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JPS6363506B2 - - Google Patents
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JPS6363506B2 - - Google Patents

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Publication number
JPS6363506B2
JPS6363506B2 JP56106969A JP10696981A JPS6363506B2 JP S6363506 B2 JPS6363506 B2 JP S6363506B2 JP 56106969 A JP56106969 A JP 56106969A JP 10696981 A JP10696981 A JP 10696981A JP S6363506 B2 JPS6363506 B2 JP S6363506B2
Authority
JP
Japan
Prior art keywords
fluoride
sintering
preheating
mold
raw material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56106969A
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Japanese (ja)
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JPS589869A (en
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Priority to JP56106969A priority Critical patent/JPS589869A/en
Publication of JPS589869A publication Critical patent/JPS589869A/en
Publication of JPS6363506B2 publication Critical patent/JPS6363506B2/ja
Granted legal-status Critical Current

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Description

【発明の詳細な説明】 本発明は、主に光学的用途のための多結晶フツ
化リチウム(LiF)、フツ化カルシウム(CaF2
及びフツ化マグネシウム(MgF2)の製造方法に
関する。
[Detailed Description of the Invention] The present invention mainly uses polycrystalline lithium fluoride (LiF), calcium fluoride (CaF 2 ) for optical applications.
and a method for producing magnesium fluoride (MgF 2 ).

LiF、CaF2及びMgF2は、可視光、赤外、紫外
及びX線分光用プリズム、レンズ、フイルタ或い
はその他の光線透過用窓として利用し得る優れた
光学材料として知られている。
LiF, CaF 2 and MgF 2 are known as excellent optical materials that can be used as prisms, lenses, filters or other light transmitting windows for visible light, infrared, ultraviolet and X-ray spectroscopy.

然しながら、それらを光学材料として利用でき
る大きさの透明均質な固体として得るのは容易で
なく、従来非常な長時間をかけて単結晶を成長さ
せるという方法によつていた。このため大きなも
の程累進的に高価格とならざるを得ず、また、単
結晶体は一般に壁開面を有するので破損し易いと
いう欠点がある。
However, it is not easy to obtain them as transparent homogeneous solids of a size that can be used as optical materials, and conventional methods have relied on growing single crystals over a very long period of time. For this reason, larger crystals inevitably become progressively more expensive, and since single crystals generally have open wall planes, they have the disadvantage of being easily damaged.

これに対して、LiF、CaF2、MgF2の粉末を焼
結することによつて得られる多結晶性の固体は、
単結晶を成長させるのに比べて極めて短時間に量
産でき、また、そのような多結晶体は、応力が加
えられてもそれを分散させる効果があつて、単結
晶体の場合の如く力学的に極端に弱い軸が存在し
ないという利点がある。
On the other hand, polycrystalline solids obtained by sintering powders of LiF, CaF 2 and MgF 2 are
Compared to growing single crystals, they can be mass-produced in an extremely short time, and even if stress is applied, such polycrystals have the effect of dispersing stress, making them less mechanically resistant than single crystals. It has the advantage that there is no extremely weak axis.

そこで、例えば特公昭42−530号公報において
は、フツ化カルシウム粉末を真空中で熱間加圧し
て焼結することにより透明な多結晶フツ化カルシ
ウム固体を製造する方法及び装置が提案されてい
る。然しながら、この種の方法は、フツ化カルシ
ウム粉末を専ら外部から加熱しつつ、即ち粉末を
充填した型等をヒータや高周波誘導加熱によつて
加熱しつつ加圧成形するものであるため、加熱効
率が良いとは言えず、加熱温度や温度の制御に限
界があつたり、その温度分布が一様でなかつたり
して均一で歪みのない焼結体を得るのが難しく、
また、焼結体中に気泡等を生じさせないためには
高真空下で焼結を行わねばならず、装置全体が複
雑になるという問題点がある。
Therefore, for example, Japanese Patent Publication No. 42-530 proposes a method and apparatus for producing transparent polycrystalline calcium fluoride solid by hot pressing and sintering calcium fluoride powder in a vacuum. . However, in this type of method, the calcium fluoride powder is press-molded while being heated exclusively from the outside, that is, the mold filled with the powder is heated by a heater or high-frequency induction heating, so the heating efficiency is low. It is difficult to obtain a uniform and distortion-free sintered body because the heating temperature and temperature control are limited, and the temperature distribution is not uniform.
Furthermore, in order to prevent bubbles from forming in the sintered body, sintering must be performed under a high vacuum, which poses a problem in that the entire apparatus becomes complicated.

