JPS639611B2 - - Google Patents
Info
- Publication number
- JPS639611B2 JPS639611B2 JP55186863A JP18686380A JPS639611B2 JP S639611 B2 JPS639611 B2 JP S639611B2 JP 55186863 A JP55186863 A JP 55186863A JP 18686380 A JP18686380 A JP 18686380A JP S639611 B2 JPS639611 B2 JP S639611B2
- Authority
- JP
- Japan
- Prior art keywords
- optical fiber
- fixing
- fiber
- photoelectric conversion
- array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4249—Packages, e.g. shape, construction, internal or external details comprising arrays of active devices and fibres
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4202—Packages, e.g. shape, construction, internal or external details for coupling an active element with fibres without intermediate optical elements, e.g. fibres with plane ends, fibres with shaped ends, bundles
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4212—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element being a coupling medium interposed therebetween, e.g. epoxy resin, refractive index matching material, index grease, matching liquid or gel
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Arrangements For Transmission Of Measured Signals (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Description
【発明の詳細な説明】
本発明はアレイ状に並べた光電変換素子とフア
イバとの組立てに関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to the assembly of photoelectric conversion elements and fibers arranged in an array.
LED等の発光装置から出射される光を効率良
く光フアイバに入射すること、或は光フアイバ同
志を効率良く接続すること、或は光フアイバから
受光装置に効率良く入射させることは、光の伝送
効率を低下させないために重要な課題であり、こ
のため、発光装置と光フアイバ、受光装置と光フ
アイバの位置合せが精度良く行なわれなければな
らない。 Light transmission is the key to efficiently inputting light emitted from a light emitting device such as an LED into an optical fiber, efficiently connecting optical fibers, or efficiently inputting light from an optical fiber to a light receiving device. This is an important issue in order not to reduce efficiency, and for this reason, the alignment of the light emitting device and the optical fiber, and the alignment of the light receiving device and the optical fiber must be performed with high precision.
フオトリソグラフイ技術を用いて、Siウエハに
V溝を形成し、前記V溝に光フアイバをマウント
することにより、光フアイバとアレイ化された発
光装置或は受光装置を高精度で整列することがで
きる。 By forming a V-groove in a Si wafer using photolithography technology and mounting an optical fiber in the V-groove, it is possible to align the optical fiber and the arrayed light emitting device or light receiving device with high precision. can.
フアイバを固定する技術としてはこれまで樹脂
で直接固定するか、周囲にメタライズをほどこし
たフアイバをAu系合金又はハンダで固定する方
法が用いられている。 Techniques for fixing fibers have so far been to directly fix them with resin, or to fix the fibers with metallized surroundings using Au-based alloys or solder.
しかしながら、樹脂などを流し込んで、光フア
イバを固着する際、樹脂が固まるのにかなりの時
間を要し、その間に、素子とフアイバとが位置ず
れを起し、光フアイバが程度もバラバラに浮くと
云う欠点があつた。これを防ぐため光フアイバを
何らかの方法でおさえておく必要があつた。従つ
てアレイ素子の場合、各エレメント毎に調整しな
ければならず、実用的でないと云う問題があつ
た。 However, when pouring resin and fixing the optical fiber, it takes a considerable amount of time for the resin to harden, and during that time, the element and the fiber may become misaligned, causing the optical fiber to float to varying degrees. There was a drawback. To prevent this, it was necessary to hold down the optical fiber in some way. Therefore, in the case of an array element, adjustment must be made for each element, which is impractical.
本発明は上述の欠点を解消するもので、アレイ
状の発光又は受光素子と光フアイバを結合させ固
定する時、まず各光フアイバをフアイバ固定台に
速乾性の接着剤で仮止め固定し、しかるのちに樹
脂等で完全に固定して組み立てたることを特徴と
するアレイ状光電変換素子と光フアイバの組立法
を提供するものである。 The present invention solves the above-mentioned drawbacks, and when an array of light emitting or light receiving elements and optical fibers are combined and fixed, each optical fiber is first temporarily fixed on a fiber fixing base with a quick-drying adhesive, and then The present invention provides a method for assembling arrayed photoelectric conversion elements and optical fibers, which is characterized in that the arrayed photoelectric conversion elements and optical fibers are assembled by completely fixing them with resin or the like.
