JPS646808B2 - - Google Patents
Info
- Publication number
- JPS646808B2 JPS646808B2 JP59237926A JP23792684A JPS646808B2 JP S646808 B2 JPS646808 B2 JP S646808B2 JP 59237926 A JP59237926 A JP 59237926A JP 23792684 A JP23792684 A JP 23792684A JP S646808 B2 JPS646808 B2 JP S646808B2
- Authority
- JP
- Japan
- Prior art keywords
- filter
- oil
- pump
- treated
- fine particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002253 acid Substances 0.000 claims description 26
- 238000001914 filtration Methods 0.000 claims description 22
- 239000010419 fine particle Substances 0.000 claims description 21
- 239000000428 dust Substances 0.000 claims description 15
- 239000003513 alkali Substances 0.000 claims description 9
- 238000011144 upstream manufacturing Methods 0.000 claims description 9
- 239000002245 particle Substances 0.000 description 10
- 150000007513 acids Chemical class 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000007789 sealing Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- -1 BO 2 Chemical class 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 239000003463 adsorbent Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 150000007514 bases Chemical class 0.000 description 1
- 239000003518 caustics Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
Landscapes
- Filtration Of Liquid (AREA)
- Treatment Of Liquids With Adsorbents In General (AREA)
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は油ろ過装置に関するもので、主として
油回転真空ポンプに用いられるシール用油を浄化
するのに使用される。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an oil filtration device, which is mainly used to purify sealing oil used in oil rotary vacuum pumps.
（従来技術及びその問題点）
半導体にプラズマアークや種々のガスを用いて
エツチング等の加工をする場合その作業は真空
下、すなわち真空のチヤンバー内で行われるが、
このチヤンバーを真空にするのに一般に油回転ポ
ンプが使用される。(Prior art and its problems) When etching or other processing is performed on a semiconductor using a plasma arc or various gases, the work is performed in a vacuum, that is, in a vacuum chamber.
An oil rotary pump is generally used to create a vacuum in this chamber.
ところで、この油回転真空ポンプの使用に際
し、半導体の加工時に発生する塵芥等の微粒子や
イオン化されたガス状の酸又はアルカリが該ポン
プにおいてケーシング、弁、吸排気等のシールに
用いられている油に混入し、このため油中の塵芥
等によつて油シール部分が目詰まりを起こして適
正なシール作用が阻害され、また油中の酸又はア
ルカリが化学反応を起こして腐蝕性を有する種々
の酸性又は塩基性化合物（例えばBO2、BCl3）
を生成しそれによつてポンプのケーシング等の金
属材が腐蝕されると云つた不都合な事態を招いて
いる。したがつてこのような不都合な事態を解消
するために上記シール用の油をろ過して塵芥等微
粒子や酸又はアルカリを除去し浄化してやる必要
があるわけであり、このような目的での油ろ過装
置は従来既に提案されている。 By the way, when using this oil rotary vacuum pump, fine particles such as dust generated during the processing of semiconductors and ionized gaseous acids or alkalis may be contaminated with the oil used for sealing the casing, valves, intake and exhaust, etc. As a result, the oil seal part is clogged due to dust etc. in the oil, inhibiting proper sealing action, and the acid or alkali in the oil causes a chemical reaction, causing various corrosive substances. Acidic or basic compounds (e.g. BO 2 , BCl 3 )
This causes an inconvenient situation in which metal materials such as the pump casing are corroded. Therefore, in order to eliminate this inconvenient situation, it is necessary to filter the oil for the seal and purify it by removing fine particles such as dust, acids, or alkalis, and oil filtration for this purpose is Devices have already been proposed in the past.