本発明は叙上の観点に立つてなされたものであ
り、その要旨とするところは、電気絶縁性の高抵
抗材料の型に充填したLiF、CaF2又はMgF2の粉
末原料を、例えば約100Kg/cm2前後のオーダ以下
の比較的軽加圧状態に保つて、外部の熱源によつ
て所定温度に予備加熱した上、これを少くとも
700Kg/cm2前後以上、通常約2000〜3000Kg/cm2
またはそれ以上の重加圧下で、数KV前後以上の
オーダの高電圧電源で通電焼結することにより、
光学材料として適した、即ちマイクロポアやミク
ロ歪の少い多結晶性のLiF、CaF2又はMgF2固体
を得ることにある。
The present invention has been made based on the above-mentioned viewpoints, and the gist thereof is to prepare, for example, about 100 kg of LiF, CaF 2 or MgF 2 powder raw material filled into a mold made of an electrically insulating high-resistance material. It is kept under relatively light pressure (on the order of around / cm2 or less), preheated to a predetermined temperature using an external heat source, and heated to at least
Around 700Kg/cm 2 or more, usually about 2000-3000Kg/cm 2 ,
Or, by sintering with a high voltage power source on the order of several KV or more under heavy pressure,
The object of the present invention is to obtain a polycrystalline LiF, CaF 2 or MgF 2 solid suitable as an optical material, that is, with few micropores and microstrains.

このような通電焼結(放電焼結と抵抗焼結を含
む。)によるときは、単なる外部加熱による場合
と異なり、加圧された粉末粒子相互間にミクロ放
電及びジユール熱が発生し、これにより粉末分子
のイオンの電界拡散と熱拡散が行われて焼結がな
されるものであるから、上記特公昭42−530号公
報記載の如き単なる熱間加圧による場合に比べ、
はるかに均一且つ良質の焼結成形体が得られるも
のである。また、上記ミクロ放電により、粒子表
面に付着しているガス分子も除去されるのでマイ
クロポアの発生が少なく、この通電焼結は必ずし
も厳密な真空雰囲気内で行う必要はなく、従つて
本発明方法は比較的簡略な装置で効率よく実施し
得るものである。
When this type of current sintering (including discharge sintering and resistance sintering) is used, micro discharges and Joule heat are generated between pressurized powder particles, unlike when using simple external heating. Since sintering is performed by electric field diffusion and thermal diffusion of ions of powder molecules, compared to the case of mere hot pressing as described in the above-mentioned Japanese Patent Publication No. 42-530,
A much more uniform and better quality sintered body can be obtained. In addition, gas molecules attached to the particle surface are also removed by the micro-discharge, so the generation of micropores is reduced, and this current sintering does not necessarily have to be carried out in a strict vacuum atmosphere. can be carried out efficiently with relatively simple equipment.

而して、通電焼結が行われ得るためには、原料
粉末が或る程度の導電性を有することが必要であ
るが、LiF、CaF2及びMgF2粉末は常温において
は絶縁物に近い高抵抗体であり、通常の方法での
通電焼結は不可能である。然しながら、これらの
物質はイオン結合によつて形成された分子から成
る化合物であり、従つて、これを加熱して熱エネ
ルギーにより結合度をゆるめてやると、イオン粒
の振動ゆらぎによつて導電性を有するようにな
る。ゆらぎによる導電率ρはマクスウエルーボル
ツマンの確率分布則により次式(1)で与えられる。
Therefore, in order to conduct current sintering, it is necessary for the raw material powder to have a certain degree of conductivity, but LiF, CaF 2 and MgF 2 powders have high conductivity close to that of insulators at room temperature. It is a resistor and cannot be sintered using a normal method. However, these substances are compounds made up of molecules formed by ionic bonds, and therefore, when they are heated to loosen their bonds with thermal energy, they become conductive due to the vibrational fluctuations of the ionic particles. It comes to have. The conductivity ρ due to fluctuation is given by the following equation (1) using Maxwell-Boltzmann's probability distribution law.

ρ=Cexp(−Q/kT) ……(1) (ここに、C:当該物質固有の定数 Q:当該物質固有の活性化エネルギー k:ボルツマン定数 T:加熱温度) 従つて、比抵抗rは導電率ρの逆数であるから、 r=C′exp(Q/kT) ……(2) で表わされ、加熱温度Tが大きくなるに従つて定
数C′に収束してゆくことが理解される。
ρ=Cexp(-Q/kT)...(1) (where, C: Constant specific to the substance Q: Activation energy specific to the substance k: Boltzmann constant T: Heating temperature) Therefore, the specific resistance r is Since it is the reciprocal of the conductivity ρ, it is expressed as r=C'exp(Q/kT)...(2), and it is understood that as the heating temperature T increases, it converges to a constant C'. Ru.

