JPS6362464B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a glass sealed body having through holes in glass.

In a glass sealed body in which glass is hermetically sealed within a metal outer ring, one or more through holes may be provided in the glass. For example, FIG. 1 is a plan view of a glass sealed body in which three through holes 3 are formed in a straight line along the radial direction of the metal outer ring 1 in the glass 2 that is hermetically sealed in the metal outer ring 1. Figure 2 shows the first
A sectional view taken along the - line in the figure is shown.

Conventionally, such glass sealed bodies have been manufactured by the method shown in FIGS. 3 to 5. That is, as shown in FIG. 3, first, a metal outer ring 1 is placed on a sealing jig 4 made of graphite, and a circular plate is formed by kneading fine glass powder with an organic binder in the metal outer ring 1. A glass tablet 2a made of sintered glass which has been press-molded and then calcined to burn out the organic binder is placed and the whole is heated. Then, the glass 2 obtained by melting the glass tablet 2a is hermetically sealed to the metal outer ring 1, and a glass sealed body without holes as shown in FIG. 4 is obtained. Next, as shown in FIG. 5, on the glass 2 of this glass sealed body,
The through-holes 3 are sequentially formed using a cemented carbide drill 5.

However, according to the above manufacturing method, not only are cracks likely to occur in the glass 2 when forming the through holes 3, but also the hole drilling process is extremely complicated and workability is extremely poor, and the through holes 3 cannot be formed accurately and neatly. There was a problem that it was difficult to do so, and the glass sealed body became extremely expensive.

Therefore, the main object of the present invention is to provide a method for manufacturing a glass sealed body having through holes in the glass, which can efficiently form the through holes accurately and neatly.

To summarize, the present invention can be summarized by arranging a glass tablet having a through hole in a metal outer shell, inserting a wire made of a material with a larger coefficient of expansion than glass into the through hole, and heating the entire tablet to remove the glass. This method is characterized in that the tablet is melted and hermetically sealed to a metal outer ring, and after cooling, the wire is pulled out of the glass to form a through hole in the glass.

Embodiments of the present invention will be described below with reference to the drawings. 6 to 8 show cross-sectional views at each stage for explaining the manufacturing method according to the present invention. First, as shown in FIG. 6, a circular recess 7 made of graphite into which the metal outer ring 1 fits, and three round holes 8 bored in the bottom of the circular recess 7.
The metal outer ring 1 is inserted into the recess 7, and the glass tablet 2b having three through holes 9 is inserted into the metal outer ring 1. , and further penetrates the through hole 9 of the glass tablet 2b to remove the glass tablet 2b.
A material with a larger coefficient of expansion than glass,
A wire rod 10 made of, for example, steel and whose surface is spray-coated with graphite is inserted into the round hole 8 of the sealing jig 6.

In this state, the whole is heated to about 1000°C in a neutral or weakly reducing atmosphere. Then, the glass tablet 2b is melted, and as shown in FIG. 7, a glass sealed body is formed in which the glass 2 is hermetically sealed to the metal outer ring 1 and the wire rod 10 is implanted through the glass 2. can get. However, since the wire 10 is made of copper, which has a larger coefficient of expansion than the glass 2, and its surface is spray-coated with molten glass and hard-to-wet graphite, the wire 10 is not sealed to the glass 2. .

Next, when the glass sealed body is cooled, the expansion coefficient of the wire 10 that is not sealed with the glass 2 is larger than that of the glass 2, as described above.
The shrinkage of the wire 10 is greater than the shrinkage of the glass 2, and the wire 10 separates from the glass 2. In this state, if you tap each wire rod 10 lightly and pull it out from the glass 2,
As shown in FIG. 8, three through holes 11 are formed in the glass 2.
is formed.

Note that the difference in expansion coefficient between the wire 10 and the glass 2 is
It is desirable that it is 50×10 ^-7 or more, and the larger the difference in the expansion coefficients between the two, the better. When the difference in expansion coefficient between the two is 70×10 ^-7 or more, spraying of graphite on the circumferential surface of the wire 10 can be particularly omitted.

As described above, in this invention, a glass tablet having a through hole is arranged inside a metal outer ring, a wire made of a material having a larger coefficient of expansion than glass is inserted into the through hole, and the whole is heated. The glass obtained by melting the glass tablet is sealed to a metal outer ring,
After cooling, the wire is pulled out of the glass to form a through hole in the glass. Therefore, compared to conventional manufacturing methods, it is necessary to insert the wire into the through hole of the glass tablet during assembly before heating, and to form a through hole in the glass. Although it is necessary to pull out the wire from the glass after sealing and cooling, the assembly work and the wire pulling work can be automated all at once.
As a whole, it is not only extremely easy to manufacture and greatly reduces processing costs, but also allows each through hole to be formed precisely and neatly at a predetermined position, and the effect becomes more pronounced as the number of through holes increases.

[Brief explanation of drawings]

Figures 1 and 2 are a plan view of an example of a glass sealed body having a through hole in the glass, and -
A cross-sectional view along the line is shown. FIGS. 3 to 5 show cross-sectional views at each stage for explaining the conventional method for manufacturing a glass sealed body. 6 to 8 show cross-sectional views at each stage for explaining the method for manufacturing a glass sealed body according to the present invention. DESCRIPTION OF SYMBOLS 1...Metal outer ring, 2...Glass, 2b...Glass tablet, 6...Sealing jig, 9...Through hole in glass tablet 2b, 10...Wire rod, 11...Through hole in glass 2 Hole.

Claims (1)

[Claims] 1. A method for manufacturing a glass sealed body in which a glass hermetically sealed in a metal outer ring has a through hole passing through it vertically, the method comprising arranging a glass tablet having a through hole in the metal outer ring, With a wire made of a material with a larger expansion coefficient than glass inserted through the hole,
A glass sealed body characterized by heating the whole to melt the glass tablet, hermetically sealing the glass to a metal outer ring, and after cooling, pulling out the wire from the glass to form a through hole in the glass. manufacturing method.