JPS6361145B2 - - Google Patents
Info
- Publication number
- JPS6361145B2 JPS6361145B2 JP17632985A JP17632985A JPS6361145B2 JP S6361145 B2 JPS6361145 B2 JP S6361145B2 JP 17632985 A JP17632985 A JP 17632985A JP 17632985 A JP17632985 A JP 17632985A JP S6361145 B2 JPS6361145 B2 JP S6361145B2
- Authority
- JP
- Japan
- Prior art keywords
- steel strip
- ring
- diamond
- inner peripheral
- boron nitride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910000831 Steel Inorganic materials 0.000 claims description 33
- 239000010959 steel Substances 0.000 claims description 33
- 239000000463 material Substances 0.000 claims description 18
- 230000002093 peripheral effect Effects 0.000 claims description 16
- 239000000843 powder Substances 0.000 claims description 12
- 239000010432 diamond Substances 0.000 claims description 11
- 229910003460 diamond Inorganic materials 0.000 claims description 10
- 229910052582 BN Inorganic materials 0.000 claims description 8
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 8
- 238000009713 electroplating Methods 0.000 claims description 3
- 238000004070 electrodeposition Methods 0.000 claims description 2
- 238000007772 electroless plating Methods 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 238000005245 sintering Methods 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- -1 carbide Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000010437 gem Substances 0.000 description 1
- 229910001751 gemstone Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D5/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
- B24D5/12—Cut-off wheels
- B24D5/126—Cut-off wheels having an internal cutting edge
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Description
【発明の詳細な説明】
（産業上の利用分野）
この発明は、シリコン等の各種半導体材料、セ
ラミツクス、タングステン、カーバイト、宝石等
の硬質物を切断するための硬質物切断用内周刃に
関するものである。Detailed Description of the Invention (Industrial Application Field) The present invention relates to an inner peripheral blade for cutting hard materials such as various semiconductor materials such as silicon, ceramics, tungsten, carbide, and gemstones. It is something.
（従来の技術）
第４図及び第５図に示すように、従来の硬質物
切断用内周刃は、ダイヤモンド又は立方晶窒化ほ
う素の粉末１１を、外周まで一体となつた幅の広
い環状の薄い鋼板１２の内周部１３に結着し、こ
のような環状の薄い鋼板１２の外周部を太鼓の皮
を張るように張り上げ治具によつて均等な強い張
力で張り上げることにより形成されるものであ
る。(Prior Art) As shown in FIGS. 4 and 5, the conventional inner peripheral blade for cutting hard materials uses diamond or cubic boron nitride powder 11 in a wide annular shape that is integral with the outer periphery. The ring-shaped thin steel plate 12 is bound to the inner peripheral part 13 of the thin steel plate 12, and the outer peripheral part of such an annular thin steel plate 12 is stretched with uniform strong tension using a tensioning jig, like stretching the skin of a drum. It is something.
（発明が解決しようとする問題点）
このような従来技術のよれば、例えば、半導体
材料として最近大量に生産されているシリコン単
結晶の外径が８インチ（203.2φ）以下であれば、
これを何とか精度良く高能率にしかも歩留り良く
切断することができるのであるが、上記シリコン
単結晶の外径が８〜12インチにもなると、内周刃
の外径が650〜950mmにも大きくなり、薄い鋼板の
素材の入手が非常に困難になる。(Problems to be Solved by the Invention) According to such conventional technology, for example, if the outer diameter of silicon single crystal, which has recently been produced in large quantities as a semiconductor material, is 8 inches (203.2φ) or less,
It is possible to cut this with high precision, high efficiency, and high yield, but when the outer diameter of the silicon single crystal becomes 8 to 12 inches, the outer diameter of the inner peripheral blade increases to 650 to 950 mm. , it becomes extremely difficult to obtain materials for thin steel sheets.
600mmφまでは0.1mm位の薄い鋼板としてはステ
ンレス鋼が豊富にあるが、650mmφを取れる素材
の入手は非常に困難で、あつたとしても厚みが
0.15mm以上と厚くなる。しかも材質が焼入れでき
ないステンレスのSUS304しかないので引張強度
も75Kg／mm2と小さく、張り上げ時の強度も弱く又
伸びも大きいため、楕円になり、回転中に真円度
が必要な高精密切断では、偏摩耗が発生して耐久
性は勿論のこと、切断精度が著しく悪くなる。 Stainless steel is plentiful as a thin steel plate of about 0.1mm up to 600mmφ, but it is very difficult to obtain material that can be used for 650mmφ, and even if it is, it is not thick enough.