第1図は、LiF、CaF2及びMgF2の各半焼結粉
末成形体の温度に対する比抵抗の変化を実測した
一結果を表わすグラフであり、成形体粉末粒子間
の接触抵抗による影響もあるので、(2)式と完全に
一致している訳ではないがほぼ同じ傾向を示して
いる。このグラフから判るように、これらの化合
物はいずれも常温ないし100℃以下では極めて高
い抵抗を有しているが、温度が上昇するにつれそ
の値は急激に下がり、その物質に固有の或る一定
値に近づいてゆく、従つて、LiFの場合には約
200℃前後以上、CaF2の場合には約40℃前後以
上、またMgF2の場合には約500℃前後以上程度
にまで加熱すれば、通電焼結を行い得るだけの充
分な導電性を有するようになることが判る。これ
を、金属材料や黒鉛の如き良導体と比べてみる
と、依然として数桁も大きな抵抗値であるが、特
定の形状の物体の電気抵抗はその物質の比抵抗と
厚さに比例し且つその断面積に反比例するもので
あるから、本発明に関連する光学材料についてい
えば一般に面積は大きくしかも厚さは薄いので形
状的に2桁ないし3桁は抵抗を小さくすることが
できる。従つて、焼結に際しては比抵抗から推測
する程高い電圧は必要としない。
Figure 1 is a graph showing the results of actual measurement of changes in specific resistance with respect to temperature of semi-sintered powder compacts of LiF, CaF 2 and MgF 2 , and it is also affected by contact resistance between compact powder particles. Although it does not completely match equation (2), it shows almost the same tendency. As you can see from this graph, all of these compounds have extremely high resistance at room temperature or below 100℃, but as the temperature rises, this value decreases rapidly and reaches a certain value unique to the substance. Therefore, in the case of LiF, about
If heated to around 200℃ or higher, in the case of CaF 2 to around 40℃ or higher, and in the case of MgF 2 to around 500℃ or higher, it has sufficient conductivity to perform current sintering. It turns out that it will be like this. Comparing this to a good conductor such as a metal material or graphite, the resistance value is still several orders of magnitude higher, but the electrical resistance of an object with a specific shape is proportional to the specific resistance and thickness of the material, and Since it is inversely proportional to the area, the optical materials related to the present invention generally have a large area and a small thickness, so that the resistance can be reduced by two to three orders of magnitude in terms of shape. Therefore, during sintering, a voltage as high as estimated from the resistivity is not required.

而して、このような比較的高い抵抗値を有する
物質を通電焼結する場合に、原料粉末を予じめ加
熱するやり方は従来知られており、それは例えば
特公昭53−4239公報中に述べられている如く、黒
鉛材の如き導電性の型の中に原料粉末を充填し、
この型に嵌合する対向電極パンチを通じて通電を
行うようにするものであつて、然るときは電流は
まず抵抗値の低い導電性の型の方に多量に流れ、
それによつて先ず型が加熱されその熱が充填粉末
に作用して充填粉末の抵抗値を減少させ、それが
型の抵抗値と同程度以下になつたとき充填粉末の
方に電流が多量に流れるようになつて以後急速に
通電焼結が進行するというものであつた。従つ
て、この場合には、原料粉末を充填する導電性の
型自体が加熱手段となるものであるが、然るとき
は、電流は型と原料粉末に分流するものであるか
ら、焼結のための注入エネルギーとして原料粉末
に流すべき電力を一定にするための電流調整が難
しく、均一な特性の焼結成形体を得ることが困難
であつた。
Therefore, when sintering a material having such a relatively high resistance value by applying electricity, a method of preheating the raw material powder is known, for example, as described in Japanese Patent Publication No. 53-4239. As shown in the figure, raw material powder is filled into a conductive mold such as graphite material,
Electricity is applied through the counter electrode punch that fits into this mold, and in such a case, a large amount of current first flows toward the conductive mold with a low resistance value.
As a result, the mold is first heated, and the heat acts on the filling powder to reduce the resistance of the filling powder, and when the resistance value becomes equal to or lower than the resistance of the mold, a large amount of current flows toward the filling powder. Thereafter, energization sintering proceeded rapidly. Therefore, in this case, the conductive mold filled with the raw material powder itself becomes the heating means, but in such a case, the current is divided between the mold and the raw material powder, so the sintering process is It has been difficult to adjust the current to keep the power flowing through the raw material powder constant as the injection energy for this purpose, and it has been difficult to obtain a sintered compact with uniform characteristics.

従来行われていた原料粉末の予備加熱の叙上の
如き問題点を解決するため、本発明においては、
原料粉末を充填すべき型として少くともその内面
が電気絶縁性の高抵抗材料で作製された型を用
い、原料粉末の予備加熱はこの型の電気絶縁部の
外側に設けた別の加熱手段により行い、原料粉末
が予じめ定められた所定の温度に達した時点で原
料粉末に電圧を印加して通電焼結を行うようにす
るものである。そして、前記型用の電気絶縁性の
高抵抗材料としては、高温時に於ても原料粉末よ
り或る程度以上、又は充分抵抗が大きいもの、例
えば、BN、Si3N4、AlN等、を使用するように
する。このようにすれば、適宜の段階で、加熱効
率の悪い外部加熱に代えてそれ自体に通電して発
熱させる通電加熱に切換えられるからエネルギー
効率が高く、また、予備加熱用電源と通電焼結用
電源とは完全に分離されているから、通電焼結用
の電力を一定にすることが容易であり、均一且つ
良質の焼結成形体を得ることが可能となる。
In order to solve the problems mentioned above in the conventional preheating of raw material powder, in the present invention,
A mold to be filled with the raw material powder is made of at least an electrically insulating high-resistance material, and the raw material powder is preheated by a separate heating means provided outside the electrically insulating part of this mold. When the raw material powder reaches a predetermined temperature, a voltage is applied to the raw material powder to perform energization sintering. As the electrically insulating, high-resistance material for the mold, a material that has a resistance higher than that of the raw material powder to some extent or sufficiently higher even at high temperatures, such as BN, Si 3 N 4 , AlN, etc., is used. I'll do what I do. In this way, energy efficiency is high because at an appropriate stage, instead of external heating, which has poor heating efficiency, it can be switched to energized heating that generates heat by energizing itself. Since it is completely separated from the power supply, it is easy to keep the power for energization sintering constant, and it is possible to obtain a uniform and high quality sintered body.

