JPH0132289B2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention is directed to annealing a wound core in a magnetic field in order to improve the magnetic properties of a wound core formed by winding an amorphous magnetic ribbon. The present invention relates to a suitable annealing device.

[Prior Art] In recent years, static induction devices such as transformers have been using amorphous magnetic thin strips (hereinafter referred to as There is a trend toward practical use of wound cores made by winding magnetic thin strips. The magnetic ribbon has excellent magnetic properties because its iron loss and excitation current are significantly smaller than those of silicon steel strips. However, in the as-manufactured state, magnetic ribbon still retains the stress from quenching, and its thickness is only about 1/10 that of silicon steel strip, so its mechanical strength is extremely low. small. In addition, stress is applied when forming a wound core by winding magnetic ribbons, which increases internal strain and increases iron loss. It was necessary to perform annealing in a magnetic field to align the 180 magnetic domains by applying a magnetic field in the direction of flow.

When performing the magnetic field annealing described above, for example, as shown in FIG. The wound core 1 is placed in a mold annealing furnace 3 and heated to a temperature suitable for annealing (approximately 400°C) in an inert gas atmosphere.
When the switch 4 is turned on in this state, the excitation coil 2 receives electricity from the excitation power source, for example.
A direct current flows, and the wound core 1 is magnetized in the direction of the arrow. That is, by performing magnetic field annealing and providing uniaxial anisotropy to the wound core, it is possible to obtain a wound core with significantly improved iron loss and excitation current. After the annealing, the excitation coil is removed from the wound core, thereby completing the annealing of the wound core made of the amorphous magnetic ribbon and completing the manufacturing of the wound core.

[Problems to be Solved by the Invention] However, when annealing a wound core, the method of annealing in a magnetic field as described above requires winding of an excitation coil for each wound core to be annealed. In other words, the work of winding the excitation coil for each wound core is required, and since the excitation coil is exposed to a high-temperature atmosphere, it must be specially heat-resistant treated. Annealing work requires a lot of effort and time, and is inefficient.
Since a coil conductor that had been subjected to expensive heat-resistant treatment was used, there was a problem in that the annealing cost increased. Furthermore, during the annealing process, there were various problems that hindered the mass production of wound cores, such as the fact that the transformer coil could not be wound unless the excitation coil wound around the wound core was removed.

In view of the above-mentioned problems, the present invention enables continuous annealing of this type of wound core by simply performing annealing in a magnetic field in order to improve the core properties of the wound core wound with an amorphous magnetic ribbon. The object of the present invention is to provide a new annealing device with the following features.

[Means for Solving the Problems] The present invention takes the measures described in the claims above, and its effects are as follows.

[Function] A fixed amount of inert gas such as nitrogen is injected into an annealing furnace composed of a heating chamber and a soaking chamber, and the rolled iron core transported to the heating chamber is heated to a temperature suitable for annealing. At the same time, the annealing is carried out while maintaining the annealing temperature. After annealing, the temperature is lowered to near normal temperature in the cooling room, and until the temperature is transferred to the outside of the annealing furnace, the window part of the wound core is heated in the axial direction. An excitation conductor connected to an excitation power source such as a DC power source is inserted into and removed from the core, and while the excitation conductor passes through the window of the winding core, a current is passed through the conductor to connect each winding core. Annealing is performed in a magnetic field by excitation, and the work of winding an excitation coil around each wound core before annealing and the work of removing the excitation coil after annealing are completely omitted, and the work of removing the excitation coil after annealing is completely omitted. simplifies annealing work, and
It is characterized in that it is carried out efficiently and continuously to improve the mass productivity of the wound core.

[Example] Hereinafter, an example of the present invention will be described with reference to FIGS. 1 to 6.

