JPH0536440B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Field of Application) The present invention relates to alkaline earth metals such as 1, 1, 1, 5,
This invention relates to a material for forming thin films, which is made of a 5,5-hexafluoropentanedionate complex and is used in chemical deposition methods.

[Problems to be solved by conventional technology and invention]

1,1,1,5,5,5- of alkaline earth metals
There have been no reports of hexafluoropentanedionate complexes yet.

As a result of extensive research, the present inventor discovered that an alkaline earth metal 1,1,1,5,5,5-hexafluoropentanedionate complex is useful as a material for forming a thin film, and has developed the present invention. completed.

[Means for solving problems]

That is, the gist of the present invention is to obtain 1,1,1,5,5,5 alkaline earth metals having an absorption wavelength of 240 nm to 350 nm as measured by an ultraviolet absorption measuring device.
- A material for forming a thin film comprising a hexafluoropentanedionate complex.

[Effect]

The present invention will be explained in more detail below.

The material for forming a thin film according to the present invention is composed of a 1,1,1,5,5,5-hexafluoropentanedionate complex of an alkaline earth metal. This makes it possible to form thin films using steam.

Here, 1, 1, 1, 5,
The 5,5-hexafluoropentanedionate complex includes 1,1,1,5,5,5-hexafluoro-2,4-pentanedionate barium complex or 1,1,1,5,5,5-hexafluoro-2,4-pentanedionate barium complex. Fluoro-
There is a 2,4-pentanedionate strontium complex.

In addition, alkaline earth metals 1, 1, 1, 5,
The 5,5-hexafluoropentanedionate complex has an absorption wavelength of 240 nm to 350 nm as measured by an ultraviolet absorption measuring device.

Furthermore, alkaline earth metals 1, 1, 1, 5,
As the 5,5-hexafluoropentanedionate complex, it is preferable to use one having a vapor pressure of 40 to 200 mmHg, preferably 80 to 160 mmHg at 100°C.

In addition, alkaline earth metals 1, 1, 1, 5,
It is preferable to use a 5,5-hexafluoropentanedionate complex that has been purified by sublimation in order to reduce impurities.

1, 1, 1, 5, of the alkaline earth metal of the present invention
There are no reports regarding the production of 5,5-hexafluoropentanedionate complexes.

When forming a thin film using the thin film forming material of the present invention, a liquid phase deposition method or a vapor phase deposition method may be used, and the vapor phase deposition method is particularly preferred.

When forming a thin film using the material for forming a thin film of the present invention, it is possible to form a thin film under pressure, normal pressure, or reduced pressure, but normal pressure or reduced pressure is preferable.

When forming a thin film using the thin film forming material of the present invention, the substrate may be alumina, aluminum nitride,
These include silicon oxide, magnesium oxide, zirconium oxide, barium titanate, and strontium titanate.

When forming a thin film using the thin film forming material of the present invention, the temperature of the substrate is 400°C to 1000°C;
600°C to 800°C is preferred.

When forming a thin film using the thin film forming material of the present invention, the wavelength of the irradiated ultraviolet rays is 190 nm ~
It is 350nm.

When forming a thin film using the material for forming a thin film of the present invention, the accompanying gas is one or a mixture of two or more of oxygen, air, helium, argon, and nitrogen.

〔Example〕

Next, alkaline earth metals 1, 1, 1, 5, 5,
An example of the production of a 5-hexafluoropentanedionate complex is shown.

Production Example 1 Production of 1,1,1,5,5,5-hexafluoropentanedionate barium complex 15 ml of an aqueous solution in which 5.8 g of barium chloride dihydrate was dissolved was stirred at room temperature, and 1,1 ,1,
A colorless transparent or white solid was produced by adding 10.0 g of 5,5,5-hexafluoro-2,4-pentanedione and stirring for 12 hours. This colorless transparent or white solid is filtered and then hexane is added.
Washed with 10ml.

Furthermore, by sublimating at 90 to 100°C and under reduced pressure conditions of 130 mmHg,
A 1,5,5,5-hexafluoropentanedionate barium complex was obtained.

Production Example 2 Production of 1,1,1,5,5,5-hexafluoropentanedionate strontium complex 20 ml of an aqueous solution in which 5.0 g of strontium nitrate anhydride was dissolved was stirred at room temperature, and 1,1,
A colorless transparent or white solid was produced by adding 10 g of 1,5,5,5-hexafluoro-2,4-pentanedione and stirring for 12 hours. This colorless transparent or white solid is filtered and then hexane is added.
Washed with 10ml.

Further, by sublimating at a temperature of 90 to 100°C and a reduced pressure of 100 mmHg, 1, 1,
A 1,5,5,5-hexafluoropentanedionate strontium complex was obtained.

The compositional analysis of the thin film was performed using an X-ray photoelectron spectrometer (XPS).

An electron microscope was used to measure the thickness of the thin film.

Next, examples will be shown to specifically explain the effects of the present invention.

Example 1 Using an apparatus for organometallic vapor phase chemical deposition, a silicon oxide substrate was heated to 800°C with a high frequency induction heating apparatus, and then 1,1,1,5,5,5-hexafluoropentanedionate was heated. While maintaining the container containing the barium complex at 50°C, oxygen was flowed at a constant rate of 20 ml/min, and the gas released from the container was sent to the reaction chamber where the substrate was located. The 1,1,1,5,5,5-hexafluoropentanedionate barium complex was decomposed on the substrate to form a thin film of barium oxide. The thickness of this film was measured to be 2 μm.

Example 2 After heating an aluminum oxide substrate to 200°C using an organometallic vapor phase chemical deposition apparatus, 1, 1, 1, 5, 5, 5 was applied while irradiating the substrate with a deuterium lamp.
- Oxygen is added to the container containing the hexafluoropentanedionate strontium complex while keeping it at 50℃.
The gas was flowed at a constant rate of 20 ml/min, and the gas coming out of the container was sent to the reaction chamber where the substrate was located. 1, 1, on the board
The 1,5,5,5-hexafluoropentanedionate strontium complex decomposed and a thin film of strontium oxide was formed. The thickness of this film was measured to be 1 μm.

Claims (1)

[Scope of Claims] 1. Formation of a thin film made of a 1,1,1,5,5,5-hexafluoropentanedionate complex of an alkaline earth metal whose absorption wavelength is 240 nm to 350 nm as measured by an ultraviolet absorption measuring device. Material for use. 2. The material for forming a thin film according to claim 1, wherein the alkaline earth metal is barium. 3. The material for forming a thin film according to claim 1, wherein the alkaline earth metal is strontium. 4. The material for forming a thin film according to claim 1, wherein the complex has a vapor pressure of 40 to 200 mmHg at 100°C.