひき起こすことに
なる。また、赤外線反射率を高めようとすると、
可視光線の反射率が同時に増大するため、室外に
不快な反射光を発散させる結果となつている。
かかる問題を改良するため、前記金属薄層の表
面を、数百Åの厚さの酸化チタン、酸化ビスマ
ス、硫化亜鉛等の屈折率の高い無機誘導体で被覆
したいわゆる反射防止膜により、可視光線に対す
る反射防止を行なつて透明性を向上する方法が知
られている。これらの無機誘電体を金属薄層表面
に被着する方法として、真空蒸着、スパツタリン
グなどの物理的膜形成方法、あるいは、溶液コー
チング、化学蒸着などの化学的膜形成方法が用い
られている。しかしながら、上述した単独の金属
化合物を大面積のフイルム状態の反射防止膜とし
て用いた場合には、膜の耐摩耗性が悪い、可撓性
が乏しい、摩擦や曲げなどにより容易に基体から
剥離しやすいなどの欠点があつた。また、これら
の機械特性を改良するため、有機チタネートある
いは有機シリケートなどを原料として、塗膜中に
有機物質を含有させる試みもなされているが、紫
外線などに対する耐光性や、耐候性、耐熱性が悪
くなるという問題があつた。
特に安価に大面積の膜を得るためには、高速で
膜形成を行なう必要があるが、膜形成速度を速く
すればする程、上記欠点が顕著になる。
〔発明が解決しようとする問題点〕
本発明者らは、かかる欠点を有しない反射防止
膜を構成成分とする。可視光線の透過率が高く、
赤外線の反射率の高い積層フイルムを得るべく鋭
意検討した結果本発明に到達した。
すなわち、本発明の目的は、耐摩耗性にすぐ
れ、耐光性、耐熱性にすぐれた反射防止膜を有す
る、可視光線の透過率が高く、赤外線の反射率の
高い積層フイルムを与えることにある。
〔問題点を解決するための手段〕
かかる目的は、有機重合体フイルム(A)の少なく
とも一方の面に、厚さ0.02μから0.3μの金属化合
物を含む透光性薄層(B)と、厚さ30Åから500Åの
金属薄層(C)とが、A/C/Bまたは、A/B/
C/Bの順に積層されたフイルムにおいて、透光
性薄層(B)の60重量%以上がジルコニウム(Zr)、
ケイ素(Si)および酸素から成り、該B中の金属
元素の60モル%以上がZrとSiとから成り、かつ、
Zr/Siのモル比率が80/20から20/80の範囲にあ
ることを特徴とする積層フイルムにより達成され
る。
本発明で使用される有機重合体フイルム(A)とし
ては、厚さが6μから1000μ、好ましくは9μから
125μで、可撓性を有するものであり、波長400n
mから2000nmにおける光線透過率が40%以上、
好ましくは70%以上の特性を有するものである。
例えば、ポリエチレンテレフタレート、ポリブチ
レンテレフタレート、ポリエチレンナフタレート
などのポリエステル、ポリエチレン、ポリプロピ
レンなどのポリオレフイン、ナイロン6、ナイロ
ン66、ナイロン12などのポリアミド、ポリカーボ
ネート、ポリメチルアクリレート、ポリ塩化ビニ
ル、ポリ塩化ビニリデン、ポリスルフオン、ポリ
フエニレンサルフアイド、ポリフエニレンオキサ
イド、ポリエーテルスルフオン、ポリアクリロニ
トリル、ポリテトラフルオロエチレン、ポリアミ
ドイミド、ポリイミド、ポリビニルアルコール、
酢酸セルロースなどがあげられる。これらは、単
独重合物として用いることもできるし、二種以上
の組み合せによる共重合体または混合体であつて
も良い。
また、有機重合体フイルム(A)は、二軸延伸また
は一軸延伸されたものであつても良い。さらに、
これらの有機重合体フイルム(A)の中に、目的に応
じて、紫外線吸収剤、酸化防止剤、老化防止剤、
着色剤、可塑剤、安定剤、帯電防止剤などの添加
物を加えることが適宜許される。
中でも、本発明の効果を発揮するのに適した有
機重合体フイルム(A)としては、二軸延伸されたポ
リエチレンテレフタレート、二軸延伸されたポリ
プロピレン、二軸延伸されたポリアミド、ポリカ
ーボネート、ポリメチルアクリレート、ポリイミ
ドのフイルムがあげられる。
本発明における金属薄層(C)に有用な金属として
は、バルクの比抵抗が10-4オーム・cm以下のもの
が好ましく、例えばアルミニウム、銅、銀、金、
錫、亜鉛、鉄、ニツケル、コバルト、パラジウ
ム、チタン、ジルコニウム、クロムなどの金属単
体、あるいは、ジユラルミン、スターリングシル
バー、真鋳、青銅、ホワイトゴールド、ステンレ
ススチール、ニクロムなどの前記金属を主体とす
る二種以上から成る合金あるいは、混合体が使用
される。
中でも、バルクの比抵抗が5×10-6オーム・cm
以下のものが好ましく、また、成型加工、粘着時
における折り曲げ、延伸の際、クラツク、脱離等
の発生を防止するため展延性の大きいものが好ま
しい。これらの点から、本発明に使用する金属薄
層(C)としては、銀、銅、金、アルミニウムおよび
これらの金属を主体とした合金が好ましく、特
に、銀および銀を主体とした合金が好ましい結果
を与える。
該金属薄板(C)の厚さは、透光性と赤外線遮断性
能を発揮させる上で重要な要素であり、本発明に
おいては、原子吸光法、放射化分析法などで測定
される重量換算膜厚で規定される。すなわち、一
定面積のフイルムの付着重量を、バルクの比重で
除した値で表わされる。本発明における金属薄層
(C)の厚さは30Åから500Åの範囲にあることが必
要である。厚さが30Å以下では、赤外線の反射率
が極めて小さくなり、また、500Å以上では可視
光線の透過率が著しく減少するため好ましくな
い。必要とする金属の最適な厚さは、使用する材
料によつて若干異なるが、好ましくは50Åから
300Åの範囲であり、特に好ましくは、80Åから
200Åの範囲である。前記の銀および銀を主体と
する合金の場合には、80Åから200Åの範囲が最
も好ましい。
金属薄板(C)を形成する方法としては、例えば真
空蒸着、スパツタリング、イオンプレーテイン
グ、メツキ、化学蒸着、熱分解などの方法が用い
られる。中でも、有機重合体フイルム(A)あるいは
透光性薄層(B)の広い面積全体にわたつて、均一か
つ高速で金属薄層(C)を形成するためには、真空蒸
着とスパツタリング法が適しており、また、膜の
密着性と、合金材料の組成制御の点では、スパツ
タリング法が最も適している。
本発明において、厚さ0.02μ〜0.3μの金属化合
物を含む透光性薄層(B)は、Bを構成する金属化合
物中の全金属元素の60モル%以上がZrとSiとから
なり、かつZr/Siのモル比率が80/20〜20/80の
範囲にあることが必要である。上記構成要件にお
いて、全金属元素中でZrとSiの和が60モル%以上
に達しないと、反射防止効果が不十分であつた
り、機械的性質が不十分であつたり、なかんづ
く、耐光性、耐候性や耐熱性がそこなわれること
になり好ましくない。また上記構成において、
Zr/Siのモル比率が80/20以上であると、得られ
る膜はもろくなり、接着性が悪くなる結果、耐摩
耗性の乏しい膜となる。逆に、Zr/Siのモル比率
が20/80以下であると、紫外線照射時の変色、あ
るいは赤外線反射率の低下をひきおこしたり、耐
候性や耐熱性の悪い膜となり、長期間の使用に耐
えない膜となるため好ましくない。
本発明において、上記B中の60重量%以上がジ
ルコニウム、ケイ素、および酸素の和で占められ
ていることが、Bの特性の点からも、また、本発
明の積層フイルムの特性の点からも好ましい。B
中の40重量%未満であれば、ケイ素やジルコニウ
ム以外の金属元素、例えば、チタン、亜鉛、カド
ミウムなどや、非金属元素あるいは有機物が含ま
れていても良い。本発明において、上記Bは可視