In FIG. 1, 11 is an annealing furnace for annealing the wound core 12 formed by winding an amorphous magnetic ribbon.
400° C.), a soaking chamber 14 for annealing the wound core 12 while maintaining the annealing temperature, and an annealed wound core 12 that is gradually cooled to a temperature close to room temperature. The cooling chambers 15 are configured to be continuously arranged in a straight line so as to be able to communicate with each other. Doors 13a and 15a are provided on the inlet side of the heating chamber 13 and on the outlet side of the cooling chamber 15 so as to be openable and closable by cylinders 16 and 17, and
It is installed so that the inside of the annealing furnace 11 can be kept airtight. Reference numeral 18 indicates an opening/closing door 1 on the entrance side of the heating chamber 13.
The front replacement chamber 18 is disposed so as to be able to communicate with the heating chamber 13 via the heating chamber 3a, and an opening/closing door 18a which is opened and closed by a cylinder 19 is attached to the front replacement chamber 18. Furthermore, on the outlet side of the cooling chamber 15, there is a cooling chamber 1.
A rear exchange chamber 20 communicating with the rear exchange chamber 5 is disposed, and an opening/closing door 20a that is opened and closed by a cylinder 21 is attached to the exit side of the rear exchange chamber 20. 22 is a roller conveyor installed across the front exchange chamber 18, heating chamber 13, soaking chamber 14, and cooling chamber 15, 23 is an electric roller installed in the rear exchange chamber 20, and 24 has finished annealing. A conveyor 25 for transporting the wound core to the next process is installed in front of the front replacement chamber 18 in a direction perpendicular to the annealing furnace 11 to carry the wound core 12 to be annealed into the front replacement chamber 18. This is a transport conveyor. 26 is a water pipe arranged in a meandering manner horizontally penetrating the furnace wall in the upper part of the cooling chamber 15; 27 is a water pipe extending from the heating chamber 13 to the soaking chamber 14 as shown in FIGS. 3 and 4; Heater arranged along the inside, 28 is the loading conveyor 2
A transport platform 30 is installed at the end opposite to the front replacement chamber 18 of No. 5 and carries the wound core 12 to be annealed.
a pushing cylinder for moving the front displacement chamber 18;
Reference numeral 9 denotes an insertion cylinder that is installed on the outside of the front replacement chamber 18 in the direction opposite to the heating chamber 13 and moves the conveyance table 30 carried into the front replacement chamber 18 into the heating chamber 13;
Note that the pushing cylinder 28 and the insertion cylinder 2
9 are set to move the conveyance table 30 by one pitch (distance equivalent to one car) in the conveyance direction. Reference numeral 29a denotes an auxiliary roller disposed at the end of the front exchange chamber 18 (on the opposite side to the heating chamber 13), perpendicular to the roller conveyor 22, in order to make it easier to carry the conveyor table 30 into the front exchange chamber 18. In addition, when the conveyance table 30 is carried in, it is provided so as to be moved in and out from between the rollers of the roller conveyor 22 by a lifting device (not shown).

Next, the structure of the magnetic field annealing device 31 installed in the soaking chamber 14 and the cooling chamber 15 of the annealing furnace 11 will be described in detail with reference to FIGS. 2 and 3. 32 is the soaking room 14
The cooling chamber 15 is made of a good conductor such as copper or stainless steel, and is arranged to pass through the ceiling and bottom of the chamber airtightly and slidably in the vertical direction, and is heated to the annealing temperature. Heated wound core 12
This excitation conductor 32 is an excitation conductor for applying a magnetic field to the annealing furnace. A plurality of window portions 12a of the wound core 12 mounted on the table 30 are inserted from the direction of the axis of the core 12, and a plurality of windows are arranged at intervals such that the through holes 30a of the transport table 30 can be easily penetrated. In this embodiment, four excitation conductors 32 on one conveyor table 30 penetrate through the wound core 12 to be annealed. or,
On the outer sides of the ceiling and bottom of the annealing furnace 11 through which the conductor 32 passes, conductive clamping fittings 33 and 33' are provided, respectively, for clamping and holding the excitation conductor 32 so that it can move up and down. Pressure fittings 33, 33'
As shown in FIG. 6, a connecting rod 34 provided with a rack 43a is connected to an insulating member made of heat-resistant resin at the upper end of the excitation conductor 32 that protrudes upward from the upper clamping fitting 33. They are integrally connected in the vertical direction via 35. The connecting rod 34 is connected to a bearing member 36 which is electrically insulated from the clamping fittings 33 and 33' and attached to the upper surface of the annealing furnace 11, and which is also attached to the upper surface of the annealing furnace 11 along its length. A horizontal beam 37 is attached to a box-shaped support frame 37.
It is inserted into a bearing fitting 38 attached via a and held vertically. The reason why the excitation conductor 32 for generating a magnetic field is provided in a limited manner across the soaking chamber 14 and the cooling chamber 15 is because the magnetic field is applied to the wound core 12 from the initial stage of heating. , wound core 1
After heating 2 to a temperature suitable for annealing in a magnetic field, we measured the core characteristics of the double-wound core through experiments when a magnetic field was applied while maintaining this temperature until it was slowly cooled. As a result, it was found that there was no superiority difference between the two cores, so in order to simplify the structure of the magnetic field annealing device 31 and achieve economical effects, the excitation conductor 32 was separated into the soaking chamber 14 and the cooling chamber 15. It was placed in Reference numeral 39 denotes an electric motor attached to the upper part of the rear displacement chamber 20 via a stepladder (not shown), and transmission gears 41, 4 are mounted on both sides of a gear 40 fixed to the rotor shaft of the electric motor 39.
As shown in FIG. is arranged parallel to the support frame 37,
As shown in FIGS. 2 and 3, these transmission shafts 41a and 41b are rotatably inserted and supported by a bearing fitting 42 vertically disposed on a cross beam 37a of the support frame 37. or,
A pinion 43 that meshes with the rack 34a of the connecting rod 34 is installed on the transmission shafts 41a, 41b at a position corresponding to the connecting shaft 34, respectively, as shown in FIG.
When activated, the connecting shaft 34 is rotated via the transmission shafts 41a and 41b, and the connecting shaft 34 is raised and lowered. Therefore, the connecting shaft 3
Excitation conductor 3 connected to 4 via an insulating member 35
2 also move up and down at the same time. 44a and 44b are limit switches for stopping the electric motor 39;
A cam protrusion 45 provided on the connecting rod 34 connects the limit switches 44a, 44
Push the operating rod b to stop the electric motor 39.

