JPS645928B2 - - Google Patents
Info
- Publication number
- JPS645928B2 JPS645928B2 JP60005272A JP527285A JPS645928B2 JP S645928 B2 JPS645928 B2 JP S645928B2 JP 60005272 A JP60005272 A JP 60005272A JP 527285 A JP527285 A JP 527285A JP S645928 B2 JPS645928 B2 JP S645928B2
- Authority
- JP
- Japan
- Prior art keywords
- oil
- waste oil
- vacuum pump
- harmful gases
- inert gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 43
- 239000002699 waste material Substances 0.000 claims description 33
- 239000011261 inert gas Substances 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- 239000012535 impurity Substances 0.000 claims description 9
- 238000000354 decomposition reaction Methods 0.000 claims description 7
- 229910021536 Zeolite Inorganic materials 0.000 claims description 6
- 239000002253 acid Substances 0.000 claims description 6
- 239000003463 adsorbent Substances 0.000 claims description 6
- 239000012459 cleaning agent Substances 0.000 claims description 6
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 claims description 6
- 239000010457 zeolite Substances 0.000 claims description 6
- 239000000741 silica gel Substances 0.000 claims description 5
- 229910002027 silica gel Inorganic materials 0.000 claims description 5
- 239000005909 Kieselgur Substances 0.000 claims description 4
- 239000011959 amorphous silica alumina Substances 0.000 claims description 4
- 238000004064 recycling Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000009792 diffusion process Methods 0.000 description 9
- 238000007664 blowing Methods 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 6
- 238000001179 sorption measurement Methods 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 239000000460 chlorine Substances 0.000 description 4
- 238000001312 dry etching Methods 0.000 description 4
- 239000010419 fine particle Substances 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- -1 AlCl 3 Substances 0.000 description 3
- 150000007513 acids Chemical class 0.000 description 3
- 239000003599 detergent Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- AJDIZQLSFPQPEY-UHFFFAOYSA-N 1,1,2-Trichlorotrifluoroethane Chemical compound FC(F)(Cl)C(F)(Cl)Cl AJDIZQLSFPQPEY-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000010842 industrial wastewater Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M175/00—Working-up used lubricants to recover useful products ; Cleaning
- C10M175/0008—Working-up used lubricants to recover useful products ; Cleaning with the use of adsorbentia
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Organic Chemistry (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Degasification And Air Bubble Elimination (AREA)
- Separation Of Gases By Adsorption (AREA)
- Compressor (AREA)
Description
〔産業上の利用分野〕
本発明は、真空ポンプに対して有害なガスを吸
引する真空ポンプのオイル中に、有害ガス、腐食
性および摩耗性不純分が蓄積して、使用出来なく
なつたオイルの再生方法に関する。
〔従来の技術〕
従来、真空ポンプに対して有害なガスを吸引し
て減圧度を保持しなければならない、例えば半導
体産業などにおいては、真空ポンプオイルの劣化