光線の透過率が60%以上であることが好ましく、
特に好ましくは、80%以上であることが本発明の
目的達成のためにより有効である。
本発明において、上記Bの厚さは0.02〜0.3μで
あることが、可視光線の高い透過特性と赤外線の
高い反射特性の面から好ましく、特に好ましくは
0.03〜0.09μの厚さが本発明の目的には有効であ
る。
上記透光性薄層(B)を積層するには、Bの組成に
あるものを、スパツタリングなどの真空薄膜形成
方法によつて積層してもよいし、最終的に上記B
を形成する原料もしくは中間体を、真空蒸着スパ
ツタリングあるいはコーテイングなどの方法で塗
工し、ついで重合、縮合、酸化その他の反応を行
なつて、上記Bの組成にしてもよい、たとえば、
一般式ZrXl(OR)4-l〔Rは炭素数1〜6のアルキ
ル基、Xはβ−ジケトン系化合物もしくはβ−ケ
トエステル系化合物である。lは0から4の整数
である。)で示されるジルコニウム化合物の1種
類以上と、一般式SiYl(OR)4-l〔Rは炭素数1〜
6のアルキル基、Yは炭素数1〜6のアルキル
基、もしくはハロゲン化アルキル基、フエニル
基、ビニル基、グリシドキシ基。lは0〜2の整
数)で示されるケイ素化合物の1種類以上との混
合物もしくは、それらの加水分解された混合物
を、上記AもしくはA/Bの積層物上にコーテイ
ングし、これを加熱反応・乾燥せしめ一種の重縮
合反応を行なわしめることによつて得ることがで
きる。この場合の混合組成において、最終的に得
られる組成が、上記Bの条件を満足する範囲内
で、必要に応じて他の材料、中間体あるいは添加
剤が添加されていてもよい。
上記一般式で示されるジルコニウム化合物とケ
イ素化合物の代表例としては、次のようなものが
あるが、本発明に有効なものは、これらのみに限
定されるものではない。
すなわち、ケイ素化合物としては、例えば、テ
トラブトキシシラン、テトラエトキシシラン、メ
チルトリメトキシシラン、メチルトリエトキシシ
ラン、メチルトリブトキシシラン、ビニルトリメ
トキシシラン、γ−メタクリロキシプロピルトリ
メトキシシラン、フエニルトリメトキシシラン、
γ−グリシドキシプロピルトリメトキシシラン、
γ−メルカプトトリメトキシシラン、N−βアミ
ノエチルプロピルトリメトキシシラン、γ−グリ
シドキシプロピルメチルジエトキシシランなどが
あり、ジルコニウム化合物としては、例えば、ア
セチルアセトンジルコニウム塩、ジルコニウムテ
トラアルコキシド(テトラブチルジルコネート、
テトラプロピルジルコネートなど)ジルコニウム
−トリアルコキシ−モノアルキルアセトアセテー
ト(ジルコニウム−トリブトキシ−モノエチルア
セトアセテートなど)、ジルコニウム−ジアルコ
キシ−ジアルキルアセトアセテート、ジルコニウ
ム−モノアルコキシ−トリアルキルアセトアセテ
ート(ジルコニウム−モノブトキシ−トリエチル
アセトアセテートなど)ジルコニウムアルキルア
セチルアセトネート化化合物などがある。
また、ジルコニウムとケイ素の混合物あるいは
合金を、酸素を含む減圧下にて原子状あるいは分
子状に析出させる、いわゆる反応性蒸着あるいは
反応性スパツタリングによつても所望の膜を得る
ことができる。
本発明による積層フイルムは、可視光線の透過
率が高く、赤外線の反射率が高いという特性を有
し、しかも、耐光性、耐候性、耐熱性にすぐれ、
可撓性、接着性にすぐれた性能を有する。
一般に、金属薄膜の反射防止層としては、屈折
率が2.0以上の酸化チタンや酸化亜鉛が有効であ
るとされており、逆に酸化ケイ素のごとく屈折率
の低いものは、金属薄膜の反射防止膜としては不
適当なものとされている。これは理論的にも裏付
けられているところである。しかるに、本発明者
らの検討によつて酸化ケイ素などケイ素化合物を
単独で用いないでジルコニウム化合物との併用系
にすると、Zr/Siのモル比率が20/80の如く、ケ
イ素化合物が主体であつても、可視光線の大幅な
反射防止により、赤外線反射率をあまり低下させ
ることなく、可視光線透過率を大幅に向上させる
ことができることが、本発明の基盤になつてい
る。また、ジコニウム化合物を一定量以上含有す
ることにより、紫外線に対する耐光線や耐候性を
向上させることができ、ジルコニウム化合物とケ
イ素化合物の混合系を用いることにより、耐熱性
をも向上できることが本発明のもう一つの基盤と
なつている。
本発明の積層フイルムは、有機重合体フイルム
(A)、透光性薄層(B)および金属薄層(C)とが、A/
C/B/の順に積層構成されるが、さらにA/
B/C/Bの構成をとることにより一層耐久性を
向上させることができる。
また、本発明の積層体の表面あるいは裏面に、
本発明の目的とする効果を損わない範囲で、他の
層、例えば、保護層、紫外線吸収層、表面硬度化
層、結露防止層などを積層することは適宜行なわ
れて良い。また、本発明の有機重合体フイルム(A)
や透光性薄層(B)に金属薄層を付着形成するに先だ
ち、公知の表面処理例えば、EC処理、プラズマ
処理、粗面化処理、逆スパツタリング処理、エツ
チング処理などを行なうことも採用されて良い。
本発明による積層フイルムの主な用途例として
は、紫外線や高温にさらされることの多い目照調
整フイルム、保温、保冷フイルム、作業用面体等
として、フイルム単独あるいは、ガラス、プラス
チツク板に積層して用いられるほか、金属薄層の
電気伝導性を利用して、静電気、電磁波の遮蔽、
透明発熱体、デイスプレー用電極などへの利用も
可能である。
以下、本発明の具体的実施態様を実施例で示
す。なお、実施例中に示した各測定方法は下記の
ものである。
光線透過率:日立製作所製、分光光度計323型で
測定。波長550nmでの測定値で示す。
赤外線反射率:日立製作所製、分光光度計323型
で測定、波長1700nmでの測定値で示す。
耐摩耗性:大栄科学精器製作所製、JIS、L0823
に基く摩耗堅牢度試験器にて測定、荷重500g
にて、膜の脱離が発生するまでの摩擦回数で示
す。
金属膜厚:原子吸光法による重量換算膜厚。
透光性薄層の厚さ:超薄切片を透過型電子顕微鏡
で観察した幾何学的膜厚。
透光性薄層の組成:国際電気(株)製X線光分光測定
装置(ESCA)、ES−200を用いて測定した。
ジルコニウム、硅素、酸素の総重量率およびジ
ルコニウムと硅素の組成比は、検出される元素
の測定値を、ESCAの検出感度で補正して算出
する。
表面電気抵抗:幅35mmのフイルムを、電極間隔35
mmの銅製電極を用いて、荷重500gにて測定し
た値。測定単位は、オーム/口(スクエア)で
示す。
耐光線:紫外線フエードメーター(東京芝浦電気
(株)製、水銀ランプH−400F)使用。800時間照
射後の赤外線反射率の保持率。
耐候性:サンシヤインカーボンウエザーメータ
(スガ試験器(株)製)使用。500時間照射後の赤外
線反射率の保持率。
耐熱性:循環式熱風オーブン(タバイ製作所(株)
製)使用。80℃、720時間保持後の赤外線反射
率保持率。
実施例1〜7、比較例1〜5
光線透過率87%、厚さ25μの二軸延伸ポリエチ
レンテレフタレートフイルムの上に、スパツリン
グ法にて厚さ120Åの銀薄層を設けた。
スパツタリングはマグネトロン方式にて5×
10-3トールのアルゴン圧力下で、純度99.9%の銀
製ターゲツトに550Vの直流電圧を印加して行な
つた。得られた銀膜の表面電気抵抗値は9オー
ム/口であつた。
次いで、銀薄層上にジルコニウム化合物と硅素
化合物より成る透光性薄層を形成し、選択光透過
性を有する積層フイルムを得た。
透光性薄層は、下記の溶液Aと溶液Bをそれぞ