It becomes thicker than 0.15mm. Moreover, since the material is only stainless steel SUS304 that cannot be quenched, its tensile strength is low at 75 kg/mm 2 , and the strength when tensioned is weak and elongation is large, resulting in an oval shape, which is not suitable for high-precision cutting that requires roundness during rotation. , uneven wear occurs, which significantly deteriorates not only durability but also cutting accuracy.
このため、シリコンの材料歩留りを犠牲にし
て、ステンレス鋼板の厚さを0.15mm以上にして強
度を持たせるので、ダイヤ等の結着部の厚さも
0.32mm以上となるのが現状である。６インチ
（152.4φ）までのシリコン単結晶は、刃厚が0.22
mmの内周刃で切断しているので、材料歩留りは50
％も悪くなる。 For this reason, the thickness of the stainless steel plate is increased to 0.15 mm or more to provide strength at the expense of silicon material yield, so the thickness of the bonding parts such as diamonds can be reduced.
The current situation is that it is 0.32 mm or more. Silicon single crystal up to 6 inches (152.4φ) has a blade thickness of 0.22
The material yield is 50 mm because the cutting is done with an internal peripheral blade of 50 mm.
% also gets worse.
（問題点を解決するための手段）
この発明は、このような従来技術の問題点を解
決するためになされたものであり、この発明によ
ればダイヤモンド又は立方晶窒化ほう素の粉末を
薄い鋼帯の折り返し部の外側に結着し、このよう
な鋼帯を薄いリングの内径側に引掛けるようにし
て上記リングの外側に向けて放射状に多数配列
し、これらの鋼帯のそれぞれの外端部をピン等に
より環状枠に連結して張り上げ治具によつて均等
な強い張力で張り上げることにより形成した硬質
物切断用内周刃が提供される。(Means for Solving the Problems) The present invention was made to solve the problems of the prior art, and according to the invention, diamond or cubic boron nitride powder is injected into thin steel. A large number of such steel strips are tied to the outside of the folded part of the band, and are arranged radially toward the outside of the thin ring so as to be hooked on the inner diameter side of the thin ring, and the outer ends of each of these steel strips are An inner circumferential blade for cutting hard materials is provided, which is formed by connecting the parts to an annular frame with pins or the like and tensioning them with uniform strong tension using a tensioning jig.
上記構成において、ダイヤモンド又は立方晶窒
化ほう素の粉末は、電気メツキ又は無電解メツキ
により電着されることにより、又は金属粉末の焼
結により、鋼帯の折り返し部に結着することがで
きるものであるが、これらに限定されるものでは
ない。 In the above configuration, the diamond or cubic boron nitride powder can be bonded to the folded portion of the steel strip by electrodeposition by electroplating or electroless plating, or by sintering the metal powder. However, it is not limited to these.
（作用） 上記の技術的手段は次の様に作用する。(effect) The above technical means works as follows.
従来の外周まで一体となつた幅の広い環状の薄
い鋼板の代りに、幅の狭い薄い鋼板即ちリングを
使用することによつて、薄い素材の入手が容易と
なり、これによつて材料の歩留りは向上し、被切
断物を精度良く高能率に切断することができるよ
うに作用する。 By using a narrow thin steel plate or ring instead of the conventional wide annular thin steel plate that is integral to the outer periphery, thin material is easily available and the material yield is reduced. It works so that the object to be cut can be cut with high precision and high efficiency.
次に、上記リングを放射状に多数配列した鋼帯
によつて張り上げることによつて、リングの内径
の真円度をよくして切断精度を向上することがで
きると共に、内周刃の耐久性を向上することがで
きるように作用する。 Next, by tensioning the ring with a large number of radially arranged steel strips, it is possible to improve the circularity of the inner diameter of the ring and improve cutting accuracy, as well as increase the durability of the inner peripheral blade. Act so that you can improve.
更に、ダイヤモンド又は立方晶窒化ほう素の粉
末は、鋼帯の折り返し部の外側に結着されてお
り、リングの内周部に結着されるものではないの
で、リングを内径の異なるものに適当に交換する
ことにより、内周刃の内径を自由に変えることが
でき、鋼帯の長さを適当に変えることにより、内
周刃の外周寸法も自由に変えることができるよう
に作用する。 Furthermore, the diamond or cubic boron nitride powder is bound to the outside of the folded part of the steel strip, and not to the inner circumference of the ring, making it suitable for rings with different inner diameters. By replacing the inner circumferential cutter, the inner diameter of the inner circumferential cutter can be freely changed, and by appropriately changing the length of the steel strip, the outer circumferential dimension of the inner circumferential cutter can also be freely changed.
