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JPS6366908B2 - - Google Patents
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JPS6366908B2 - - Google Patents

Info

Publication number
JPS6366908B2
JPS6366908B2 JP60268588A JP26858885A JPS6366908B2 JP S6366908 B2 JPS6366908 B2 JP S6366908B2 JP 60268588 A JP60268588 A JP 60268588A JP 26858885 A JP26858885 A JP 26858885A JP S6366908 B2 JPS6366908 B2 JP S6366908B2
Authority
JP
Japan
Prior art keywords
waste liquid
etching
solution
iron
ferric chloride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60268588A
Other languages
Japanese (ja)
Other versions
JPS62130285A (en
Inventor
Yorio Nakaji
Shoichi Ishihara
Junsuke Ooishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Inc
Original Assignee
Toppan Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Printing Co Ltd filed Critical Toppan Printing Co Ltd
Priority to JP26858885A priority Critical patent/JPS62130285A/en
Publication of JPS62130285A publication Critical patent/JPS62130285A/en
Publication of JPS6366908B2 publication Critical patent/JPS6366908B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/46Regeneration of etching compositions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)

Description

【発明の詳細な説明】[Detailed description of the invention]

〔産業上の利用分野〕 本発明は、重金属を含有する塩化第二鉄エツチ
ング廃液から重金属分を除去し、エツチング能力
を回復した塩化第二鉄液に再生する方法の改良に
関する。 〔従来の技術〕 塩化第二鉄液は、鋼、銅、ステンレス鋼、ニツ
ケル合金等からなる金属板をエツチング処理する
ためのエツチング液として多用されている。この
エツチング液は、繰返し使用することによつて溶
込んだ重金属が液内に蓄積され、かつ三価の鉄イ
オンが二価に還元されて塩化第一鉄になり、その
結果エツチング能力が低下して、廃液として廃棄
されねばならず、公害上問題となつていた。その
ため、このようなエツチング廃液を再生して、再
使用することが望まれていた。 従来、塩化第二鉄エツチング廃液の再生方法と
して、特開昭59−121123号公報に記載されている
方法が知られている。この方法は、塩化第二鉄エ
ツチング廃液に塊状の金属鉄を加え、その後加熱
して析出した重金属を除去し、次いで塩素ガスを
吹込んで廃液中の二価の鉄イオンを三価にするこ
とからなる。しかし、この方法は、金属鉄を加え
た後の廃液を加熱すると、局部的な過加熱あるい
は一時間に過加熱が起きた場合、爆発的に反応が
生じ、反応器内の圧力が急上昇して液もれやガス
もれを生じたり、廃液が高温となつて反応器の材
質上の問題を生じたりするなどの装置保全上の欠
点があり、その改善が望まれていたものである。 〔発明が解決しようとする問題点〕 本発明は、上記事情の下になされたものであつ
て、多量の重金属を含有する塩化第二鉄エツチン
グ廃液を、何ら装置の損傷を生ずることなく、安
全にかつ効率よく再生する方法を提供することを
目的とする。 〔問題点を解決するための手段〕 本発明は、重金属を含有する塩化第二鉄エツチ
ング廃液を予め加熱し、この加熱廃液に金属鉄を
加え反応させ、析出した重金属成分を除去し、次
いで廃液に塩素ガスを吹きこむことにより廃液中
の二価の鉄イオンを酸化して三価の鉄イオンとす
ることからなる塩化第二鉄エツチング廃液の再生
方法を提供するものである。 上述の本発明の方法において、金属鉄を加える
前のエツチング廃液の加熱温度は、60〜120℃で
あるのが好ましく、より好ましくは90〜100℃で
ある。60℃以下では反応が遅すぎ、120℃以上で
は反応の制御が困難である。また、加熱されたエ
ツチング廃液に対して加えられる金属鉄は、塊状
のものであるのが好ましい。粉末状の金属鉄では
反応が急激に進行し、従来技術と同様の問題が生
ずるため好ましくない。なお、加熱されたエツチ
ング廃液に対しては金属鉄だけでなく、それに加
えてFe(OH)2含有スラツジを触媒として加える
ことが好ましい。このFe(OH)2含有スラツジは、
エツチング廃液から除去された重金属成分を回収
し、これから分離回収したものである。 〔実施例〕 以下、図面を参照して、本発明の実施例につい
て説明する。 図面は、実施例において用いたエツチング液再
生工程を示すフローシートである。まず、廃液槽
1に貯えられた塩化第二鉄エツチング廃液を、加
熱器2を通して100℃に加熱する。加熱器2の熱
源は、スチーム源3からのスチームである。次
に、100℃に加熱したエツチング廃液を反応器4
に導入する。反応器4は、水平軸5の回りを回転
可能な円筒形容器である。反応器4に導入したエ
ツチング廃液に対して、塊状の金属鉄6を加え
る。その結果、塩化第二鉄は塩化第一鉄に還元さ
れるとともに、廃液中の重金属成分は鉄と反応し
て析出沈殿する。このような反応は、反応器4の
回転によつて均一に行なわれる。なお、反応器4
内の廃液には、金属鉄に加えて、後述する別途回
収されたFe(OH)2含有スラツジが触媒として加
えられ、それによつて反応をより効率よく行なう
ことが可能である。 第2図に、加熱器2における加温中および反応
器4における反応中のエツチング廃液中に溶解す
るNiおよびCrの量、および廃液のPHの経時変化
を示す。第2のグラフから、NiおよびCrはとも
に反応器4における反応により急速に析出沈殿
し、廃液中の濃度が減少することがわかる。例え
ばNiは、反応開始から2.5〜3時間で400〜
500ppmに減少するが、この程度のNi濃度では十
分再生エツチング液として使用可能である。 析出沈殿した重金属成分を含むエツチング廃液
を、次いで撹拌槽7に導入し、そこで均一に撹拌
する。この撹拌槽7には、水8が加えられ、廃液