れ混合比率にて混合したのち、グラビアロールコ
ータにて塗布し、140℃にて2分間乾燥・熱処理
し、厚さがそれぞれ0.05μの膜を得た。
透光性薄層中の金属元素は、ジルコニウムと硅
素からなり、該薄層中のジルコニウム、硅素、酸
素の総重量率は、表1に示される値であつた。
溶液A
トリブトキシジルコニウムモノエチルアセトアセ
テート 44g
イソプロピルアルコール 593g
ブタノール 297g
トルエン 297g
溶液B
テトラブチルシリケートの加水分解処理液 52g
イソプロピルアルコール 300g
ブタノール 150g
トルエン 150g
溶液Bで用いるテトラブチルシリケートの加水
分解処理液は、ブチルシリケートの32g、エチル
アルコール16g、0.1N塩酸水溶液8.6gを混合撹
拌し、脱水処理を行なうことによつて得た。該液
の固型分濃度は12.5%であつた。
ジルコニウム化合物単体および、Zr/Siのモル
比率が80/20を上回る場合は、粉体状に白濁した
膜となり、耐摩耗性が著しく悪く、また、耐熱性
テスト後の赤外線反射率が低下した。またZr/Si
のモル比率が20/80未満となると、耐光性、耐候
性の悪い膜となり、光線透過率、赤外線反射率が
低下する結果となつた。
これらの積層フイルムの光学特性、耐摩耗性、
耐久性を測定した結果を表1に示す。
実施例 8〜10
実施例1の溶液Aのうち、トリブトキシジルコ
ニウムモノエチルアセトアセテートをテトラブチ
ルジルコニウムに置きかえた以外は、実施例1と
同様にして、Zr/Siのモル比率がそれぞれ70/
30、50/50、30/70の組成比でジルコニウム、硅
素、酸素の総重量率がそれぞれ95、96、96%の透
光性薄層を有する積層フイルムを得た。それぞれ
の膜の光線透過率は75、75、74%で、赤外線反射
率は78、78、79%であつた。紫外線フエードメー
タによる耐光性試験後の赤外線反射率の保持率
は、それぞれ80、80、85%であつた。また、耐摩
耗性はいずれも100回以上と良好であつた。
比較例 6
実施例1で用いた、銀被着ポリエチレンテレフ
タレートフイルム上に、テトラブチルチタネート
3部と、テトラブチルシリケートの加水分解処理
液から主として成るコーテイング液(実施例1の
溶液B)97部とから成る溶液をワイヤーバーで塗
布し、140℃にて2分間乾燥して透光性薄層を設
けた。
得られたフイルムの光線透過率は70%、赤外線
反射率は75%であつた。このフイルムの紫外線照
射による耐光性試験後赤外線反射率保持率は20%
で、変色を起し、透光性薄層が白化した。
実施例 11
光線透過率87%、厚さ25μの二軸延伸ポリエチ
レンテレフタレートフイルムの上に、スパツタリ
ング法により銀と金の重量比が2:1の膜を付着
させた。金属膜の厚さは100Å、表面電気抵抗は
14オーム/口、光線透過率は63%、赤外線反射率
は77%であつた。
この上に、酸化ジルコニウムと酸化ケイ素の混
合した、厚さ0.045μの透光性薄層をスパツタリン
グ法により形成した。スパツタリングは、ジルコ
ニウムとケイ素のターゲツトをカソード上に分配
配置し、アルゴン、酸素、窒素の混合ガス(混合
比、40:12:48体積%)を導入して行なつた。得
られた膜のZr/Siモル比は、原子吸光法により
55/45であることを確認した。
FSCAによる測定では、透光性薄層は、ジルコ
ニウム、硅素、酸素から構成されていた。
この積層フイルムの光線透過率は83%、赤外線
反射率は76%であつた。耐摩耗性は、100回摩耗
後も変化がなく、また、耐光性試験、耐熱性試験
後も初期の光学特性を維持した。
サンシヤインウエーザーメータによる耐候性試
験後の赤外線反射率保持率も80%と良好であつ
た。
実施例 12〜16
光線透過率87%、厚さ38μの二軸延伸ポリエチ
レンテレフタレートフイルムの上に、スパツタリ
ング法により、金、パラジウム、アルミニウム、
銀−アルミニウム合金(重量比10/1)の金属薄
膜をそれぞれ作製した。
これらの金属薄膜上に、実施例1で用いた溶液
Aおよび溶液Bを、Zr/Siのモル比率のが50/50
となるよう調合した混合液を、ワイヤーバーで塗
布し、140℃にて2分間乾燥して、厚さ0.06μの均
一かつ透明な透光性薄層を設けた。
透光性薄層中の金属元素は、ジルコニウムと硅
素であり、ジルコニウム、硅素、酸素の総重量率
は97%であつた。
得られた積層フイルムの膜厚、光学特性、耐摩
耗性、耐久性を測定し、表2に示す結果を得た。
実施例 17
実施例4で得られた積層フイルムの透光性薄膜
層側に、厚さ15μの二軸延伸されたポリプロピレ
ンフイルムを接着積層した。このフイルムの光線
透過率は、68%、赤外線反射率は72%であつた。
耐光性、耐候性、耐熱性試験後の赤外線反射率保
持率は85%、80%、90%であつた。
[Industrial Application Field] The present invention relates to a laminated film that transmits visible light and reflects infrared rays and has selective light transmittance. A preferred embodiment of the present invention is a laminated film that blocks infrared rays and has sufficient transparency for visible rays when attached to a window or facepiece. Such laminated films are not only useful for protecting the human body, especially the face, during high-temperature work such as welding, melting, and firefighting, but also for protecting buildings,
Of the sunlight that enters through the glass windows of containers, vehicles, etc., it blocks infrared rays without interfering with visible rays, and is effective in improving cooling and heating effects. In addition, we also provide thermal insulation, freezing, and
It can also be widely used for cold storage in refrigerated cases and for preventing heat radiation from the windows of solar collectors. [Prior art] Conventionally, aluminum, aluminum,
Laminated films are known in which thin layers of metals such as silver, copper, and gold are vacuum-deposited. These laminated films are