更にまた、内周刃の刃の厚さも、リングを厚さ
の異なるものに適当に交換することにより自由に
調節することができ、鋼帯の厚さを適当に変える
ことによつても調節可能であるように作用する。 Furthermore, the thickness of the inner peripheral blade can be adjusted freely by appropriately replacing the ring with one of different thickness, and can also be adjusted by appropriately changing the thickness of the steel strip. It acts as if.
（実施例）
この発明の一実施例を図面について説明すれ
ば、１は幅の狭い薄い鋼板即ちリングであり、厚
さ0.05mm、内径300mm、外径320mmに仕上げられて
いる。(Embodiment) An embodiment of the present invention will be described with reference to the drawings. Reference numeral 1 is a thin steel plate with a narrow width, that is, a ring, finished with a thickness of 0.05 mm, an inner diameter of 300 mm, and an outer diameter of 320 mm.
２は厚さ0.05mm、幅10mm、長さ620mmのマルチ
エージング鋼を310mmで二つ折りにして熱処理を
行い硬度を上げ、引張強度を250Kg／mm2以上にし
た薄い鋼帯であり、この鋼帯２の折り返し部３の
外側には、先端から２mmの部分の表裏に40/60ミ
クロンのダイヤモンド微粉末４が電気メツキによ
り一層結着されている。 2 is a thin steel strip made of multi-aging steel with a thickness of 0.05 mm, width of 10 mm, and length of 620 mm, which is folded in half at 310 mm and heat treated to increase hardness and have a tensile strength of 250 Kg/mm 2 or more. On the outside of the folded portion 3 of 2, 40/60 micron fine diamond powder 4 is bonded to the front and back surfaces of the portion 2 mm from the tip by electroplating.
このようにして製作された鋼帯２90本（図面で
は16本）を上記リング１の内径側に引掛けるよう
にして放射状に配列する。 290 steel strips (16 in the drawing) thus produced are arranged radially so as to be hooked onto the inner diameter side of the ring 1.
上記鋼帯２のそれぞれの外端部には直径７mmの
小孔が設けられ、これにピン５が挿嵌されてそれ
ぞれ環状枠６に連結され、図示しない張り上げ治
具によつて均等で強力な張力で張り上げる。 A small hole with a diameter of 7 mm is provided at the outer end of each of the steel strips 2, into which a pin 5 is inserted and connected to the annular frame 6. Stretch it with tension.
これによつて、刃厚0.15mm内径300mm外径920mm
の内周刃を得ることができる。 With this, the blade thickness is 0.15 mm, the inner diameter is 300 mm, and the outer diameter is 920 mm.
It is possible to obtain an inner peripheral edge of
（発明の効果）
以上に説明したように、本発明は、幅の狭い環
状の薄い鋼板即ちリングとこのリングの外側に放
射状に多数配列された鋼帯との組合せによつて、
上記リングを均等な強い張力で張り上げることに
より形成した硬質物切断用内周刃であるから、被
切断物が相当大きなものであつても、薄い鋼板の
素材の入手が容易であり張り上げた場合の強度が
大きく真円度がよく精度が悪くならないので、製
作が容易であり精度良く耐久性よく使用すること
ができ、歩留り良く切断することができる。(Effects of the Invention) As explained above, the present invention has a combination of a narrow annular thin steel plate, that is, a ring, and a large number of steel strips arranged radially outside the ring.
The inner peripheral blade for cutting hard materials is formed by tensioning the above-mentioned ring with even and strong tension, so even if the object to be cut is quite large, thin steel plate material is easily available, and when tensioned, Since it has high strength, good roundness, and no loss of accuracy, it is easy to manufacture, can be used with high precision and durability, and can be cut with a high yield.
次に、ダイヤモンド又は立方晶窒化ほう素の粉
末が、鋼帯の折り返し部の外側に結着されており
リングの内周部に結着されるものではないので、
リングを内径の異なるものに適当に交換すること
により内周刃の内径を自由に変えることができ、
鋼帯の長さを適当に変えることにより、内周刃の
外周寸法も自由に変えることができる。 Next, since the diamond or cubic boron nitride powder is bound to the outside of the folded part of the steel strip and not to the inner circumference of the ring,
By appropriately replacing the ring with one with a different inner diameter, the inner diameter of the inner peripheral blade can be changed freely.
By appropriately changing the length of the steel strip, the outer circumferential dimension of the inner peripheral cutter can also be changed freely.