が早く、また、比較的高価なオイルを使用してい
るため、廃オイルの再生は重要な技術課題となつ
ている。
特にAlドライエツチング用ロータリー真空ポ
ンプでは、吸引した有害ガスの溶解、或いは
AlCl3等の微粒子、酸分、水分、オイル分解物等
の蓄積により比較的短時間で所定の真空度が保持
出来なくなり、頻繁に真空ポンプの整備を行うと
ともに、オイルを交換しなければならない。新し
いオイルと交換した廃オイルは、通常、処理業者
によつて再生が行なわれているが、これには上記
有害ガスその他が含有されており、再生が困難と
云われている。事実、処理業者による再生は、処
理費が高く、処理に時間を要するため、真空ポン
プオイルの保有量が増大し、特に、処理オイルの
粘度が高過ぎたり、オイル分解物の除去が不充分
である等、再生オイルの品質が安定しない欠点が
あつた。
〔発明が解決しようとする問題点〕
本発明は上記の事情に鑑み、処理業者の手をわ
ずらわすことなく、廃オイルが発生する場所にお
いて、品質が安定して容易に再生することが出来
る真空ポンプ廃オイルの再生方法を提供すること
を目的とする。
〔問題点を解決するための手段〕
本発明は上記問題点を解決するためになされた
もので、その要旨は、真空ポンプ廃オイルを40〜
80℃に加熱、保持しながら、不活性ガスを送入し
て溶存する有害ガスを除去し、この有害ガスを含
有する不活性ガスを吸着剤と接触させて有害ガス
を吸着除去した後放出し、次いで有害ガスを除去
した真空ポンプ廃オイルを、無定形シリカアルミ
ナと、ケイソウ土、ゼオライト或いはシリカゲル
から選ばれた少なくとも１種よりなる清浄剤に接
触させ、微粒子、酸分、水分、オイル分解物等、
有外ガス以外の不純分を除去する真空ポンプ廃オ
イルの再生方法にある。
〔発明の具体的構成および作用〕
以下本発明に係る真空ポンプ廃オイルの再生方
法を図面を参照して説明する。
第１図は、本発明の方法を実施する装置の一例
を示すもので、図中符号１は放散槽である。放散
槽１の上部には、廃オイルを放散槽１に注入する
注入管２および気体導出管３が取付けられてい
る。上記注入管２には、バルブ２ａが取付けら
れ、また気体導出管３は、有害ガス吸着筒４に接
続されている。この有害ガス吸着筒４には活性
炭、シリカゲル、ゼオライト等の吸着剤４ａが充
填されている。また、上記放散槽１の内底部に
は、充填されている廃オイル５内にN2等の不活
性ガスを吹込む不活性ガス吹込管６が設けられ、
この吹込管６のやや上部には、充填されている廃
オイル５を加熱し、所定温度に保持するヒータ７
が設けられている。また放散槽１の底部には、有
害ガスを除去した廃オイル５を、ダイヤフラム定
量ポンプ８ａを介して抜出し、清浄筒９に送る抜
出管８が取付けられている。上記清浄筒９には、
無定形シリカアルミナ、（例えば日揮化学製、商
品名N633、HN等）Ａ等と、ケイソウ土、ゼオ
ライト或いはシリカゲルから選ばれた少なくとも
１種Ｂを混合した清浄剤Ｃが充填されている。
清浄剤ＣのＡとＢとの混合割合は、Ａが多い方
がＣの固化が発生せず、Ａ／Ｂ＝1wt／1wt〜
3wt／1wtが好ましい。
上記装置を用いて真空ポンプより抜出した廃オ
イルを再生するには、先ず廃オイルをバルブ２ａ
を開き、放散槽１に注入管２を介して注入し、バ
ルブ２ａを閉じる。この場合廃オイルの注入量
は、放散槽１の容量の1/2程度が好ましい。あま
り多いと、後述する不活性ガスを導入してバブル
させる際飛末同伴が発生する。
次いでヒータ７により昇温し、40〜80℃、好ま
しくは、50〜60℃に保持しながら、不活性ガス吹
込管６より不活性ガスを導入し、廃オイル中にバ
ブルさせる。有害ガスは不活性ガスによつて追出
され、不活性ガスとともに気体導出管３により有
害ガス吸着筒４に導かれ、吸着剤４ａによつて吸
着除去され、不活性ガスは、排気ダクト等に放出
される。
上記真空ポンプオイルとしてはフオンブリン、
シリコン油等が使され、例えばフオンブリンの動
粘度は、20℃：250cst、40℃：70〜80cst、80
℃：20cstである。したがつて、上記廃オイルの
温度が40℃より低いと、オイルの粘度の低下とオ
イルに対する有害ガスの溶解度の低下が充分でな
く有害ガスの不活性ガス中への移行が遅くなり、
また、80℃以上では、不活性ガス中に混入するオ
イルベーパの量が増大する。また、有害ガス除去
には必ずしも不活性ガスを必要としないが、空気
等ではオイルの劣化を促進する問題が発生し、導
入ガス量が多いと、オイルミストを同伴して、オ
イルの損失となり、さらに吸着剤４ａを劣化させ
る。有害ガスとしては、それぞれの場合によつて
種々なものがあるが、例えばAlドライエツチン
グにおいては、BCl3、SiCl4、Cl2、CCl4、HCl等
塩素形のものである。
有害ガスを除去した廃オイル５は、ダイヤフラ
ムポンプ８ａにより所定の流速で抜出管８を介し
て清浄筒９に送られ、清浄剤Ｃと接触される。清
浄剤Ｃは、オイル内に含有される酸分、水分、
1μm以上の劣化物よりなる微粒子、オイル分解物
等よりなる不純分を同時に除去するので、清浄筒
９を通過した再生オイル１０は、上記不純分を含
有しない。
上記装置の各部の規模は、再生するオイルの
量、および含有される不純分によつて適宜選択さ
れ、また、有害ガス吸着筒４、清浄筒９は、一般
に行なわれているような、着脱自在なカートリツ
ジ方式を採用することによりワンタツチで行なう
ことが出来るので、人手を要せず、真空ポンプを
使用している現場で廃オイルを再生することが出
来る。さらに、本発明の方法は、廃オイルの量が
増加した場合には、連続処理する装置とすること
が出来る。
〔実施例 １〜３〕
３の放散筒に、Alドライエツチングに使用
したフオンブリン廃オイル1.5を入れてバルブ
を閉じ加熱し、50〜60℃に保持しながら不活性ガ
ス吹込管よりN2を２／minの流速で導入し、
有害ガスをストリツピングした。この有害ガスを
含有したN2を活性炭：100ml或いはゼオライト
100ml充填した20mmφ×300mmＬの有害ガス吸着筒
に通し、通過したN2中のBCl3、Cl2をガスクロマ
トクラフにより測定した結果いずれも1ppmvol以
下であつた。
次いで有害ガスを除去した廃オイルを、種々な
清浄剤130mlを充填した20mmφ×400mmＬの清浄筒
に１〜２ml／minの流速で通し、通過したオイル
中の不純分を測定した。
不純分の測定方法は次の方法による。酸分は
Cl-、BCl3等であるがHCl換算値で示し、水分は
カールフイツシヤー法、オイル分解物は液体クロ
マトクラフ法で行なつた。また、微粒子の測定
は、JIS−KD102の工業排水試験法中の懸融物質
試験に準じ、0.45μmのメンブランフイルターで
濾過し、重量差によつて求めた。その際のオイル