が所定の濃度となるよう希釈される。その後、廃
液を洗浄水としての水8とともにフイルタープレ
ス9に送り、そこで過し、液と固形物とに分
離する。固形分のうちフイルタープレスの前方左
側に堆積した軽いスラツジは、Ni等の重金属分
の少ないFe(OH)2含有スラツジ10であり、フ
イルタープレスの手前右側に堆積した重いスラツ
ジは、Ni等の重金属分の多いNi含有スラツジ1
1である。Fe(OH)2含有スラツジ10は、金属
鉄6とともに触媒として反応器4内に導入され
る。Ni含有スラツジ11は、別途回収されて、
Ni回収原料として販売に供される。本実施例に
より得たNi含有スラツジの組成(重量%)を下
記表1に示す。
[Industrial Field of Application] The present invention relates to an improvement in a method for removing heavy metals from a ferric chloride etching waste solution containing heavy metals and regenerating it into a ferric chloride solution with restored etching ability. [Prior Art] Ferric chloride solution is frequently used as an etching solution for etching metal plates made of steel, copper, stainless steel, nickel alloy, etc. When this etching solution is used repeatedly, dissolved heavy metals accumulate in the solution, and trivalent iron ions are reduced to divalent ones and become ferrous chloride, resulting in a decrease in etching ability. Therefore, it had to be disposed of as waste liquid, which caused a pollution problem. Therefore, it has been desired to regenerate and reuse such etching waste liquid. Conventionally, as a method for regenerating ferric chloride etching waste liquid, a method described in Japanese Patent Application Laid-open No. 121123/1983 has been known. This method involves adding lumps of metallic iron to the ferric chloride etching waste liquid, then heating it to remove the precipitated heavy metals, and then blowing chlorine gas to convert the divalent iron ions in the waste liquid to trivalent. Become. However, in this method, when heating the waste liquid after adding metallic iron, if local overheating or overheating occurs over an hour, an explosive reaction will occur and the pressure inside the reactor will rise rapidly. There are drawbacks in terms of equipment maintenance, such as liquid leaks and gas leaks, and problems with the material of the reactor due to the high temperature of the waste liquid, and improvements have been desired. [Problems to be Solved by the Invention] The present invention has been made under the above circumstances, and is capable of safely handling ferric chloride etching waste liquid containing a large amount of heavy metals without causing any damage to the equipment. The purpose is to provide a method for reproducing information quickly and efficiently. [Means for Solving the Problems] The present invention involves heating a ferric chloride etching waste solution containing heavy metals in advance, adding metallic iron to the heated waste solution to cause a reaction, removing precipitated heavy metal components, and then discharging the waste solution. The present invention provides a method for regenerating a ferric chloride etching waste solution, which comprises blowing chlorine gas into the waste solution to oxidize divalent iron ions in the waste solution into trivalent iron ions. In the method of the present invention described above, the heating temperature of the etching waste liquid before adding metal iron is preferably 60 to 120°C, more preferably 90 to 100°C. Below 60°C, the reaction is too slow, and above 120°C, it is difficult to control the reaction. Further, it is preferable that the metal iron added to the heated etching waste liquid be in the form of lumps. Powdered metallic iron is not preferred because the reaction proceeds rapidly and causes the same problems as in the prior art. Note that it is preferable to add not only metal iron but also Fe(OH) 2 -containing sludge as a catalyst to the heated etching waste liquid. This Fe(OH) 2- containing sludge is