そこでこの従来の油ろ過装置を第４図の回路図
により説明すると、この油ろ過装置は、両端部
（油入口側端部ａ及び油出口側端部ｂ）が油回転
真空ポンプのオイルボツクス（図示せず）に接続
される被処理油流通管路イに、被処理油中の塵芥
等微粒子を捕集除去する第１フイルターロを設け
且つこの第１フイルターロの下流側に被処理液中
の酸又はアルカリを吸着除去する第２フイルター
ハを直列に設け、また第１フイルターロの上流側
に電動機ニで駆動されるポンプホを設けて成るも
ので、ポンプホによつてオイルボツクス内の被処
理油を流通管路イに導入して第１フイルターロ側
へ圧送し、この第１フイルターロで加圧ろ過して
被処理油中の塵芥等微粒子を捕集除去し、ここを
通過した被処理油を第２フイルターハに通して酸
又はアルカリを吸着除去し、こうしてろ過処理し
た油をオイルボツクスに戻し、このような操作を
繰り返してオイルボツクスのシール用油を浄化す
るようにしている。尚、この第４図中ヘはリリー
フ弁、トは圧力計、チは圧力スイツチである。と
ころがこの従来装置によれば、第１フイルターロ
を通過して塵芥等微粒子を除去した被処理油がそ
のまま第２フイルターハに入るわけであるから、
ろ過精度によつては第１フイルターロで捕集され
ずにそこを通過した微粒子が第２フイルターハに
流れ込んでその吸着材の表面に付着し、このため
第２フイルターハは早期に目詰まりを生じて、
酸、アルカリ分の吸着除去という本来のろ過作用
を充分に行う以前に使用不能に陥り易く、したが
つて頻繁にフイルターを交換する必要があつた。 Therefore, this conventional oil filtration device will be explained with reference to the circuit diagram in FIG. A first filter for collecting and removing fine particles such as dust in the oil to be treated is provided in the oil distribution pipe A connected to the oil to be treated (not shown), and downstream of the first filter, a A second filter for adsorbing and removing acid or alkali is installed in series, and a pump hole driven by an electric motor is installed upstream of the first filter. The oil is introduced into the distribution pipe A and sent under pressure to the first filter, which filters it under pressure to collect and remove fine particles such as dust in the oil to be treated. The oil is passed through a second filter to adsorb and remove acids or alkalis, and the filtered oil is returned to the oil box, and this operation is repeated to purify the sealing oil in the oil box. In Fig. 4, F is a relief valve, G is a pressure gauge, and H is a pressure switch. However, according to this conventional device, the oil to be treated that has passed through the first filter and has been cleaned of dust and other fine particles enters the second filter as it is.
Depending on the filtration accuracy, fine particles that pass through the first filter without being collected may flow into the second filter and adhere to the surface of the adsorbent, which may cause the second filter to become clogged early. arise,
The filter tends to become unusable before it can perform its original filtration function of adsorbing and removing acids and alkalis, and it is therefore necessary to frequently replace the filter.
（問題点を解決するための技術的手段）
本発明は上述した従来の問題点に鑑みてなされ
たもので、酸又はアルカリの吸着除去を行う第２
フイルターの、塵芥等微粒子による目詰まりをで
きるだけ生じにくくして、この第２フイルター本
来のろ過作用を有効に行わせると共にその使用寿
命をより長く延ばせるようにすることを目的とし
ている。(Technical Means for Solving the Problems) The present invention has been made in view of the above-mentioned conventional problems.
The purpose of this invention is to prevent the filter from being clogged with fine particles such as dust as much as possible, to enable the second filter to effectively carry out its original filtration action, and to further extend its service life.
したがつて本発明の技術的手段は、被処理油流
通管路に、第２フイルターを迂回するバイパス管
路を設けると共に、第１フイルターの上流側には
この第１フイルターに流入する被処理油を加圧す
る第１ポンプを、また第２フイルターの上流側に
は第１フイルターを通過して第２フイルターに流
入する被処理油を加圧する第２ポンプをそれぞれ
設けたことにある。 Therefore, the technical means of the present invention is to provide a bypass line that bypasses the second filter in the oil distribution line to be treated, and to provide a bypass line that bypasses the second filter on the upstream side of the first filter to prevent oil flowing into the first filter. A first pump is provided to pressurize the oil to be treated, and a second pump is provided upstream of the second filter to pressurize the oil to be treated that passes through the first filter and flows into the second filter.
（作用） 上記技術的手段は次のように作用する。(effect) The above technical means works as follows.