すなわち、光フアイバをフアイバ固定台の溝の
正常な位置に速乾性接着剤で仮固定する。しかる
後、該光フアイバを樹脂等で固着するものであ
る。 That is, the optical fiber is temporarily fixed in a normal position in the groove of the fiber fixing table using a quick-drying adhesive. After that, the optical fiber is fixed with resin or the like.
以下本発明の実施例を詳述する。 Examples of the present invention will be described in detail below.
図はアレイ化された光半導体素子と光フアイバ
の結合を行なう場合に、フアイバ固定台のV溝内
に光フアイバをマウントし、速乾性接着剤で光フ
アイバを仮固定する実施例を示す図である。 The figure shows an example of mounting an optical fiber in a V-groove of a fiber fixing table and temporarily fixing the optical fiber with a quick-drying adhesive when bonding an array of optical semiconductor elements and an optical fiber. be.
ここでは端面取り出し型の発光素子の場合につ
いて述べるが、本発明の主旨によれば、特にこの
実施例に限らないことは明らかである。 Although the case of an edge-emitting type light emitting element will be described here, it is clear that the present invention is not limited to this embodiment in particular according to the gist of the present invention.
発光素子アレイのピツチに合わせてSi基板にフ
オトリソグラフイ技術でV溝を刻み、その溝にフ
アイバを並べる。発光素子アレイとフアイバを対
向させ各エレメント毎にフアイバをV溝に沿つて
スライドさせ、最適位置を出し瞬間接着剤(アロ
ンアロフアとかセメダイン3000等)で仮止めを行
なう。 V-grooves are cut into the Si substrate using photolithography technology to match the pitch of the light-emitting element array, and fibers are lined up in the grooves. The light emitting element array and the fibers are faced to each other, and the fibers are slid along the V-groove for each element to find the optimal position and temporarily fixed with an instant adhesive (Aron Alloa, Cemedine 3000, etc.).
図において、1は発光素子アレイ、2は活性
層、3は発光部、4は下部電極、5はストライプ
状の上部電極である。6はSi基板にフオトリソグ
ラフイ技術によりV溝を形成したフアイバ固定台
であり、7は光フアイバである。8はフアイバ固
定台6に光フアイバ7を瞬間接着剤で仮止めした
固定部である。全部のフアイバを仮止めした後、
全面に完全固定の為の樹脂をつけ固定する。 In the figure, 1 is a light emitting element array, 2 is an active layer, 3 is a light emitting part, 4 is a lower electrode, and 5 is a striped upper electrode. 6 is a fiber fixing base in which a V-groove is formed on a Si substrate by photolithography, and 7 is an optical fiber. Reference numeral 8 denotes a fixing portion in which the optical fiber 7 is temporarily fixed to the fiber fixing base 6 with an instant adhesive. After temporarily fixing all the fibers,
Apply resin to the entire surface for complete fixation.
以上の説明から明らかな如く、フアイバを完全
に固定する樹脂止めの前にフアイバを各エレメン
トに位置合わせし、瞬間接着剤で固定し樹脂止め
中に位置ずれしないようにしたのち、完全な樹脂
固定を行なう。 As is clear from the above explanation, before applying the resin fixing to completely fix the fibers, the fibers are aligned with each element and fixed with instant adhesive to prevent them from shifting during the resin fixing, and then the fibers are completely fixed with the resin. Do this.
本発明の方法により、長時間かかる樹脂固定中
にフアイバが位置ずれしないような支持を行なう
ことが不要になり、又一本一本樹脂固定する方法
に比べて、仮止めを行なつたあとなので1回です
べての樹脂固定が可能となり時間の大巾な短縮と
高い位置合わせ精度が保たれる。 The method of the present invention eliminates the need to provide support to prevent the fibers from shifting during resin fixation, which takes a long time, and compared to the method of fixing each fiber one by one with resin, it is unnecessary to provide support after temporarily fixing the fibers. All the resin can be fixed in one go, which greatly reduces time and maintains high positioning accuracy.
