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JPS6416742A - Thin film-forming material - Google Patents
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JPS6416742A - Thin film-forming material - Google Patents

Thin film-forming material

Info

Publication number
JPS6416742A
JPS6416742A JP16858787A JP16858787A JPS6416742A JP S6416742 A JPS6416742 A JP S6416742A JP 16858787 A JP16858787 A JP 16858787A JP 16858787 A JP16858787 A JP 16858787A JP S6416742 A JPS6416742 A JP S6416742A
Authority
JP
Japan
Prior art keywords
thin film
forming material
complex
barium
hexafluoropentanedionato
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16858787A
Other languages
Japanese (ja)
Other versions
JPH0536440B2 (en
Inventor
Toshio Naka
Shuichi Nakai
Shunsuke Mabuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tosoh Finechem Corp
Original Assignee
Tosoh Finechem Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tosoh Finechem Corp filed Critical Tosoh Finechem Corp
Priority to JP16858787A priority Critical patent/JPS6416742A/en
Publication of JPS6416742A publication Critical patent/JPS6416742A/en
Publication of JPH0536440B2 publication Critical patent/JPH0536440B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

NEW MATERIAL:1,1,1,5,5,5-Hexafluoropentanedionato complex of alkali metal having absorption wavelength at 240-350nm. EXAMPLE:1,1,1,5,5,5-Hexafluoropentanedionato barium complex. USE:A thin film-forming material useful in chemical deposition method. PREPARATION:For example, an aqueous solution of barium chloride dihydrate is reacted with 1,1,1,5,5,5-hexafluoro-2,4-pentanedione to give 1,1,1,5,5,5-hexa fluoropentanedionato barium complex shown by the example.
JP16858787A 1987-07-08 1987-07-08 Thin film-forming material Granted JPS6416742A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16858787A JPS6416742A (en) 1987-07-08 1987-07-08 Thin film-forming material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16858787A JPS6416742A (en) 1987-07-08 1987-07-08 Thin film-forming material

Publications (2)

Publication Number Publication Date
JPS6416742A true JPS6416742A (en) 1989-01-20
JPH0536440B2 JPH0536440B2 (en) 1993-05-31

Family

ID=15870822

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16858787A Granted JPS6416742A (en) 1987-07-08 1987-07-08 Thin film-forming material

Country Status (1)

Country Link
JP (1) JPS6416742A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04134044A (en) * 1990-09-25 1992-05-07 Tosoh Akzo Corp Metal complex for thin film formation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04134044A (en) * 1990-09-25 1992-05-07 Tosoh Akzo Corp Metal complex for thin film formation

Also Published As

Publication number Publication date
JPH0536440B2 (en) 1993-05-31

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