ここで、本発明方法を実施するための装置の一
実施例を示す第2図を参照しつつ、本発明方法を
具体的に説明する。
Here, the method of the present invention will be specifically explained with reference to FIG. 2, which shows an embodiment of an apparatus for carrying out the method of the present invention.

本発明方法においては、先ず、公知の化学的手
段により製造され且つ所定の粒度に調整、又は粉
砕されたLiF、CaF2、又はMgF2の原料粉末1
を、耐熱性の電気絶縁性高抵抗材料(例えば
Al2O3、Si3N4、BN等)で作られた型2内充填
し、型の両端より挿入した耐熱耐圧性金属合金、
高耐圧性または高耐圧処理、加工等された炭素材
等の導電性電極パンチ3,3により軽加圧する。
次いでこの絶縁性型2をこれが熱衝撃で壊れない
程度にゆつくりとその外側から加熱する。加熱手
段としては、公知の任意の手段を利用でき、例え
ば型2の周囲に巻きつけた電熱線ヒータで加熱し
たり、或いは図に示す如く、型2の周囲に黒鉛製
の外型4を嵌合させ、この外型4に加熱用電響6
から、直流等適宜の電流を供給してジユール熱加
熱し、又は上記外型4をその周囲に設けた誘導コ
イル5に加熱用電源6から高周波電流を供給して
誘導加熱により加熱し、その熱を型2を通じて原
料粉末に伝えるようにしてもよい。この温度上昇
を、例えば型2中に埋設した熱電対7で検知しつ
つ、原料粉末の比抵抗が例えば約1〜3MΩ程度
になる温度、即ち第1図に示された如くそのは原
料粉末の種類によつて異つているが、約200〜700
℃の範囲内において粉末の種類に従つて定められ
た所定の温度に数分間保ち、予備加熱を完全なら
しめる。然る後、焼結用電源8により電極パンチ
3,3間に数KV前後以上の定電力電圧を印加
し、それと同時に前述の例えば約2000〜3000Kg/
cm2の重加圧Pを与えて、原料粉末の通電焼結を行
う。上記予備加熱の温度は、焼結用電源8として
より高電圧のものを用意使用できれば上記温度前
後以下でも良い訳で、逆に電源8が高電圧のもの
でなければ、より高温の予備加熱が必要となるが
如くであり、対象焼結原料粉末の種類や、加熱効
率、その他種々の経済性等を考慮して、予備加熱
温度その他が選定される。上記通電焼結用電源8
は、直流でもよいが、直流に約2KHz前後以下の
中周波交流を重畳したものを用いると、粉末粒子
間のミクロ放電が誘発され、また、通電電流密度
が各部に於てほゞ均一となる所から、良質の焼結
体が得られる。従来通常の通電焼結法において
は、一般に成形圧力を約300〜500Kg/cm3前後とし
ているが、本発明においては光学材料の製造を目
的としているので、密度に影響を及ぼさないピン
ホールや、μ単位の粉末粒子間隙でも内部散乱を
起し、光の透過率を低下させるので、粉末粒子自
体を塑性変形させて僅かな粒子間隙をも除去し得
るよう、またあまり高くない電圧の電源で通電焼
結のための電流を流し得るように、通電焼結法に
おいては従来使われていない前述の約700〜3000
Kg/cm3またはそれ以上という極めて高い加圧、及
び数KV前後以上の高電圧電源による通電を用い
るものである。かかる高圧力により粒子は互いに
充分に近接、接触し、粒子中のイオンは電界によ
る電界拡散を熱による熱拡散の作用で粒子間を移
動し、またガスが排出されて均質、強固な焼結成
形体を形成する。また、粒子間のミクロ放電によ
り粒子表面に付着しているガス分子もイオン化し
原料分子間に拡散さらには排出されるので、上記
通電焼結を必ずしも真空中で行わなくても気泡に
よるピンホールは生じない。通電焼結を終えた焼
結体は、通常電源による通電と加圧圧縮とを同時
に切つて自然冷却するか、熱衝撃防止等のために
必要ならば前記予備加熱のための加熱手段を用い
るとか、その他の通常の方法により徐冷したり、
又は徐冷と共に加圧を徐々に減少させるようにし
て、型2内から取出される。
In the method of the present invention, first, raw material powder 1 of LiF, CaF 2 or MgF 2 is produced by known chemical means and adjusted or pulverized to a predetermined particle size.
, heat-resistant electrically insulating high-resistance materials (e.g.
A heat-resistant and pressure-resistant metal alloy made of Al 2 O 3 , Si 3 N 4 , BN, etc.) was filled in the mold 2 and inserted from both ends of the mold.
Light pressure is applied using conductive electrode punches 3, 3 made of a carbon material or the like that has been subjected to high pressure resistance or high pressure resistance treatment or processing.
Next, this insulating mold 2 is heated slowly from the outside to the extent that it will not break due to thermal shock. As the heating means, any known means can be used, such as heating with an electric wire heater wrapped around the mold 2, or fitting an outer mold 4 made of graphite around the mold 2 as shown in the figure. This outer mold 4 is fitted with a heating electric 6.
Then, the outer mold 4 is heated by induction heating by supplying an appropriate current such as direct current, or by induction heating by supplying a high frequency current from the heating power source 6 to the induction coil 5 provided around the outer mold 4. may be transmitted to the raw material powder through the mold 2. While detecting this temperature rise with, for example, a thermocouple 7 embedded in the mold 2, the temperature at which the resistivity of the raw material powder becomes approximately 1 to 3 MΩ, that is, as shown in FIG. Approximately 200 to 700, depending on the type
The temperature is maintained at a predetermined temperature within the range of 0.degree. C. for several minutes, determined according to the type of powder, to ensure complete preheating. After that, a constant power voltage of about several KV or more is applied between the electrode punches 3 and 3 by the sintering power source 8, and at the same time, the sintering power source 8 applies a constant power voltage of about several KV or more, for example, about 2000 to 3000 Kg/
A heavy pressure P of cm 2 is applied to carry out electrical sintering of the raw material powder. The temperature of the preheating described above may be around the above temperature or lower if a higher voltage power source 8 is available for use as the sintering power source 8. Conversely, if the power source 8 is not a high voltage power source, a higher temperature preheating is required. The preheating temperature and other conditions are selected as necessary, taking into consideration the type of target sintering raw material powder, heating efficiency, and various other economical factors. Power source 8 for energizing sintering above
may be a direct current, but if a medium-frequency alternating current of around 2KHz or less is superimposed on the direct current, micro-discharges will be induced between the powder particles, and the current density will be approximately uniform in each part. A high quality sintered body can be obtained from this location. In the conventional electric sintering method, the molding pressure is generally around 300 to 500 kg/cm 3 , but since the purpose of the present invention is to manufacture optical materials, there are no pinholes or pinholes that do not affect the density. Internal scattering occurs even in the gaps between powder particles on the order of microns, reducing light transmittance. Therefore, in order to plastically deform the powder particles themselves and remove even the slightest gaps between particles, electricity is supplied using a power source with a not very high voltage. The above-mentioned approximately 700 to 3000
It uses extremely high pressurization of Kg/cm 3 or more and electricity from a high voltage power source of around several KV or more. Due to this high pressure, the particles come close enough to each other and come into contact with each other, and the ions in the particles move between particles due to the effects of electric field diffusion and thermal diffusion, and gas is exhausted to form a homogeneous and strong sintered compact. form. In addition, gas molecules attached to the particle surface are ionized due to the micro-discharge between the particles, diffused between the raw material molecules, and then discharged, so even if the electrical sintering described above is not necessarily performed in a vacuum, pinholes caused by air bubbles will be eliminated. Does not occur. After sintering, the sintered body may be allowed to cool naturally by turning off the current from the normal power supply and pressurization at the same time, or the heating means for preheating may be used if necessary to prevent thermal shock, etc. , slow cooling by other conventional methods,
Alternatively, it is taken out from the mold 2 while slowly cooling and gradually reducing the pressure.