Next, the conveyor table 30 on which the wound core 12 to be annealed is loaded and transported to the annealing furnace 11 is formed in a U-shape as shown in FIGS. The mounting surface 30b on which the vehicle is mounted is provided with a large number of through holes 30a for good passage of hot air, and support walls 30c are provided at the front and rear portions (left and right directions in FIG. 2) of the mounting surface 30b. is formed at a constant height, and on the lower side of the mounting surface 30b on which the support wall 30c is located, it engages with the upper end of the support wall 30c and
A hook-shaped notch 30d is provided to allow stacking of the sheets. Reference numerals 46 denote clamping fittings 33 and 33' for vertically movably clamping the excitation conductor 32 at the upper and lower parts of the annealing furnace 11, respectively, as shown in FIG.
Connecting cables connected in series across the soaking chamber 14 and the cooling chamber 15 via excitation conductors 32 vertically installed in a required number at regular intervals so as to be vertically movable;
The end of this cable 46 is connected to the excitation conductor 32,
For example, as an excitation source for passing a current to provide a required magnetic field to the wound core 12 to be annealed,
It is connected to a DC power source 48 via a switch 47. Then, the excitation conductor 32 is connected to the DC power supply 4.
8 is connected in series because in the connection circuit of the excitation conductor 32, if there is a poor contact with the clamping fittings 33, 33' or a disconnection accident, it can be easily detected at one location. It is. but,
In the present invention, without being limited to this,
Of course, various connection methods may be employed. Further, although an embodiment has been described in which a direct current is passed through the excitation conductor 32 in order to provide a required magnetic field to the wound core 12 to be annealed, the present invention is not limited thereto. Furthermore, in FIG. 1, 49 is an inert gas tank supplied to each chamber 13, 14, 15 of the annealing furnace 11 and the front and rear replacement chambers 18, 20 through valves a to e, and 50 is an inert gas tank. A vacuum pump for evacuating the front and rear displacement chambers 18 and 20 through valves f and g; 51 is a support leg of the annealing furnace 11; 52 is a cooling water pipe disposed around the bearing member 36; Reference numeral 53 designates an insulating cover for the lower clamping metal fitting 33'.

In addition, cylinders 16, 17, 19, 21, 2
8 and 29, the electric motor 39, and the motor M of the electric roller 23 are each operated by a command signal from a control device (not shown). Further, during operation of the annealing furnace 11, inert gas is supplied to each chamber 13, 14, 15 at a constant pressure.

Next, the operation will be explained.

Before annealing the wound core 12 using the apparatus of the present invention, the following preparatory work is performed.