更にまた、内周刃の刃の厚さも、リングを厚さ
の異なるものに適当に交換したり鋼帯の厚さを適
当にかえることによつて、自由に調節することが
できる。 Furthermore, the thickness of the inner peripheral cutter can be freely adjusted by appropriately replacing the ring with one having a different thickness or by appropriately changing the thickness of the steel strip.
第１図ないし第３図はこの発明による硬質物切
断用内周刃の一実施例を示すものであり、第１図
はその平面図、第２図は第１図のＡ−Ａ線拡大断
面図、第３図は第１図の要部拡大図、第４図ない
し第５図は従来の硬質物切断用内周刃を示すもの
であり、第４図はその平面図、第５図は第４図の
Ａ−Ａ線断面図である。
図面において、１は薄いリング、２は薄い鋼
帯、３は折り返し部、４はダイヤモンド粉末、５
はピン、６は環状枠を示す。
1 to 3 show an embodiment of the inner peripheral blade for cutting hard materials according to the present invention, FIG. 1 is a plan view thereof, and FIG. 2 is an enlarged cross section taken along line A-A in FIG. 1. Figures 3 and 3 are enlarged views of the main parts of Figure 1, Figures 4 and 5 show conventional internal blades for cutting hard materials, Figure 4 is a plan view thereof, and Figure 5 is an enlarged view of the main part of Figure 1. FIG. 5 is a sectional view taken along line A-A in FIG. 4; In the drawing, 1 is a thin ring, 2 is a thin steel strip, 3 is a folded part, 4 is a diamond powder, 5
indicates a pin, and 6 indicates an annular frame.
Claims (1)
薄い鋼帯の折り返し部の外側に結着し、このよう
な鋼帯を薄いリングの内径側に引掛けるようにし
て上記リングの外側に向けて放射状に多数配列
し、これらの鋼帯のそれぞれの外端部をピン等に
より環状枠に連結して張り上げ治具によつて均等
な強い張力で張り上げることにより形成した硬質
物切断用内周刃。 ２ ダイヤモンド又は立方晶窒化ほう素の粉末
が、電気メツキ又は無電解メツキによつて電着さ
れることにより鋼帯の折り返し部に結着されるも
のであることを特徴とする特許請求の範囲第１項
記載の硬質物切断用内周刃。 ３ ダイヤモンド又は立方晶窒化ほう素の粉末
が、金属粉末の焼結により鋼帯の折り返し部に結
着されるものであることを特徴とする特許請求の
範囲第１項記載の硬質物切断用内周刃。[Claims] 1. Diamond or cubic boron nitride powder is bound to the outside of the folded part of a thin steel strip, and such a steel strip is hung on the inner diameter side of the thin ring to form the ring. For cutting hard materials formed by arranging a large number of steel strips radially outward, connecting the outer ends of each of these steel strips to an annular frame with pins, etc., and tensioning them with uniform strong tension using a tensioning jig. Inner peripheral blade. 2. Claim No. 2, characterized in that diamond or cubic boron nitride powder is bonded to the folded portion of the steel strip by electrodeposition by electroplating or electroless plating. The inner peripheral blade for cutting hard materials according to item 1. 3. The hard material cutting tool according to claim 1, wherein diamond or cubic boron nitride powder is bonded to the folded portion of the steel strip by sintering the metal powder. Surrounding blade.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17632985A JPS6239182A (en) | 1985-08-09 | 1985-08-09 | Inner peripheral cutting edge for cutting hard material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17632985A JPS6239182A (en) | 1985-08-09 | 1985-08-09 | Inner peripheral cutting edge for cutting hard material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6239182A JPS6239182A (en) | 1987-02-20 |
| JPS6361145B2 true JPS6361145B2 (en) | 1988-11-28 |
Family
ID=16011684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17632985A Granted JPS6239182A (en) | 1985-08-09 | 1985-08-09 | Inner peripheral cutting edge for cutting hard material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6239182A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0332446U (en) * | 1989-08-08 | 1991-03-29 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63295182A (en) * | 1987-05-26 | 1988-12-01 | Hiroshi Kajitani | Cushion grinding wheel and grinding roll |
| KR940010978B1 (en) * | 1988-08-12 | 1994-11-21 | 갈소니꾸 가부시끼가이샤 | Multiflow Heat Exchanger |
-
1985
- 1985-08-09 JP JP17632985A patent/JPS6239182A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0332446U (en) * | 1989-08-08 | 1991-03-29 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6239182A (en) | 1987-02-20 |
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