In order to prevent scratches, contamination, and oxidation of the thin metal layer, the metal surface is usually coated with an organic polymer protective layer having a thickness of 1 to 100 microns. The infrared reflectance of such a laminated film depends on the thickness of the metal layer, and in order to obtain a high infrared reflectance, it is necessary to make the metal layer sufficiently thick. As a result, if an attempt is made to increase the infrared ray blocking effect, the visible ray transmittance will be significantly reduced, resulting in insufficient lighting and unclear recognition of objects. Also, if you try to increase the infrared reflectance,
At the same time, the reflectance of visible light increases, resulting in unpleasant reflected light being emitted outdoors. In order to improve this problem, the surface of the thin metal layer is coated with an inorganic derivative with a high refractive index, such as titanium oxide, bismuth oxide, or zinc sulfide, to a thickness of several hundred angstroms. A method of improving transparency by preventing reflection is known. As a method for depositing these inorganic dielectrics on the surface of a metal thin layer, physical film forming methods such as vacuum evaporation and sputtering, or chemical film forming methods such as solution coating and chemical vapor deposition are used. However, when the single metal compound mentioned above is used as an antireflection coating in the form of a large-area film, the coating has poor abrasion resistance, lacks flexibility, and easily peels off from the substrate due to friction or bending. It had some drawbacks, such as being easy to use. Additionally, in order to improve these mechanical properties, attempts have been made to incorporate organic substances into the coating film using organic titanates or organic silicates as raw materials, but these efforts lack light resistance to ultraviolet light, weather resistance, and heat resistance. I had a problem with it getting worse. Particularly in order to obtain a large-area film at low cost, it is necessary to form the film at high speed, but the faster the film formation speed, the more the above-mentioned drawbacks become more pronounced. [Problems to be Solved by the Invention] The present inventors have created an antireflection film that does not have these drawbacks. High transmittance of visible light,
As a result of intensive studies to obtain a laminated film with a high reflectance of infrared rays, the present invention was arrived at. That is, an object of the present invention is to provide a laminated film having a high visible light transmittance and a high infrared reflectance, which has an antireflection film having excellent abrasion resistance, light resistance, and heat resistance. [Means for Solving the Problems] This purpose is to provide a transparent thin layer (B) containing a metal compound with a thickness of 0.02μ to 0.3μ on at least one side of the organic polymer film (A); The metal thin layer (C) with a thickness of 30 Å to 500 Å is A/C/B or A/B/
In the film laminated in the order of C/B, 60% by weight or more of the transparent thin layer (B) is zirconium (Zr),
Consisting of silicon (Si) and oxygen, 60 mol% or more of the metal elements in B are composed of Zr and Si, and