の洗浄および溶媒としてはフロン113を使用した。
また、有害ガスは、N2で追出し、N2中の有害ガ
ス濃度はガスクロマトグラフで測定した。
試験に使用した廃オイルは、Alドライエツチ
ングに200時間使用したロータリーポンプのオイ
ルで、その不純分濃度を第１表に示した。また、
この廃オイルを再生処理した実施例の結果を第２
表に示した。
[Industrial Application Field] The present invention is directed to vacuum pump oil which sucks harmful gases into the vacuum pump, and which accumulates harmful gases, corrosive and abrasive impurities in the oil, making it unusable. Regarding the reproduction method. [Prior Art] Conventionally, in the semiconductor industry, for example, where a vacuum pump must maintain a reduced pressure by suctioning harmful gases, vacuum pump oil deteriorates quickly and relatively expensive oil is used. Therefore, recycling of waste oil has become an important technical issue. In particular, rotary vacuum pumps for Al dry etching are used to dissolve harmful gases sucked in or
Due to the accumulation of fine particles such as AlCl 3 , acids, moisture, oil decomposition products, etc., it becomes impossible to maintain the specified degree of vacuum in a relatively short period of time, and the vacuum pump must be maintained frequently and the oil must be replaced. Waste oil that has been replaced with new oil is usually recycled by a processing company, but this oil contains the above-mentioned harmful gases and other substances and is said to be difficult to recycle. In fact, regeneration by a processor is expensive and takes time, resulting in an increase in the amount of vacuum pump oil held, especially when the viscosity of the treated oil is too high or the removal of oil decomposition products is insufficient. However, the quality of recycled oil was not stable. [Problems to be Solved by the Invention] In view of the above circumstances, the present invention enables waste oil to be easily regenerated with stable quality at locations where waste oil is generated without bothering the processing company. The purpose of the present invention is to provide a method for recycling vacuum pump waste oil. [Means for Solving the Problems] The present invention has been made to solve the above problems, and its gist is that vacuum pump waste oil is
While heating and maintaining the temperature at 80℃, inert gas is introduced to remove dissolved harmful gases, and this inert gas containing harmful gases is brought into contact with an adsorbent to adsorb and remove the harmful gases, and then released. Next, the vacuum pump waste oil from which harmful gases have been removed is brought into contact with a cleaning agent consisting of amorphous silica alumina and at least one selected from diatomaceous earth, zeolite, or silica gel to remove fine particles, acids, moisture, and oil decomposition products. etc,