被処理油流通管路に送給された被処理油の流れ
は第１フイルターを通過した後、バイパス管路側
と第２フイルター側とに分岐し、したがつて第１
フイルターにおいてそのろ過精度により捕集され
得ずに通過する塵芥等微粒子もバイパス管路側と
第２フイルター側との二手に分かれて流れること
になり、そのため第２フイルターを通過する塵芥
等微粒子の量はバイパス管路へ流れ込んでいる分
だけ少なくなる。そして、第１ポンプは第１フイ
ルターに対し、第２ポンプは第２フイルターに対
しそれぞれ直接的に加圧作用し、また第２フイル
ター側に流入した被処理油は流通管路の油出口側
へと送られる。 After passing through the first filter, the flow of the treated oil fed to the treated oil distribution pipe is branched into the bypass pipe side and the second filter side, and therefore the first filter
Dust and other fine particles that pass through the filter without being collected due to its filtration accuracy are divided into two streams: the bypass pipe side and the second filter side. Therefore, the amount of dust and other fine particles that pass through the second filter is The amount decreases by the amount flowing into the bypass pipe. The first pump directly pressurizes the first filter, and the second pump directly pressurizes the second filter, and the oil to be treated that flows into the second filter is directed to the oil outlet side of the distribution pipe. is sent.
（実施例）
本発明の実施例を第１図の回路図により説明す
ると、被処理油流通管路１は第４図のろ過装置と
同じく油回転真空ポンプのオイルボツクスに接続
される油入口側端部ａ及び油出口側端部ｂを有
し、そしてこの流通管路１には、これに通されて
くる被処理油中に混入されている塵芥等微粒子を
捕集除去するための第１フイルター２と、同被処
理油中に混入されている酸又はアルカリを吸着除
去するための第２フイルター３とが設けられてい
る。第１フイルター２は公知構造のフイルターで
あつて、公称値３〜5μの粒子を除去することが
できるものであり、また第２フイルター３も公知
のもので、公称値1μ程度の粒子を除去しうる吸
着材を有しておりそしてこの吸着剤としては活性
アルミナ、活性炭等が使用される。また、上記流
通管路１には、第１フイルター２の下流側所要位
置に設けた分岐点４から分岐して第２フイルター
３を迂回し合流点５で該流通管路１と合流するよ
うなバイパス管路６が配設されており、このバイ
パス管路６には流量調整可能な絞り弁７が設けて
ある。また、第１フイルター２の上流側には電動
機８により駆動される第１ポンプ９が設置され、
そして第２フイルター３の設けてある流通管路部
分１０にはこの第２フイルター３の上流側に電動
機１１により駆動される第２ポンプ１２が設置さ
れている。尚、第１図中１３，１４はリリーフ
弁、１５，１６は圧力計、１７，１８は圧力スイ
ツチを示す。(Embodiment) An embodiment of the present invention will be explained with reference to the circuit diagram shown in FIG. 1. The oil distribution pipe 1 to be treated is connected to the oil inlet side connected to the oil box of the oil rotary vacuum pump, as in the filtration device shown in FIG. 4. The flow pipe 1 has an end a and an end b on the oil outlet side, and the flow pipe 1 has a first pipe for collecting and removing fine particles such as dust mixed in the oil to be treated that is passed through the flow pipe 1. A filter 2 and a second filter 3 for adsorbing and removing acid or alkali mixed in the oil to be treated are provided. The first filter 2 is a filter of a known structure and is capable of removing particles with a nominal value of 3 to 5 μm, and the second filter 3 is also of a known type and is capable of removing particles with a nominal value of about 1 μm. Activated alumina, activated carbon, etc. are used as the adsorbent. In addition, the above-mentioned distribution pipe 1 includes a branch that branches from a branch point 4 provided at a predetermined position downstream of the first filter 2, bypasses the second filter 3, and merges with the distribution pipe 1 at a confluence point 5. A bypass line 6 is provided, and this bypass line 6 is provided with a throttle valve 7 that can adjust the flow rate. Further, a first pump 9 driven by an electric motor 8 is installed on the upstream side of the first filter 2,
A second pump 12 driven by an electric motor 11 is installed on the upstream side of the second filter 3 in the flow pipe section 10 where the second filter 3 is provided. In FIG. 1, 13 and 14 are relief valves, 15 and 16 are pressure gauges, and 17 and 18 are pressure switches.
次に、上記のような構成を有する油ろ過装置の
操作を説明する。 Next, the operation of the oil filtration device having the above configuration will be explained.