The heavy metal components removed from the etching waste liquid are recovered and separated and recovered from this. [Example] Hereinafter, an example of the present invention will be described with reference to the drawings. The drawing is a flow sheet showing the etching solution regeneration process used in the examples. First, the ferric chloride etching waste liquid stored in the waste liquid tank 1 is heated to 100° C. through the heater 2. The heat source of the heater 2 is steam from a steam source 3. Next, the etching waste liquid heated to 100℃ was poured into the reactor 4.
to be introduced. Reactor 4 is a cylindrical vessel rotatable around a horizontal axis 5. A lump of metallic iron 6 is added to the etching waste liquid introduced into the reactor 4. As a result, ferric chloride is reduced to ferrous chloride, and heavy metal components in the waste liquid react with iron and precipitate. Such a reaction is uniformly carried out by rotating the reactor 4. In addition, reactor 4
In addition to metallic iron, separately recovered Fe(OH) 2 -containing sludge, which will be described later, is added to the waste liquid as a catalyst, thereby making it possible to carry out the reaction more efficiently. FIG. 2 shows the amounts of Ni and Cr dissolved in the etching waste liquid during heating in the heater 2 and during the reaction in the reactor 4, and changes over time in the pH of the waste liquid. From the second graph, it can be seen that both Ni and Cr rapidly precipitate due to the reaction in the reactor 4, and the concentration in the waste liquid decreases. For example, Ni becomes 400~2.5~3 hours from the start of the reaction.
Although the Ni concentration decreases to 500 ppm, it can be used as a regenerated etching solution. The etching waste liquid containing the precipitated heavy metal components is then introduced into the stirring tank 7, where it is uniformly stirred. Water 8 is added to this stirring tank 7, and the waste liquid is diluted to a predetermined concentration. Thereafter, the waste liquid is sent to a filter press 9 together with water 8 as washing water, where it is filtered and separated into liquid and solids. Of the solid content, the light sludge deposited on the left side in front of the filter press is Fe(OH) 2 -containing sludge 10 with a low content of heavy metals such as Ni, and the heavy sludge deposited on the right side in front of the filter press is sludge containing heavy metals such as Ni. High Ni-containing sludge 1
It is 1. Fe(OH) 2 -containing sludge 10 is introduced into reactor 4 together with metal iron 6 as a catalyst. Ni-containing sludge 11 is collected separately,
It is sold as recovered Ni raw material. The composition (wt%) of the Ni-containing sludge obtained in this example is shown in Table 1 below.