A method for recycling vacuum pump waste oil that removes impurities other than external gases. [Specific structure and operation of the invention] The method for regenerating vacuum pump waste oil according to the present invention will be explained below with reference to the drawings. FIG. 1 shows an example of an apparatus for carrying out the method of the present invention, and reference numeral 1 in the figure is a diffusion tank. An injection pipe 2 for injecting waste oil into the diffusion tank 1 and a gas outlet pipe 3 are attached to the upper part of the diffusion tank 1. A valve 2a is attached to the injection pipe 2, and the gas outlet pipe 3 is connected to a harmful gas adsorption cylinder 4. This harmful gas adsorption cylinder 4 is filled with an adsorbent 4a such as activated carbon, silica gel, or zeolite. Further, an inert gas blowing pipe 6 for blowing an inert gas such as N2 into the filled waste oil 5 is provided at the inner bottom of the diffusion tank 1.
Slightly above the blowing pipe 6 is a heater 7 that heats the filled waste oil 5 and maintains it at a predetermined temperature.
is provided. Further, a discharge pipe 8 is attached to the bottom of the diffusion tank 1 to extract the waste oil 5 from which harmful gases have been removed via a diaphragm metering pump 8a and send it to the cleaning cylinder 9. In the above-mentioned cleaning tube 9,
The cleaning agent C is filled with a mixture of amorphous silica alumina (for example, manufactured by JGC Chemical Co., Ltd., trade name N633, HN, etc.) A, etc., and at least one type B selected from diatomaceous earth, zeolite, or silica gel. The mixing ratio of A and B in cleaning agent C is such that the more A there is, the less solidification of C will occur, and A/B = 1wt/1wt ~
3wt/1wt is preferable. In order to regenerate the waste oil extracted from the vacuum pump using the above device, first the waste oil is removed from the valve 2a.
is opened, the solution is injected into the diffusion tank 1 via the injection pipe 2, and the valve 2a is closed. In this case, the amount of waste oil injected is preferably about 1/2 of the capacity of the diffusion tank 1. If the amount is too large, particles will be entrained when introducing an inert gas to create bubbles, which will be described later. Next, the temperature is raised by the heater 7 and maintained at 40 to 80°C, preferably 50 to 60°C, while inert gas is introduced from the inert gas blowing pipe 6 and bubbled into the waste oil. The harmful gas is expelled by the inert gas, guided along with the inert gas to the harmful gas adsorption tube 4 through the gas outlet pipe 3, and adsorbed and removed by the adsorbent 4a, and the inert gas is transferred to the exhaust duct etc. released. The vacuum pump oil mentioned above is Fuonbrin,
Silicone oil etc. are used.For example, the kinematic viscosity of Fomblin is 20℃: 250cst, 40℃: 70-80cst, 80℃.
℃: 20cst. Therefore, if the temperature of the waste oil is lower than 40°C, the viscosity of the oil and the solubility of harmful gases in the oil will not be sufficiently reduced, and the migration of harmful gases into the inert gas will be delayed.