この油ろ過装置において第１ポンプ９の吐出量
は第２ポンプ１２の吐出量と同一か又はそれより
大とする。また第１ポンプ９を駆動する電動機８
は連続運転されるものとし、一方第２ポンプ１２
を駆動する電動機１１は連続又は間欠運転できる
ようにタイマーによつて任意に設定されるように
なつている。そしてこの油ろ過装置は油回転真空
ポンプのオイルボツクスに接続され、この真空ポ
ンプは半導体エツチング加工用の真空チヤンバー
に連結されて真空引きを行うものとする。 In this oil filtration device, the discharge amount of the first pump 9 is equal to or larger than the discharge amount of the second pump 12. Also, an electric motor 8 that drives the first pump 9
shall be operated continuously, while the second pump 12
The electric motor 11 that drives the motor 11 can be arbitrarily set by a timer so that it can be operated continuously or intermittently. This oil filtration device is connected to an oil box of an oil rotary vacuum pump, and this vacuum pump is connected to a vacuum chamber for semiconductor etching processing to perform evacuation.
先ず、油回転真空ポンプの作動を開始した後、
油ろ過装置における第１ポンプ９及び第２ポンプ
１２を作動させる。尚、第１ポンプ９は連続的に
作動させ、また第２ポンプ１２は例えば10〜15分
の周期で停止と作動とを繰り返し行わせる。い
ま、オイルタンク内の被処理油が油入口側端部ａ
から被処理油流通管路１に送給されて第１フイル
ター２を通過することにより塵芥等微粒子が捕集
され、この第１フイルター２を通過した被処理油
は分岐点４からバイパス管路６と第２フイルター
３の設けられた流通管路部分１０とに分流され
る。尚、絞り弁７は第２フイルター３を通過した
後の被処理油が流通管路部分１０を通つて流通管
路１の油出口側端部ｂへ流れるように設定してあ
り、またここで流通管路１の油入口側端部ａ及び
油出口側端部ｂにおける油流量をそれぞれＡ
（／min）、第２フイルター３通過後の油流量を
Ｂ（／min）とすると、第２ポンプ１２が停止
している場合Ｂが零となるためバイパス管路６の
絞り弁７を通過する油流量Ｑ（／min）はＡに
等しく、また第２ポンプ１２が作動している場合
Ｑ＝Ａ−Ｂとなる。しかして、第２ポンプ１２の
作動時には第１フイルター２通過後の被処理油は
バイパス管路６と流通管路部分１０とに分かれる
わけであるから、第１フイルター２で捕集され得
ずに通過した塵芥等微粒子も双方側に分かれて流
れることなり、したがつて第２フイルター３を通
過する塵芥等微粒子の流量はバイパス管路６へ流
れ込む分だけ少なくなり、このため第２フイルタ
ー３の吸着材表面に付着する微粒子の量も少なく
なつてこの第２フイルター３は目詰まりしにくく
なる。またこの第２フイルター３においては微粒
子の少ない被処理油中の酸又はアルカリが吸着除
去される。尚、第１ポンプ９の吐出量を第２ポン
プ１２のそれよりも大きくすると、被処理油中の
微粒子が第１フイルター２によつて早く除去され
るため、その分第２フイルター３側へ流入する微
粒子の流量は少なくなつて一層有効となる。一
方、第２ポンプ１２の作動が停止している間は上
述のように被処理油は第２フイルター３側へは流
れずバイパス管路６へ流れるわけであるから、そ
の間酸又はアルカリの除去操作はなされず第１フ
イルター２による微粒子の除去操作のみ継続され
る。このように、第２フイルター３による酸又は
アルカリの吸着除去が間欠的であつても、被処理
油中の酸又はアルカリの濃度は充分低い値におさ
えることが可能である。 First, after starting the operation of the oil rotary vacuum pump,
The first pump 9 and the second pump 12 in the oil filtration device are operated. The first pump 9 is operated continuously, and the second pump 12 is repeatedly stopped and operated, for example, at intervals of 10 to 15 minutes. Now, the oil to be treated in the oil tank is at the oil inlet side end a.
The oil to be treated is fed from the oil to the distribution pipe 1 and passes through the first filter 2 to collect fine particles such as dust.The oil to be treated flows from the branch point 4 to the bypass pipe 6. and a distribution pipe section 10 provided with the second filter 3. The throttle valve 7 is set so that the oil to be treated after passing through the second filter 3 flows through the distribution pipe section 10 to the oil outlet side end b of the distribution pipe 1. The oil flow rates at the oil inlet side end a and the oil outlet side end b of the distribution pipe 1 are respectively A.
