JPS646370B2 - - Google Patents

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention subdivides areas requiring a clean atmosphere into a plurality of clean rooms in a semiconductor manufacturing factory, a pharmaceutical factory, etc., and Regarding an air conditioner that can perform air conditioning with high precision by controlling air conditioning, in detail, each of multiple clean rooms and a semi-clean room are connected by separate circulation air paths, and one of the circulation air paths is A circulation fan and a high-performance filter located on the downstream side thereof are interposed in each of the supply side air passages to the clean room, and the fan supplies pressurized temperature-controlled gas whose temperature is controlled by an air conditioner. The discharge air passages of the circulation fans are connected to the inlet side portions of each of the circulation fans via parallel branch air passages, and are connected to the semi-clean room, and an exhaust gas for discharging indoor gas to the outside is connected to the semi-clean room. By providing a vent and using a circulation fan to ensure air volume to maintain a clean atmosphere in each clean room, and by supplying temperature-controlled gas from the air conditioner to the inlet side of each circulation fan, The present invention relates to an air conditioner adapted to cope with the heat load of each clean room.

[Conventional technology]

Conventionally, in the above air conditioner, each clean room and
In order to perform separate room temperature control for each semi-clean room, as shown in FIG. A secondary temperature regulator 18' such as a reheat heater or a recooling coil was installed for each of the branch air passages 12 that are connected to the Based on the feedback information from the room temperature sensor 19, each room 1A, 1B,
By individually controlling the temperature control capability of the secondary temperature controller 18' corresponding to room No. 2, the room temperature of each room 1A, 1B, and 2 was maintained at the respective set room temperature.

In addition, 8 in the figure is an air conditioner, 4 is a high-performance filter,
6 is a communication port forming a return circulation air path from the clean rooms 1A and 1B to the semi-clean room 2; 13 is an exhaust port for discharging indoor gas from the semi-clean room 2 to the outside; 14 is a return fan; RA is a return fan; The return air passage, OA is the outside air intake air passage, and EA is the exhaust air passage.

[Problem that the invention seeks to solve]

However, in the case of the above-mentioned conventional device, for example, in the case of cooling operation, the air conditioner 8 constantly generates low-temperature gas with a temperature margin that can handle the maximum load, and also pressurizes and supplies an air volume with a margin. Although the gas is constantly supplied by the fan 7, heating the low-temperature gas with the reheat heater 18' in order to individually control each chamber 1A, 1B, and 2 causes a large heat loss. Pressurized supply fan 7 can continue to supply a large air volume commensurate with the maximum load, regardless of the indoor load fluctuations of each room 1A, 1B, and 2.
There is a problem in that power is wasted, and these problems are the same in the case of heating operation in which a cooling coil is used as the secondary temperature controller 18'.

Moreover, separately attaching secondary temperature controllers 18' such as reheat heaters and cooling coils to each chamber 1A, 1B, and 2 leads to a significant complication of the piping configuration or power electrical wiring configuration. At the same time, there were also disadvantages in terms of maintenance.

An object of the present invention is to eliminate heat loss and waste of fan power, and to simplify the device configuration by adopting a rational individual room temperature control configuration.

[Means for solving problems]

The characteristic configuration of the air conditioner according to the present invention is that a room temperature sensor is provided to detect the indoor temperature of each of the plurality of clean rooms and the semi-clean room to which circulating gas is supplied separately by a circulation fan, and the air conditioner supplies circulating gas. an air temperature sensor for detecting the temperature of the temperature-controlled gas, a device for changing the temperature control capacity of the air conditioner, and an air conditioner for changing the blowing capacity of the pressurized supply fan for the temperature-controlled gas; The discharge air passages of the pressure supply fans are branched in parallel and connected confluently to the inlet side portions of each of the circulation fans, and each of the branch air passages connected to the semi-clean room,
For an air path device that is provided with a device that adjusts a passing air volume and automatically operates the air conditioner capacity changing device, the fan capacity changing device, and the passing air volume adjusting device, (a) based on information from the room temperature sensor; (b) room temperature control execution means for individually issuing operation commands to the passing air volume adjusting devices so as to maintain the detected indoor temperature of each room at the set indoor temperature; (c) means for determining the air volume adjustment state; (c) based on the determination result by the determination means, changing the fan capacity so that the air volume of the pressurizing supply fan matches the sum of the adjusted passing air volume of each of the branch air paths; (d) Based on the information from the temperature sensor, transmitting an operation command to the air conditioner capacity changing device so as to maintain the temperature detected by the temperature sensor at the set temperature; Each of the temperature control means is provided, and the effects thereof are as follows.