Furthermore, at temperatures above 80°C, the amount of oil vapor mixed into the inert gas increases. In addition, although inert gas is not necessarily required to remove harmful gases, air etc. can cause the problem of accelerating oil deterioration, and if a large amount of gas is introduced, it will entrain oil mist, resulting in oil loss. Furthermore, the adsorbent 4a is deteriorated. There are various harmful gases depending on the case, but for example, in Al dry etching, chlorine gases such as BCl 3 , SiCl 4 , Cl 2 , CCl 4 and HCl are used. The waste oil 5 from which harmful gases have been removed is sent to the cleaning cylinder 9 via the extraction pipe 8 at a predetermined flow rate by the diaphragm pump 8a, and is brought into contact with the cleaning agent C. Detergent C removes the acid content contained in the oil, moisture,
Since impurities such as fine particles of degraded substances of 1 μm or more and oil decomposition products are removed at the same time, the recycled oil 10 that has passed through the cleaning tube 9 does not contain the above-mentioned impurities. The scale of each part of the above-mentioned device is appropriately selected depending on the amount of oil to be regenerated and the impurities contained, and the harmful gas adsorption cylinder 4 and the cleaning cylinder 9 are detachable as is generally done. By adopting a cartridge method, it can be done with one touch, so waste oil can be regenerated at the site where a vacuum pump is used, without the need for manpower. Furthermore, the method of the present invention can be used as an apparatus for continuous treatment when the amount of waste oil increases. [Examples 1 to 3] Pour 1.5 liters of Fomblin waste oil used for Al dry etching into the diffusion tube of No. 3, close the valve, heat it, and while maintaining it at 50 to 60°C, 2 liters of N 2 from the inert gas blowing pipe. Introduced at a flow rate of /min,
Stripped harmful gases. Activated carbon: 100ml or zeolite to remove N2 containing this harmful gas
BCl 3 and Cl 2 in the N 2 that passed through a 20 mmφ x 300 mm L harmful gas adsorption cylinder filled with 100 ml were measured using a gas chromatograph, and both were less than 1 ppmvol. Next, the waste oil from which harmful gases had been removed was passed through a 20 mm diameter x 400 mm L cleaning cylinder filled with 130 ml of various cleaning agents at a flow rate of 1 to 2 ml/min, and the impurities in the oil that passed through were measured. The method for measuring impurities is as follows. The acid content is
Cl − , BCl 3 , etc. are shown in HCl equivalent values; moisture was determined by the Karl Fischer method, and oil decomposition products were determined by the liquid chromatograph method. The fine particles were measured by filtering with a 0.45 μm membrane filter and determining the difference in weight according to the suspended solids test in the industrial wastewater test method of JIS-KD102. Freon 113 was used to clean the oil and as a solvent.
In addition, harmful gases were expelled with N 2 , and the concentration of harmful gases in N 2 was measured using a gas chromatograph. The waste oil used in the test was from a rotary pump that had been used for Al dry etching for 200 hours, and its impurity concentration is shown in Table 1. Also,
The results of the example in which this waste oil was regenerated are shown in the second example.
Shown in the table.
【表】【table】
以上述べた如く、本発明の方法は、簡単な装
置、操作により廃オイル中に含まれる有害ガス、
酸分、水分、微粒子、オイル分解物が除去される
ので、オイルを使用する場所において廃オイルの
再生が可能となり、また、廃オイルの処理量に合
わせて装置の規模を選ぶことが出来、処理業者を
必要としないので、処理費の節約、オイル保有量
の減少など、その経済的効果は極めて大きい。
As described above, the method of the present invention can eliminate harmful gases contained in waste oil using simple equipment and operations.
Since acids, moisture, particulates, and oil decomposition products are removed, waste oil can be regenerated at the location where the oil is used, and the scale of the equipment can be selected according to the amount of waste oil to be processed. Since it does not require a contractor, it has extremely economical effects such as savings in processing costs and a reduction in the amount of oil retained.