以下に本発明の実施例を示す。 Examples of the present invention are shown below.

実施例 1 −400メツシユのLiF粉末6gを内径30mmの
Al2O3製の型に入れ、上下より耐熱鋼(SK材又
はSUS304材)製の電極パンチで10Kg/cm2程度の
軽加圧を行う。型の外側には耐熱鋼のリングで補
強を施しておく。この状態で型の外周に設けた電
熱ヒータにより約5℃/minの加熱速度で型及び
その内部のLiF粉末を昇温させ約300℃に4分間
保持する。次に圧力を約2000Kg/cm2に増強し、そ
れと同時に上下両電極パンチ間に5KVの直流電
圧を印加して粉末粒子間に放電並びにジユール熱
を発生させる。上記直流電源はその最大出力を
800Wにセツトしておく。通電初期は被焼結体の
温度が低くて比抵抗が未だ高いため、約400W弱
の出力しかみられないが、原料粉末の内部発熱と
ミクロ放電によるイオン化によつて投入電力は
徐々に増加し設定値まで達する。設定値に達して
から約10分間その状態を保持し、然る後、焼結用
電源と圧力を切る。以上の工程はすべて大気中で
行ない、得られたLiF焼結体を研摩仕上げしたも
のの赤外線透過率(%)は第3図に示す如く満足
すべき値を示した。
Example 1 6g of LiF powder of −400 mesh was placed in a 30mm inner diameter
Place it in an Al 2 O 3 mold and apply light pressure of about 10 kg/cm 2 from the top and bottom using electrode punches made of heat-resistant steel (SK material or SUS304 material). The outside of the mold is reinforced with a heat-resistant steel ring. In this state, the temperature of the mold and the LiF powder inside the mold is raised at a heating rate of approximately 5° C./min using an electric heater provided around the outer periphery of the mold, and the temperature is maintained at approximately 300° C. for 4 minutes. Next, the pressure is increased to about 2000 Kg/cm 2 and at the same time, a DC voltage of 5 KV is applied between the upper and lower electrode punches to generate electric discharge and Joule heat between the powder particles. The maximum output of the above DC power supply is
Set it to 800W. At the beginning of energization, the temperature of the object to be sintered is low and the specific resistance is still high, so the output is only about 400W, but the input power gradually increases due to internal heat generation of the raw material powder and ionization due to micro discharge. The set value is reached. After reaching the set value, maintain that state for about 10 minutes, and then turn off the sintering power and pressure. All of the above steps were carried out in the atmosphere, and the infrared transmittance (%) of the obtained LiF sintered body, which was polished and finished, showed a satisfactory value as shown in FIG.