This is achieved by a laminated film characterized in that the molar ratio of Zr/Si is in the range of 80/20 to 20/80. The organic polymer film (A) used in the present invention has a thickness of 6μ to 1000μ, preferably 9μ to 1000μ.
125μ, flexible, wavelength 400n
Light transmittance from m to 2000nm is 40% or more,
Preferably, it has a characteristic of 70% or more.
For example, polyesters such as polyethylene terephthalate, polybutylene terephthalate, and polyethylene naphthalate, polyolefins such as polyethylene and polypropylene, polyamides such as nylon 6, nylon 66, and nylon 12, polycarbonate, polymethyl acrylate, polyvinyl chloride, polyvinylidene chloride, and polysulfon. , polyphenylene sulfide, polyphenylene oxide, polyether sulfone, polyacrylonitrile, polytetrafluoroethylene, polyamideimide, polyimide, polyvinyl alcohol,
Examples include cellulose acetate. These may be used as a homopolymer, or may be a copolymer or a mixture of two or more of them. Further, the organic polymer film (A) may be biaxially stretched or uniaxially stretched. moreover,
Depending on the purpose, these organic polymer films (A) may contain ultraviolet absorbers, antioxidants, anti-aging agents,
Additives such as colorants, plasticizers, stabilizers, antistatic agents and the like may be added as appropriate. Among them, organic polymer films (A) suitable for exhibiting the effects of the present invention include biaxially oriented polyethylene terephthalate, biaxially oriented polypropylene, biaxially oriented polyamide, polycarbonate, and polymethyl acrylate. , polyimide film. The metal useful for the metal thin layer (C) in the present invention preferably has a bulk resistivity of 10 -4 ohm cm or less, such as aluminum, copper, silver, gold,
Metals such as tin, zinc, iron, nickel, cobalt, palladium, titanium, zirconium, chromium, etc., or metals mainly composed of the above metals such as duralumin, sterling silver, brass, bronze, white gold, stainless steel, nichrome, etc. Alloys or mixtures of more than one species are used. Among them, the bulk resistivity is 5×10 -6 ohm・cm
The following are preferred, and those with high malleability are preferred in order to prevent occurrence of cracks, detachment, etc. during molding, bending during adhesion, and stretching. From these points, the thin metal layer (C) used in the present invention is preferably silver, copper, gold, aluminum, or alloys mainly composed of these metals, and particularly preferably silver and alloys mainly composed of silver. Give results. The thickness of the thin metal plate (C) is an important factor in exhibiting light transmittance and infrared blocking performance, and in the present invention, the thickness of the thin metal plate (C) is determined by Defined by thickness. That is, it is expressed as a value obtained by dividing the weight of a film attached to a certain area by the specific gravity of the bulk. Metal thin layer in the present invention
The thickness of (C) needs to be in the range of 30 Å to 500 Å. If the thickness is less than 30 Å, the reflectance of infrared rays will be extremely small, and if it is more than 500 Å, the transmittance of visible light will be significantly reduced, which is not preferable. The optimal thickness of metal required varies slightly depending on the material used, but is preferably from 50 Å.