第１図は本発明の方法を実施する装置の一例を
示す図である。
１……放散槽、２……注入管、２ａ……バル
ブ、３……気体導出管、４……有害ガス吸着筒、
４ａ……吸着剤、５……廃オイル、６……不活性
ガス吹込管、７……ヒータ、８……抜出管、８ａ
……ダイヤフラム定量ポンプ、９……清浄筒、１
０……再生オイル、Ａ……無定形シリカアルミ
ナ、Ｂ……ケイソウ土、ゼオライト、シリカゲル
中の少なくとも１種、Ｃ……清浄剤。
FIG. 1 is a diagram showing an example of an apparatus for carrying out the method of the present invention. 1... Diffusion tank, 2... Injection pipe, 2a... Valve, 3... Gas outlet pipe, 4... Harmful gas adsorption cylinder,
4a...Adsorbent, 5...Waste oil, 6...Inert gas blowing pipe, 7...Heater, 8...Extraction pipe, 8a
...Diaphragm metering pump, 9...Clean cylinder, 1
0...Recycled oil, A...Amorphous silica alumina, B...At least one of diatomaceous earth, zeolite, and silica gel, C...Detergent.
Claims (1)
しながら、不活性ガスを送入して溶存する有害ガ
スを除去し、この有害ガスを含有する不活性ガス
を吸着剤と接触させて有害ガスを吸着除去した後
放出し、次いで有害ガスを除去した真空ポンプ廃
オイルを、無定形シリカアルミナと、ケイソウ
土、ゼオライト或いはシリカゲルから選ばれた少
なくとも１種よりなる清浄剤に接触させ、微粒
子、酸分、水分、オイル分解物等、有害ガス以外
の不純分を除去することを特徴とする真空ポンプ
廃オイルの再生方法。1 While heating and maintaining vacuum pump waste oil at 40 to 80℃, inert gas is introduced to remove dissolved harmful gases, and the inert gas containing this harmful gas is brought into contact with an adsorbent to remove harmful gases. After adsorbing and removing gases, the vacuum pump waste oil is released, and then the waste oil from the vacuum pump, from which harmful gases have been removed, is brought into contact with a cleaning agent consisting of amorphous silica alumina and at least one selected from diatomaceous earth, zeolite, or silica gel. A method for recycling vacuum pump waste oil, which is characterized by removing impurities other than harmful gases, such as acid content, moisture, oil decomposition products, etc.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60005272A JPS61164609A (en) | 1985-01-16 | 1985-01-16 | Regeneration of waste oil of vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60005272A JPS61164609A (en) | 1985-01-16 | 1985-01-16 | Regeneration of waste oil of vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61164609A JPS61164609A (en) | 1986-07-25 |
| JPS645928B2 true JPS645928B2 (en) | 1989-02-01 |
Family
ID=11606593
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60005272A Granted JPS61164609A (en) | 1985-01-16 | 1985-01-16 | Regeneration of waste oil of vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61164609A (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2539696Y2 (en) * | 1991-05-13 | 1997-06-25 | 株式会社豊田自動織機製作所 | Compressor for air conditioner using hydrogen storage alloy |
| KR100407161B1 (en) * | 2003-04-21 | 2003-11-28 | Korea Mach & Materials Inst | Apparatus of removing water contained in waste lubricant oil and method therefor |
| KR100407159B1 (en) * | 2003-04-21 | 2003-11-28 | Korea Mach & Materials Inst | Apparatus of purifying waste lubricant oil and method therefor |
| KR100739414B1 (en) * | 2006-06-23 | 2007-07-13 | 권선대 | Oil diffusion vacuum distillation apparatus and method |
| CN107287016B (en) * | 2017-07-10 | 2023-06-20 | 西安热工研究院有限公司 | Oxygen-enriched super-polar regeneration method and regenerator for wind power gear oil |
| CN107694549A (en) * | 2017-11-17 | 2018-02-16 | 苏州博进生物技术有限公司 | Adsorbent and its application method for mineral regenerating waste oil |
-
1985
- 1985-01-16 JP JP60005272A patent/JPS61164609A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61164609A (en) | 1986-07-25 |
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