JPS636498B2 - - Google Patents
Info
- Publication number
- JPS636498B2 JPS636498B2 JP3720982A JP3720982A JPS636498B2 JP S636498 B2 JPS636498 B2 JP S636498B2 JP 3720982 A JP3720982 A JP 3720982A JP 3720982 A JP3720982 A JP 3720982A JP S636498 B2 JPS636498 B2 JP S636498B2
- Authority
- JP
- Japan
- Prior art keywords
- burner
- tube
- soot
- port
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
- C03B37/0142—Reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
- C03B2207/06—Concentric circular ports
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
- C03B2207/08—Recessed or protruding ports
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
- C03B2207/16—Non-circular ports, e.g. square or oval
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/42—Assembly details; Material or dimensions of burner; Manifolds or supports
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/70—Control measures
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Gas Burners (AREA)
- Pre-Mixing And Non-Premixing Gas Burner (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Description
【発明の詳細な説明】
本発明は光フアイバ用母材(プレフオーム)製
造における、VAD法による微粒子集合体(スス
体)の積層に使用するガスバーナーの改良に関す
るものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improvement in a gas burner used for laminating fine particle aggregates (soot bodies) by the VAD method in the production of optical fiber preforms.
VAD法によるスス体製造を第1図で示すと、
マツフル3内において、ガスバーナー4からパイ
プ5を経てSiCl4、GeCl4、POCl3、BBr3等の原
料ガスをH2、O2、Ar2等と共に流して、酸水素
炎中で酸化物微粒子とし、この微粒子を、回転し
て上に引き上げられている石英棒などの出発部材
1の先端をターゲツトとして吹き付け、多孔質母
材を長さ方向に沈積、成長させるものであり、こ
の多孔質母材を微粒子集合体(スス体)2とい
う。このスス体は更に加熱溶融されて透明な母材
となる。 Figure 1 shows the production of soot by the VAD method.
In Matsufuru 3, raw material gases such as SiCl 4 , GeCl 4 , POCl 3 , BBr 3 , etc. are passed from gas burner 4 through pipe 5 together with H 2 , O 2 , Ar 2 , etc., and oxide fine particles are generated in an oxyhydrogen flame. The fine particles are sprayed onto the tip of a starting member 1, such as a quartz rod, which is being rotated and pulled up, to deposit and grow the porous base material in the length direction. The material is called a particulate aggregate (soot body) 2. This soot body is further heated and melted to become a transparent base material.
上記ガスバーナー4としては、第2図に示すよ
うな丸型断面や角型断面の多重バーナーが広く用
いられており、多重バーナーの各層でドーバンド
濃度を変えることも行なわれている。 As the gas burner 4, multiple burners having a round cross section or a square cross section as shown in FIG. 2 are widely used, and the dopant concentration is changed in each layer of the multiple burner.
VAD法で光フアイバ多孔質母材を作製する場
合、フアイバ化後のGeO2濃度分布が二乗分布と
なるような、スス体のGeO2濃度分布にする必要
がある。しかしながら、二乗分布となるような製
造条件で製造を行なつても、製造の継続につれて
分布が変化してくる。この原因の一つにバーナー
の先端へのススの付着が挙げられる。 When producing an optical fiber porous base material by the VAD method, it is necessary to create a soot GeO 2 concentration distribution such that the GeO 2 concentration distribution after fiberization is a square distribution. However, even if manufacturing is performed under manufacturing conditions that provide a square distribution, the distribution will change as manufacturing continues. One of the causes of this is the adhesion of soot to the tip of the burner.
バーナーの多重管を構成する各ポートのススの
付着量は、前記ドーパンド濃度の相違等により、
各ボートで異なるので、ススの付着によりみかけ
上バーナーの突出し量に変化が生じ、第3図に示
すように使用前Aに対し、使用後Bのバーナーの
各ポートPは付着したススSによりでこぼこした
状態となつている。 The amount of soot attached to each port that makes up the multiple tubes of the burner depends on the difference in the dopant concentration, etc.