(/min), and the oil flow rate after passing through the second filter 3 is B (/min). Since B becomes zero when the second pump 12 is stopped, the oil passes through the throttle valve 7 of the bypass pipe 6. The oil flow rate Q (/min) is equal to A, and when the second pump 12 is operating, Q=AB. Therefore, when the second pump 12 is operated, the oil to be treated after passing through the first filter 2 is divided into the bypass pipe line 6 and the distribution pipe section 10, so that it cannot be collected by the first filter 2. The dust and other fine particles that have passed through will also flow separately on both sides, and therefore the flow rate of the dust and other fine particles that have passed through the second filter 3 will be reduced by the amount that flows into the bypass pipe 6, so that the adsorption of the second filter 3 will be reduced. The amount of fine particles adhering to the material surface is also reduced, making the second filter 3 less likely to become clogged. Further, in this second filter 3, acids or alkalis in the oil to be treated, which contain few particles, are adsorbed and removed. In addition, if the discharge amount of the first pump 9 is made larger than that of the second pump 12, fine particles in the oil to be treated will be removed faster by the first filter 2, so that more particles will flow into the second filter 3 side. The smaller the flow rate of the particulates, the more effective it will be. On the other hand, while the operation of the second pump 12 is stopped, the oil to be treated does not flow to the second filter 3 side but flows to the bypass pipe 6 as described above, so the acid or alkali removal operation is performed during that time. The operation for removing particulates by the first filter 2 continues instead. In this way, even if the second filter 3 adsorbs and removes the acid or alkali intermittently, the concentration of the acid or alkali in the oil to be treated can be kept to a sufficiently low value.
第２図は真空ポンプの運転時間とこれに伴う被
処理油中の微粒子数及び酸濃度との関係を示すグ
ラフで、この図の横軸は油回転真空ポンプの運転
時間、縦軸はオイルボツクス内に所定量貯められ
た油中の微粒子数及び酸濃度を表し、そして図中
Ｖは上記実施例の油ろ過装置を使用した場合の微
粒子数の変化を表す線、Ｗは酸濃度の変化を表す
線、またV0及びW0は参考としてろ過装置を用い
ない場合における微粒子及び酸濃度のそれぞれの
変化を示している。このグラフについて説明を加
えると、真空ポンプを運転開始した時点ではオイ
ルボツクス内の油中の微粒子数及び酸濃度はほと
んど零であるが、この真空ポンプを運転してゆく
に従つてそれらは漸次上昇する。そして本装置を
使用した場合において、油中の微粒子数はＶ線で
示すように真空ポンプの運転開始時から若干の時
間が経過するまでは緩やかな上がり勾配で増加す
るが、それ以降は平行線をたどつて一定数に維持
されている。これは第１フイルター２によつて微
粒子が逐次除去されることによるものである。ま
た油中の酸濃度はＷ線で示すように、微粒子数と
同じく真空ポンプの運転開始当初は緩やかに増加
するがそれ以降は上がり勾配と下り勾配とで短い
波長の波線を描きながらほぼ一定値を維持してい
る。ここで上がり勾配は第２ポンプ１２の作動が
停止して第２フイルター３による酸の除去操作が
中断し酸濃度が増加している状態、また下り勾配
は第２ポンプ１２の作動が開始されて再び酸の除
去操作が行われ酸濃度が減少している状態を示
す。尚、この場合微粒子数及び酸濃度は油が真空
ポンプに対し目詰まりや腐蝕といつた支障を来さ
ない程度の一定値に維持するようにすればよい。 Figure 2 is a graph showing the relationship between the operating time of the vacuum pump and the number of particles and acid concentration in the oil to be treated. The horizontal axis of this figure is the operating time of the oil rotary vacuum pump, and the vertical axis is the oil box. In the figure, V represents the change in the number of particulates when the oil filtration device of the above example is used, and W represents the change in the acid concentration. The lines shown, as well as V 0 and W 0 , indicate changes in fine particle and acid concentrations when no filtration device is used for reference. To explain this graph, the number of particles and acid concentration in the oil in the oil box are almost zero when the vacuum pump starts operating, but as the vacuum pump continues to operate, they gradually increase. do. When this device is used, the number of fine particles in the oil increases at a gentle upward slope from the start of vacuum pump operation until some time has passed, as shown by the V line, but after that, the number of particles in the oil increases with a parallel line. is maintained at a constant number. This is because fine particles are successively removed by the first filter 2. In addition, as shown by the W line, the acid concentration in the oil increases slowly at the beginning of operation of the vacuum pump, just like the number of particles, but after that it remains almost constant while drawing a short wavelength wavy line with an upward slope and a downward slope. is maintained. Here, an upward slope is a state in which the operation of the second pump 12 is stopped and the acid removal operation by the second filter 3 is interrupted, and the acid concentration is increasing, and a downward slope is a state in which the operation of the second pump 12 is started. This shows that the acid removal operation is performed again and the acid concentration is decreasing. In this case, the number of particles and the acid concentration may be maintained at constant values to the extent that the oil does not cause problems such as clogging or corrosion of the vacuum pump.