[Effect]

In other words, in order to perform individual room temperature control for each of multiple clean rooms and semi-clean rooms, the air flow rate in each branch air path is automatically adjusted based on the feedback information from each room temperature sensor, and thereby each circulation fan The amount of temperature control gas from the air conditioner that is combined and supplied to the inlet side of the air conditioner (i.e., the amount of temperature control gas blown into each clean room together with the circulating gas)
By individually adjusting the amount of temperature control gas supplied to semi-clean rooms, the room temperature can be controlled for each room without heat loss due to reheating or recooling. In other words, the discharge pressure of the pressure supply fan is adjusted to an unnecessary high pressure by determining the air volume adjustment state of each passing air volume adjustment device and adjusting the air volume of the pressurized supply fan to match the sum of the passing air volume at each adjustment point. By changing and controlling the air blowing capacity of the pressurized supply fan so as to match the air blowing capacity of the pressurized supply fan with the passing air flow rate adjustment state without causing a This avoids wasting the power of the pressurizing supply fan in the following state.

In the room temperature control described above and the associated air blowing capacity control of the pressurized supply fan, the temperature of the temperature control gas from the air conditioner is kept at the set temperature regardless of the change in the air flow rate of the pressurized supply fan. to maintain
By controlling and changing the temperature control capacity of the air conditioner, the individual room temperature control by the above-mentioned passing air volume control is stabilized while the air conditioner capacity itself is made to respond to the total load fluctuation.

Note that the clean atmosphere in the clean room is sufficiently maintained because the air volume of the circulation fan (the total air volume of the circulating gas from the semi-clean room and the passing temperature regulating gas to be combined with it) is constant regardless of the above-mentioned passing air volume control. maintained.

On the other hand, for the passage air volume changing device provided in each branch air path for each room, it is sufficient to simply connect the operation wiring, and the reheating heater and recooling coil in conventional devices are required. There is no need to connect wires, and as a result, construction and maintenance are naturally simplified.

〔Effect of the invention〕

As a result of the above, compared to conventional equipment that involves heat loss due to reheating and recooling, and wasted power from the fan, operating costs can be significantly reduced while maintaining air conditioning performance, and the overall piping configuration can be reduced. The configuration of power and electrical wiring can be greatly simplified, reducing equipment costs and improving ease of construction and maintenance.

〔Example〕

Next, an embodiment of the present invention will be described based on FIG.

Indoor gas taken in from the ceiling suction port 3 of the semi-clean room 2 is blown into the clean rooms 1A, 1B in a downward laminar flow state through a high-performance filter 4 and supplied to each of the plurality of clean rooms 1A, 1B. and a communication port 6 for discharging the indoor gas in the clean rooms 1A, 1B to the semi-clean room 2, and circulating the indoor gas across the plurality of clean rooms 1A, 1B and the semi-clean room 2. In addition, the discharge air passage 9 of the air conditioner 8 equipped with the pressurized supply fan 7 is connected to the suction chamber 10 of each circulation fan 5 and the ceiling outlet 11 with a high-performance filter of the semi-clean room 2. The exhaust port 13 provided in the semi-clean room 2 is connected to the letter fan 1 in parallel via the branch air path 12.
4, and is connected to the intake chamber of the air conditioner 8 via the return air passage RA.

In the figure, OA is an outside air intake path, and EA is an exhaust air path that exhausts a portion of the return air from the exhaust port 13 to the outside.

To configure the room temperature control configuration for each room 1A, 1B, 2, a proportional control valve 15 for changing the amount of heat medium liquid supplied to the temperature control coil 8A of the air conditioner 8 is provided, and a temperature control gas discharged from the air conditioner 8 is provided. A sensor 16 is provided to detect the temperature of the central air conditioning controller 1.
7, a supply temperature control unit automatically operates the proportional control valve 15 to automatically adjust the air conditioner capacity so as to maintain the temperature of the discharged temperature-controlled gas at the set temperature based on the feedback information from the temperature sensor 16; It is equipped with 17A.

On the other hand, the pressurized supply fan 7 and the return fan 14 are configured with fans whose air blowing capacity can be changed by controlling the rotation speed, and each of the parallel branch air paths 12 has a branch air path. The amount of temperature-controlled gas that is combined and supplied to the suction chamber 10 of each circulation fan 5 and the amount of temperature-controlled gas that is supplied to the ceiling outlet 11 of the semi-clean room 2 is individually controlled by adjusting the passing air volume in Accordingly, each room 1
A passing air volume adjusting device 18 is interposed to adjust the room temperature of rooms A, 1B, and 2.