That is, a fixed amount of inert gas is injected into the annealing furnace 11, and the heating chamber 13 and soaking chamber 1 in the furnace 11 are
4 heats the air in the furnace to a temperature suitable for annealing using a heater 27 and a fan (not shown), and furthermore, a cooling chamber 15 and a bearing member 36 supply cooling water to water pipes 26 and 52. Water is passed through to maintain the temperature at which the annealing work can be performed smoothly. Further, in the cooling chamber 15 and the soaking chamber 14 in the annealing furnace 11, a conveyor table 30 on which the wound core 12 is not mounted is placed.
They are placed on the roller conveyor 22 with the exception of one conveyance table 30 located on the exit side of the cooling chamber 15.

After completing the above preparation work, carry-in conveyor 2
A conveyor table 3 on which the wound core 12 to be annealed is mounted
0, the support wall 30c is the opening/closing door 1 of the front replacement chamber 18.
Place it so that it is located on the 8a side. At this time, as shown in FIG. 5, the carrier 30 is stacked in two stages using a support wall 30c and a notch 30d, and the wound core 12 is mounted on the mounting surface 30b with the window 12a positioned vertically. I will post it. When this wound core 12 is mounted, as shown in FIG. 4, the window portion 12a of the wound core 12 and the through hole 30a of the mounting surface 30b are aligned so that the excitation conductor 32 can penetrate therethrough. After the transport platform 30 on which the wound iron core 12 is mounted as shown in FIG. 5 is placed on the transport conveyor 25, the cylinder 19 opens the opening/closing door 18a, and then the push cylinder 28 is driven to replace the front part. One transport table 30 is sent into the front replacement chamber 18. After being carried into the replacement chamber 18, the opening/closing door 18a is temporarily closed. After that, the conveyor table 30 on which the wound core 12 is newly mounted is placed on the carry-in conveyor 25 on the pushing cylinder 28 side, and the front exchange chamber 18 is evacuated by the vacuum pump 50. After doing this, inject a fixed amount of inert gas. Next, the opening/closing door 13a of the heating chamber 13 is opened by the cylinder 16, and then the insertion cylinder 29 is driven to send the conveyance table 30 carried into the replacement chamber 18 into the heating chamber 13. After this conveyance table 30 is sent into the heating chamber 13, the opening/closing door 13a is temporarily closed. The wound core 12 carried into the heating chamber 13 is gradually heated to a temperature suitable for annealing according to the atmospheric temperature in the heating chamber 13. The work of placing the loaded conveyor table 30, the work of transporting the conveyor table 30 into the front exchange chamber 18, the work of creating an atmosphere of inert gas in the front exchange chamber 18, the operation of carrying the conveyor table 30 into the front exchange chamber 18. The work up to sending the table 30 into the heating chamber 13 (the above work is referred to as the first work) is sequentially repeated, and
The conveyance tables 30 carrying the wound cores 12 are fed in such a number that they come into contact with the conveyance tables 30 on which the wound cores 12 that have already been conveyed to the soaking chamber 14 are not mounted.
Note that the first operation is performed continuously until the conveyance table 30 carrying the wound core 12 comes into contact with the conveyance table in the soaking chamber 14, but from then on, the first operation is performed in relation to the next process.
Divide the time into sections. When the first operation is completed, the inside of the annealing furnace 11 → the front replacement chamber 18 → the conveyor 25 is transferred to the conveyor 3 on which the rolled iron core 12 is mounted.
0 and the transport platform 30 that is not loaded. At this point, when the first operation is completed once, a space corresponding to 301 transport tables is created on the pushing cylinder 28 side of the carry-in conveyor 25, and a space on which the wound core 12 is newly loaded is created between this space. For example, by stacking the tables 30 in two stages as shown in FIG. 5 and performing the above-mentioned first operation in order, each conveyor table 30 on which the wound core 12 in the annealing furnace 11 is not mounted can be The insertion cylinder 29 moves the conveyor table 30 on the roller conveyor 22 toward the cooling chamber 15 by the length of one conveyor table. Then, only one conveyance table 30 carrying the wound core 12 heated to a temperature suitable for magnetic field annealing at the tip end in the heating chamber 13 is sent into the soaking chamber 14 .