一方、V0線及びW0線を参照して明らかなよう
に、ろ過処理を全く行わない場合には微粒子数及
び酸濃度が可成り急な勾配で増加し、真空ポンプ
は短時間のうちに使用不可能となる。また、第４
図に示したような従来装置による場合、第２図の
グラフ中での図示は省略するが酸濃度は真空ポン
プの運転開始後しばらくの間は比較的低い値を維
持しているが、第２フイルターハが早期に目詰ま
りを起こすため或る時間経過後は第２図のVo線
と同様に急激に増大することになる。 On the other hand, as is clear from the V 0 and W 0 lines, when no filtration is performed, the number of particles and acid concentration increase at a fairly steep gradient, and the vacuum pump quickly It becomes unusable. Also, the fourth
In the case of the conventional device shown in the figure, although not shown in the graph of Figure 2, the acid concentration remains at a relatively low value for a while after the vacuum pump starts operating. Since the filter becomes clogged early, the value increases rapidly after a certain period of time, similar to the Vo line in FIG.
第３図は他の実施例による油ろ過装置の回路図
を示したもので、これによれば油入口側端部ａ及
び油出口側端部ｂがオイルボツクスに接続可能な
被処理油流通管路１９に、主第１フイルター２０
Ａと、副第１フイルター２０Ｂ及び第２フイルタ
ー２１とが並列に設けられ、主第１フイルター２
０Ａの上流側には電動機２２で駆動される第１ポ
ンプ２３が、また副第１フイルター２０Ｂの上流
側には電動機２４で駆動される第２ポンプ２５が
設けられている。尚、副第１フイルター２０Ｂは
設けられない場合もある。図中２６，２７はリリ
ーフ弁、２８，３０，３２は圧力計、２９，３
１，３３は圧力スイツチである。 FIG. 3 shows a circuit diagram of an oil filtration device according to another embodiment, in which an oil inlet end a and an oil outlet end b are connected to an oil box to be treated. 19, the main first filter 20
A, a sub-first filter 20B and a second filter 21 are provided in parallel, and the main first filter 2
A first pump 23 driven by an electric motor 22 is provided upstream of 0A, and a second pump 25 driven by an electric motor 24 is provided upstream of the sub-first filter 20B. Note that the sub-first filter 20B may not be provided. In the figure, 26, 27 are relief valves, 28, 30, 32 are pressure gauges, 29, 3
1 and 33 are pressure switches.
（発明の効果）
本発明によれば、第２フイルターを通過する塵
芥等微粒子の量を比較的少なくすることができる
ため、酸又はアルカリの吸着除去を目的とする第
２フイルターでの微粒子による目詰まりが起こり
にくくなり、したがつて第２フイルター本来の吸
着によるろ過作用を有効に行わせることができる
と共にその使用寿命を長くすることができる。ま
た、各フイルターごとにポンプを設けていること
によつて、各フイルターに対し有効に加圧を施す
ことができると共に各ポンプの出力を効率よく最
大限利用でき、加えて第２ポンプを酸又はアルカ
リの濃度が所要値におさえられる程度に間欠的に
作動させることにより第２フイルターの目詰まり
を一層少なくすることができてこのフイルターの
寿命をより長く延ばすことができる。(Effects of the Invention) According to the present invention, the amount of fine particles such as dust passing through the second filter can be relatively reduced, so that the second filter can be used for the purpose of adsorbing and removing acid or alkali. Clogging is less likely to occur, and therefore the second filter's inherent filtration action by adsorption can be effectively performed, and its service life can be extended. In addition, by providing a pump for each filter, it is possible to effectively pressurize each filter, and the output of each pump can be efficiently and maximally utilized. By operating the second filter intermittently to such an extent that the alkali concentration is kept within a required value, clogging of the second filter can be further reduced, and the life of this filter can be further extended.