なお本方法はアレイ素子に対して特に有効な固
定法であるが樹脂が固定する迄特に支持する必要
がないことから単体の素子に対しても有効であ
る。 This method is particularly effective for fixing array elements, but it is also effective for single elements since there is no need for special support until the resin is fixed.
本実施例では半導体発光装置と光フアイバとの
結合について説明したが、フアイバと半導体受光
装置との結合についても同様に使用できる。 In this embodiment, a connection between a semiconductor light emitting device and an optical fiber has been described, but the present invention can be similarly used for a connection between a fiber and a semiconductor light receiving device.
図面は本発面の発光素子アレイとフアイバとの
組立てを説明する斜視図である。
1:発光素子アレイ、3:発光部、6:フアイ
バ固定台、7:光フアイバ。
The drawing is a perspective view illustrating the assembly of the light emitting element array and fiber according to the present invention. 1: Light emitting element array, 3: Light emitting section, 6: Fiber fixing base, 7: Optical fiber.
Claims (1)
体発光装置、或は半導体受光素子がアレイ状に形
成された半導体受光装置の該半導体発光素子或は
該半導体受光素子(アレイ状光電変換素子)と、 該アレイ状光電変換素子のアレイのピツチに合
わせて、フオトリソグラフイ技術を用いて、Siウ
エハにV溝を形成したフアイバ固定台の、前記V
溝に光フアイバをマウントすることにより、光フ
アイバとアレイ化された発光装置或は受光装置を
整列するアレイ状光電変換素子と光フアイバとを
結合固定する方法に於て、上記半導体発光装置或
は半導体受光装置のアレイ状光電変換素子と上記
フアイバ固定台のV溝に並べられた光フアイバを
対向させ、各エレメント毎に光フアイバの最適位
置を出した状態でフアイバ固定台に光フアイバを
速乾性接着剤で仮止め固定し、しかる後、樹脂等
で完全に固定することを特徴とするアレイ状光電
変換素子と光フアイバの組立て方法。[Scope of Claims] 1. A semiconductor light-emitting device in which semiconductor light-emitting elements are formed in an array, or a semiconductor light-receiving device in which semiconductor light-receiving elements are formed in an array. photoelectric conversion elements) and the fiber fixing base in which V grooves are formed in the Si wafer using photolithography technology to match the pitch of the array of the arrayed photoelectric conversion elements.
In a method for coupling and fixing an arrayed photoelectric conversion element and an optical fiber, the optical fiber is aligned with the optical fiber and the arrayed light emitting device or light receiving device by mounting the optical fiber in the groove. The arrayed photoelectric conversion element of the semiconductor photodetector and the optical fibers arranged in the V-groove of the fiber fixing table are placed facing each other, and the optical fibers are quickly dried on the fiber fixing table with the optimum position of the optical fibers exposed for each element. A method for assembling an arrayed photoelectric conversion element and optical fiber, characterized by temporarily fixing them with an adhesive and then completely fixing them with a resin or the like.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18686380A JPS57108719A (en) | 1980-12-26 | 1980-12-26 | Assembling method of array type photoelectric transducer and optical fiber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18686380A JPS57108719A (en) | 1980-12-26 | 1980-12-26 | Assembling method of array type photoelectric transducer and optical fiber |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57108719A JPS57108719A (en) | 1982-07-06 |
| JPS639611B2 true JPS639611B2 (en) | 1988-03-01 |
Family
ID=16195973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18686380A Granted JPS57108719A (en) | 1980-12-26 | 1980-12-26 | Assembling method of array type photoelectric transducer and optical fiber |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57108719A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102013012609B4 (en) | 2013-07-26 | 2024-06-27 | Carl Zeiss Microscopy Gmbh | Optoelectronic detector, especially for high-resolution light scanning microscopes and light scanning microscope |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5364531A (en) * | 1976-11-20 | 1978-06-09 | Nippon Telegr & Teleph Corp <Ntt> | Photo detector using optical fiber |
-
1980
- 1980-12-26 JP JP18686380A patent/JPS57108719A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57108719A (en) | 1982-07-06 |
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