As described above, the outlet side (the first
When the most advanced transport platform (on which the wound core 12 is not mounted at the start of annealing work) is moved to the left direction in the figure, the electric motor 39 is started (by a command signal from a control device (not shown)) and connected. The shaft 34 is the transmission shaft 41
a, 41b and the pinion 43, and when the limit switch 44a is operated by the cam projection 45 provided on the connecting shaft 34, the electric motor 39 is stopped. By lowering the connecting shaft 34, this connecting shaft 3
Excitation conductor 3 connected to 4 via an insulating member 35
2 is a wound core 12 as shown in FIGS. 2 and 3.
The carriage 30 is placed in the window 12a from the direction of its axis.
It passes through the through hole 30a and is clamped by the lower clamping fitting 33'. When the clamping fittings 33 and 33' are connected by the excitation conductor 32 as described above, the soaking chamber 14
All the excitation conductors 3 arranged in the cooling chamber 15 and
2 are connected in series by a cable 46 as shown in FIG. When the excitation conductors 32 are connected in series, a switch 47 is turned on and DC current is applied to the excitation conductors 32 from the DC power supply 48 via the cable 46. As a result, a predetermined magnetic field is applied to each of the wound cores 12 on the conveyor table 30 that have been transported to the entrance of the soaking chamber 14, and annealing is performed in the magnetic field. That is, by this magnetic field annealing, the wound core 12
The magnetic domains are aligned at 180°, improving iron loss and excitation current. The time during which the magnetic field is applied is
In this example, it takes about 10 to 30 minutes. When the annealing in the magnetic field is completed, the switch 47 is opened, the electric motor 39 is then rotated in the opposite direction to raise the connecting shaft 34, and the cam protrusion 45 turns the limit switch 4.
When 4b is operated, the electric motor 39 is stopped. As the connecting shaft 34 rises, the excitation conductor 32 is also pulled up at the same time, and when its lower end reaches slightly above the support frame 30c of the upper conveyance table 30, the upward movement is stopped by the operation of the limit switch 44b. In this way, after the first work is completed, the above-mentioned work, that is, the work of forming a series current circuit by lowering the excitation conductor 32 and supplying direct current to the excitation conductor 32 for a certain period of time, and annealing in a magnetic field are performed. The second operation is completed by lifting the post-excitation conductor 32 upward from the upper transport platform.

When the second work is completed, open/close door 1 of cooling chamber 15
5a and the opening/closing door 13a of the heating chamber 13 are once opened from the cylinders 16 and 17C, respectively, and then the insertion cylinder 29 is operated to push the transfer table 30 in the front exchange chamber 18 and transfer from the cooling chamber 15. 30 units
One unit (with no wound core 12 mounted thereon) is sent to the rear replacement chamber 20. After this, the opening/closing door 13
a, 15a once closed, and the rear replacement chamber 2
0, the door 20a of the rear exchange chamber 20 is opened by the cylinder 21, and then the motor M is started and the electric roller 23 moves the conveyor table of the rear exchange chamber 20 onto the conveyor 24. Then, the opening/closing door 20a is closed again. in this way,
After the second operation is completed, the third operation is completed by sending the most advanced conveyor table 30 in the cooling chamber 15 to the conveyor 24 via the rear replacement chamber 20. Note that after the rear replacement chamber 20 is closed, similarly to the front replacement chamber 18, it is evacuated by the vacuum pump 50, and then a fixed amount of inert gas is injected.

In this way, once the third task is completed, again,
The first operation is restarted. In this case, since the operation of the insertion cylinder 29 has been incorporated into the third work process and has already been completed, at the time the third work is started, the operation of the insertion cylinder 29 performed in the first work is already completed. It does not operate. Therefore, in the first operation, the wound core 12 to be annealed is transferred to the front replacement chamber 18.
This is the work process up to the time of transport. After this first work, a second work is performed. That is, annealing is performed in a magnetic field. Then, by performing the third operation, the wound cores 12 that have been annealed in the magnetic field are sequentially delivered to the conveyor 24. For a while at the start of annealing, only the carriers 30 on which the wound core 12 is not loaded are sent out, but after all the carriers 30 are delivered to the carrier 24, By sequentially repeating the working steps, the wound core 12 is continuously annealed at regular intervals.

