JPS6361144B2 - - Google Patents

Description

Detailed Description of the Invention (Industrial Application Field) The present invention relates to an inner peripheral blade for cutting hard materials such as various semiconductor materials such as silicon, ceramics, tungsten, carbide, and gemstones. It is something.

(Prior Art) As shown in FIGS. 4 and 5, the conventional inner peripheral blade for cutting hard materials uses diamond or cubic boron nitride powder 11 in a wide annular shape that is integral with the outer periphery. The ring-shaped thin steel plate 12 is bound to the inner peripheral part 13 of the thin steel plate 12, and the outer peripheral part of such an annular thin steel plate 12 is stretched with uniform strong tension using a tensioning jig, like stretching the skin of a drum. It is something.

(Problems to be Solved by the Invention) According to such conventional technology, for example, if the outer diameter of silicon single crystal, which has recently been produced in large quantities as a semiconductor material, is 8 inches (203.2φ) or less,
It is possible to cut this with high precision, high efficiency, and high yield, but when the outer diameter of the silicon single crystal becomes 8 to 12 inches, the outer diameter of the inner peripheral blade increases to 650 to 950 mm. , it becomes very difficult to obtain materials for thin steel sheets.

There are plenty of stainless steel plates that are about 0.1mm thin for up to 600mmφ, but it is very difficult to obtain materials that can be used for 650mmφ, and even if they are thick, they are difficult to obtain.
It becomes thicker than 0.15mm. Moreover, since the material is only stainless steel SUS304 that cannot be quenched, its tensile strength is low at 75 kg/mm ² , and the strength when tensioned is weak and elongation is large, resulting in an oval shape, which is not suitable for high-precision cutting that requires roundness during rotation. , uneven wear occurs, which significantly deteriorates not only durability but also cutting accuracy.

For this reason, the thickness of the stainless steel plate is increased to 0.15 mm or more to provide strength at the expense of silicon material yield, so the thickness of the bonding parts such as diamonds can be reduced.
The current situation is that it is 0.32 mm or more. Silicon single crystal up to 6 inches (152.4φ) has a blade thickness of 0.22
The material yield is 50mm because the cutting is done with an internal peripheral blade of 50 mm.
% also gets worse.

(Means for Solving the Problems) The present invention was made to solve the problems of the prior art, and according to the invention, diamond or cubic boron nitride powder is It is formed by attaching it to the inner circumference of a wide annular thin steel plate that is integrated into one piece, and then stretching the outer circumference of such an annular thin steel plate with even and strong tension like the skin of a drum. In the inner circumferential blade for cutting hard materials, the annular thin steel plate is formed into a narrow annular thin steel plate, that is, a ring, the powder is bonded to the inner circumference of the ring, and the powder is quenched mainly with silicon etc. Alternatively, there is provided an inner circumferential blade for cutting hard materials formed by arranging a large number of heat-treated steel strips radially and tensioning the ring with uniform strong tension.

In the above structure, the diamond or cubic boron nitride powder can be bonded to the inner circumference of the ring by electrodeposition by electroplating or electroless plating, or by sintering the metal powder. It is. It is not limited to these.

(effect) The above technical means works as follows.

By using a narrow thin steel plate or ring instead of the conventional wide annular thin steel plate that is integral to the outer periphery, thin material is easily available and the material yield is reduced. It works so that the object to be cut can be cut with high precision and high efficiency.

Next, by tensioning the ring with a large number of radially arranged steel strips, it is possible to improve the circularity of the inner diameter of the ring and improve cutting accuracy, as well as increase the durability of the inner peripheral blade. Act so that you can improve.

(Embodiment) An embodiment of the present invention will be described with reference to the drawings. 1 is a thin steel plate with a narrow width, that is, a ring, which is heat treated with high speed steel (SKH-9) and has a thickness of 0.10 mm.
Finished with an inner diameter of 184 mm and an outer diameter of 204 mm, the outer circumference side
Slit 2 of 194mmφ with a width of 1mm and a length of 8mm is 12mm.
There are 48 holes drilled concentrically with Ring 1 at the pitch.

Diamond powder 3 of 40 to 60 microns is electrodeposited on both the front and back sides of the ring 1 at a width of 2 mm from the inner circumferential end by electroplating.

In each slit 2 provided in the ring 1,
A steel strip 4 made of heat-treated maraging steel (tensile strength 300 Kg/mm ² ) having a thickness of 0.05 mm, a width of 7.9 mm, and a length of 360 mm is passed through the slit 2 and folded in the center to form a ring 1. are arranged radially relative to

From the center of the ring 1 to the steel strip 4,
A hole of 7mmφ is provided at each position of 266.7mm,
The pins 5 are inserted into these and fixed to the annular frame 6, respectively, and tensioned with an even and strong tension (approximately 120 kg/mm ² , twice that of the conventional method) using a tensioning jig (not shown).

The inner circumferential blade for cutting hard materials thus formed has an inner diameter of less than ±5 microns in elongation measurement, which is less than 1/4 of that of conventional products.

(Effects of the Invention) As explained above, the present invention has a combination of a narrow annular thin steel plate, that is, a ring, and a large number of steel strips arranged radially outside the ring.
The inner peripheral blade for cutting hard materials is formed by tensioning the above-mentioned ring with even and strong tension, so even if the object to be cut is quite large, thin steel plate material is easily available, and when tensioned, Since it has high strength, good roundness, and no loss of precision, it is easy to manufacture, can be used with good precision and durability, and can be cut with a high yield.

[Brief explanation of drawings]

1 to 3 show an embodiment of the inner peripheral blade for cutting hard materials according to the present invention, FIG. 1 is a plan view thereof, and FIG. 2 is an enlarged cross section taken along line A-A in FIG. 1. Figures 3 and 3 are enlarged views of the main parts of Figure 1, Figures 4 and 5 show conventional internal blades for cutting hard materials, Figure 4 is a plan view thereof, and Figure 5 is an enlarged view of the main part of Figure 1. FIG. 5 is a sectional view taken along the line A-A in FIG. 4; In the drawings, 1 is a narrow thin steel plate or ring, 2 is a slit, 3 is a diamond powder, 4 is a steel strip, 5 is a pin, and 6 is an annular frame.

Claims (1)

[Scope of Claims] 1 Diamond or cubic boron nitride powder is bonded to the inner periphery of a wide annular thin steel plate that is integral to the outer periphery, and the outer periphery of such an annular thin steel plate is In the inner circumferential blade for cutting hard materials, which is formed by tensioning the parts with uniform strong tension like stretching the skin of a drum, the above-mentioned annular thin steel plate is made into a narrow annular thin steel plate, that is, a ring. An interior for cutting hard materials formed by binding the above powder to the inner periphery, arranging a large number of hardened or heat-treated steel strips radially around such a ring, and tensioning the above ring with uniform strong tension. Surrounding blade. 2. Claim No. 2, characterized in that diamond or cubic boron nitride powder is bonded to the inner circumference of the ring by electrodeposition by electroplating or electroless plating. The inner peripheral blade for cutting hard materials according to item 1. 3. The hard material cutting inner according to claim 1, wherein diamond or cubic boron nitride powder is bonded to the inner circumference of the ring by sintering metal powder. Surrounding blade.