【表】 表1から明らかなように、Ni含有スラツジは
Ni分が極めて高く、Ni資源として有用に活用で
きる。 一方、液を塩素反応槽12に送り、そこに塩
素ガス13を吹込む。その結果、液中の第一鉄
イオン(F2+)は、第二鉄イオン(F3+)に酸化
される。即ち、塩化第一鉄は塩化第二鉄とされ
る。このようにして得た再生エツチング液を貯槽
14に送り、そこに貯える。 以上のプロセスにより再生されたエツチング液
の組成を、新液および廃液の組成とともに下記表
2に示す。
[Table] As is clear from Table 1, Ni-containing sludge is
It has an extremely high Ni content and can be usefully used as a Ni resource. On the other hand, the liquid is sent to a chlorine reaction tank 12, and chlorine gas 13 is blown into it. As a result, ferrous ions (F 2+ ) in the liquid are oxidized to ferric ions (F 3+ ). That is, ferrous chloride is treated as ferric chloride. The regenerated etching solution thus obtained is sent to storage tank 14 and stored there. The composition of the etching solution regenerated by the above process is shown in Table 2 below, along with the compositions of the new solution and waste solution.

〔発明の効果〕〔Effect of the invention〕

本発明の方法により、以下に示す種々の優れた
効果が得られる。 (1) 本発明の方法では、従来の方法と異なり、エ
ツチング廃液を加熱した後に金属鉄を加えてい
るため、反応は徐々にかつ均一に行なわれ、操
作の安全および装置の保全の点で全く問題を生
じない。 (2) 新たなエツチング液の購入費用およびエツチ
ング廃液の処分のための費用が不要なため、エ
ツチングコストが大幅に減少する。例えば約50
〜60%減少する。特に、エツチングプロセスに
直接接続することにより、エツチング廃液や再
生液の輸送のための費用が不要となる。 (3) 再生液以外の他の副生物もすべて再利用可能
なため、廃液するものがなく、公害問題が生じ
ない。特にNi、Cr、Cu等を高濃度で含有する
Ni含有スラツジは全量資源化可能である。 (4) エツチング液の品質が常に一定に維持される
ため、一定精度でのエツチングが可能となり、
品質管理に役立つ。特に、近年、シヤドウマス
クの材質が鉄からアンバー(ニツケル合金)に
移行することが計画されているが、そのような
シヤドウマスクをエツチングにより製造する場
合、エツチング液中に多量のニツケルが溶込
み、これがエツチングを阻害し、シヤドウマス
クの精度を低下させてしまうが、本発明の方法
によると、ニツケル分はエツチング廃液から効
果的に除去されるため、シヤドウマスクの精度
を損なうことはない。 (5) 廃液にFe(OH)2スラツジを加えることによ
り、(OH-+H+→H2O)水素ガスの発生を根
本的に押えるので爆発の心配がほとんどなくな
る。
By the method of the present invention, various excellent effects shown below can be obtained. (1) Unlike conventional methods, in the method of the present invention, metal iron is added after heating the etching waste solution, so the reaction occurs gradually and uniformly, which is completely conducive to operational safety and equipment maintenance. Does not cause any problems. (2) Etching costs are significantly reduced because there is no need to purchase new etching liquid or to dispose of etching waste liquid. For example about 50
~60% decrease. In particular, the direct connection to the etching process eliminates the cost of transporting etching waste liquid and regenerating liquid. (3) All by-products other than the regenerated liquid can be reused, so there is no waste liquid and no pollution problem occurs. Contains particularly high concentrations of Ni, Cr, Cu, etc.
All Ni-containing sludge can be recycled. (4) Since the quality of the etching solution is always maintained constant, etching can be performed with constant accuracy.
Useful for quality control. In particular, in recent years, it has been planned that the material of shadow masks will shift from iron to amber (nickel alloy), but when such shadow masks are manufactured by etching, a large amount of nickel dissolves into the etching solution, which causes the etching process. However, according to the method of the present invention, the nickel component is effectively removed from the etching waste solution, so that the accuracy of the shadow mask is not impaired. (5) By adding Fe(OH) 2 sludge to the waste liquid, the generation of hydrogen gas (OH - +H + →H 2 O) is fundamentally suppressed, so there is almost no risk of explosion.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、本発明の一実施例に係るエツチング
廃液再生プロセスのフローシート、および第2図
は、加熱および反応中における廃液中に溶解する
NiおよびCrの量、および廃液のPHを経時変化を
示すグラフである。 2……加熱器、4……反応器、9……フイルタ
ープレス、12……塩素反応槽。
FIG. 1 is a flow sheet of the etching waste liquid regeneration process according to an embodiment of the present invention, and FIG. 2 shows the etching waste liquid regeneration process during heating and reaction.
3 is a graph showing changes over time in the amount of Ni and Cr and the pH of waste liquid. 2... Heater, 4... Reactor, 9... Filter press, 12... Chlorine reaction tank.