300 Å, particularly preferably from 80 Å
It is in the range of 200 Å. In the case of the silver and silver-based alloys mentioned above, a range of 80 Å to 200 Å is most preferred. Examples of methods for forming the thin metal plate (C) include vacuum deposition, sputtering, ion plating, plating, chemical vapor deposition, and thermal decomposition. Among them, vacuum evaporation and sputtering methods are suitable for uniformly and rapidly forming a thin metal layer (C) over a wide area of an organic polymer film (A) or a transparent thin layer (B). In addition, sputtering is the most suitable method in terms of film adhesion and composition control of the alloy material. In the present invention, the transparent thin layer (B) containing a metal compound with a thickness of 0.02μ to 0.3μ is composed of Zr and Si, in which 60 mol% or more of the total metal elements in the metal compound constituting B, Moreover, it is necessary that the molar ratio of Zr/Si is in the range of 80/20 to 20/80. In the above structural requirements, if the sum of Zr and Si in all metal elements does not reach 60 mol% or more, the antireflection effect or mechanical properties may be insufficient, especially light resistance. This is not preferable since weather resistance and heat resistance will be impaired. Furthermore, in the above configuration,
When the Zr/Si molar ratio is 80/20 or more, the resulting film becomes brittle and has poor adhesion, resulting in a film with poor wear resistance. On the other hand, if the Zr/Si molar ratio is less than 20/80, it may cause discoloration when irradiated with ultraviolet rays or a decrease in infrared reflectance, and the film may have poor weather resistance and heat resistance, making it difficult to withstand long-term use. This is not preferable because it results in a film that is opaque. In the present invention, the sum of zirconium, silicon, and oxygen accounts for 60% by weight or more of B, both from the viewpoint of the characteristics of B and from the viewpoint of the characteristics of the laminated film of the present invention. preferable. B
Metal elements other than silicon and zirconium, such as titanium, zinc, cadmium, etc., non-metallic elements, or organic substances may be included as long as the amount is less than 40% by weight. In the present invention, the above B preferably has a visible light transmittance of 60% or more,
Particularly preferably, it is 80% or more, which is more effective in achieving the object of the present invention. In the present invention, the thickness of the above-mentioned B is preferably 0.02 to 0.3μ from the viewpoint of high transmission characteristics of visible light and high reflection characteristics of infrared rays, and particularly preferably.
Thicknesses of 0.03 to 0.09 microns are useful for purposes of this invention. In order to laminate the above-mentioned light-transmitting thin layer (B), materials having the composition of B may be laminated by a vacuum thin film forming method such as sputtering, or finally the above-mentioned B
The composition B may be obtained by applying the raw material or intermediate forming the composition by vacuum deposition sputtering or coating, and then subjecting it to polymerization, condensation, oxidation, or other reactions.For example,
General formula ZrX l (OR) 4-l [R is an alkyl group having 1 to 6 carbon atoms, and X is a β-diketone compound or a β-ketoester compound. l is an integer from 0 to 4. ) and one or more zirconium compounds represented by the general formula SiY l (OR) 4-l [R is 1 to 1 carbon number]
6, Y is an alkyl group having 1 to 6 carbon atoms, or a halogenated alkyl group, a phenyl group, a vinyl group, or a glycidoxy group. (l is an integer of 0 to 2) or a hydrolyzed mixture thereof is coated on the above A or A/B laminate, and this is heated and reacted. It can be obtained by drying and performing a type of polycondensation reaction. In the mixed composition in this case, other materials, intermediates, or additives may be added as necessary, as long as the finally obtained composition satisfies the condition B above. Representative examples of the zirconium compound and silicon compound represented by the above general formula include the following, but those effective in the present invention are not limited to these. That is, examples of silicon compounds include tetrabutoxysilane, tetraethoxysilane, methyltrimethoxysilane, methyltriethoxysilane, methyltributoxysilane, vinyltrimethoxysilane, γ-methacryloxypropyltrimethoxysilane, and phenyltrimethoxysilane. silane,
γ-glycidoxypropyltrimethoxysilane,
Examples of zirconium compounds include γ-mercaptotrimethoxysilane, N-βaminoethylpropyltrimethoxysilane, and γ-glycidoxypropylmethyldiethoxysilane. ,
zirconium-trialkoxy-monoalkylacetoacetate (such as zirconium-tributoxy-monoethyl acetoacetate), zirconium-dialkoxy-dialkyl acetoacetate, zirconium-monoalkoxy-trialkyl acetoacetate (zirconium-monobutoxy- zirconium alkyl acetylacetonate compounds (such as triethylacetoacetate). The desired film can also be obtained by so-called reactive vapor deposition or reactive sputtering, in which a mixture or alloy of zirconium and silicon is deposited in atomic or molecular form under reduced pressure containing oxygen. The laminated film according to the present invention has the characteristics of high transmittance of visible light and high reflectance of infrared rays, and has excellent light resistance, weather resistance, and heat resistance.
It has excellent flexibility and adhesive properties. In general, titanium oxide and zinc oxide, which have a refractive index of 2.0 or higher, are considered to be effective as anti-reflection layers for thin metal films.On the other hand, materials with low refractive indexes such as silicon oxide can be used as anti-reflection layers for thin metal films. It is considered inappropriate. This is also supported theoretically. However, the present inventors have found that when silicon compounds such as silicon oxide are not used alone but are used in combination with zirconium compounds, the molar ratio of Zr/Si is 20/80, and silicon compounds are the main component. However, the basis of the present invention is that visible light transmittance can be significantly improved by significantly preventing reflection of visible light without significantly reducing infrared reflectance. Furthermore, by containing a certain amount or more of a ziconium compound, light resistance to ultraviolet rays and weather resistance can be improved, and by using a mixed system of a zirconium compound and a silicon compound, heat resistance can also be improved. It is another foundation. The laminated film of the present invention is an organic polymer film.