In addition, in the present invention, as described above, even while the wound core 12 annealed in the magnetic field in the soaking chamber 14 is being moved to the cooling chamber 15 and slowly cooled, the excitation conductor 32 is not energized. The above-mentioned wound core 1 is
It is configured to apply a magnetic field of a predetermined strength to 2. This means that during magnetic field annealing in the soaking chamber 14, the wound core 12 with its 180°C magnetic domains aligned,
In order to prevent the aligned magnetic domains from collapsing during the annealing and having an adverse effect on the core properties, even during the annealing of the wound core 12, a magnetic field is applied, that is, cooling in a magnetic field is performed to prevent the wound core 12 from collapsing. The aim is to obtain uniaxial anisotropy suitable for the core in order to improve the core properties.

In addition, each work process when annealing the wound core 12 is as follows:
As mentioned above, it goes without saying that this is done automatically based on the command signal from the control device.

Further, the present invention has been described with respect to a structure in which the excitation conductor 32 is inserted into and removed from the window portion 12a of the wound core 12 in the vertical direction during magnetic field annealing, but the present invention is not limited to this; The excitation conductor 32 is inserted into and removed from the window of the winding core by horizontally penetrating the furnace wall of the annealing furnace 11 so as to face the furnace wall side of the annealing furnace 11, thereby annealing the winding core 12 in a magnetic field. You may also do so.

[Effects of the Invention] As described above, according to the present invention, when annealing a wound core around which an amorphous magnetic ribbon is wound, a plurality of windings to be annealed are placed on a conveyor table placed on a conveyor. By loading the iron core in the direction in which the excitation conductor advances and retreats, the carriage can be carried into the annealing furnace automatically and continuously for annealing. The wound cores carried into the furnace are loaded onto a loading table at regular intervals and transported through the annealing furnace while being gradually heated. Since annealing can be performed with a substantially uniform distribution, the conventional drawback of degrading magnetic properties during annealing can be overcome. In particular, at the time of magnetic field annealing, the wound core is maintained at the optimum annealing temperature, so magnetic field annealing can be performed well. Since the conductor is inserted and removed freely through the window of the wound core, there is no hindrance to the transportation of the wound core, and there is no need to provide an excitation coil for each wound core as in the past. There is no need to perform annealing in a magnetic field, and in addition, the excitation conductor is pulled out of the window of the core when the transport platform carrying the core is moved.
Since the wound core can be easily transported through the furnace, it is possible to annealing a large number of wound cores at once without any special labor, rationally, and continuously.
In addition, it is possible to provide an annealing apparatus that has various advantages that enable mass production of wound cores made of amorphous magnetic ribbons, such as being able to perform annealing without impairing the magnetic properties of the core.

[Brief explanation of drawings]

FIG. 1 is a diagram schematically showing an annealing apparatus of the present invention;
Figure 2 is a sectional view taken along line A-A in Figure 1;
The figure is a cross-sectional view taken along the line B-B in Figure 1, Figure 4 is a cross-sectional view taken along the line C-C in Figure 3, Figure 5 is a perspective view of the conveyor platform on which the winding core is mounted, and Figure 6 is a cross-sectional view taken along the line B-B in Figure 1. FIG. 7 is a sectional view schematically showing a conventional annealing apparatus. 11...Annealing furnace, 12...Wound core, 13...Heating chamber, 14...Soaking chamber, 15...Cooling chamber, 30...
...Transportation platform, 32...Excitation conductor, 34...Connection shaft.

Claims (1)

[Claims] 1 A heating chamber that heats a wound core formed by winding an amorphous magnetic ribbon to a predetermined annealing temperature, a soaking chamber that maintains the wound core heated to the annealing temperature at that temperature for a predetermined period of time, and The wound core is provided with a cooling chamber for cooling the wound core to room temperature, and these chambers are communicated with each other, and an inlet side of the heating chamber, an outlet side of the cooling chamber, and an opening/closing door are provided to connect the wound core to each chamber. An annealing furnace is constructed that can be transported intermittently, and a window portion of the wound core, which is transported intermittently to each chamber, is installed in the soaking chamber and cooling chamber of the annealing furnace from the direction of its axis. When the excitation conductors are inserted and removably penetrated, and these excitation conductors are penetrated through the window of the wound core,
An annealing device for a wound iron core, comprising a magnetic field annealing device comprising an excitation power source that causes current to flow through the excitation conductor.