JPS641722B2 - - Google Patents
Info
- Publication number
- JPS641722B2 JPS641722B2 JP16626782A JP16626782A JPS641722B2 JP S641722 B2 JPS641722 B2 JP S641722B2 JP 16626782 A JP16626782 A JP 16626782A JP 16626782 A JP16626782 A JP 16626782A JP S641722 B2 JPS641722 B2 JP S641722B2
- Authority
- JP
- Japan
- Prior art keywords
- door
- cover
- ray tube
- shutter
- shutter block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
- G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
-
- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B17/00—Screening
- G12B17/02—Screening from electric or magnetic fields, e.g. radio waves
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Description
【発明の詳細な説明】
この発明は螢光X線膜厚測定装置に関し、特に
操作ミス等によつておこるX線の被曝を防ぐため
の安全装置の新規な改良に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a fluorescent X-ray film thickness measuring device, and more particularly to a new and improved safety device for preventing exposure to X-rays caused by operational errors.
従来用いられていたこの種の装置の安全装置は
種々あるが、その一例を述べるとサンプル出入ド
アが完全に閉まつて検出マイクロスイツチが動作
するまでは、シヤツターが動作しないように構成
されていた。また、シヤツターが作動している間
にドアを開けた場合には、ドアの作動と連動して
シヤツターが自動的に閉じるように構成されてい
るが、ドアが開けられて試料の出入を行つている
状態において、例えば誤つてシヤツターを手で作
動させたような場合には、X線が照射されること
になり、手に被曝を受ける可能性があり極めて危
険であつた。 There are various safety devices for this type of device that have been used in the past, but one example is that the shutter does not operate until the sample entrance/exit door is completely closed and the detection microswitch is activated. . Additionally, if the door is opened while the shutter is operating, the shutter is configured to automatically close in conjunction with the door operation, but if the door is opened and the sample is taken in or taken out, the shutter is configured to close automatically. If, for example, the user accidentally operated the shutter with his/her hand, the user would be exposed to X-rays, which was extremely dangerous as there was a possibility that his/her hands would be exposed to radiation.
この考案は以上のような欠点を速やかに除去す
るための極めて効果的な手段を提供することを目
的とするもので、特にドアが完全に閉じた状態を
検出するスイツチとシヤツターが閉じている状態
を検出するスイツチとX線電源供給しや断回路を
備え、ドアが開けられている状態において、例え
ば誤つてシヤツターを手で作動させたような場合
には、X線しや断回路が働きX線管への電力供給
がしや断されることによりX線被曝の危険性のな
い安全なX線膜厚測定装置の構成を得ることであ
る。 The purpose of this invention is to provide an extremely effective means to quickly eliminate the above-mentioned drawbacks, especially the switch that detects when the door is completely closed and the shutter when it is closed. The X-ray power supply is equipped with a switch that detects the It is an object of the present invention to obtain a safe configuration of an X-ray film thickness measuring device in which there is no risk of exposure to X-rays due to the power supply to the ray tube being cut off.
以下、図面と共にこの発明を説明する。図面1
において、1はX線管であり、装置を使用中は常
に電流が流れX線が発生している。2はシヤツタ
ブロツクでX線管1から発生されたX線を通常は
しや断し、測定の際にはサンプル11に照射する
ためのもので、シヤツタブロツク2に設けられた
レバー8及び9を介してロータリソレノイド10
によつて矢印Aの方向に駆動される。7は支持板
7aに設けられたマイクロスイツチで、シヤツタ
ブロツク2が図面において右方向に移動されたと
きにレバー9により接点レバー7bを作動させて
OFFとなるように構成され、この状態ではX線
管1からのX線はシヤツターブロツク2によりし
や断された状態である。 The present invention will be explained below with reference to the drawings. Drawing 1
1 is an X-ray tube, and when the device is in use, current is constantly flowing and X-rays are generated. 2 is a shutter block that normally cuts off the X-rays generated from the X-ray tube 1 and irradiates the sample 11 during measurement. rotary solenoid 10
is driven in the direction of arrow A by. Reference numeral 7 designates a micro switch provided on a support plate 7a, which operates a contact lever 7b by a lever 9 when the shutter block 2 is moved to the right in the drawing.