(A), the transparent thin layer (B) and the metal thin layer (C) are A/
It is constructed by laminating in the order of C/B/, but further A/
By adopting the B/C/B configuration, durability can be further improved. Furthermore, on the front or back surface of the laminate of the present invention,
Other layers such as a protective layer, an ultraviolet absorbing layer, a surface hardening layer, a dew condensation prevention layer, etc. may be laminated as appropriate within a range that does not impair the intended effects of the present invention. Moreover, the organic polymer film (A) of the present invention
Prior to depositing a thin metal layer on the transparent thin layer (B), known surface treatments such as EC treatment, plasma treatment, surface roughening treatment, reverse sputtering treatment, etching treatment, etc. are also employed. It's good. The main applications of the laminated film according to the present invention are as an eye adjustment film that is often exposed to ultraviolet rays and high temperatures, a heat insulating film, a cold insulating film, a work facepiece, etc. The film can be used alone, or it can be laminated on glass or plastic plates. In addition to being used, the electrical conductivity of thin metal layers can be used to shield static electricity and electromagnetic waves.
It can also be used for transparent heating elements, display electrodes, etc. Hereinafter, specific embodiments of the present invention will be shown in Examples. The measurement methods shown in the Examples are as follows. Light transmittance: Measured with a spectrophotometer model 323 manufactured by Hitachi, Ltd. It is shown as a measured value at a wavelength of 550 nm. Infrared reflectance: Measured with a spectrophotometer model 323 manufactured by Hitachi, Ltd., and shown as a measured value at a wavelength of 1700 nm. Abrasion resistance: Manufactured by Daiei Kagaku Seiki Seisakusho, JIS, L0823
Measured with an abrasion fastness tester based on , load 500g
It is expressed as the number of frictions until the film detaches. Metal film thickness: Weight-equivalent film thickness determined by atomic absorption method. Thickness of translucent thin layer: Geometric thickness of an ultra-thin section observed with a transmission electron microscope. Composition of the transparent thin layer: Measured using an X-ray spectrometer (ESCA) manufactured by Kokusai Electric Co., Ltd., ES-200.
The total weight percentage of zirconium, silicon, and oxygen and the composition ratio of zirconium and silicon are calculated by correcting the measured value of the detected element using the detection sensitivity of ESCA. Surface electrical resistance: 35 mm wide film, electrode spacing 35
Value measured with a load of 500g using a mm copper electrode. The unit of measurement is ohm/square. Light resistance: UV fade meter (Tokyo Shibaura Electric)
Uses a mercury lamp H-400F (manufactured by Co., Ltd.). Retention rate of infrared reflectance after 800 hours of irradiation. Weather resistance: Uses Sunshine Carbon Weather Meter (manufactured by Suga Test Instruments Co., Ltd.). Retention rate of infrared reflectance after 500 hours of irradiation. Heat resistance: Circulating hot air oven (Tabai Seisakusho Co., Ltd.)
manufactured by) used. Infrared reflectance retention rate after holding at 80℃ for 720 hours. Examples 1 to 7, Comparative Examples 1 to 5 A thin silver layer with a thickness of 120 Å was provided by a sputtering method on a biaxially stretched polyethylene terephthalate film with a light transmittance of 87% and a thickness of 25 μm. Sputtering is done 5 times using magnetron method.
This was done by applying a DC voltage of 550 V to a 99.9% pure silver target under an argon pressure of 10 -3 Torr. The surface electrical resistance value of the obtained silver film was 9 ohms/mouth. Next, a light-transmitting thin layer made of a zirconium compound and a silicon compound was formed on the silver thin layer to obtain a laminated film having selective light-transmitting properties. The transparent thin layer was prepared by mixing the following solutions A and B at the respective mixing ratios, then applying the mixture using a gravure roll coater, drying and heat treating at 140°C for 2 minutes, and forming a layer with a thickness of 0.05 μm. A membrane was obtained. The metal elements in the light-transmitting thin layer consisted of zirconium and silicon, and the total weight percentages of zirconium, silicon, and oxygen in the thin layer were the values shown in Table 1. Solution A Tributoxyzirconium monoethyl acetoacetate 44g Isopropyl alcohol 593g Butanol 297g Toluene 297g Solution B Tetrabutyl silicate hydrolysis solution 52g Isopropyl alcohol 300g Butanol 150g Toluene 150g The tetrabutyl silicate hydrolysis solution used in Solution B contains butyl It was obtained by mixing and stirring 32 g of silicate, 16 g of ethyl alcohol, and 8.6 g of 0.1N aqueous hydrochloric acid solution, and performing a dehydration treatment. The solid content concentration of the liquid was 12.5%. When the zirconium compound alone and the molar ratio of Zr/Si exceeded 80/20, the film became powdery and cloudy, the abrasion resistance was extremely poor, and the infrared reflectance after the heat resistance test was reduced. Also Zr/Si
When the molar ratio was less than 20/80, the film had poor light resistance and weather resistance, resulting in decreased light transmittance and infrared reflectance. The optical properties, abrasion resistance,
Table 1 shows the results of measuring durability. Examples 8 to 10 In the same manner as in Example 1, except that tributoxyzirconium monoethyl acetoacetate in solution A of Example 1 was replaced with tetrabutylzirconium, the molar ratio of Zr/Si was 70/1, respectively.