実施例 2 −325メツシユのCaF2粉末7gを内径30mmの
Si3N4製の型に入れる。この型の外側には黒鉛製
の外型をかぶせ、この外型に直接通電を行つて15
分間かけて約400℃に昇温し4分間保持する。そ
の後2000Kg/cm2の圧力を加えそれと同時に直流に
1KHzに交流を重畳した実効値5KVの電圧を印加
する。電力投入時に原料粉末に入つた電力は
150W弱であつたがこれは徐々に増加した。最大
電力を1.3KWに設定しておきこの値になつてか
ら約15分間保持した後、圧力及び電力を同時に切
つて焼結された成形体を取り出した。以上の工程
は1Pa(パスカル)の減圧気中で行い、得られた
CaF2焼結体の赤外線透過率は第4図に示す如く
満足すべき値を示した。
Example 2 7g of CaF 2 powder of -325 mesh was placed in a 30mm inner diameter
Place in a mold made of Si 3 N 4 . The outside of this mold is covered with a graphite outer mold, and this outer mold is directly energized.
The temperature is raised to approximately 400°C over a period of minutes and held for 4 minutes. After that, a pressure of 2000Kg/cm 2 was applied and at the same time it became a direct current.
Apply a voltage with an effective value of 5KV, which is 1KHz superimposed with alternating current. The electricity that enters the raw material powder when electricity is turned on is
It was just under 150W, but this gradually increased. The maximum power was set at 1.3 KW, and after reaching this value, it was held for about 15 minutes, then the pressure and power were turned off at the same time, and the sintered compact was taken out. The above process was performed in a reduced pressure of 1Pa (Pascal), and the obtained
The infrared transmittance of the CaF 2 sintered body showed a satisfactory value as shown in FIG.

実施例 3 −325メツシユのMgF2粉末7gを内径30mmの
BN製の型に入れる。この型の外側には黒鉛製の
外型をかぶせ、その外型の外側に設けた誘導コイ
ルに400KHzの高周波電流を流して誘導加熱によ
り外型を約30分かけてゆつくり加熱した。原料粉
末が約500℃に達してから10分間保持し、然る後
2000Kg/cm2の圧力と実効値7KVの直流と交流と
重畳電圧を同時に加えた。最大電力を1.56KWに
設定し、この設定値に達してから約30分間保持
し、圧力及び電力を切つた。雰囲気は約500℃ま
での予備加熱期間、及びその後の通電焼結期間中
を通し、約1Paの窒素気流中で行い、得られた
MgF2の焼結体の赤外線透過率(%)は第5図に
示す如く満足すべき値を示した。
Example 3 7g of MgF 2 powder of -325 mesh was placed in a 30mm inner diameter
Place in a BN mold. The outside of this mold was covered with a graphite outer mold, and a 400 KHz high-frequency current was passed through an induction coil installed outside the outer mold, causing induction heating to slowly heat the outer mold over a period of about 30 minutes. After the raw material powder reaches approximately 500℃, hold it for 10 minutes, and then
A pressure of 2000Kg/cm 2 and an effective value of 7KV of direct current, alternating current, and superimposed voltage were applied simultaneously. The maximum power was set to 1.56KW and held for about 30 minutes after reaching this set point, then the pressure and power were turned off. The atmosphere was a nitrogen flow of approximately 1 Pa throughout the preheating period to approximately 500°C and the subsequent electrical sintering period.
The infrared transmittance (%) of the MgF 2 sintered body showed a satisfactory value as shown in FIG.

以上の如く、本発明によるときは、原料粉末を
通常以上の重加圧下で通電焼結することにより多
結晶性固体を得るものであるから、従来に比べて
加熱エネルギー効率が高く、マイクロポアやミク
ロ歪が少なくより均質且つ良質の光学材料を効率
よく製造し得るものである。
As described above, according to the present invention, a polycrystalline solid is obtained by sintering the raw material powder with electricity under heavier pressure than usual, so heating energy efficiency is higher than in the past, and micropores and It is possible to efficiently produce a more homogeneous and high quality optical material with less micro-distortion.