In this state, the X-rays from the X-ray tube 1 are cut off by the shutter block 2.
3は全体がほぼ箱型をなすカバーで、X線によ
る被曝を防止するための装置全体を覆つており、
試料台12上に設けられたサンプル11を出入す
るためのドア4が前記カバー3の前面部に取付け
られ、このカバー3を完全に閉じた状態でカバー
3に設けられた第1および第2のマイクロスイツ
チ5および6の接点レバー5aおよび6aが作動
される構成で、第1マイクロスイツチ5はON状
態、第2マイクロスイツチ6はOFF状態となる
ように各々のスイツチング動作が異なるように構
成されている。 3 is a nearly box-shaped cover that covers the entire device to prevent exposure to X-rays.
A door 4 for entering and exiting the sample 11 provided on the sample stage 12 is attached to the front part of the cover 3, and when the cover 3 is completely closed, the first and second doors provided on the cover 3 are opened. The contact levers 5a and 6a of the microswitches 5 and 6 are operated, and each switching operation is different so that the first microswitch 5 is in the ON state and the second microswitch 6 is in the OFF state. There is.
さらに、前記支持板7a上にはリレー装置13
が設けられ、このリレー装置はX線管1の電源に
対するON,OFF制御を行うものである。 Furthermore, a relay device 13 is provided on the support plate 7a.
is provided, and this relay device performs ON/OFF control of the power supply of the X-ray tube 1.
以上のような構成において、この発明による螢
光X線膜厚測定装置を作動させる場合について説
明すると、通常の測定操作の場合ドア4を開状態
にし、サンプル11をステージ12上にセツトし
再びドア4を閉じるとマイクロスイツチ5の接点
がONとなりロータリーソレノイド10に通電可
能の状態になる。この状態でロータリーソレノイ
ド10が通電されると、レバー8および9を介し
シヤツターブロツク2が移動し、X線がコリメー
タ2aを介してサンプル11に照射され、測定が
開始される。またドア4が開けられている状態に
おいてはマイクロスイツチ6の接点がONになつ
ており、この時たとえば誤まつてシヤツターを手
で作動させようとした場合に、マイクロスイツチ
7が作動して接点がONとなりこの結果、リレー
装置13が作動しX線管1への電流を遮断するの
でX線の発生が止まる。 In the above configuration, the case of operating the fluorescent X-ray film thickness measuring device according to the present invention will be described. In normal measurement operation, the door 4 is opened, the sample 11 is set on the stage 12, and the door is opened again. When 4 is closed, the contact of the micro switch 5 is turned ON, and the rotary solenoid 10 becomes energized. When the rotary solenoid 10 is energized in this state, the shutter block 2 is moved via the levers 8 and 9, the sample 11 is irradiated with X-rays via the collimator 2a, and measurement is started. In addition, when the door 4 is open, the contact of the micro switch 6 is ON, and if you accidentally try to operate the shutter by hand, the micro switch 7 will be activated and the contact will turn ON. As a result, the relay device 13 is activated and cuts off the current to the X-ray tube 1, thereby stopping the generation of X-rays.
以上のように本発明によれば、ドア4が開いて
いる状態では駆動手段(ロータリーソレノイド1
0)によるシヤツターブロツク2の開閉が不可能
であり、かつ万一この状態で誤まつてシヤツター
を手で作動させようとした場合は、X線電流が遮
断させることによりX線被曝の危険が全くなく、
安全管理上極めて効果があるという特徴を有す
る。 As described above, according to the present invention, when the door 4 is open, the drive means (rotary solenoid
0), and if you accidentally try to operate the shutter by hand in this condition, the X-ray current will be cut off and there is a risk of X-ray exposure. Not at all,
It is characterized by being extremely effective in terms of safety management.