Laminated films having transparent thin layers with composition ratios of 30, 50/50, and 30/70 and total weight percentages of zirconium, silicon, and oxygen of 95, 96, and 96%, respectively, were obtained. The light transmittance of each film was 75, 75, and 74%, and the infrared reflectance was 78, 78, and 79%. The retention rates of infrared reflectance after the light resistance test using an ultraviolet fade meter were 80, 80, and 85%, respectively. In addition, the abrasion resistance was good at 100 times or more in all cases. Comparative Example 6 On the silver-coated polyethylene terephthalate film used in Example 1, 3 parts of tetrabutyl titanate and 97 parts of a coating solution (solution B of Example 1) mainly consisting of a hydrolyzed solution of tetrabutyl silicate were applied. A solution consisting of was applied with a wire bar and dried at 140°C for 2 minutes to provide a thin translucent layer. The resulting film had a light transmittance of 70% and an infrared reflectance of 75%. This film has an infrared reflectance retention rate of 20% after a light resistance test using ultraviolet irradiation.
However, discoloration occurred and the transparent thin layer turned white. Example 11 On a biaxially stretched polyethylene terephthalate film having a light transmittance of 87% and a thickness of 25 μm, a film having a weight ratio of silver and gold of 2:1 was deposited by a sputtering method. The thickness of the metal film is 100 Å, and the surface electrical resistance is
14 ohms/mouth, light transmittance was 63%, and infrared reflectance was 77%. On top of this, a 0.045 μm thick translucent thin layer containing a mixture of zirconium oxide and silicon oxide was formed by sputtering. Sputtering was performed by distributing zirconium and silicon targets on the cathode and introducing a mixed gas of argon, oxygen, and nitrogen (mixing ratio: 40:12:48% by volume). The Zr/Si molar ratio of the obtained film was determined by atomic absorption method.
I confirmed that it was 55/45. As measured by FSCA, the transparent thin layer was composed of zirconium, silicon, and oxygen. This laminated film had a light transmittance of 83% and an infrared reflectance of 76%. The abrasion resistance did not change even after being abraded 100 times, and the initial optical properties were maintained even after the light resistance test and the heat resistance test. The infrared reflectance retention rate after a weather resistance test using a sunshine inweather meter was also good at 80%. Examples 12 to 16 Gold, palladium, aluminum,
Metal thin films of silver-aluminum alloy (weight ratio 10/1) were each produced. Solution A and solution B used in Example 1 were applied onto these metal thin films at a Zr/Si molar ratio of 50/50.
A mixed solution prepared as follows was applied with a wire bar and dried at 140°C for 2 minutes to form a uniform transparent light-transmitting thin layer with a thickness of 0.06 μm. The metal elements in the transparent thin layer were zirconium and silicon, and the total weight percentage of zirconium, silicon, and oxygen was 97%. The film thickness, optical properties, abrasion resistance, and durability of the obtained laminated film were measured, and the results shown in Table 2 were obtained. Example 17 A biaxially stretched polypropylene film having a thickness of 15 μm was adhesively laminated on the transparent thin film layer side of the laminated film obtained in Example 4. The light transmittance of this film was 68%, and the infrared reflectance was 72%.
The infrared reflectance retention rates after light resistance, weather resistance, and heat resistance tests were 85%, 80%, and 90%.
【表】【table】
Claims (1)
に、厚さ0.02μから0.3μの金属化合物を含む透光
性薄層(B)と、厚さ30Åから500Åの金属薄層(C)と
が、A/C/BまたはA/B/C/Bの順に積層
されたフイルムにおいて、透光性薄層(B)の60重量
%以上がジルコニウム(Zr)、ケイ素(Si)およ
び酸素からなり、該B中の金属元素の60モル%以
上がZrとSiとから成り、かつ、Zr/Siのモル比率
が80/20から20/80の範囲にあることを特徴とす
る積層フイルム。1. On at least one side of the organic polymer film (A), a transparent thin layer (B) containing a metal compound with a thickness of 0.02 μ to 0.3 μ and a thin metal layer (C) with a thickness of 30 Å to 500 Å. However, in a film laminated in the order of A/C/B or A/B/C/B, 60% by weight or more of the transparent thin layer (B) consists of zirconium (Zr), silicon (Si) and oxygen. , a laminated film characterized in that 60 mol% or more of the metal elements in B are composed of Zr and Si, and the molar ratio of Zr/Si is in the range of 80/20 to 20/80.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29040185A JPS61167546A (en) | 1985-12-25 | 1985-12-25 | Laminated film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29040185A JPS61167546A (en) | 1985-12-25 | 1985-12-25 | Laminated film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61167546A JPS61167546A (en) | 1986-07-29 |
| JPS635263B2 true JPS635263B2 (en) | 1988-02-02 |
Family
ID=17755531
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29040185A Granted JPS61167546A (en) | 1985-12-25 | 1985-12-25 | Laminated film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61167546A (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2601546B2 (en) * | 1988-10-21 | 1997-04-16 | 旭硝子株式会社 | Method for producing glass substrate with scratch-resistant protective film |
| JP2576662B2 (en) * | 1989-03-07 | 1997-01-29 | 旭硝子株式会社 | Heat blocking glass |
| JP2576637B2 (en) * | 1989-03-07 | 1997-01-29 | 旭硝子株式会社 | Heat ray reflective glass |
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-
1985
- 1985-12-25 JP JP29040185A patent/JPS61167546A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02122958U (en) * | 1989-03-06 | 1990-10-09 | ||
| WO2004052747A1 (en) * | 2002-12-10 | 2004-06-24 | Ckd Corporation | Packaging body and foreign matter inspection method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61167546A (en) | 1986-07-29 |
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