Since each boat is different, the apparent protrusion amount of the burner changes due to soot adhesion, and as shown in Figure 3, each port P of the burner B after use is uneven due to the attached soot S compared to A before use. It is in a state of
本発明は、このようなススの付着による、各ポ
ートからの原料ガスの混合状態の変化およびスス
体とバーナー先端の相対位置のずれを防ぐことを
目的とするもので、本発明では各ポートの突出し
量を変化させることができるバーナーを用いて、
バーナーの各ポートをススの付着量と相当する量
だけ下げることにより、バーナーの経時変化を防
ぐことを特徴とするものである。 The purpose of the present invention is to prevent changes in the mixing state of raw material gas from each port and misalignment of the relative position between the soot body and the burner tip due to such adhesion of soot. Using a burner that can change the amount of protrusion,
This is characterized by preventing the burner from deteriorating over time by lowering each port of the burner by an amount corresponding to the amount of soot attached.
すなわち、本発明はVAD法による光フアイバ
母材製造に用いる多重管バーナーにおいて、多重
管を形成する各管が独立して当該バーナーの中心
軸方向に移動可能とする移動手段を設けてなる多
重管バーナーに関する。 That is, the present invention provides a multi-tube burner used for manufacturing an optical fiber base material by the VAD method, which is provided with a moving means that allows each tube forming the multi-tube to move independently in the direction of the central axis of the burner. Regarding burners.
本発明の特に好ましい実施態様としては、移動
手段が、ガラス微粒子合成中のバーナー先端の所
定位置からのずれの測定装置を有する上記多重管
バーナーが挙げられる。これを第4図に示すと、
制御前C、制御後Dとなる。この際、第5図に示
すようにレーザ光Rなどでススの付着量を測定す
ることにより、バーナーBの各ポートP1,P2,
P3を各ポート駆動用モーターM1,M2,M3で自
動的に駆動し、更に精度を上げることも可能にな
る。また、各ポートの先端は必ずしも同一平面上
になくてもよく、要するに各ポートの先端位置の
経時変化を抑えればよいということである。 A particularly preferred embodiment of the present invention is the multi-tube burner described above, in which the moving means has a device for measuring the deviation of the burner tip from a predetermined position during glass particle synthesis. This is shown in Figure 4.
C before control and D after control. At this time, as shown in FIG. 5, by measuring the amount of soot attached using a laser beam R, etc., each port P 1 , P 2 ,
It is also possible to automatically drive P 3 with each port drive motor M 1 , M 2 , M 3 to further improve accuracy. Further, the tips of each port do not necessarily have to be on the same plane; in short, it is sufficient to suppress changes in the tip position of each port over time.
更にスス付着量をX線透視などで製造中に連続
して測定し、X線検出器の出力信号と各ポート駆
動装置を結び、フイードバツク回路を構成すれ
ば、製造中も常に一定の分布のフアイバが得られ
る。 Furthermore, if the amount of soot adhesion is continuously measured during manufacturing using X-ray fluoroscopy, etc., and a feedback circuit is configured by connecting the output signal of the X-ray detector to each port drive device, it is possible to maintain a constant fiber distribution even during manufacturing. is obtained.
従来の調節不可のバーナーでは帯域が1.0G
Hz・Kmから0.3GHz・Kmまで劣化するに対し、本
発明の調節可能のバーナーを用いることにより、
常に伝送帯域0.8〜1GHz・Kmで安定したガラスフ
アイバを得ることができる。 Conventional non-adjustable burners have a bandwidth of 1.0G
By using the adjustable burner of the present invention,
A stable glass fiber can always be obtained with a transmission band of 0.8 to 1 GHz/Km.