Then, for the central air conditioning control device 17,
Based on the feedback information from the room temperature sensor 19 installed in each room 1A, 1B, 2,
A room temperature control execution circuit 17B is provided to automatically operate the passing air volume adjusting device 18 corresponding to each room 1A, 1B, 2 so as to maintain the room temperature of each clean room 1A, 1B at the set room temperature. The configuration is configured to perform individual automatic room temperature control for each room 1A, 1B, and 2 while ensuring the air volume necessary to maintain cleanliness with the circulation fan 5, and return air from each passing air volume adjustment device 18. The adjustment state determination circuit 17C calculates the total amount of passing air volume based on the feedback information of the passing air volume adjustment state, and the air flow rate of the pressurizing supply fan 7 of the calculated passing air volume based on the determination result. letter fan 1
In other words, the discharge pressure of the pressurizing supply fan 7 and the suction pressure of the letter fan 14 are not unnecessarily increased so that the return air amounts of the letter fans 14 and 4 are matched.
An air volume control circuit that sends operation commands to the rotation speed controllers 7A and 14B of the pressurized supply fan 7 and the return fan 14 so as to match the air blowing capacity of the pressurized supply fan 7 and the return fan 14 with the passing air volume adjustment state. 17D is provided in the central air conditioning control device 17, and the air blowing capacity of the pressurized supply fan 7 and the return air capacity of the return fan 14 are automatically changed in accordance with fluctuations in the total air conditioning heat load during the above-mentioned room temperature control. This structure is designed to avoid wasting fan power.

[Another example]

Next, another embodiment will be described.

Return circuit RA from semi-clean room 2 to air conditioner 8
may be omitted.

A control unit 17A that automatically operates an air conditioner capacity changing device 15 such as a proportional control valve for heat medium so as to maintain the temperature of the temperature control gas from the air conditioner 8 at a set temperature based on information from the air temperature sensor 16. may be constituted by a control device separate from the control device including the other control means 17B, 17C, and 17D.

In order to determine the air volume adjustment state of the passing air volume adjusting device 18, instead of based on the feedback information sent back from the passing air volume adjusting device 18 itself, a sensor that detects the passing wind speed in each branch air path 12,
The room temperature control execution circuit 1 may be based on information from a sensor that detects the differential pressure before and after the passing air volume adjusting device 18, and the room temperature control execution circuit 1 automatically operates the passing air volume adjusting device 18.
It may also be based on the operation command transmission information of 7B. or,
A so-called VAV system may be applied to operate the pressurizing supply fan 7 and the passing air volume adjusting device 18 in conjunction with each other.

The specific hardware configuration of each of the control units/control circuits 17A to 17D described above can be changed in various ways, and each of these control configurations is collectively referred to as the temperature control means 17A, the room temperature control execution means 17B, and the operation state determination. They are referred to as means 17C and air volume control means 17D.

The specific number of multiple clean rooms 1A and 1B is not a concern.

To change the air blowing capacity of the pressurized supply fan 7, instead of fan rotation speed control, vane angle control,
Further, in the case of an axial flow fan, various conventionally known capacity control types such as blade pitch control can be applied.

[Brief explanation of the drawing]

FIG. 1 is a system diagram showing an embodiment of the present invention, and FIG. 2 is a system diagram showing a conventional configuration. 1A, 1B...Clean room, 2...Semi-clean room, 4...
...High performance filter, 5...Circulation fan, 7...
Pressurized supply fan, 7A...Fan capacity changing device,
8... Air conditioner, 9... Discharge air path, 10... Suction port side portion, 12... Branch air path, 13... Exhaust port, 1
5... Air conditioner capacity changing device, 16... Temperature sensor, 17... Control device, 17A... Temperature control means, 17B... Room temperature control execution means, 17C... Adjustment state determining means, 17D... Air volume control means , 18
...Passing air volume adjustment device, 19...Room temperature sensor.

Claims (1)

[Scope of Claims] 1. Each of the plurality of clean rooms 1A, 1B and the semi-clean room 2 are connected by separate circulation air passages, and among these circulation air passages, the supply side air passage for the clean rooms 1A, 1B is connected to the semi-clean room 2. Each has a circulation fan 5 and a high-performance filter 4 located downstream thereof, and a discharge air path 9 of a fan 7 that supplies temperature-controlled gas under pressure by an air conditioner 8. are connected to the inlet side portion 10 of each of the circulation fans 5 through parallel branch air passages 12.
and connected to the semi-clean room 2,
An air conditioner in which the semi-clean room 2 is provided with an exhaust port 13 for discharging indoor gas to the outside, the semi-clean room 1
A room temperature sensor 19 is provided to detect the indoor temperature of each of the rooms A and 1B and the semi-clean room 2, and an air temperature sensor 16 is provided to detect the temperature of the temperature conditioning gas supplied from the air conditioner 8. 8 and a device 7A for changing the air blowing ability of the pressurized supply fan 7, and a device 18 for adjusting the passing air volume in each of the branch air passages 12, (a) Based on the information from the room temperature sensor 19, the control device 17 automatically operates the fan capacity change device 15, the fan capacity change device 7A, and the passing air volume adjustment device 18; . (c) Based on the determination result by the determining means 17C, the air volume of the pressurizing supply fan 7 is made to match the sum of the adjusted air volume of each of the branch air passages 12; , an air volume control means 17D that sends an operation command to the fan capacity changing device 7A; (d) based on the information from the temperature sensor 16, the air conditioner is configured to maintain the temperature detected by the temperature sensor 16 at the set temperature; Temperature control means 17 that sends an operation command to the capacity change device 15
An air conditioner equipped with each of A.