第1図はこの発明による螢光X線膜厚測定装置
を示すための一部切欠斜面図、第2図は本装置の
電気接続を示す回路図である。
1はX線管、2はシヤツターブロツク、2aは
コリメータ、3はカバー、4はドア、5,6,7
はマイクロスイツチで5a,6a,7aはそれぞ
れ5,6,7のマイクロスイツチの接点レバーで
あり、8,9はレバー、10はロータリーソレノ
イド、11はサンプル、12はステージ、13は
リレー装置である。
FIG. 1 is a partially cutaway perspective view showing a fluorescent X-ray film thickness measuring device according to the present invention, and FIG. 2 is a circuit diagram showing electrical connections of the device. 1 is an X-ray tube, 2 is a shutter block, 2a is a collimator, 3 is a cover, 4 is a door, 5, 6, 7
are micro switches, 5a, 6a, and 7a are contact levers of micro switches 5, 6, and 7, respectively, 8 and 9 are levers, 10 is a rotary solenoid, 11 is a sample, 12 is a stage, and 13 is a relay device. .
Claims (1)
移動自在に設けられコリメータを一体に有するシ
ヤツターブロツクにより制御してサンプルに対す
るX線の照射を行うものにおいて、前記シヤツタ
ーブロツクの移動と連動して作動する第1のスイ
ツチと、前記カバーの前面に開閉自在に設けられ
たドアと、前記カバーに設けられドアの開閉と連
動して互いに異なるタイミングでオンオフ動作す
るように構成された第2および第3のスイツチ
と、前記X線管への電流を制御するためのリレー
装置と、前記シヤツターブロツクを稼動させるた
めの駆動手段とを備え、前記ドアが閉状態の場
合、前記第2および第3のスイツチおよびリレー
装置の作動により、駆動手段およびX線管への電
源がオフ状態に保持されるように構成したことを
特徴とする螢光X線膜厚計。1 X-rays from the X-ray tube installed inside the cover,
A first switch that operates in conjunction with movement of the shutter block, and a front surface of the cover, in which X-ray irradiation is performed on a sample by controlling a shutter block that is movably provided and has an integral collimator. a door provided on the cover so that it can be opened and closed; second and third switches provided on the cover and configured to turn on and off at different timings in conjunction with the opening and closing of the door; and a current to the X-ray tube. and a drive means for operating the shutter block, and when the door is closed, the drive means and the shutter block are operated by the operation of the second and third switches and the relay device. A fluorescent X-ray film thickness meter characterized in that the power to the X-ray tube is maintained in an OFF state.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16626782A JPS5967409A (en) | 1982-09-24 | 1982-09-24 | X-ray spectrometric device for measuring film thickness |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16626782A JPS5967409A (en) | 1982-09-24 | 1982-09-24 | X-ray spectrometric device for measuring film thickness |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5967409A JPS5967409A (en) | 1984-04-17 |
| JPS641722B2 true JPS641722B2 (en) | 1989-01-12 |
Family
ID=15828210
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16626782A Granted JPS5967409A (en) | 1982-09-24 | 1982-09-24 | X-ray spectrometric device for measuring film thickness |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5967409A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4933702B2 (en) * | 2000-04-06 | 2012-05-16 | エスアイアイ・ナノテクノロジー株式会社 | Portable X-ray fluorescence analyzer |
| JP4575369B2 (en) * | 2004-04-28 | 2010-11-04 | パナソニック株式会社 | X-ray fluorescence analysis method and apparatus |
| JP5509604B2 (en) * | 2009-02-02 | 2014-06-04 | 株式会社島津製作所 | X-ray analyzer |
-
1982
- 1982-09-24 JP JP16626782A patent/JPS5967409A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5967409A (en) | 1984-04-17 |
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