実施例
各ポートの先端が同一平面上にある4重管バー
ナーを用いて、VAD法によりGI型屈折率分布の
スス体を合成した。このスス体を脱水・透明化し
た後延伸して、これに石英管をかぶせた光フアイ
バ母材を線引したところ、伝送帯域1GHz・Kmの
広帯域フアイバが得られた。Example A soot body with a GI-type refractive index distribution was synthesized by the VAD method using a quadruple tube burner in which the tips of each port were on the same plane. When this soot material was dehydrated and made transparent, it was stretched, and an optical fiber base material covered with a quartz tube was drawn, resulting in a broadband fiber with a transmission band of 1 GHz/km.
約10日間連続して製造したところ、得られるフ
アイバの帯域が徐々に劣化し、600MHz・Kmとな
つた。該4重管バーナーを測定装置により観察し
たところ、第2ポートの先端に、均一に固くガラ
スが付着しており、その厚さは0.3mmであつた。
そこで、この第2ポートをバーナー軸方向に0.3
mm移動させて、第2ポート先端が他のポートと同
一平面となるようにして、再びGI型スス体を合
成し、フアイバ化したところ、該フアイバの伝送
帯域は1GHz・Kmと回復した。 After continuous production for about 10 days, the bandwidth of the resulting fiber gradually deteriorated to 600MHz/Km. When the quadruple tube burner was observed using a measuring device, it was found that glass was adhered uniformly and firmly to the tip of the second port, and its thickness was 0.3 mm.
Therefore, we installed this second port by 0.3 in the direction of the burner axis.
When the GI type soot body was synthesized again by moving it by mm so that the tip of the second port was on the same plane as the other ports and making it into a fiber, the transmission band of the fiber was restored to 1 GHz·Km.
第1図はVAD法によるスス体製造の概略を示
す図であり、第2図は、多重バーナーの1例の断
面図であり、第3図は、多重バーナーの各ポート
の使用前と使用後の状態を示す側断面図であり、
第4図は使用多重バーナーの各ポートの制御前と
本発明制御後の状態を示す側断面図であり、第5
図は本発明方法の一実施態様を示す図である。
Figure 1 is a diagram showing the outline of soot body production using the VAD method, Figure 2 is a cross-sectional view of an example of a multiple burner, and Figure 3 is a diagram showing each port of the multiple burner before and after use. It is a side sectional view showing the state of
FIG. 4 is a side sectional view showing the state of each port of the multiplex burner used before control and after the control according to the present invention;
The figure shows one embodiment of the method of the present invention.
Claims (1)
多重管バーナーにおいて、多重管を形成する各管
が独立して当該バーナーの中心軸方向に移動可能
とする移動手段を設けてなる多重管バーナー。 2 移動手段が、ガラス微粒子合成中のバーナー
先端の所定位置からのずれの測定装置を有する特
許請求の範囲第1項に記載の多重管バーナー。[Claims] 1. A multi-tube burner used for manufacturing an optical fiber base material by the VAD method, which is provided with a moving means that allows each tube forming the multi-tube to move independently in the direction of the central axis of the burner. Multi-tube burner. 2. The multi-tube burner according to claim 1, wherein the moving means includes a device for measuring the deviation of the burner tip from a predetermined position during glass particle synthesis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3720982A JPS58156545A (en) | 1982-03-11 | 1982-03-11 | Multitube burner for manufacturing optical fiber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3720982A JPS58156545A (en) | 1982-03-11 | 1982-03-11 | Multitube burner for manufacturing optical fiber |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58156545A JPS58156545A (en) | 1983-09-17 |
| JPS636498B2 true JPS636498B2 (en) | 1988-02-10 |
Family
ID=12491198
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3720982A Granted JPS58156545A (en) | 1982-03-11 | 1982-03-11 | Multitube burner for manufacturing optical fiber |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58156545A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100640405B1 (en) | 2004-12-16 | 2006-10-31 | 삼성전자주식회사 | Burner for Fiber Optic Substrate Deposition |
-
1982
- 1982-03-11 JP JP3720982A patent/JPS58156545A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58156545A (en) | 1983-09-17 |
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