第１図は本発明の一実施例を示す油ろ過装置の
回路図、第２図は真空ポンプの運転時間と被処理
油中の微粒子数及び酸濃度との関係を示すグラ
フ、第３図は別実施例を示す回路図、第４図は従
来の油ろ過装置の回路図である。
１……被処理油流通管路、２……第１フイルタ
ー、３……第２フイルター、６……バイパス管
路、７……絞り弁、９……第１ポンプ、１２……
第２ポンプ。
Fig. 1 is a circuit diagram of an oil filtration device showing an embodiment of the present invention, Fig. 2 is a graph showing the relationship between the operating time of the vacuum pump and the number of fine particles and acid concentration in the oil to be treated, and Fig. 3 is A circuit diagram showing another embodiment, FIG. 4 is a circuit diagram of a conventional oil filtration device. DESCRIPTION OF SYMBOLS 1... Oil distribution pipe to be treated, 2... First filter, 3... Second filter, 6... Bypass pipe, 7... Throttle valve, 9... First pump, 12...
Second pump.
Claims (1)
子を捕集除去する第１フイルターを設け且つこれ
の下流側に被処理油中の酸又はアルカリを吸着除
去する第２フイルターを設けて成る油ろ過装置に
おいて、上記被処理油流通管路に、上記第２フイ
ルターを迂回するバイパス管路を設けると共に、
上記第１フイルターの上流側にはこの第１フイル
ターに流入する被処理油を加圧する第１ポンプ
を、また上記第２フイルターの上流側には第１フ
イルターを通過して第２フイルターに流入する被
処理油を加圧する第２ポンプをそれぞれ設けたこ
とを特徴とする油ろ過装置。 ２ 上記バイパス管路に絞り弁を設けたことを特
徴とする特許請求の範囲第１項記載の油ろ過装
置。[Scope of Claims] 1. A first filter for collecting and removing fine particles such as dust in the oil to be treated is provided in the oil distribution pipe to be treated, and on the downstream side of the first filter, acid or alkali in the oil to be treated is adsorbed and removed. In an oil filtration device including a second filter, a bypass pipe that bypasses the second filter is provided in the oil distribution pipe to be treated, and
Upstream of the first filter, there is a first pump that pressurizes the oil flowing into the first filter, and upstream of the second filter, the oil passes through the first filter and flows into the second filter. An oil filtration device characterized in that each second pump is provided to pressurize the oil to be treated. 2. The oil filtration device according to claim 1, characterized in that the bypass pipe line is provided with a throttle valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59237926A JPS61118107A (en) | 1984-11-12 | 1984-11-12 | Oil filter device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59237926A JPS61118107A (en) | 1984-11-12 | 1984-11-12 | Oil filter device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61118107A JPS61118107A (en) | 1986-06-05 |
| JPS646808B2 true JPS646808B2 (en) | 1989-02-06 |
Family
ID=17022500
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59237926A Granted JPS61118107A (en) | 1984-11-12 | 1984-11-12 | Oil filter device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61118107A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0318705U (en) * | 1989-07-05 | 1991-02-25 | ||
| CN102232786A (en) * | 2011-04-26 | 2011-11-09 | 浙江绍兴苏泊尔生活电器有限公司 | Electric pressure cooker |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63137714A (en) * | 1986-12-01 | 1988-06-09 | Tooshin Technical:Kk | Liquid processing equipment |
| CN104056488A (en) * | 2014-05-30 | 2014-09-24 | 洛阳凯美胜石化设备有限公司 | Oil product filtering device and oil product filtering process for same |
| JP7534895B2 (en) * | 2020-09-04 | 2024-08-15 | オルガノ株式会社 | Liquid Purification Equipment |
-
1984
- 1984-11-12 JP JP59237926A patent/JPS61118107A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0318705U (en) * | 1989-07-05 | 1991-02-25 | ||
| CN102232786A (en) * | 2011-04-26 | 2011-11-09 | 浙江绍兴苏泊尔生活电器有限公司 | Electric pressure cooker |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61118107A (en) | 1986-06-05 |
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