なお、本発明の構成は叙上の実施例に限定され
るものでなく、例えば、予備加熱の進行状況の検
知手段としては熱電対温度計の代りに両電極パン
チ間に原料粉末の抵抗値検出用の微弱電流を流し
ておきその電流の変化により通電焼結間始の時期
を決定するようにしてもよく、また焼結後の成形
体を自然冷却ではなく、予備加熱のために設けら
れた加熱手段を用いて所望の冷却速度で長時間を
かけて徐々に冷却するようにしてもよく、要する
に本発明は、電気絶縁性の高抵抗材料の型の中に
充填した原料粉末を適宜の外部熱源により予備加
熱し、然る後電極パンチを通じて高電圧電源によ
り通電を行つて原料粉末粒子間にミクロ放電及び
ジユール熱を生じさせて原料粉末を内部発熱させ
ると同時に、少くとも700Kg/cm2の前後以上、通
常2000〜3000Kg/cm2前後、またはそれ以上の重加
圧を行ない、前記数KV以上の高電圧電源により
従来の通電焼結に比較して小電流の通電により通
電焼結を行うことにより多結晶性のLiF、CaF2
たはMgF2固体を得るというものであり、その基
本構成の範囲内におけるすべての変更実施例を包
摂するものである。
Note that the configuration of the present invention is not limited to the above-mentioned embodiments; for example, as a means for detecting the progress of preheating, instead of a thermocouple thermometer, the resistance value of the raw material powder may be detected between both electrode punches. It is also possible to pass a weak electric current and determine the timing of the start of sintering based on the change in the electric current. A heating means may be used to gradually cool the powder at a desired cooling rate over a long period of time.In short, the present invention is capable of cooling raw material powder filled in a mold made of an electrically insulating high resistance material to an appropriate external source. It is preheated by a heat source, and then energized by a high-voltage power source through an electrode punch to generate micro-discharge and Joule heat between the raw powder particles, internally generating heat in the raw material powder, and at the same time, at least 700 kg/cm 2 Heavy pressure is applied around 2,000 to 3,000 Kg/cm 2 or more, usually around 2,000 to 3,000 Kg/cm 2 or more, and energization sintering is performed by applying a small current compared to conventional energization sintering using a high voltage power supply of several KV or more. As a result, a polycrystalline LiF, CaF 2 or MgF 2 solid is obtained, and it is intended to cover all modifications within the scope of its basic configuration.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はLiF、CaF2及びMgF2の粉末成形体の
温度−比抵抗特性を説明するためのグラフ、第2
図は本発明方法を実施するための装置の概要を示
す説明図、第3図ないし第5図はそれぞれ本発明
方法によつて製造されたLiF、CaF2及びMgF2
焼結成形体の赤外線透過率特性を示すグラフであ
る。 1……原料粉末、2……電気絶縁性型、3……
電極パンチ、4……外型、5……加熱コイル、6
……加熱用電源、7……熱電対温度計、8……通
電焼結用電源。
Figure 1 is a graph for explaining the temperature-resistivity characteristics of powder compacts of LiF, CaF 2 and MgF 2 ;
The figure is an explanatory diagram showing an overview of the apparatus for carrying out the method of the present invention, and Figures 3 to 5 show infrared transmission of sintered bodies of LiF, CaF 2 and MgF 2 produced by the method of the present invention, respectively. It is a graph showing rate characteristics. 1...Raw material powder, 2...Electric insulation type, 3...
Electrode punch, 4... Outer mold, 5... Heating coil, 6
... Power source for heating, 7... Thermocouple thermometer, 8... Power source for energizing sintering.

Claims (1)