Claims (1)

【特許請求の範囲】[Claims] 1 重金属を含有する塩化第二鉄エツチング廃液
を予め60〜120℃に加熱し、この加熱廃液に金属
鉄を加え反応させ、析出した重金属成分を除去
し、その重金属成分からFe(OH)2含有スラツジ
とNi含有スラツジとを分離回収し、Fe(OH)2
有スラツジを加熱廃液に前記金属鉄との反応のた
めの触媒として加え、次いで重金属成分が除去さ
れた廃液に塩素ガスを吹込むことにより廃液中の
二価の鉄イオンを酸化して三価の鉄イオンとする
ことからなる塩化第二鉄エツチング廃液の再生方
法。
1 Preheat ferric chloride etching waste liquid containing heavy metals to 60 to 120°C, add metallic iron to this heated waste liquid and react, remove precipitated heavy metal components, and remove Fe(OH) 2 from the heavy metal components. Separate and recover the sludge and Ni-containing sludge, add the Fe(OH) 2- containing sludge to the heated waste liquid as a catalyst for the reaction with the metal iron, and then blow chlorine gas into the waste liquid from which heavy metal components have been removed. A method for regenerating a ferric chloride etching waste solution, which comprises oxidizing divalent iron ions in the waste solution to trivalent iron ions.
JP26858885A 1985-11-29 1985-11-29 Method for regenerating etching waste liquid containing ferric chloride Granted JPS62130285A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26858885A JPS62130285A (en) 1985-11-29 1985-11-29 Method for regenerating etching waste liquid containing ferric chloride

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26858885A JPS62130285A (en) 1985-11-29 1985-11-29 Method for regenerating etching waste liquid containing ferric chloride

Publications (2)

Publication Number Publication Date
JPS62130285A JPS62130285A (en) 1987-06-12
JPS6366908B2 true JPS6366908B2 (en) 1988-12-22

Family

ID=17460615

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26858885A Granted JPS62130285A (en) 1985-11-29 1985-11-29 Method for regenerating etching waste liquid containing ferric chloride

Country Status (1)

Country Link
JP (1) JPS62130285A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020073126A (en) * 2002-09-05 2002-09-19 서보창 The reductor and remover of waste iron chloride's water solution
KR100451052B1 (en) * 2002-10-22 2004-10-13 엘지마이크론 주식회사 Method of recycling etching solution for manufacturing shadow mask and apparatus therefor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59121123A (en) * 1982-12-24 1984-07-13 Toppan Printing Co Ltd Reclamation of solution of ferric chloride

Also Published As

Publication number Publication date
JPS62130285A (en) 1987-06-12

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