【特許請求の範囲】 1 下記a項ないしc項記載の工程から成ること
を特徴とする多結晶フツ化リチウム、フツ化カル
シウム及びフツ化マグネシウムの製造方法。 (a) 少くともその内面が電気絶縁性の高抵抗材料
で作製された型内に原料となるフツ化リチウ
ム、フツ化カルシウム又はフツ化マグネシウム
粉末を充填し、互いに対向する電極パンチでこ
の原料粉末を軽加圧する工程。 (b) 上記原料粉末を上記型の外側から徐々に加熱
し、少くとも200℃以上の予め定められた温度
に加熱すると共に所定温度に数分間以上の所望
の時間保持することにより上記原料粉末を予備
加熱する工程。 (c) 上記予備加熱後の原料粉末に上記電極パンチ
を介して少くとも700Kg/cm2前後以上の重加圧
を与えると共に数KV前後以上の高電圧電源に
より通電して通電焼結を行う工程。 2 上記予備加熱及び通電焼結を大気中で行うこ
とを特徴とする特許請求の範囲第1項記載の多結
晶フツ化リチウム、フツ化カルシウム及びフツ化
マグネシウムの製造方法。 3 上記予備加熱及び通電焼結を不活性ガス雰囲
気中で行うことを特徴とする特許請求の範囲第1
項記載の多結晶フツ化リチウム、フツ化カルシウ
ム及びフツ化マグネシウムの製造方法。 4 上記予備加熱及び通電焼結を真空中で行うこ
とを特徴とする特許請求の範囲第1項記載の多結
晶フツ化リチウム、フツ化カルシウム及びフツ化
マグネシウムの製造方法。 5 上記予備加熱を、上記型の電気絶縁性高抵抗
材料部の外側に設けた電熱ヒータにより行うこと
を特徴とする特許請求の範囲第1項ないし第4項
のいずれか一に記載の多結晶フツ化リチウム、フ
ツ化カルシウム及びフツ化マグネシウムの製造方
法。 6 上記予備加熱を、上記型の電気絶縁性高抵抗
材料部の外側に設けた黒鉛材料製の外型に対する
通電により行うことを特徴とする特許請求の範囲
第1項ないし第4項のいずれか一に記載の多結晶
フツ化リチウム、フツ化カルシウム及びフツ化マ
グネシウムの製造方法。 7 上記予備加熱を、上記型の電気絶縁性高抵抗
材料部の外側に設けた黒鉛材料製の外型に対する
高周波誘導加熱により行うことを特徴とする特許
請求の範囲第1項ないし第4項のいずれか一に記
載の多結晶フツ化リチウム、フツ化カルシウム及
びフツ化マグネシウムの製造方法。 8 上記通電焼結の電源として直流電源を用いる
ことを特徴とする特許請求の範囲第1項ないし第
7項のいずれか一に記載の多結晶フツ化リチウ
ム、フツ化カルシウム及びフツ化マグネシウムの
製造方法。 9 上記通電焼結の電源として直流に数KHz以下
の交流を重畳した電源を用いることを特徴とする
特許請求の範囲第1項ないし第7項のいずれか一
に記載の多結晶フツ化リチウム、フツ化カルシウ
ム及びフツ化マグネシウムの製造方法。
[Scope of Claims] 1. A method for producing polycrystalline lithium fluoride, calcium fluoride, and magnesium fluoride, which comprises the steps described in items a to c below. (a) A mold made of a high-resistance material with at least an electrically insulating inner surface is filled with lithium fluoride, calcium fluoride, or magnesium fluoride powder as a raw material, and the raw material powder is punched with electrode punches facing each other. The process of applying light pressure to the (b) The raw material powder is gradually heated from the outside of the mold to a predetermined temperature of at least 200°C and held at the predetermined temperature for a desired time of several minutes or more. Preheating process. (c) A step of applying a heavy pressure of at least around 700 kg/cm 2 or more to the raw material powder after the above preheating via the electrode punch and energizing it with a high voltage power source of around several KV or more to carry out energization sintering. . 2. The method for producing polycrystalline lithium fluoride, calcium fluoride, and magnesium fluoride according to claim 1, wherein the preheating and electrical sintering are performed in the atmosphere. 3. Claim 1, characterized in that the above preheating and current sintering are performed in an inert gas atmosphere.
A method for producing polycrystalline lithium fluoride, calcium fluoride, and magnesium fluoride as described in 2. 4. The method for producing polycrystalline lithium fluoride, calcium fluoride, and magnesium fluoride according to claim 1, wherein the preheating and electrical sintering are performed in a vacuum. 5. The polycrystalline crystal according to any one of claims 1 to 4, wherein the preheating is performed by an electric heater provided outside the electrically insulating high-resistance material portion of the type. A method for producing lithium fluoride, calcium fluoride and magnesium fluoride. 6. Any one of claims 1 to 4, wherein the preheating is performed by energizing an outer mold made of graphite material provided outside the electrically insulating high-resistance material portion of the mold. 1. The method for producing polycrystalline lithium fluoride, calcium fluoride, and magnesium fluoride according to 1. 7. Claims 1 to 4, characterized in that the preheating is performed by high-frequency induction heating of an outer mold made of graphite material provided outside the electrically insulating high-resistance material portion of the mold. A method for producing polycrystalline lithium fluoride, calcium fluoride, and magnesium fluoride according to any one of the above. 8. Production of polycrystalline lithium fluoride, calcium fluoride, and magnesium fluoride according to any one of claims 1 to 7, characterized in that a DC power source is used as a power source for the energization sintering. Method. 9. Polycrystalline lithium fluoride according to any one of claims 1 to 7, characterized in that a power source in which an alternating current of several KHz or less is superimposed on a direct current is used as a power source for the energization sintering. Method for producing calcium fluoride and magnesium fluoride.
JP56106969A 1981-07-10 1981-07-10 Manufacture of polycrystal lithium fluoride, calcium fluoride and magnesium fluoride Granted JPS589869A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56106969A JPS589869A (en) 1981-07-10 1981-07-10 Manufacture of polycrystal lithium fluoride, calcium fluoride and magnesium fluoride

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56106969A JPS589869A (en) 1981-07-10 1981-07-10 Manufacture of polycrystal lithium fluoride, calcium fluoride and magnesium fluoride

Publications (2)

Publication Number Publication Date
JPS589869A JPS589869A (en) 1983-01-20
JPS6363506B2 true JPS6363506B2 (en) 1988-12-07

Family

ID=14447134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56106969A Granted JPS589869A (en) 1981-07-10 1981-07-10 Manufacture of polycrystal lithium fluoride, calcium fluoride and magnesium fluoride

Country Status (1)

Country Link
JP (1) JPS589869A (en)

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* Cited by examiner, † Cited by third party
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JP6843766B2 (en) * 2015-05-04 2021-03-17 南京中硼▲聯▼康医▲療▼科技有限公司Neuboron Medtech Ltd. Beam shaping assembly for neutron capture therapy
JP6429093B2 (en) * 2016-02-11 2018-11-28 株式会社プラウド Semiconductor crystal processing method and semiconductor crystal processing apparatus
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Also Published As

Publication number Publication date
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